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1. 发明授权

US07446542B2 Apparatus and method for automated stress testing of flip-chip packages 失效
标题翻译：倒装芯片封装自动应力测试的装置和方法
公开(公告)号：US07446542B2
公开(公告)日：2008-11-04
申请号：US11367562
申请日：2006-03-03
申请人： Lyudmila Zaykova-Feldman , Thomas M. Moore
发明人： Lyudmila Zaykova-Feldman , Thomas M. Moore
IPC分类号： G01R31/302 , G01R31/28
CPC分类号： G01R31/2881 , G01M7/08 , G01N3/00 , G01N3/307 , G01N3/313 , G01N2203/0044 , G01N2203/005 , G01N2203/0057 , G01N2203/0296 , G01N2203/0676 , G01R31/2868 , H01L21/67011
摘要： An apparatus for testing flip-chip packages has a programmed computer, a test-engine stage for applying an impact to at least one package under test, and a monitoring stage. The test-engine stage causes an impact on the package on the side opposite its ball-grid array. The test-engine stage has actuators connected to the test-engine stage and the computer, for moving and aligning the test-engine stage. The monitoring stage has a digital camera connected to the computer for transmitting digital images from the ball-grid array side of the package to the computer. A microscope is preferably connected to the digital camera. A sample stage located between the test-engine stage and the monitoring stage holds the package under test. The sample stage has an acoustic transducer capable of being removably connected to the package under test. The acoustic transducer is connected to the computer for transmitting signals from the acoustic transducer to the computer.
摘要翻译：用于测试倒装芯片封装的装置具有编程的计算机，用于对至少一个待测试包进行冲击的测试引擎阶段和监视阶段。测试引擎级在与球栅阵列相反的一侧对包装产生影响。测试发动机级具有连接到测试发动机级和计算机的致动器，用于移动和对准测试引擎级。监控级具有连接到计算机的数字照相机，用于将数字图像从包装的球栅阵列侧传输到计算机。显微镜优选地连接到数码相机。位于测试引擎级和监控级之间的样品台保持被测试的包装。样品台具有能够可拆卸地连接到被测试包装的声学换能器。声学换能器连接到计算机，用于将信号从声学传感器传输到计算机。

2. 发明申请

US20080258056A1 METHOD FOR STEM SAMPLE INSPECTION IN A CHARGED PARTICLE BEAM INSTRUMENT 有权
标题翻译：充电颗粒光束仪器中的样品检测方法
公开(公告)号：US20080258056A1
公开(公告)日：2008-10-23
申请号：US12041217
申请日：2008-03-03
申请人： Lyudmila Zaykova-Feldman , Thomas M. Moore , Gonzalo Amador , Matthew Hammer
发明人： Lyudmila Zaykova-Feldman , Thomas M. Moore , Gonzalo Amador , Matthew Hammer
IPC分类号： G01N23/00
CPC分类号： G01N23/04 , H01J2237/208 , H01J2237/31745
摘要： A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.
摘要翻译：在双光束FIB中的样本检查的方法根据FIB的几何形状和样本台的倾斜度来计算作为第二，第三和第四角度的函数的第一角度。根据所述角度计算第五角度，其中第五角度是切除样本的长轴与探针轴的轴线在X-Y平面上的突起之间的角度。样品台按计算出的第五个角度旋转，然后连接到探针尖端并提起。然后可以通过探针轴通过第一角度的旋转，将样品定位成垂直于FIB电子束的轴线进行STEM分析。

3. 发明授权

US07755372B2 Method for automated stress testing of flip-chip packages 失效
标题翻译：倒装芯片封装自动应力测试方法
公开(公告)号：US07755372B2
公开(公告)日：2010-07-13
申请号：US12238906
申请日：2008-09-26
申请人： Lyudmila Zaykova-Feldman , Thomas M. Moore
发明人： Lyudmila Zaykova-Feldman , Thomas M. Moore
IPC分类号： G01R31/302
CPC分类号： G01R31/2881 , G01M7/08 , G01N3/00 , G01N3/307 , G01N3/313 , G01N2203/0044 , G01N2203/005 , G01N2203/0057 , G01N2203/0296 , G01N2203/0676 , G01R31/2868 , H01L21/67011
摘要： Methods for testing flip-chip packages includes aligning a microscope and a test engine. The package under test is placed between the microscope and the test engine, and an acoustic transducer is attached to the package under test. The test engine delivers an impact to the package under test on the side of the package opposite its ball-grid array. Acoustic information and image information from the package under test is recorded. In alternate embodiments, a sequence of packages may be automatically tested.
摘要翻译：测试倒装芯片封装的方法包括对准显微镜和测试引擎。被测试的包被放置在显微镜和测试引擎之间，并且声学换能器附着在被测试的包装上。测试引擎在与球栅阵列相对的封装侧面对被测试的封装产生影响。记录被测包装的声学信息和图像信息。在替代实施例中，可以自动测试一系列包装。

4. 发明申请

US20090015274A1 METHOD FOR AUTOMATED STRESS TESTING OF FLIP-CHIP PACKAGES 失效
标题翻译：自动应力测试方法
公开(公告)号：US20090015274A1
公开(公告)日：2009-01-15
申请号：US12238906
申请日：2008-09-26
申请人： Lyudmila Zaykova-Feldman , Thomas M. Moore
发明人： Lyudmila Zaykova-Feldman , Thomas M. Moore
IPC分类号： G01R31/302
CPC分类号： G01R31/2881 , G01M7/08 , G01N3/00 , G01N3/307 , G01N3/313 , G01N2203/0044 , G01N2203/005 , G01N2203/0057 , G01N2203/0296 , G01N2203/0676 , G01R31/2868 , H01L21/67011
摘要： Methods for testing flip-chip packages includes aligning a microscope and a test engine. The package under test is placed between the microscope and the test engine, and an acoustic transducer is attached to the package under test. The test engine delivers an impact to the package under test on the side of the package opposite its ball-grid array. Acoustic information and image information from the package under test is recorded. In alternate embodiments, a sequence of packages may be automatically tested.
摘要翻译：测试倒装芯片封装的方法包括对准显微镜和测试引擎。被测试的包被放置在显微镜和测试引擎之间，并且声学换能器附着在被测试的包装上。测试引擎在与球栅阵列相对的封装侧面对被测试的封装产生影响。记录被测包装的声学信息和图像信息。在替代实施例中，可以自动测试一系列包装。

5. 发明申请

US20060219919A1 TEM sample holder and method of forming same 审中-公开
标题翻译： TEM样品架及其形成方法
公开(公告)号：US20060219919A1
公开(公告)日：2006-10-05
申请号：US11433850
申请日：2006-05-12
申请人： Thomas Moore , Gonzalo Amador , Lyudmila Zaykova-Feldman
发明人： Thomas Moore , Gonzalo Amador , Lyudmila Zaykova-Feldman
IPC分类号： G21K7/00 , G01N23/00
CPC分类号： H01J37/20 , G01N1/286 , G01N23/2204 , H01J37/26 , H01J37/3056 , H01J37/31 , H01J2237/31745 , H01J2237/31749
摘要： A TEM sample holder is formed from at least one nano-manipulator probe tip and a TEM sample holder pre-form. The probe tip is permanently attached to the TEM sample-holder pre-form to create a TEM sample holder before attachment of a sample to the probe tip inside a FIB. In the preferred embodiment the probe tip is attached to the TEM sample holder pre-form by applying pressure to the pre-form and the probe tip, so as to cause plastic flow of the pre-form material about the probe tip. The TEM sample holder may have smaller dimensions than the TEM sample holder pre-form; in this case the TEM sample holder is cut from the larger TEM sample holder pre-form, preferably in the same operation as attaching the probe tip.
摘要翻译： TEM样品保持器由至少一个纳米机械手探针尖端和TEM样品架预成型件形成。探针尖端永久地连接到TEM样品架预成型件上，以在将样品连接到FIB内的探针尖端之前创建TEM样品架。在优选实施例中，通过向预成型件和探针针尖施加压力，将探头尖端连接到TEM样品架预成型件上，以便使预成型材料围绕探针尖端塑性流动。 TEM样品架可能具有比TEM样品架预制件更小的尺寸; 在这种情况下，TEM样品架从较大的TEM样品保持器预成型切割，优选地在与附接探针尖端相同的操作中。

6. 发明申请

US20110031397A1 METHOD FOR STEM SAMPLE INSPECTION IN A CHARGED PARTICLE BEAM INSTRUMENT 有权
公开(公告)号：US20110031397A1
公开(公告)日：2011-02-10
申请号：US12896281
申请日：2010-10-01
申请人： Lyudmila Zaykova-Feldman , Thomas M. Moore , Gonzalo Amador , Matthew Hammer
发明人： Lyudmila Zaykova-Feldman , Thomas M. Moore , Gonzalo Amador , Matthew Hammer
IPC分类号： H01J37/28
CPC分类号： G01N23/04 , H01J2237/208 , H01J2237/31745
摘要： A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.

7. 发明授权

US07414252B2 Method and apparatus for the automated process of in-situ lift-out 有权
标题翻译：用于现场提升自动化过程的方法和装置
公开(公告)号：US07414252B2
公开(公告)日：2008-08-19
申请号：US11265934
申请日：2005-11-03
申请人： Thomas M. Moore , Lyudmila Zaykova-Feldman
发明人： Thomas M. Moore , Lyudmila Zaykova-Feldman
IPC分类号： G21G5/00
CPC分类号： H01J37/302 , B82Y15/00 , G01N1/32 , H01J37/20 , H01J37/22 , H01J37/3056 , H01J2237/20 , H01J2237/202 , H01J2237/204 , H01J2237/206 , H01J2237/208 , H01J2237/2482 , H01J2237/28 , H01J2237/30411 , H01J2237/30472 , H01J2237/31745
摘要： An apparatus for performing automated in-situ lift-out of a sample from a specimen includes a computer having a memory with computer-readable instructions, a stage for a specimen and a nano-manipulator. The stage and the nano-manipulator are controlled by motion controllers connected to the computer. The nano-manipulator has a probe tip for attachment to samples excised from the specimen. The computer-readable instructions include instructions to cause the stage motion controllers and the nano-manipulator motion controllers, as well as an ion-beam source, to automatically perform in-situ lift-out of a sample from the specimen.
摘要翻译：用于从样本进行样品的自动原位提取的装置包括具有具有计算机可读指令的存储器的计算机，用于样本的台和纳米操纵器。舞台和纳米操纵器由连接到计算机的运动控制器控制。纳米操纵器具有用于附着到从样品切除的样品的探针尖端。计算机可读指令包括使载物台运动控制器和纳米操纵器运动控制器以及离子束源自动执行样品从样本的原位提取的指令。

8. 发明授权

US07208724B2 Apparatus and method of detecting probe tip contact with a surface 有权
标题翻译：检测探针尖端与表面接触的装置和方法
公开(公告)号：US07208724B2
公开(公告)日：2007-04-24
申请号：US11266678
申请日：2005-11-03
申请人： Thomas Moore , Lyudmila Zaykova-Feldman
发明人： Thomas Moore , Lyudmila Zaykova-Feldman
IPC分类号： H01J3/14 , G01J5/08 , G01B5/28 , G01R31/02
CPC分类号： H01J37/22 , B82Y35/00 , H01J37/20 , H01J37/3056 , H01J2237/20 , H01J2237/202 , H01J2237/204 , H01J2237/206 , H01J2237/208 , H01J2237/2482 , H01J2237/28 , H01J2237/31745
摘要： We disclose an apparatus and method for detecting probe-tip contact with a surface, generally inside a focused ion-beam instrument, where the probe tip is attached to a capsule, and the capsule is movably secured in a probe shaft. There is a fiber-optic cable having a first end and a second end; a beam splitter having first and second output ports; and a light source connected to the beam splitter. The first output port of the beam splitter is connected to the first end of the fiber-optic cable, and the second output port of the beam splitter is connected to a photodiode. The second end of the fiber-optic cable has a mirror for reflecting incident light at approximately a ninety-degree angle to the axis of the optical path in the fiber-optic cable and onto the capsule, so that the intensity of the light reflected back from the capsule through the fiber-optic cable is proportional to the deflection of the capsule as the probe tip makes contact with the surface.
摘要翻译：我们公开了一种用于检测与通常在聚焦离子束仪器内的表面的探针 - 尖端接触的装置和方法，其中探针尖端附接到胶囊，并且胶囊可移动地固定在探针轴中。存在具有第一端和第二端的光纤电缆; 具有第一和第二输出端口的分束器; 以及连接到分束器的光源。分束器的第一输出端口连接到光纤电缆的第一端，并且分束器的第二输出端口连接到光电二极管。光纤电缆的第二端具有反射镜，用于将入射光与光纤电缆中的光路的轴线大约九十度角反射到胶囊上，使得光的强度反射回当胶囊通过光纤电缆与探针尖端与表面接触时胶囊的偏转成正比。

9. 发明申请

US20060091302A1 Apparatus and method of detecting probe tip contact with a surface 有权
标题翻译：检测探针尖端与表面接触的装置和方法
公开(公告)号：US20060091302A1
公开(公告)日：2006-05-04
申请号：US11266678
申请日：2005-11-03
申请人： Thomas Moore , Lyudmila Zaykova-Feldman
发明人： Thomas Moore , Lyudmila Zaykova-Feldman
IPC分类号： G01J1/04 , H01J3/14 , G01J5/08
CPC分类号： H01J37/22 , B82Y35/00 , H01J37/20 , H01J37/3056 , H01J2237/20 , H01J2237/202 , H01J2237/204 , H01J2237/206 , H01J2237/208 , H01J2237/2482 , H01J2237/28 , H01J2237/31745
摘要： We disclose an apparatus and method for detecting probe-tip contact with a surface, generally inside a focused ion-beam instrument, where the probe tip is attached to a capsule, and the capsule is movably secured in a probe shaft. There is a fiber-optic cable having a first end and a second end; a beam splitter having first and second output ports; and a light source connected to the beam splitter. The first output port of the beam splitter is connected to the first end of the fiber-optic cable, and the second output port of the beam splitter is connected to a photodiode. The second end of the fiber-optic cable has a mirror for reflecting incident light at approximately a ninety-degree angle to the axis of the optical path in the fiber-optic cable and onto the capsule, so that the intensity of the light reflected back from the capsule through the fiber-optic cable is proportional to the deflection of the capsule as the probe tip makes contact with the surface.
摘要翻译：我们公开了一种用于检测与通常在聚焦离子束仪器内的表面的探针 - 尖端接触的装置和方法，其中探针尖端附接到胶囊，并且胶囊可移动地固定在探针轴中。存在具有第一端和第二端的光纤电缆; 具有第一和第二输出端口的分束器; 以及连接到分束器的光源。分束器的第一输出端口连接到光纤电缆的第一端，并且分束器的第二输出端口连接到光电二极管。光纤电缆的第二端具有反射镜，用于将入射光与光纤电缆中的光路的轴线大约九十度角反射到胶囊上，使得光的强度反射回当胶囊通过光纤电缆与探针尖端与表面接触时胶囊的偏转成正比。

10. 发明授权

US08247768B2 Method for stem sample inspection in a charged particle beam instrument 有权
标题翻译：带电粒子束仪器中的茎样品检查方法
公开(公告)号：US08247768B2
公开(公告)日：2012-08-21
申请号：US12896281
申请日：2010-10-01
申请人： Lyudmila Zaykova-Feldman , Thomas M. Moore , Gonzalo Amador , Matthew Hammer
发明人： Lyudmila Zaykova-Feldman , Thomas M. Moore , Gonzalo Amador , Matthew Hammer
IPC分类号： G01N23/00
CPC分类号： G01N23/04 , H01J2237/208 , H01J2237/31745
摘要： A method for sample examination in a dual-beam FIB calculates a first angle as a function of second, third and fourth angles defined by the geometry of the FIB and the tilt of the specimen stage. A fifth angle is calculated as a function of the stated angles, where the fifth angle is the angle between the long axis of an excised sample and the projection of the axis of the probe shaft onto the X-Y plane. The specimen stage is rotated by the calculated fifth angle, followed by attachment to the probe tip and lift-out. The sample may then be positioned perpendicular to the axis of the FIB electron beam for STEM analysis by rotation of the probe shaft through the first angle.
摘要翻译：在双光束FIB中的样本检查的方法根据FIB的几何形状和样本台的倾斜度来计算作为第二，第三和第四角度的函数的第一角度。根据所述角度计算第五角度，其中第五角度是切除样本的长轴与探针轴的轴线在X-Y平面上的投影之间的角度。样品台按计算出的第五个角度旋转，然后连接到探针尖端并提起。然后可以通过探针轴通过第一角度的旋转，将样品定位成垂直于FIB电子束的轴线进行STEM分析。

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