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1. 发明授权

US5260824A Atomic force microscope 失效
标题翻译：原子力显微镜
公开(公告)号：US5260824A
公开(公告)日：1993-11-09
申请号：US511054
申请日：1990-04-19
申请人： Takao Okada , Shuzo Mishima , Tsugiko Takase , Hirofumi Miyamoto , Hiroko Ohta , Yasushi Satoh , Yoshimitsu Enomoto , Toshiaki Matsuzawa , Yuzo Nakamura , Hiroshi Kajimura
发明人： Takao Okada , Shuzo Mishima , Tsugiko Takase , Hirofumi Miyamoto , Hiroko Ohta , Yasushi Satoh , Yoshimitsu Enomoto , Toshiaki Matsuzawa , Yuzo Nakamura , Hiroshi Kajimura
IPC分类号： G01B7/34 , G01B21/30 , G01L5/00 , G01Q20/02 , G01Q20/04 , G01Q30/02 , G01Q60/38 , G02B4/00 , G01B5/28 , G01N23/00
CPC分类号： G01Q60/38 , B82Y35/00 , G01Q20/02 , G01Q30/025 , Y10S977/87
摘要： An atomic force microscope comprises a probe having a sharply-pointed tip end. The probe is supported on the free end portion of a cantilever and is close to the surface of a specimen. When an interatomic force is produced, the cantilever is deformed, and the probe is displaced. The displacement of the probe is detected by an optical system. A light beam emitted from a light source is collimated by a lens, and reflected by a polarized beam-splitter, and also by a half-mirror. Then, the light beam passes through a quarter wavelength plate and an objective lens, such that the light is converged on the cantilever. The reflected light beam from the cantilever returns along the same optical path and passes through the splitter. The light beam is divided into two light beams at the splitter. These two light beams are reflected by respective prisms and are then incident on respective photodetectors. These photodetectors detect the displacement of the probe.

2. 发明授权

US5136162A Measuring device in a scanning probe microscope 失效
标题翻译：扫描探针显微镜中的测量装置
公开(公告)号：US5136162A
公开(公告)日：1992-08-04
申请号：US730475
申请日：1991-07-16
申请人： Hirofumi Miyamoto , Tsugiko Takase , Hiroshi Kajimura , Akitoshi Toda
发明人： Hirofumi Miyamoto , Tsugiko Takase , Hiroshi Kajimura , Akitoshi Toda
IPC分类号： G01B7/34 , G01N37/00 , G01Q30/18 , G01Q60/10 , G01Q70/08 , G05D3/12 , H01J37/252 , H01J37/26 , H01J37/28 , H01L41/09
CPC分类号： G01Q60/16 , B82Y35/00 , G01Q10/04 , G01Q20/04 , Y10S977/86
摘要： A probe for scanning a sample is attached to a probe electrode supported by a cylindrical piezoelectric actuator. The actuator has four drive electrodes on its periphery, and deforms in the three axial directions in accordance with the voltage applied to the drive electrodes. A girdling electrode is provided between the actuator and the probe electrode. The girdling electrode is insulated from the probe electrode and the drive electrodes by insulator members provided on its upper and lower surfaces. A bias voltage signal S1 is input to an operational amplifier of which the output is connected to the girdling electrode. The amplifier is a voltage follower for equalizing the potential of the girdling electrode to that of the bias voltage signal S1. An operational amplifier has a non-inversion input to which the bias voltage signal S1 is input, and an inversion input connected to the probe electrode. While equalizing the potential of the probe electrode to that of the bias input voltage S1, the amplifier converts a tunnel current flowing between the probe and the sample to a voltage signal S2. An operational amplifier subtracts a bias voltage component from the voltage signal S2, and outputs a tunnel current signal S3.
摘要翻译：用于扫描样品的探针连接到由圆柱形压电致动器支撑的探针电极。致动器在其周围具有四个驱动电极，并且根据施加到驱动电极的电压在三个轴向方向上变形。在致动器和探针电极之间提供环形电极。环形电极通过设置在其上表面和下表面上的绝缘体与探针电极和驱动电极绝缘。偏置电压信号S1输入到输出与环绕电极连接的运算放大器。放大器是用于使环形电极的电位与偏置电压信号S1的电位相等的电压跟随器。运算放大器具有输入偏置电压信号S1的非反相输入端和连接到探针电极的反相输入端。在使探针电极的电位与偏置输入电压S1的电位相等的同时，放大器将在探头和样品之间流动的隧道电流转换为电压信号S2。运算放大器从电压信号S2中减去偏置电压分量，并输出隧道电流信号S3。

3. 发明授权

US5294790A Probe unit for near-field optical scanning microscope 失效
标题翻译：近场光学扫描显微镜探头单元
公开(公告)号：US5294790A
公开(公告)日：1994-03-15
申请号：US957404
申请日：1992-10-06
申请人： Yoshinori Ohta , Hiroshi Kajimura , Akitoshi Toda , Tsugiko Takase
发明人： Yoshinori Ohta , Hiroshi Kajimura , Akitoshi Toda , Tsugiko Takase
IPC分类号： G02B21/06 , G01B9/04 , G01N37/00 , G01Q60/20 , G01Q60/22 , G01Q70/14 , G02B6/36 , G02B21/00 , H01S5/18 , H01J3/14
CPC分类号： G01Q60/22 , B82Y20/00 , B82Y35/00 , G01B9/04 , G02B6/3624 , Y10S977/862
摘要： A hole is formed in a silicon substrate, passing through the substrate. An insulating film is formed on one face of the silicon substrate and one open end of the hole is thus closed by the insulating film. An antireflection film is attached to that area of the insulating film by which the one open end of the hole is closed. An optical fiber is fitted and fixed in the hole. An optically-transparent conical probe is formed on the area of the insulating film which corresponds to the hole in the silicon substrate and the probe is coated by a metal film while leaving a tip of the probe not coated. A fine aperture is thus formed at the tip of the probe to allow light to enter into the probe through the fine aperture. The metal film prevents light reflected from entering into the probe and light from being leaked from the probe, and it is connected to an electrode to use tunnel current to position the fine aperture near a sample.
摘要翻译：在硅衬底中形成穿过衬底的孔。绝缘膜形成在硅衬底的一个表面上，孔的一个开口端由绝缘膜封闭。防反射膜附着在孔的一个开口端被封闭的绝缘膜的区域上。光纤装配并固定在孔中。在绝缘膜的与硅衬底中的孔对应的区域上形成光学透明的锥形探针，并且探针被金属膜涂覆，同时使探针的尖端未被涂覆。因此，在探针的尖端处形成细孔，以允许光通过细孔进入探针。金属膜防止反射进入探针的光，并且光从探针泄漏，并且其连接到电极以使用隧道电流来将细孔定位在样品附近。

4. 发明授权

US5216254A Circuit pattern forming apparatus using MU-STM 失效
标题翻译：使用MU-STM的电路图形成装置
公开(公告)号：US5216254A
公开(公告)日：1993-06-01
申请号：US517588
申请日：1990-05-01
申请人： Hiroko Ohta , Ryouhei Shimizu , Toshihito Kouchi , Akitoshi Toda , Yasuo Isono , Yoshiyuki Mimura , Hiroshi Kajimura
发明人： Hiroko Ohta , Ryouhei Shimizu , Toshihito Kouchi , Akitoshi Toda , Yasuo Isono , Yoshiyuki Mimura , Hiroshi Kajimura
IPC分类号： H01J37/26 , G01Q60/10 , G01Q70/06 , G01Q80/00 , H01J37/28 , H01J37/317 , H05K3/00 , H05K3/06 , H05K3/14
CPC分类号： H05K3/0082 , H05K3/146 , B82Y10/00 , H05K2203/0121 , H05K2203/1338 , H05K3/061 , Y10S977/849 , Y10S977/855 , Y10S977/861 , Y10S977/872 , Y10S977/874 , Y10S977/887
摘要： An apparatus for forming a predetermined circuit pattern on a circuit substrate by using a .mu.-STM write head, the .mu.-STM write head comprising a write head substrate having a flat surface, a plurality of micro chip electrodes formed upright on the flat surface of the write head substrate and constituting a .mu.-STM, a level of a distal end of each of the chip electrodes being set to be constant, and scanning means for scanning the micro chip electrodes on the circuit substrate by moving the micro chip electrodes and the circuit substrate relative to each other in two-dimensional directions.

5. 发明授权

US5144581A Apparatus including atomic probes utilizing tunnel current to read, write and erase data 失效
标题翻译：包括使用隧道电流读取，写入和删除数据的原子探针的装置
公开(公告)号：US5144581A
公开(公告)日：1992-09-01
申请号：US471854
申请日：1990-01-29
申请人： Akitoshi Toda , Ryouhei Shimizu , Hiroko Ohta , Hiroshi Kajimura , Yoshiyuki Mimura , Yasuo Isono , Toshihito Kouchi
发明人： Akitoshi Toda , Ryouhei Shimizu , Hiroko Ohta , Hiroshi Kajimura , Yoshiyuki Mimura , Yasuo Isono , Toshihito Kouchi
IPC分类号： G01N27/00 , G01Q60/10 , G06F5/01 , G06F5/10 , G06F7/76 , G06F7/78 , G11B9/00 , G11B27/19 , G11B27/30 , G11C11/21
CPC分类号： G06F7/785 , G06F5/01 , G06F5/10 , G06F7/768 , G11B27/19 , G11B27/3027 , G11B9/14 , G11B9/1418 , B82Y10/00 , G01Q80/00 , G06F2205/104 , G11B9/1481 , Y10S977/861 , Y10S977/947
摘要： A micro scanning tunneling microscope ("STM") arithmetic circuit device comprises an information-rewritable micro STM recording medium and a micro STM recording apparatus which temporarily stores information on the recording medium such that the information can be read as a variation in a tunnel current. The recording apparatus has a probe (probes) for writing/reading information on the recording medium and a scanner for varying a relationship in position between the probe and the recording medium. The micro STM recording apparatus uses a recording medium having a specific format as the micro STM recording medium in which recorded information is read as a variation in a tunnel current. That is, the recording medium has an address area in which address information is recorded and a data area in which data information is recorded.

6. 发明授权

US5091880A Memory device 失效
标题翻译：内存设备
公开(公告)号：US5091880A
公开(公告)日：1992-02-25
申请号：US471841
申请日：1990-01-29
申请人： Yasuo Isono , Toshihito Kouchi , Akitoshi Toda , Hiroshi Kajimura , Yoshiyuki Mimura , Hiroko Ohta , Ryouhei Shimizu
发明人： Yasuo Isono , Toshihito Kouchi , Akitoshi Toda , Hiroshi Kajimura , Yoshiyuki Mimura , Hiroko Ohta , Ryouhei Shimizu
IPC分类号： G01Q80/00 , G11B9/00 , G11B11/03 , G11B17/00 , G11B19/00 , G11B21/00
CPC分类号： G11C13/0014 , B82Y10/00 , G11B11/03 , G11B17/00 , G11B19/00 , G11B21/00 , G11B9/14 , G11B9/149 , G11C13/04 , Y10S977/849 , Y10S977/861 , Y10S977/881 , Y10S977/94 , Y10S977/943 , Y10S977/947
摘要： A memory device comprises a base plate with a memory element supporting layer, a probe with a pointed tip portion, and a fine scan element for causing the probe to scan over the surface of the memory element supporting layer. When the probe is approached to the surface of the memory element supporting layer and a suitable bias voltage is applied across the probe and the memory element supporting layer, a tunnel current is cause to flow therebetween and a specific region of the surface of the supporting layer is excited. The excited region can adsorb one molecule of, for example, di-(2-ethylhexyl)phthalate. By causing the memory element to be adsorbed selectively on the memory element supporting layer, data is recorded in the form of a projection-and-recess pattern. The recorded data can be read out by observing the surface configuration of the supporting layer in accordance with the principle of an STM (scanning tunneling microscope).

7. 发明授权

US5289408A Memory apparatus using tunnel current techniques 失效
标题翻译：使用隧道电流技术的存储设备
公开(公告)号：US5289408A
公开(公告)日：1994-02-22
申请号：US873635
申请日：1992-04-23
申请人： Yoshiyuki Mimura , Hiroshi Kajimura , Toshihito Kouchi , Akitoshi Toda , Yasuo Isono , Hiroko Ohta , Ryouhei Shimizu
发明人： Yoshiyuki Mimura , Hiroshi Kajimura , Toshihito Kouchi , Akitoshi Toda , Yasuo Isono , Hiroko Ohta , Ryouhei Shimizu
IPC分类号： G01Q10/00 , G01Q70/06 , G11B5/00 , G11B9/00 , G11B11/00 , G11B11/03 , G11B11/08 , G11B17/00 , G11B19/00 , G11B19/02 , G11B19/20 , G11B20/10 , G11B21/02 , G11B21/12 , G11C13/00 , G01N27/00
CPC分类号： G11B20/10 , G11B11/00 , G11B11/03 , G11B11/08 , G11B17/00 , G11B19/00 , G11B19/02 , G11B19/20 , G11B21/02 , G11B21/12 , G11B5/00 , G11B9/14 , G11B9/1427 , B82Y10/00 , G01Q80/00 , Y10S977/947
摘要： A scanning tunneling microscope memory apparatus comprises first and second integrated circuit (IC) substrates. First and second cantilevers, which can be moved by piezoelectric elements, are arranged on the first and second IC substrates, respectively. Tunnel current probes are provided on a free end of the first cantilever, and a recording element is provided on a free end of the second cantilever. The first and second cantilevers are spaced from each other and overlap such that the tunnel current probes face the recording element. The first or second substrate includes a charge coupled device (CCD) circuit, a control circuit for controlling the CCD circuit and cantilevers, and a drive circuit having a preamplifier, a write circuit, and a servo circuit.
摘要翻译：扫描隧道显微镜存储装置包括第一和第二集成电路（IC）基板。可以分别通过压电元件移动的第一和第二悬臂分别布置在第一和第二IC基板上。隧道电流探针设置在第一悬臂的自由端上，并且记录元件设置在第二悬臂的自由端上。第一和第二悬臂彼此间隔开并重叠，使得隧道电流探针面对记录元件。第一或第二基板包括电荷耦合器件（CCD）电路，用于控制CCD电路和悬臂的控制电路，以及具有前置放大器，写入电路和伺服电路的驱动电路。

8. 发明授权

US5053995A Tunnel current data storage apparatus having separate lever bodies 失效
标题翻译：隧道电流数据存储装置具有独立的杠杆体
公开(公告)号：US5053995A
公开(公告)日：1991-10-01
申请号：US468640
申请日：1990-01-23
申请人： Hiroshi Kajimura , Toshihito Kouchi , Akitoshi Toda , Yasuo Isono , Yoshiyuki Mimura , Hiroko Ohta , Ryouhei Shimizu
发明人： Hiroshi Kajimura , Toshihito Kouchi , Akitoshi Toda , Yasuo Isono , Yoshiyuki Mimura , Hiroko Ohta , Ryouhei Shimizu
IPC分类号： G01Q10/04 , G01Q20/04 , G01Q60/16 , G01Q70/06 , G01Q80/00 , G11B9/00 , G11B9/14 , G11B11/08 , G11B11/10 , G11B17/32 , G11B17/34 , G11B21/00 , G11B21/02 , G11B21/12 , G11C11/21
CPC分类号： G11B9/14 , G11B11/08 , G11B11/10 , G11B17/32 , G11B17/34 , G11B21/00 , G11B21/02 , G11B21/12 , G11B9/1427 , G11B9/1454 , B82Y10/00 , B82Y35/00 , G01Q70/06 , G01Q80/00 , Y10S977/947
摘要： A data storage apparatus includes a first lever body having a piezoelectric driving section, and a second lever body which is disposed to separate from and to be perpendicular to the first lever body, and has a piezoelectric driving section. A recording medium is formed on a portion of the second lever body, and records desired data. A plurality of probes are disposed on a portion of the first lever body to oppose the recording medium at a predetermined interval, and detect a change in state at predetermined positions on the recording medium as a change in tunnel current or a change in three-dimensional pattern. A voltage applying circuit alternately applies predetermined voltages to the piezoelectric driving sections of the first and second lever bodies to separately drive the plurality of probes in different directions, thereby three-dimensionally scanning the recording medium.

9. 发明授权

US5245863A Atomic probe microscope 失效
标题翻译：原子探针显微镜
公开(公告)号：US5245863A
公开(公告)日：1993-09-21
申请号：US724145
申请日：1991-07-01
申请人： Hiroshi Kajimura , Takao Okada
发明人： Hiroshi Kajimura , Takao Okada
IPC分类号： G01B7/34 , G01Q20/02 , G01Q60/38 , G01Q60/40 , G01Q60/42 , G01R31/312
CPC分类号： G01Q60/38 , B82Y35/00 , G01Q20/02 , Y10S977/87
摘要： A cantilever has a probe on one side of the end portion and a mirror on the opposite side. The cantilever is fixed to a support member via a piezoelectric element. A semiconductor laser situated above the mirror has a reflection cleavage plane and constitutes a Fabry-Perot resonator between the mirror and the reflection cleavage plane. The output from the resonator varies in accordance with the amount of displacement of the end portion of the cantilever, that is, the surface configuration of the sample. This variation is detected by a detector via a photodetector. A control circuit controls a driving voltage applied to an XYZ-scanner so as to cancel the variation of the output from the resonator, thereby keeping constant the distance between the tip of the probe and the surface of the sample. The driving voltage provides height data of the sample surface. The driving voltage, along with a position signal relating to the sample surface output from the XYZ-scanner, is supplied to an image forming unit. The image forming unit generates a three-dimensional image representing the surface configuration of the sample, on the basis of the input voltage and signal.
摘要翻译：悬臂在端部的一侧具有探针，在相对侧具有反射镜。悬臂通过压电元件固定到支撑构件上。位于反射镜上方的半导体激光器具有反射解理面，并且在反射镜和反射解理面之间构成了法布里 - 珀罗（Francry-Pérot）谐振器。谐振器的输出根据悬臂的端部的位移量，即样品的表面构型而变化。该变化由检测器通过光电检测器检测。控制电路控制施加到XYZ扫描仪的驱动电压，以抵消来自谐振器的输出的变化，从而保持探针的尖端与样品表面之间的距离恒定。驱动电压提供样品表面的高度数据。驱动电压以及与从XYZ扫描器输出的样品表面相关的位置信号被提供给图像形成单元。图像形成单元基于输入电压和信号生成表示样本的表面配置的三维图像。

10. 发明授权

US5206702A Technique for canceling the effect of external vibration on an atomic force microscope 失效
标题翻译：消除外部振动对原子力显微镜的影响的技术
公开(公告)号：US5206702A
公开(公告)日：1993-04-27
申请号：US592239
申请日：1990-10-03
申请人： Masahiko Kato , Takao Okada , Hiroshi Kajimura
发明人： Masahiko Kato , Takao Okada , Hiroshi Kajimura
IPC分类号： G01B7/34 , G01B11/02 , G01B11/14 , G01Q20/02 , G01Q30/00 , G01Q60/24
CPC分类号： G01Q20/02 , B82Y35/00 , Y10S977/87
摘要： A light beam from a light source is divided into two beams by a polarized beam splitter. The beam is reflected by a mirror, is converted into a P-polarized beam by a 1/4 .lambda. plate, passes through the beam splitter, is reflected by prisms, passes through a polarized beam splitter, is reflected by a mirror, is converted into a S-polarized beam by a 1/4 .lambda. plate, is reflected by the beam splitter, and is finally incident on a detector. The beam is converted into a S-polarized beam by a 1/2 .lambda. plate, is reflected by a polarized beam splitter, is reflected by the upper face of a cantilever supporting a probe, passes through a polarized beam splitter, is reflected twice in a prism, passes through the beam splitter, is reflected again by the cantilever, is converted into a S-polarized beam by a 1/4 .lambda. plate, is reflected by the beam splitter, is converted into a P-polarized beam by a 1/2 .lambda. plate, passes through the beam splitter, and is finally incident on the detector. The detector outputs the displacement of the cantilever from the optical path difference of the beams Lr and Lt.

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