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1. 发明授权

US5216254A Circuit pattern forming apparatus using MU-STM 失效
标题翻译：使用MU-STM的电路图形成装置
公开(公告)号：US5216254A
公开(公告)日：1993-06-01
申请号：US517588
申请日：1990-05-01
申请人： Hiroko Ohta , Ryouhei Shimizu , Toshihito Kouchi , Akitoshi Toda , Yasuo Isono , Yoshiyuki Mimura , Hiroshi Kajimura
发明人： Hiroko Ohta , Ryouhei Shimizu , Toshihito Kouchi , Akitoshi Toda , Yasuo Isono , Yoshiyuki Mimura , Hiroshi Kajimura
IPC分类号： H01J37/26 , G01Q60/10 , G01Q70/06 , G01Q80/00 , H01J37/28 , H01J37/317 , H05K3/00 , H05K3/06 , H05K3/14
CPC分类号： H05K3/0082 , H05K3/146 , B82Y10/00 , H05K2203/0121 , H05K2203/1338 , H05K3/061 , Y10S977/849 , Y10S977/855 , Y10S977/861 , Y10S977/872 , Y10S977/874 , Y10S977/887
摘要： An apparatus for forming a predetermined circuit pattern on a circuit substrate by using a .mu.-STM write head, the .mu.-STM write head comprising a write head substrate having a flat surface, a plurality of micro chip electrodes formed upright on the flat surface of the write head substrate and constituting a .mu.-STM, a level of a distal end of each of the chip electrodes being set to be constant, and scanning means for scanning the micro chip electrodes on the circuit substrate by moving the micro chip electrodes and the circuit substrate relative to each other in two-dimensional directions.

2. 发明授权

US5144581A Apparatus including atomic probes utilizing tunnel current to read, write and erase data 失效
标题翻译：包括使用隧道电流读取，写入和删除数据的原子探针的装置
公开(公告)号：US5144581A
公开(公告)日：1992-09-01
申请号：US471854
申请日：1990-01-29
申请人： Akitoshi Toda , Ryouhei Shimizu , Hiroko Ohta , Hiroshi Kajimura , Yoshiyuki Mimura , Yasuo Isono , Toshihito Kouchi
发明人： Akitoshi Toda , Ryouhei Shimizu , Hiroko Ohta , Hiroshi Kajimura , Yoshiyuki Mimura , Yasuo Isono , Toshihito Kouchi
IPC分类号： G01N27/00 , G01Q60/10 , G06F5/01 , G06F5/10 , G06F7/76 , G06F7/78 , G11B9/00 , G11B27/19 , G11B27/30 , G11C11/21
CPC分类号： G06F7/785 , G06F5/01 , G06F5/10 , G06F7/768 , G11B27/19 , G11B27/3027 , G11B9/14 , G11B9/1418 , B82Y10/00 , G01Q80/00 , G06F2205/104 , G11B9/1481 , Y10S977/861 , Y10S977/947
摘要： A micro scanning tunneling microscope ("STM") arithmetic circuit device comprises an information-rewritable micro STM recording medium and a micro STM recording apparatus which temporarily stores information on the recording medium such that the information can be read as a variation in a tunnel current. The recording apparatus has a probe (probes) for writing/reading information on the recording medium and a scanner for varying a relationship in position between the probe and the recording medium. The micro STM recording apparatus uses a recording medium having a specific format as the micro STM recording medium in which recorded information is read as a variation in a tunnel current. That is, the recording medium has an address area in which address information is recorded and a data area in which data information is recorded.

3. 发明授权

US5075548A Tunnel current probe moving mechanism having parallel cantilevers 失效
标题翻译：隧道电流移动机构具有平行障碍物
公开(公告)号：US5075548A
公开(公告)日：1991-12-24
申请号：US551762
申请日：1990-07-11
申请人： Hiroshi Kajimura
发明人： Hiroshi Kajimura
IPC分类号： B81B3/00 , G01B7/34 , G01Q10/00 , G01Q40/00 , G01Q60/16 , G01R31/302 , G05D3/00 , G05D3/12 , G11B9/00 , H01J37/20 , H01L27/20
CPC分类号： G01Q60/16 , B82Y35/00 , G01Q40/00 , G01R31/302 , G11B9/14 , G11B9/1418 , G11B9/1445 , B82Y10/00 , Y10S977/837 , Y10S977/861 , Y10S977/872 , Y10S977/873
摘要： A tunnel current probe moving mechanism includes first and second substrates and at least two parallel cantilevers. The first substrate has a tunnel current probe group arranged on its surface. The tunnel current probe group includes probes which are two-dimensionally arranged at a predetermined pitch and have distal ends aligned within the same plane. The second substrate is arranged to oppose the tunnel current probe group on the first substrate, and can approach at a position where a tunnel current flows between the tunnel current probe group and the second substrate. These two cantilevers have the same length and are arranged parallel to each other on at least one of the first and second substrates. Each cantilever includes a plurality of piezoelectric driving members. When the piezoelectric driving elements are driven in response to a predetermined driving signal, the probe group is translated along the second substrate while a predetermined distance is kept between the probe group and the second substrate.
摘要翻译：隧道电流探针移动机构包括第一和第二基底以及至少两个平行的悬臂。第一衬底具有布置在其表面上的隧道电流探针组。隧道电流探针组包括以预定间距二维布置并且具有在相同平面内对准的远端的探针。第二基板被布置成与第一基板上的隧道电流探针组相对，并且可以在隧道电流在隧道电流探针组和第二基板之间流动的位置处接近。这两个悬臂具有相同的长度并且在第一和第二基板中的至少一个上彼此平行布置。每个悬臂包括多个压电驱动构件。当压电驱动元件响应于预定的驱动信号被驱动时，探针组沿着第二基片平移，同时在探针组和第二基片之间保持预定的距离。

4. 发明授权

US5408094A Atomic force microscope with light beam emission at predetermined angle 失效
标题翻译：具有预定角度的光束发射的原子力显微镜
公开(公告)号：US5408094A
公开(公告)日：1995-04-18
申请号：US57336
申请日：1993-05-04
申请人： Hiroshi Kajimura
发明人： Hiroshi Kajimura
IPC分类号： G01Q20/04 , G01Q20/02 , G01Q60/24 , G01Q60/38 , H01J37/26
CPC分类号： G01Q20/02 , B82Y35/00 , Y10S977/87
摘要： A cantilever has a probe on one surface of the free end and a reflection surface on the opposite surface thereof. A laser diode is located so as to emit a laser beam to the reflection surface at a predetermined angle. The cantilever is supported at a support member fixed to a cylindrical actuator for scanning the probe across the surface of a sample. Further, there is provided a photodiode having two portions for receiving the laser beam from the reflection surface of the cantilever to detect displacement of the probe on the basis of the incident position of the beam.
摘要翻译：悬臂在自由端的一个表面上具有探针，在其相反表面上具有反射表面。激光二极管被定位成以预定的角度向激光束发射激光束。悬臂支撑在固定到圆柱形致动器的支撑构件上，用于扫描穿过样品表面的探针。此外，提供一种具有两个部分的光电二极管，用于从悬臂的反射表面接收激光束，以根据光束的入射位置检测探测器的位移。

5. 发明授权

US5294804A Cantilever displacement detection apparatus 失效
标题翻译：悬臂位移检测装置
公开(公告)号：US5294804A
公开(公告)日：1994-03-15
申请号：US26989
申请日：1993-03-05
申请人： Hiroshi Kajimura
发明人： Hiroshi Kajimura
IPC分类号： G01B11/30 , G01B21/30 , G01N21/86 , G01N21/88 , G01N37/00 , G01Q10/04 , G01Q20/02 , G01Q60/24 , G01Q60/38 , H01J37/28
CPC分类号： G01Q20/02 , B82Y35/00 , Y10S977/863 , Y10S977/868 , Y10S977/87 , Y10S977/873 , Y10S977/954
摘要： A cantilever displacement detection apparatus comprises a laser diode for emitting a laser beam functioning as detection beam for displacement detection based on an optical lever method, and a position sensor having two light receiving regions for outputting signals corresponding to the intensity of received light. The laser diode and the position sensor are arranged such that the light beam is passed through an objective lens and made incident slantingly on a mirror provided on a free-end portion of a cantilever and the laser beam reflected by the mirror is passed through the objective lens and made incident on the position sensor.
摘要翻译：悬臂位移检测装置包括：激光二极管，用于发射用作基于光学手柄方法的用于位移检测的检测光束的激光束;以及位置传感器，具有用于输出对应于接收光强度的信号的两个光接收区域。激光二极管和位置传感器被布置成使得光束通过物镜并且倾斜地入射在设置在悬臂的自由端部分上的反射镜上，并且由反射镜反射的激光束通过物镜镜头并入射到位置传感器上。

6. 发明授权

US5245863A Atomic probe microscope 失效
标题翻译：原子探针显微镜
公开(公告)号：US5245863A
公开(公告)日：1993-09-21
申请号：US724145
申请日：1991-07-01
申请人： Hiroshi Kajimura , Takao Okada
发明人： Hiroshi Kajimura , Takao Okada
IPC分类号： G01B7/34 , G01Q20/02 , G01Q60/38 , G01Q60/40 , G01Q60/42 , G01R31/312
CPC分类号： G01Q60/38 , B82Y35/00 , G01Q20/02 , Y10S977/87
摘要： A cantilever has a probe on one side of the end portion and a mirror on the opposite side. The cantilever is fixed to a support member via a piezoelectric element. A semiconductor laser situated above the mirror has a reflection cleavage plane and constitutes a Fabry-Perot resonator between the mirror and the reflection cleavage plane. The output from the resonator varies in accordance with the amount of displacement of the end portion of the cantilever, that is, the surface configuration of the sample. This variation is detected by a detector via a photodetector. A control circuit controls a driving voltage applied to an XYZ-scanner so as to cancel the variation of the output from the resonator, thereby keeping constant the distance between the tip of the probe and the surface of the sample. The driving voltage provides height data of the sample surface. The driving voltage, along with a position signal relating to the sample surface output from the XYZ-scanner, is supplied to an image forming unit. The image forming unit generates a three-dimensional image representing the surface configuration of the sample, on the basis of the input voltage and signal.
摘要翻译：悬臂在端部的一侧具有探针，在相对侧具有反射镜。悬臂通过压电元件固定到支撑构件上。位于反射镜上方的半导体激光器具有反射解理面，并且在反射镜和反射解理面之间构成了法布里 - 珀罗（Francry-Pérot）谐振器。谐振器的输出根据悬臂的端部的位移量，即样品的表面构型而变化。该变化由检测器通过光电检测器检测。控制电路控制施加到XYZ扫描仪的驱动电压，以抵消来自谐振器的输出的变化，从而保持探针的尖端与样品表面之间的距离恒定。驱动电压提供样品表面的高度数据。驱动电压以及与从XYZ扫描器输出的样品表面相关的位置信号被提供给图像形成单元。图像形成单元基于输入电压和信号生成表示样本的表面配置的三维图像。

7. 发明授权

US5206702A Technique for canceling the effect of external vibration on an atomic force microscope 失效
标题翻译：消除外部振动对原子力显微镜的影响的技术
公开(公告)号：US5206702A
公开(公告)日：1993-04-27
申请号：US592239
申请日：1990-10-03
申请人： Masahiko Kato , Takao Okada , Hiroshi Kajimura
发明人： Masahiko Kato , Takao Okada , Hiroshi Kajimura
IPC分类号： G01B7/34 , G01B11/02 , G01B11/14 , G01Q20/02 , G01Q30/00 , G01Q60/24
CPC分类号： G01Q20/02 , B82Y35/00 , Y10S977/87
摘要： A light beam from a light source is divided into two beams by a polarized beam splitter. The beam is reflected by a mirror, is converted into a P-polarized beam by a 1/4 .lambda. plate, passes through the beam splitter, is reflected by prisms, passes through a polarized beam splitter, is reflected by a mirror, is converted into a S-polarized beam by a 1/4 .lambda. plate, is reflected by the beam splitter, and is finally incident on a detector. The beam is converted into a S-polarized beam by a 1/2 .lambda. plate, is reflected by a polarized beam splitter, is reflected by the upper face of a cantilever supporting a probe, passes through a polarized beam splitter, is reflected twice in a prism, passes through the beam splitter, is reflected again by the cantilever, is converted into a S-polarized beam by a 1/4 .lambda. plate, is reflected by the beam splitter, is converted into a P-polarized beam by a 1/2 .lambda. plate, passes through the beam splitter, and is finally incident on the detector. The detector outputs the displacement of the cantilever from the optical path difference of the beams Lr and Lt.

8. 发明授权

US5091880A Memory device 失效
标题翻译：内存设备
公开(公告)号：US5091880A
公开(公告)日：1992-02-25
申请号：US471841
申请日：1990-01-29
申请人： Yasuo Isono , Toshihito Kouchi , Akitoshi Toda , Hiroshi Kajimura , Yoshiyuki Mimura , Hiroko Ohta , Ryouhei Shimizu
发明人： Yasuo Isono , Toshihito Kouchi , Akitoshi Toda , Hiroshi Kajimura , Yoshiyuki Mimura , Hiroko Ohta , Ryouhei Shimizu
IPC分类号： G01Q80/00 , G11B9/00 , G11B11/03 , G11B17/00 , G11B19/00 , G11B21/00
CPC分类号： G11C13/0014 , B82Y10/00 , G11B11/03 , G11B17/00 , G11B19/00 , G11B21/00 , G11B9/14 , G11B9/149 , G11C13/04 , Y10S977/849 , Y10S977/861 , Y10S977/881 , Y10S977/94 , Y10S977/943 , Y10S977/947
摘要： A memory device comprises a base plate with a memory element supporting layer, a probe with a pointed tip portion, and a fine scan element for causing the probe to scan over the surface of the memory element supporting layer. When the probe is approached to the surface of the memory element supporting layer and a suitable bias voltage is applied across the probe and the memory element supporting layer, a tunnel current is cause to flow therebetween and a specific region of the surface of the supporting layer is excited. The excited region can adsorb one molecule of, for example, di-(2-ethylhexyl)phthalate. By causing the memory element to be adsorbed selectively on the memory element supporting layer, data is recorded in the form of a projection-and-recess pattern. The recorded data can be read out by observing the surface configuration of the supporting layer in accordance with the principle of an STM (scanning tunneling microscope).

9. 发明授权

US5294790A Probe unit for near-field optical scanning microscope 失效
标题翻译：近场光学扫描显微镜探头单元
公开(公告)号：US5294790A
公开(公告)日：1994-03-15
申请号：US957404
申请日：1992-10-06
申请人： Yoshinori Ohta , Hiroshi Kajimura , Akitoshi Toda , Tsugiko Takase
发明人： Yoshinori Ohta , Hiroshi Kajimura , Akitoshi Toda , Tsugiko Takase
IPC分类号： G02B21/06 , G01B9/04 , G01N37/00 , G01Q60/20 , G01Q60/22 , G01Q70/14 , G02B6/36 , G02B21/00 , H01S5/18 , H01J3/14
CPC分类号： G01Q60/22 , B82Y20/00 , B82Y35/00 , G01B9/04 , G02B6/3624 , Y10S977/862
摘要： A hole is formed in a silicon substrate, passing through the substrate. An insulating film is formed on one face of the silicon substrate and one open end of the hole is thus closed by the insulating film. An antireflection film is attached to that area of the insulating film by which the one open end of the hole is closed. An optical fiber is fitted and fixed in the hole. An optically-transparent conical probe is formed on the area of the insulating film which corresponds to the hole in the silicon substrate and the probe is coated by a metal film while leaving a tip of the probe not coated. A fine aperture is thus formed at the tip of the probe to allow light to enter into the probe through the fine aperture. The metal film prevents light reflected from entering into the probe and light from being leaked from the probe, and it is connected to an electrode to use tunnel current to position the fine aperture near a sample.
摘要翻译：在硅衬底中形成穿过衬底的孔。绝缘膜形成在硅衬底的一个表面上，孔的一个开口端由绝缘膜封闭。防反射膜附着在孔的一个开口端被封闭的绝缘膜的区域上。光纤装配并固定在孔中。在绝缘膜的与硅衬底中的孔对应的区域上形成光学透明的锥形探针，并且探针被金属膜涂覆，同时使探针的尖端未被涂覆。因此，在探针的尖端处形成细孔，以允许光通过细孔进入探针。金属膜防止反射进入探针的光，并且光从探针泄漏，并且其连接到电极以使用隧道电流来将细孔定位在样品附近。

10. 发明授权

US5266502A STM memory medium 失效
标题翻译： STM存储介质
公开(公告)号：US5266502A
公开(公告)日：1993-11-30
申请号：US678597
申请日：1991-04-01
申请人： Takao Okada , Hiroshi Kajimura
发明人： Takao Okada , Hiroshi Kajimura
IPC分类号： G11B9/00 , G11B9/08 , G11B11/08 , H01L21/265
CPC分类号： B82Y10/00 , G11B9/08 , G11B9/1472 , G11B9/149 , G11B11/08 , Y10S977/863 , Y10S977/888 , Y10S977/89 , Y10S977/943
摘要： An STM memory medium comprising a substrate whose surface is smooth or even, a first insulating layer formed at a predetermined depth in the substrate by implanting first ion atoms from the smooth surface of the substrate into it under a certain condition, and a second insulating layer formed adjacent to the first insulating layer and at another predetermined depth in the substrate by implanting second ion atoms from the smooth surface of the substrate into it under another certain condition.
摘要翻译：一种STM存储介质，包括表面光滑或均匀的基板，通过在一定条件下从基板的平滑表面注入第一离子原子而在基板中以预定深度形成第一绝缘层，以及第二绝缘层通过在另一特定条件下将第二离子原子从衬底的光滑表面注入其中而形成在第一绝缘层附近并且在衬底中的另一预定深度处。

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