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1. 发明授权

CN101075015B 极化电子发射源及自旋极化扫描隧道显微镜有权
公开(公告)号：CN101075015B
公开(公告)日：2010-08-25
申请号：CN200610060733.X
申请日：2006-05-19
申请人：清华大学 , 鸿富锦精密工业(深圳)有限公司
发明人：段文晖 , 郝少刚 , 周刚 , 吴健 , 顾秉林
IPC分类号： G02B21/00 , G01N13/10
CPC分类号： H01J1/304 , G01Q60/16 , H01J2201/30434 , H01J2201/30488 , H01J2203/0296 , Y10S977/815 , Y10S977/822 , Y10S977/838 , Y10S977/849 , Y10S977/86 , Y10S977/861
摘要：本发明涉及一种极化电子发射源。该种极化电子发射源通常包括电极以及位于该电极上的III-V族化合物半导体一维纳米结构；该III-V族化合物半导体一维纳米结构包括与电极形成电连接的第一端以及远离该电极的第二端，该第二端作为极化电子发射端，该III-V族化合物半导体一维纳米结构的第二端开口，该III-V族化合物半导体一维纳米结构为开口纳米管；当向该电极施加负偏压，经由磁场诱导或/和圆偏振光激发可使该一维纳米结构的第二端发射极化电子束。本发明还提供一种采用III-V族化合物半导体一维纳米结构作为探针的自旋极化电子扫描隧道显微镜。

2. 发明公开

CN1057363A 一种用于研究或改变在真空或保护气体中的样品表面的装置无效
公开(公告)号：CN1057363A
公开(公告)日：1991-12-25
申请号：CN91103772.1
申请日：1991-05-10
申请人：斯皮拉尔研究发展公司
发明人：古道内·让-彼埃尔 , 拉克鲁特·伊冯
IPC分类号： H01J37/20 , H01J37/26 , G01J3/00 , G01B9/04
CPC分类号： G01Q30/16 , G02B21/24 , H01J37/20 , Y10S977/86 , Y10S977/861 , Y10S977/869 , Y10S977/871 , Y10S977/881 , Y10S977/888
摘要：本发明涉及一种用于研究放置在真空或在保护气体中的样品表面的装置。其结构包括一个主工作室，在该室中置有一个用于安装至少一个称为SXM部件的支承平板，该部件是借助于电或光导探针，利用对样品表面扫描来进行样品表面的显微检查，光谱分析或蚀刻。所述装置特征在于，支承平板能够从工作室中卸下，并且围绕中轴自行旋转，使得允许使用装在所述平板周边上的一套SXM部件。它应用于扫描隧道显微检查和/或光谱分析或利用光和/或电子微刻处理。

3. 发明公开

CN101075015A 极化电子发射源及自旋极化扫描隧道显微镜有权
公开(公告)号：CN101075015A
公开(公告)日：2007-11-21
申请号：CN200610060733.X
申请日：2006-05-19
申请人：清华大学 , 鸿富锦精密工业(深圳)有限公司
发明人：段文晖 , 郝少刚 , 周刚 , 吴健 , 顾秉林
IPC分类号： G02B21/00 , G01N13/10
CPC分类号： H01J1/304 , G01Q60/16 , H01J2201/30434 , H01J2201/30488 , H01J2203/0296 , Y10S977/815 , Y10S977/822 , Y10S977/838 , Y10S977/849 , Y10S977/86 , Y10S977/861
摘要：本发明涉及一种极化电子发射源。该种极化电子发射源通常包括电极以及位于该电极上的III－V族化合物半导体一维纳米结构；该III－V族化合物半导体一维纳米结构包括与电极形成电连接的第一端以及远离该电极的第二端，该第二端作为极化电子发射端；当向该电极施加负偏压，经由磁场诱导或/和圆偏振光激发可使该一维纳米结构的第二端发射极化电子束。本发明还提供一种采用III－V族化合物半导体一维纳米结构作为探针的自旋极化电子扫描隧道显微镜。

5. 发明专利

JP2006189441A Probe with field-effect transistor-channel structure for probe scanning microscope and its manufacturing method 审中-公开
标题翻译：用于探针扫描显微镜及其制造方法的场效应晶体管通道结构探测
公开(公告)号：JP2006189441A
公开(公告)日：2006-07-20
申请号：JP2005372969
申请日：2005-12-26
申请人： Hoko Koka Daigakko , 学校法人浦項工科大学校
发明人： MOON WON-KYU , LIM GEUN-BAE , LEE SANG HOON
IPC分类号： C01B31/02 , G01Q60/00 , G01Q70/00 , G01Q70/12 , G01Q70/16
CPC分类号： G01Q60/30 , G01Q70/12 , G11B9/02 , G11B9/1409 , Y10S977/849 , Y10S977/85 , Y10S977/855 , Y10S977/86 , Y10S977/861 , Y10S977/862 , Y10S977/863 , Y10S977/864 , Y10S977/876
摘要： PROBLEM TO BE SOLVED: To provide a probe for probe scanning microscopes, which has a sharp tip and an improved electrical property, and to provide its manufacturing method which includes producing a planar field-effect transistor and forming a conductive carbon nanotube thereon. SOLUTION: The method for manufacturing the probe with a field-effect transistor channel structure comprises a first step of producing the field-effect transistor, a second step of preparing to grow up the carbon nanotube on one upper section edge of a gate electrode of the field-effect transistor, and a third step of forming the carbon nanotube on the one upper section edge of the gate electrode of the prepared field-effect transistor. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种具有尖锐尖端和改善的电性能的探针扫描显微镜的探针，并提供其制造方法，其包括制造平面场效应晶体管并在其上形成导电碳纳米管。解决方案：用于制造具有场效应晶体管沟道结构的探针的方法包括产生场效应晶体管的第一步骤，准备在栅极的一个上部边缘上长大的碳纳米管的第二步骤电场，以及在所制备的场效应晶体管的栅极的一个上部边缘上形成碳纳米管的第三步骤。版权所有（C）2006，JPO＆NCIPI

6. 发明申请

WO1990010304A1 METHOD AND APPARATUS FOR SPECIFIC SPECTROSCOPIC ATOMIC IMAGING USING COMPLEMENTARY WAVELENGTH SPECIFIC PHOTON BIASING WITH ELECTRONIC AND TEMPERATURE BIASING ON A SCANNING TUNNELING MICROSCOPE 审中-公开
标题翻译：在扫描隧道显微镜上使用电子和温度偏移的补充波长特定光子偏转的特定光谱原子成像的方法和装置
公开(公告)号：WO1990010304A1
公开(公告)日：1990-09-07
申请号：PCT/US1990000098
申请日：1990-01-08
申请人： MIDWEST RESEARCH INSTITUTE , KAZMERSKI, Lawrence, L.
发明人： MIDWEST RESEARCH INSTITUTE
IPC分类号： H01J37/285
CPC分类号： G01Q60/12 , G01Q30/02 , G01Q30/10 , Y10S977/852 , Y10S977/861 , Y10S977/868
摘要： A method and apparatus (10) for specific spectroscopic atomic-imaging is disclosed for spatial resolution and imaging for display not only individual atoms on a sample (5) surface, but also bonding and the specific atomic species in such bond. The apparatus (10) includes a scanning tunneling microscope (STM) that is modified to include photon biasing, preferably a tuneable laser (54), modulating electronic surface biasing for the sample (5), and temperature biasing, preferably a vibration-free refrigerated sample mounting stage (12). Computer control (100) and data processing and visual display components (102) are also included. The method includes modulating the electronic bias voltage with and without selected photon wavelengths and frequency biasing under a stabilizing (usually cold) bias temperature to detect bonding and specific atomic species in the bonds as the STM rasters the sample (5). This data is processed along with atomic spatial topography data obtained from the STM raster scan to create a real-time visual image of the atoms on the sample (5) surface.
摘要翻译：公开了用于特定光谱原子成像的方法和装置（10）用于空间分辨率和成像，用于不仅显示样品（5）表面上的单个原子，而且还可以键合和这种键中的特定原子物质。该装置（10）包括扫描隧道显微镜（STM），其被修改为包括光子偏置，优选可调谐激光器（54），调制用于样品（5）的电子表面偏置，以及温度偏置，优选无振动的冷冻样品安装台（12）。还包括计算机控制（100）和数据处理和视觉显示组件（102）。该方法包括在稳定（通常为冷）偏压温度下调制具有和不具有所选择的光子波长和频率偏置的电子偏置电压，以在STM栅极对样品（5）进行栅格扫描时检测键中的键合和特定原子物质。将该数据与从STM光栅扫描获得的原子空间地形数据一起处理，以创建样品（5）表面上的原子的实时视觉图像。

7. 发明申请

WO8907258A3 INTEGRATED SCANNING TUNNELING MICROSCOPE 审中-公开
标题翻译：集成扫描隧道显微镜
公开(公告)号：WO8907258A3
公开(公告)日：1989-09-08
申请号：PCT/US8900243
申请日：1989-01-26
申请人： UNIV LELAND STANFORD JUNIOR
发明人： ALBRECHT THOMAS R , ZDEBLICK MARK J
IPC分类号： G01B7/34 , B44C1/22 , G01N23/00 , G01N23/225 , G01N27/00 , G01N37/00 , G01Q10/06 , G01Q20/04 , G01Q30/04 , G01Q60/10 , G01Q60/16 , G01Q70/16 , G01Q80/00 , G11B9/00 , G11B9/04 , G11B9/14 , G11C13/00 , G11C13/04 , H01J37/20 , H01J37/28 , H01L41/09 , H01L41/22 , H02N2/00 , H01J37/00 , H01L41/00
CPC分类号： H01L41/0966 , G01Q10/045 , G01Q60/16 , G01Q80/00 , G11B9/14 , G11B9/1418 , G11B9/1436 , G11B9/1472 , H01J37/20 , H01L41/316 , Y10S977/837 , Y10S977/861 , Y10S977/872 , Y10S977/873 , Y10S977/943 , Y10S977/947 , Y10T29/42
摘要： There is disclosed herein an integrated scanning tunneling microscope and an integrated piezoelectric transducer and methods for making both. The device consists of one or two arm piezoelectric bimorph cantilevers (42, 46) formed by micromachining using standard integrated circuit processing steps. These cantilevers are attached to the substrate (32) at one area (80) and are free to move under the influence of piezoelectric forces which are caused by the application of appropriate voltages generated by control circuitry (88) and applied to pairs of electrodes (48, 36, 44; 52, 49, 44) formed as an integral part of the bimorph cantilever structure. The electric fields caused by the control voltages cause the piezoelectric bimorphs to move in any desired fashion within ranges determined by the design. The bimorph cantilevers have tips (66) with very sharp points formed thereon which are moved by the action of the control circuit (88) and the piezoelectric bimorphs so to stay within a very small distance of a conducting surface (84). The movements of the tip can be tracked to yield an image of the surface at atomic resolution.

8. 发明申请

WO1992014250A1 MICROSTRUCTURE ARRAY AND ACTIVATION SYSTEM THEREFOR 审中-公开
标题翻译：微结构阵列及其激活体系
公开(公告)号：WO1992014250A1
公开(公告)日：1992-08-20
申请号：PCT/US1992000719
申请日：1992-01-29
申请人： SPITZER, Richard
IPC分类号： G11C07/00
CPC分类号： G11B5/00 , G01Q80/00 , G11B5/09 , G11B5/35 , G11B5/4969 , G11B5/4992 , G11B9/1418 , G11B19/02 , G11B20/10 , G11B21/00 , G11B21/003 , G11B2005/0002 , G11B2005/0005 , G11B2005/0016 , G11C11/14 , G11C13/02 , Y10S977/85 , Y10S977/852 , Y10S977/861 , Y10S977/872 , Y10S977/874 , Y10S977/947
摘要： An electronic transducer array and transfer device and method which provides for activation of selected transducers at selected times. In one application, the device performs data transfer by a combination of suitably interconnected submillimeter transducers (4) capable of sensing and/or actuating microscopic data-storage cells, and electronic switching (402, 602, 702) to activate selected individual transducers. One embodiment of the invention provides for magnetic transducers for reading (304) and writing (302) on a magnetic medium (8). Another embodiment of the invention provides tunneling electron transducers (10) arranged in an array.

9. 发明申请

WO1991017429A1 INSTALLATION FOR THE STUDY OR TRANSFORMATION OF SAMPLE SURFACES IN A VACUUM OR CONTROLLED ATMOSPHERE 审中-公开
标题翻译：安装在真空或控制的大气中的样品表面的研究或转换
公开(公告)号：WO1991017429A1
公开(公告)日：1991-11-14
申请号：PCT/FR1991000378
申请日：1991-05-07
申请人： SPIRAL RECHERCHE ET DEVELOPPEMENT (SARL) , GOUDONNET, Jean-Pierre , LACROUTE, Yvon
发明人： SPIRAL RECHERCHE ET DEVELOPPEMENT (SARL)
IPC分类号： G01N27/00
CPC分类号： G01Q30/16 , G02B21/24 , H01J37/20 , Y10S977/86 , Y10S977/861 , Y10S977/869 , Y10S977/871 , Y10S977/881 , Y10S977/888
摘要： An installation for the study of the surface of samples in a vacuum or controlled atmosphere, of the type comprising a main chamber in which is placed a microscopy stage support for at least one device, known as SXM, for microscopy, spectroscopy or engraving a sample surface, according to a process for carrying out the scanning of said surface using an electrically or light conducting microprobe, said installation being characterized in that the stage support can be disconnected from the main chamber and rotated around a central axis in order for an assembly of SXM devices arranged on the periphery of said stage to be used. The invention is applicable, in particular, to electron scanning tunnelling microscopy and/or spectroscopy, especially in ultrahigh vacuums, optic scanning tunnelling microscopy and/or spectroscopy, or to the engraving of nanometric structures using microlithographic optic and/or electronic processes.
摘要翻译： PCT No.PCT / FR91 / 00378 Sec。 371日期：1993年1月5日 102（e）日期1993年1月5日PCT提交1991年5月7日PCT公布。公开号WO91 / 17429 日期为1991年11月14日。用于分析或转化放置在真空或受控气氛中的样品表面的装置，包括主壳体，其中定位有至少一个称为SXM的装置的支撑板，其中，例如光或电导电尖端定位为接近待检测样品的表面，无论是在空气中还是在真空中。该器件旨在通过微探针扫描表面进行显微镜，光谱或样品表面的蚀刻。支撑板配备有用于将其与主壳体断开的元件以及用于使支撑板围绕中心轴线旋转的元件，允许使用装配在支撑板的周边中的一系列SXM装置。主外壳由用于样品表面的洗涤外壳和样品的引入和储存外壳完成，样品可以通过传送杆端部的安装进行处理，该输送杆可纵向移动并沿轴向旋转外壳的对齐轴。

10. 发明申请

WO00070325A1 SCANNING TUNNELING MICROSCOPE, ITS PROBE, PROCESSING METHOD FOR THE PROBE AND PRODUCTION METHOD FOR FINE STRUCTURE 审中-公开
标题翻译：扫描隧道显微镜及其探针，精细结构探针和生产方法的处理方法
公开(公告)号：WO00070325A1
公开(公告)日：2000-11-23
申请号：PCT/JP1999/006385
申请日：1999-11-16
IPC分类号： B82B3/00 , G01B7/34 , G01Q60/10 , G01Q60/16 , G01Q80/00 , G01N13/12 , G12B21/04
CPC分类号： B82B3/00 , G01Q60/16 , Y10S977/861 , Y10S977/869 , Y10S977/875 , Y10S977/879
摘要： A scanning tunneling microscope capable of constructing a continuous fine structure, its probe, a processing method for the probe and a production method for a fine structure. A probe (2) for a scanning tunneling microscope made of inonic conductive and electronic conductive Ag2S single crystal is provided, a voltage and a tunnel current (6) is applied to between the probe (2) and a substrate (3) to move the above Ag ions and grow a protrusion (mini-chip) consisting of Ag ions or Ag atoms at the tip end of the probe (2), after the growth of the protrusion, the applied voltage polarity is reversed to allow Ag ions or Ag atoms constituting the grown protrusion to re-dissolve into the Ag2S single crystal and shrink the protrusion, and a probe (2) having a shaped protrusion consisting of the Ag ions or Ag atoms is formed. Movable ions in a mixed conductive material or atoms constituting a mixed conductive material are applied to a substrate to form a fine structure on the substrate.
摘要翻译：能够构造连续精细结构的扫描隧道显微镜，其探针，探针的处理方法和精细结构的制造方法。提供用于由异性导电和电子导电Ag2S单晶构成的扫描隧道显微镜的探针（2），在探针（2）和基底（3）之间施加电压和隧道电流（6）以移动在Ag离子之上并在探针（2）的尖端处生长由Ag离子或Ag原子组成的突起（微型芯片），在突起生长之后，施加的电压极性反转以允许Ag离子或Ag原子构成生长的突起以再溶解到Ag2S单晶中并收缩突起，并且形成具有由Ag离子或Ag原子组成的成形突起的探针（2）。混合导电材料中的可动离子或构成混合导电材料的原子被施加到衬底上以在衬底上形成精细结构。

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