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    • 4. 发明授权
    • Apparatus and process for chemical vapor deposition
    • 化学气相沉积的装置和方法
    • US5183510A
    • 1993-02-02
    • US443317
    • 1989-11-30
    • Takafumi Kimura
    • Takafumi Kimura
    • H01L21/365C23C16/40C23C16/448
    • C23C16/408C23C16/4481
    • An apparatus for a chemical vapor deposition of a compound film on a substrate, comprising: a plurality of gas-generating chambers each containing an evaporating boat for a solid source containing a component element of a compound film to be formed on a substrate, provided with a heating element for heating and evaporating the solid source, having an inlet for a carrier gas and a gas outlet, and arranged such that effective gas-generating portions thereof are thermally isolated from each other; a gas-mixing chamber for mixing gases from said gas-generating chambers, provided with a heater element for heating a gas passing therethrough and having inlets for gases flowing from said gas-generating chambers and an outlet for a gas mixture; and a film-growing chamber containing a substrate on which a compound film is formed by a gas phase reaction, provided with a heating element for heating the substrate, and having an inlet for a gas mixture flowing from said gas-mixing chamber and an exhaust gas outlet. Also disclosed is a chemical vapor deposition process using the disclosed apparatus.
    • 5. 发明授权
    • Plasma processing apparatus
    • 等离子体处理装置
    • US09236226B2
    • 2016-01-12
    • US13428512
    • 2012-03-23
    • Jun YamawakuTakafumi KimuraChishio Koshimizu
    • Jun YamawakuTakafumi KimuraChishio Koshimizu
    • H01L21/00H01J37/32
    • H01J37/32091H01J37/32669
    • In the plasma processing apparatus 10, a processing space S is formed between a susceptor 12 and an upper electrode 13 facing the susceptor 12. The plasma processing apparatus 10 includes a magnetic field generating unit provided at a side of the upper electrode 13 opposite to the processing space S. The magnetic field generating unit includes a magnetic force line generating unit 27 having a pair of annular magnet rows 27a and 27b. The annular magnet rows 27a and 27b are provided at the side of the upper electrode 13 opposite to the processing space S and arranged concentrically when viewed from the top. In the magnetic force line generating unit 27, an angle θ1 formed by axial lines of magnets of the annular magnet rows 27a and 27b is set to be in a range of about 0°
    • 在等离子体处理装置10中,在基座12和与基座12相对的上部电极13之间形成有处理空间S.等离子体处理装置10包括设在上侧电极13的与 处理空间S.磁场产生单元包括具有一对环形磁体排27a和27b的磁力线生成单元27。 环形磁体排27a和27b设置在上部电极13的与处理空间S相对的一侧,并且从顶部观察时同心地布置。 在磁力线产生单元27中,由环状磁体排27a和27b的磁体的轴线形成的角度θ1设定在约0°<1at; 1&amp; nlE; 180°的范围内。
    • 6. 发明申请
    • PLASMA PROCESSING APPARATUS
    • 等离子体加工设备
    • US20120241092A1
    • 2012-09-27
    • US13428512
    • 2012-03-23
    • Jun YamawakuTakafumi KimuraChishio Koshimizu
    • Jun YamawakuTakafumi KimuraChishio Koshimizu
    • H05H1/24B44C1/22
    • H01J37/32091H01J37/32669
    • In the plasma processing apparatus 10, a processing space S is formed between a susceptor 12 and an upper electrode 13 facing the susceptor 12. The plasma processing apparatus 10 includes a magnetic field generating unit provided at a side of the upper electrode 13 opposite to the processing space S. The magnetic field generating unit includes a magnetic force line generating unit 27 having a pair of annular magnet rows 27a and 27b. The annular magnet rows 27a and 27b are provided at the side of the upper electrode 13 opposite to the processing space S and arranged concentrically when viewed from the top. In the magnetic force line generating unit 27, an angle θ1 formed by axial lines of magnets of the annular magnet rows 27a and 27b is set to be in a range of about 0°
    • 在等离子体处理装置10中,在基座12和与基座12相对的上部电极13之间形成有处理空间S.等离子体处理装置10包括设在上侧电极13的与 处理空间S.磁场产生单元包括具有一对环形磁体排27a和27b的磁力线生成单元27。 环形磁体排27a和27b设置在上部电极13的与处理空间S相对的一侧,并且从顶部观察时同心地布置。 在磁力线产生单元27中,由环状磁体排27a和27b的磁体的轴线形成的角度θ1设定在约0°<1at; 1&amp; nlE; 180°的范围内。
    • 7. 发明授权
    • Handheld RFID reader with display
    • 带显示屏的手持式RFID阅读器
    • US07508306B2
    • 2009-03-24
    • US11589927
    • 2006-10-31
    • Hiroshi FujiiTakafumi Kimura
    • Hiroshi FujiiTakafumi Kimura
    • G08B13/14
    • G01S5/12G01S13/74G01S13/867
    • A handy terminal allowing an object of interest such as a cargo to be efficiently searched utilizing an RFID tag is provided. A detection unit detects the distance and direction of an RFID tag attached to an object of search from a point for observing the distance and direction. A reading unit reads information on the external shape of the object of search written in a memory portion of the RFID tag. An image processing unit displays a three-dimensional graphic of the disposition of the RFID tag based on the distance and direction detected by the detection unit and compositely displaying a three-dimensional appearance image of the object of search estimated from the external shape information of the object of search read by the reading unit in the position where the three-dimensional graphic of the RFID tag is displayed.
    • 提供了一种方便的终端,其允许利用RFID标签有效地搜索诸如货物的感兴趣对象。 检测单元从用于观察距离和方向的点检测附接到搜索对象的RFID标签的距离和方向。 读取单元读取写入RFID标签的存储器部分中的搜索对象的外部形状的信息。 图像处理单元基于由检测单元检测到的距离和方向显示RFID标签的配置的三维图形,并且从根据该检测单元的外部形状信息估计的复合显示搜索对象的三维外观图像 读取单元在显示RFID标签的三维图形的位置读取的搜索对象。
    • 10. 发明授权
    • Photograph developing apparatus
    • 照相显影装置
    • US6024503A
    • 2000-02-15
    • US159508
    • 1998-09-24
    • Tsukasa NakanoTomoya TanakaTakafumi KimuraYoshifumi NakamuraJunichi Miyai
    • Tsukasa NakanoTomoya TanakaTakafumi KimuraYoshifumi NakamuraJunichi Miyai
    • G03D3/00G03D3/02G03D3/06G03D13/04
    • G03D3/06G03D3/065
    • A photograph developing apparatus includes a main processing tank and a sub-tank which is connected to the main processing tank. The sub-tank is provided with a filter, a sensor, and the like in order to filter processing solution and feed the filtered processing solution back to the main processing tank. The sub-tank has a lid for covering the top of the sub-tank. The lid has an evaporation prevention block which is extended to a point below the surface of the processing solution. Cavity portions are formed in the evaporation prevention block at least at positions corresponding to the filter and the sensor. Alternatively, evaporation of the processing solution is suppressed through employment of an evaporation prevention block which floats on the surface of the processing solution. In this case as well, cavity portions are formed in the block at least at positions corresponding to the filter and the sensor.
    • 照相显影装置包括连接到主处理槽的主处理槽和副罐。 副罐设置有过滤器,传感器等,以过滤处理溶液并将过滤的处理溶液反馈回主处理槽。 副坦克具有用于覆盖副罐的顶部的盖子。 盖子具有一个延伸到处理溶液表面下方的蒸发防止块。 至少在与过滤器和传感器对应的位置处,在防蒸发块中形成腔部。 或者,通过使用漂浮在处理溶液表面上的蒸发防止块来抑制处理溶液的蒸发。 在这种情况下,至少在与过滤器和传感器对应的位置处,在块体中形成空腔部分。