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    • 1. 发明授权
    • Aluminum-based intermetallic compound with high toughness and high wear
resistance
    • 具有高韧性和高耐磨性的铝基金属间化合物
    • US5300157A
    • 1994-04-05
    • US827632
    • 1992-01-29
    • Sinji OkabeTakashi IwasaNaoya Watanabe
    • Sinji OkabeTakashi IwasaNaoya Watanabe
    • C22C21/00C22C21/12F16D65/12F16D69/04
    • C22C21/00C22C21/003C22C21/12F16D65/127F16D69/04F16D2069/0491
    • An Al-based intermetallic compound in which a eutectic crystal type Al-CuMn intermetallic compound dispersion phase is dispersed in an Al-Cu intermetallic compound matrix phase. The content of Mn as a eutectic crystal-forming element contained in the dispersion phase is set in a range of from 5% by weight (inclusive) to 30% by weight (inclusive). In the course of solidification of the Al-Cu-Mn intermetallic compound, an infinite number of dispersion phases are first crystallized, and the matrix phase is then crystallized. This ensures that the matrix phase is formed into a fine crystal structure due to hindrance of the growth thereof by the dispersion phase, leading to increases in hardness and toughness of the resulting Al-based intermetallic compound. In another embodiment, the Al-based intermetallic compound contains peritectic type Al-based intermetallic dispersion phase, such as formed by Ta, dispersed in the intermetallic compound matrix phase.
    • 共晶体型Al-CuMn金属间化合物分散相分散在Al-Cu金属间化合物基质相中的Al系金属间化合物。 分散相中含有的作为共晶结晶形成元素的Mn的含量为5重量%以上30重量%以下的范围。 在Al-Cu-Mn金属间化合物的固化过程中,首先结晶出无数个分散相,然后使基体相结晶。 由此,由于分散相的生长受阻,基体相成为微细晶体结构,导致Al系金属间化合物的硬度和韧性提高。 在另一个实施方案中,Al基金属间化合物包含分散在金属间化合物基质相中的由Ta形成的包晶型Al基金属间化合物分散相。
    • 7. 发明申请
    • Self displacement sensing cantilever and scanning probe microscope
    • 自动位移检测悬臂和扫描探针显微镜
    • US20100132075A1
    • 2010-05-27
    • US12592428
    • 2009-11-24
    • Masato IyokiNaoya Watanabe
    • Masato IyokiNaoya Watanabe
    • G01Q20/02G01Q20/00
    • G01Q20/04G01Q30/025G01Q70/14
    • Provided is a self displacement sensing cantilever, including: a cantilever (4) that has a probe (2) at its tip and has a distal end portion (3) at its distal end; a displacement detecting portion (5) that is provided to the cantilever (4), for detecting a displacement of the cantilever (4); an electrode portion (6) that is connected to the displacement detecting portion (5) and is communicated with the distal end portion (3); and an insulation film (7) that is formed over at least one of the electrode portion (6) and the displacement detecting portion (5) of the cantilever (4), in which the insulation film (7) is applied a coating of an arbitrary functional material (8). As a result, measurement with a scanning probe microscope may be performed at the same time as projecting light.
    • 本发明提供一种自移位检测悬臂,包括:悬臂(4),其顶端具有探针(2),并在其远端具有远端部分(3); 位移检测部(5),其设置在所述悬臂(4)上,用于检测所述悬臂(4)的位移; 与所述位移检测部(5)连接并与所述前端部(3)连通的电极部(6)。 以及形成在所述悬臂(4)的所述电极部(6)和所述位移检测部(5)中的至少一个上的绝缘膜(7),其中所述绝缘膜(7)被涂覆在所述悬臂 任意功能材料(8)。 结果,可以在与投射光同时进行扫描探针显微镜的测量。
    • 8. 发明授权
    • Scanning probe microscope and scanning method
    • 扫描探针显微镜和扫描方法
    • US07456400B2
    • 2008-11-25
    • US11235458
    • 2005-09-26
    • Masatsugu ShigenoYoshiharu ShirakawabeAmiko NiheiOsamu MatsuzawaNaoya WatanabeAkira Inoue
    • Masatsugu ShigenoYoshiharu ShirakawabeAmiko NiheiOsamu MatsuzawaNaoya WatanabeAkira Inoue
    • G12B21/00
    • G01Q60/32G01Q10/06Y10S977/849Y10S977/851Y10S977/852Y10S977/86Y10S977/872
    • A scanning probe microscope has a probe needle and a control section that controls relative scanning movement between the probe needle and a surface of a sample in at least one direction parallel to the sample surface and controls relative movement between the probe needle and the sample surface in a direction perpendicular to the sample surface. A vibration source vibrates the probe needle at a vibrating frequency relative to the sample surface. An approach/separation drive section causes the probe needle to relatively approach to and separate from the sample surface at a predetermined distance while the probe needle is vibrated at the vibrating frequency relative to the sample surface by the vibration source. A detection section detects a rate of change in a vibration state of the probe needle in accordance with a distance between the probe needle and the sample surface. An observation section gathers observation data from the sample surface when the rate of change in the vibration state of the probe needle detected by the detection section has exceeded a preselected threshold value.
    • 扫描探针显微镜具有探针和控制部,其控制探针和样品表面之间的平行于样品表面的至少一个方向上的相对扫描运动,并且控制探针与样品表面之间的相对运动 垂直于样品表面的方向。 振动源以相对于样品表面的振动频率振动探针。 接近/分离驱动部分使得探针相对于样品表面以预定距离相对接近和分离,同时探针以振动源相对于样品表面的振动频率振动。 检测部根据探针与样本面的距离来检测探针的振动状态的变化率。 当由检测部检测到的探针的振动状态的变化率超过预选阈值时,观察部分从样本表面收集观察数据。
    • 9. 发明申请
    • Scanning probe device and processing method of scanning probe
    • 扫描探头装置和扫描探头的处理方法
    • US20060254348A1
    • 2006-11-16
    • US11488254
    • 2006-07-18
    • Naoya WatanabeOsamu Takaoka
    • Naoya WatanabeOsamu Takaoka
    • G01B5/28
    • G01Q60/32G01Q80/00G03F1/72
    • There is provided a device in which a probe can be used for both of observation and correction, and which can, even if a next generation photomask of ultra minute structure is made an object, perform a desired processing without injuring a normal portion in a process of obtaining information of a position and a shape of a defect part, and without impairing the probe also at a processing time. It has been adapted such that, at an observation time, a contact pressure between a probe and a mask is reduced to 0.1 nN by applying a vibration of 1 kHz to 1 MHz to the probe. It has been adapted such that a cantilever used in the present invention is formed by a silicon material of 100-600 μm in length and 5-50 μm in thickness and, at the observation time, the probe contacts with the mask at the contact pressure of 0.1 nN and, at the processing time, a defect correction can be performed by causing the probe to contact with the mask at the contact pressure of 10 nN to 1 mN.
    • 提供了一种可以将探头用于观察和校正的装置,并且即使下一代超微小结构的光掩模被制成物体也可以进行所需的处理而不损害处理中的正常部分 获得缺陷部分的位置和形状的信息,并且在处理时间也不损害探针。 已经适应使得在观察时间,通过向探针施加1kHz至1MHz的振动,将探针和掩模之间的接触压力降低至0.1nN。 已经适应使得本发明中使用的悬臂由长度为100〜600μm,厚度为5-50μm的硅材料形成,并且在观察时刻,探针以接触压力与掩模接触 0.1nN,并且在处理时间,可以通过使探针以10nN至1mN的接触压力与掩模接触来进行缺陷校正。
    • 10. 发明授权
    • Image processing apparatus and method selectively utilizing lower than normal image recording density
    • 选择性地利用低于正常图像记录密度的图像处理装置和方法
    • US07130064B1
    • 2006-10-31
    • US09598201
    • 2000-06-21
    • Koji OkamuraNaoya Watanabe
    • Koji OkamuraNaoya Watanabe
    • G06F15/00
    • H04N1/56
    • An image processing system includes an input unit, a selecting unit, a determining unit and a control unit. The input unit inputs one of a color image and a monochrome image, and the selecting unit selects either a normal recording mode for recording an image on a recording material at a predetermined recording density, and a decimation recording mode for recording the image on the recording material at a recording density lower than that of the normal recording mode. The determining unit determines if the input image is a color image or a monochrome image, and the control unit changes to the normal recording mode, when the decimation recording mode is selected and the input image is determined to be a color image.
    • 图像处理系统包括输入单元,选择单元,确定单元和控制单元。 输入单元输入彩色图像和单色图像之一,并且选择单元以预定的记录密度选择用于在记录材料上记录图像的正常记录模式,以及用于在记录上记录图像的抽取记录模式 材料的记录密度低于正常记录模式。 当选择抽取记录模式并将输入图像确定为彩色图像时,确定单元确定输入图像是彩色图像还是单色图像,并且控制单元改变为正常记录模式。