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    • 3. 发明授权
    • Scanning probe microscope and scanning method
    • 扫描探针显微镜和扫描方法
    • US07456400B2
    • 2008-11-25
    • US11235458
    • 2005-09-26
    • Masatsugu ShigenoYoshiharu ShirakawabeAmiko NiheiOsamu MatsuzawaNaoya WatanabeAkira Inoue
    • Masatsugu ShigenoYoshiharu ShirakawabeAmiko NiheiOsamu MatsuzawaNaoya WatanabeAkira Inoue
    • G12B21/00
    • G01Q60/32G01Q10/06Y10S977/849Y10S977/851Y10S977/852Y10S977/86Y10S977/872
    • A scanning probe microscope has a probe needle and a control section that controls relative scanning movement between the probe needle and a surface of a sample in at least one direction parallel to the sample surface and controls relative movement between the probe needle and the sample surface in a direction perpendicular to the sample surface. A vibration source vibrates the probe needle at a vibrating frequency relative to the sample surface. An approach/separation drive section causes the probe needle to relatively approach to and separate from the sample surface at a predetermined distance while the probe needle is vibrated at the vibrating frequency relative to the sample surface by the vibration source. A detection section detects a rate of change in a vibration state of the probe needle in accordance with a distance between the probe needle and the sample surface. An observation section gathers observation data from the sample surface when the rate of change in the vibration state of the probe needle detected by the detection section has exceeded a preselected threshold value.
    • 扫描探针显微镜具有探针和控制部,其控制探针和样品表面之间的平行于样品表面的至少一个方向上的相对扫描运动,并且控制探针与样品表面之间的相对运动 垂直于样品表面的方向。 振动源以相对于样品表面的振动频率振动探针。 接近/分离驱动部分使得探针相对于样品表面以预定距离相对接近和分离,同时探针以振动源相对于样品表面的振动频率振动。 检测部根据探针与样本面的距离来检测探针的振动状态的变化率。 当由检测部检测到的探针的振动状态的变化率超过预选阈值时,观察部分从样本表面收集观察数据。
    • 4. 发明申请
    • Scanning probe microscopy and method of measurement by the same
    • 扫描探针显微镜和测量方法相同
    • US20050189490A1
    • 2005-09-01
    • US11054504
    • 2005-02-09
    • Kazunori AndoAmiko Nihei
    • Kazunori AndoAmiko Nihei
    • G01Q30/08G01Q30/10G01Q30/20G01Q60/24G21K7/00
    • G01Q30/18G01Q30/20
    • The present invention provides a scanning probe microscopy which can measure and keep the shape of a sample surface and the physical properties of the sample at high resolution even when an evaporable component is evaporated from a substance to be heated when the sample is heated, and can measure variations in physical properties at every heated temperature without causing thermal history on the sample. The scanning probe microscopy includes a cantilever having a probe at the distal end thereof; a heating unit for heating the sample; a sample moving unit for moving the sample; and a shielding unit for shielding between the cantilever and the sample, and when heating the sample, the shielding unit is interposed between the cantilever and the sample, and when measuring the sample, the shielding unit is not interposed between the cantilever and the sample.
    • 本发明提供一种扫描探针显微镜,其可以在样品被加热时从被加热物质蒸发出可蒸发成分时,以高分辨率测量和保持样品表面的形状和样品的物理性能,并且可以 在每个加热温度下测量物理性能的变化,而不会对样品造成热历史。 扫描探针显微镜包括在其远端具有探针的悬臂; 用于加热样品的加热单元; 用于移动样品的样品移动单元; 以及用于屏蔽悬臂与样品之间的屏蔽单元,当加热样品时,屏蔽单元介于悬臂与样品之间,测量样品时,屏蔽单元不会夹在悬臂与样品之间。
    • 9. 发明申请
    • Scanning probe microscope and scanning method
    • 扫描探针显微镜和扫描方法
    • US20060113472A1
    • 2006-06-01
    • US11235458
    • 2005-09-26
    • Masatsugu ShigenoYoshiharu ShirakawabeAmiko NiheiOsamu MatsuzawaNaoya WatanabeAkira Inoue
    • Masatsugu ShigenoYoshiharu ShirakawabeAmiko NiheiOsamu MatsuzawaNaoya WatanabeAkira Inoue
    • G21K7/00
    • G01Q60/32G01Q10/06Y10S977/849Y10S977/851Y10S977/852Y10S977/86Y10S977/872
    • In order to provide a scanning probe microscope and a scanning method which are capable of accurately approaching or contacting a probe needle and a sample surface irrespective of an irregularities shape of the sample surface, it comprises a probe needle 2 for relatively performing, with respect to a sample surface S, scans in two directions parallel to the sample surface S and a movement in a perpendicular direction of the sample surface S, a detection means 4 for detecting a measurement amount changing in compliance with a distance between the probe needle 2 and the sample surface S, an observation means 6 for gathering an observation data in a point of time at which the probe needle 2 has approached to or contacted with the sample surface S, a control means 5 for controlling the sans in the two directions and the movement in the perpendicular direction and an approach/separation drive section 24 for causing the probe needle 2 to relatively approach to and separate from the sample surface S at a predetermined distance, wherein the detection means 4 detects a change rate of the measurement amount at an approach time and a separation time by the approach/separation drive section 24, and the observation means 6 gathers the observation data when the change rate of the observation amount exceeds a previously set threshold value.
    • 为了提供能够精确地接近或接触探针和样品表面的扫描探针显微镜和扫描方法,而与样品表面的不规则形状无关,其包括用于相对于相对于 样品表面S在平行于样品表面S的两个方向上扫描并沿着样品表面S的垂直方向移动;检测装置4,用于检测测量量根据探针2和 样本表面S,用于在探针2接近或接触样本表面S的时间点收集观察数据的观察装置6,用于控制两个方向上的无效的控制装置5和运动 以及用于使探针2相对于样品su相对接近和分离的接近/分离驱动部24 表面S在预定距离处,其中检测装置4通过接近/分离驱动部分24检测接近时间的测量量和分离时间的变化率,并且观察装置6在变化率 的观察量超过预先设定的阈值。