专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US06506642B1 Removable spacer technique 有权
标题翻译：可拆卸间隔技术
公开(公告)号：US06506642B1
公开(公告)日：2003-01-14
申请号：US10020931
申请日：2001-12-19
申请人： Scott D. Luning , Jon D. Cheek , Daniel Kadosh , James F. Buller , David E. Brown
发明人： Scott D. Luning , Jon D. Cheek , Daniel Kadosh , James F. Buller , David E. Brown
IPC分类号： H01L218238
CPC分类号： H01L29/6653 , H01L21/823814 , H01L21/823864 , H01L29/6656
摘要： Submicron-dimensioned MOS and/or CMOS transistors are fabricated utilizing a simplified removable sidewall spacer technique, enabling effective tailoring of individual transistors to optimize their respective functionality. Embodiments include forming a first sidewall spacer having a first thickness on the side surfaces of a plurality of gate electrodes of transistors, selectively removing the first sidewall spacers from the gate electrodes of certain transistors, and then depositing second sidewall spacers on remaining first sidewall spacers and on the side surfaces of the gate electrodes from which the first sidewall spacers have been removed. Embodiments enable separately tailoring n- and p-MOS transistors as well as individual n- or p-MOS transistors having different functionality, e.g., different drive current and voltage leakage requirements.
摘要翻译：亚微米尺寸的MOS和/或CMOS晶体管使用简化的可移除侧壁间隔物技术制造，使得能够有效地定制各个晶体管以优化它们各自的功能。实施例包括在晶体管的多个栅极电极的侧表面上形成具有第一厚度的第一侧壁间隔物，从某些晶体管的栅电极选择性地去除第一侧壁间隔物，然后在剩余的第一侧壁间隔物上沉积第二侧壁间隔物，在栅电极的已经被去除了第一侧壁间隔物的侧表面上。实施例能够单独定制n型和p型MOS晶体管以及具有不同功能的单独n型或p型MOS晶体管，例如不同的驱动电流和电压泄漏要求。

2. 发明授权

US06720227B1 Method of forming source/drain regions in a semiconductor device 失效
标题翻译：在半导体器件中形成源/漏区的方法
公开(公告)号：US06720227B1
公开(公告)日：2004-04-13
申请号：US10059615
申请日：2002-01-29
申请人： Daniel Kadosh , Jon D. Cheek , James F. Buller , Basab Bandyopadhyay
发明人： Daniel Kadosh , Jon D. Cheek , James F. Buller , Basab Bandyopadhyay
IPC分类号： H01L21336
CPC分类号： H01L29/6659 , H01L21/26513 , H01L29/7833
摘要： A method of forming source/drain regions in a semiconductor device is provided. In one illustrative embodiment, the method comprises forming a gate electrode above a semiconducting substrate, forming source/drain regions in the substrate adjacent the gate electrode by performing at least the following steps: performing two ion implantation processes to form source/drain extensions for the device and performing a third ion implantation process to further form source/drain regions for the device. Various N-type and P-type dopant atoms such as arsenic, phosphorous, boron and boron difluoride may be used with the present invention.
摘要翻译：提供了一种在半导体器件中形成源极/漏极区域的方法。在一个说明性实施例中，该方法包括在半导体衬底之上形成栅电极，通过至少执行以下步骤在衬底中邻近栅电极形成源极/漏极区：执行两个离子注入工艺以形成用于并且执行第三离子注入工艺以进一步形成用于该器件的源极/漏极区域。本发明可以使用各种N型和P型掺杂剂原子，例如砷，磷，硼和二氟化硼。

3. 发明授权

US06245649B1 Method for forming a retrograde impurity profile 有权
标题翻译：形成逆行杂质分布的方法
公开(公告)号：US06245649B1
公开(公告)日：2001-06-12
申请号：US09251923
申请日：1999-02-17
申请人： James F. Buller , Jon D. Cheek , Daniel Kadosh , Derick J. Wristers , H. Jim Fulford
发明人： James F. Buller , Jon D. Cheek , Daniel Kadosh , Derick J. Wristers , H. Jim Fulford
IPC分类号： H01L2104
CPC分类号： H01L29/105 , H01L21/2652
摘要： A method for forming a retrograde impurity profile in a semiconducting substrate is provided. The method comprises forming a sacrificial layer having a thickness in the range of about 10 Å to about 150 Å on the surface of a semiconducting substrate. Thereafter, an ion implantation process is performed wherein dopant impurity ions are directed through the sacrificial layer and into the semiconducting substrate under conditions effective to form a retrograde impurity profile in the semiconducting substrate.
摘要翻译：提供了一种在半导体衬底中形成逆向杂质分布的方法。该方法包括在半导体衬底的表面上形成具有在大约至大约的范围内的厚度的牺牲层。此后，进行离子注入工艺，其中掺杂杂质离子在有效地在半导体衬底中形成逆向杂质分布的条件下引导通过牺牲层并进入半导体衬底。

4. 发明授权

US06274415B1 Self-aligned Vt implant 有权
标题翻译：自对准Vt植入物
公开(公告)号：US06274415B1
公开(公告)日：2001-08-14
申请号：US09489068
申请日：2000-01-21
申请人： Jon D. Cheek , Mark Michael , Derick J. Wristers , James F. Buller
发明人： Jon D. Cheek , Mark Michael , Derick J. Wristers , James F. Buller
IPC分类号： H01L21337
CPC分类号： H01L29/66583 , H01L29/105 , H01L29/66537 , H01L29/66545
摘要： Integrated circuits with transistors exhibiting improved junction capacitances and various methods of fabricating the same are provided. In one aspect, a method of manufacturing is provided that includes forming a doped region in an active area of a substrate wherein the doped region has a first conductivity type and a first horizontal junction. A first source/drain region of the first conductivity type is formed in the active area with a second horizontal junction. A second source/drain region of the first conductivity type is formed in the active area with a third horizontal junction and a lateral separation from the first source/drain region that defines a channel region. The second and third horizontal junctions are positioned substantially at the first horizontal junction. The portion of the doped region positioned in the channel region is doped with an impurity of a second conductivity type that is opposite to the first conductivity type. Impurity grading across a source/drain-to-body junction is less abrupt, resulting in improved junction capacitance.
摘要翻译：提供具有改善的结电容的晶体管的集成电路及其制造方法。一方面，提供一种制造方法，其包括在衬底的有源区中形成掺杂区域，其中所述掺杂区域具有第一导电类型和第一水平结。第一导电类型的第一源极/漏极区域形成在具有第二水平结的有源区域中。第一导电类型的第二源极/漏极区域在有源区域中形成有第三水平结和与限定沟道区域的第一源极/漏极区域的横向分离。第二和第三水平接头基本位于第一水平接头处。位于沟道区域中的掺杂区域的部分掺杂有与第一导电类型相反的第二导电类型的杂质。通过源极/漏极到体区结的杂质分级不太突然，导致改善的结电容。

5. 发明授权

US06566696B1 Self-aligned VT implant 有权
标题翻译：自对准VT植入
公开(公告)号：US06566696B1
公开(公告)日：2003-05-20
申请号：US09907359
申请日：2001-07-17
申请人： Jon D. Cheek , Mark Michael , Derick J. Wristers , James F. Buller
发明人： Jon D. Cheek , Mark Michael , Derick J. Wristers , James F. Buller
IPC分类号： H01L2980
CPC分类号： H01L29/66583 , H01L29/105 , H01L29/66537 , H01L29/66545
摘要： Integrated circuits with transistors exhibiting improved junction capacitances and various methods of fabricating the same are provided. In one aspect, a method of manufacturing is provided that includes forming a doped region in an active area of a substrate wherein the doped region has a first conductivity type and a first horizontal junction. A first source/drain region of the first conductivity type is formed in the active area with a second horizontal junction. A second source/drain region of the first conductivity type is formed in the active area with a third horizontal junction and a lateral separation from the first source/drain region that defines a channel region. The second and third horizontal junctions are positioned substantially at the first horizontal junction. The portion of the doped region positioned in the channel region is doped with an impurity of a second conductivity type that is opposite to the first conductivity type. Impurity grading across a source/drain-to-body junction is less abrupt, resulting in improved junction capacitance.
摘要翻译：提供了具有改善的结电容的晶体管的集成电路及其制造方法。一方面，提供一种制造方法，其包括在衬底的有源区中形成掺杂区域，其中所述掺杂区域具有第一导电类型和第一水平结。第一导电类型的第一源极/漏极区域形成在具有第二水平结的有源区域中。第一导电类型的第二源极/漏极区域在有源区域中形成有第三水平结和与限定沟道区域的第一源极/漏极区域的横向分离。第二和第三水平接头基本位于第一水平接头处。位于沟道区域中的掺杂区域的部分掺杂有与第一导电类型相反的第二导电类型的杂质。通过源极/漏极到体区结的杂质分级不太突然，导致改善的结电容。

6. 发明授权

US06541321B1 Method of making transistors with gate insulation layers of differing thickness 有权
标题翻译：制造具有不同厚度的栅极绝缘层的晶体管的方法
公开(公告)号：US06541321B1
公开(公告)日：2003-04-01
申请号：US10145519
申请日：2002-05-14
申请人： James F. Buller , Jon D. Cheek
发明人： James F. Buller , Jon D. Cheek
IPC分类号： H01L21336
CPC分类号： H01L21/823462
摘要： In one illustrative embodiment, the method comprises forming a sacrificial layer of material above a substrate comprised of silicon, performing a wet etching process to remove the sacrificial layer, implanting fluorine atoms into selected portions of the substrate after the sacrificial layer is removed, and performing a thermal oxidation process to form a plurality of gate insulation layers above the substrate, the gate insulation layers formed above the fluorine implanted selected portions of the substrate having a thickness that is greater than a thickness of the gate insulation layers formed above portions of the substrate not implanted with fluorine.
摘要翻译：在一个说明性实施例中，该方法包括在由硅构成的衬底之上形成材料的牺牲层，执行湿蚀刻工艺以去除牺牲层，在去除牺牲层之后将氟原子注入到衬底的选定部分中，并执行热氧化工艺以在衬底上形成多个栅极绝缘层，形成在衬底的氟注入的选定部分上方的栅极绝缘层的厚度大于在衬底的上方形成的栅极绝缘层的厚度没有植入氟。

7. 发明授权

US06949436B2 Composite spacer liner for improved transistor performance 有权
标题翻译：用于提高晶体管性能的复合间隔衬
公开(公告)号：US06949436B2
公开(公告)日：2005-09-27
申请号：US10824428
申请日：2004-04-15
申请人： James F. Buller , David Wu , Scott Luning , Derick Wristers , Daniel Kadosh
发明人： James F. Buller , David Wu , Scott Luning , Derick Wristers , Daniel Kadosh
IPC分类号： H01L21/8238 , H01L21/336 , H01L27/092 , H01L29/49 , H01L29/78
CPC分类号： H01L29/4983 , H01L29/6656 , H01L29/6659
摘要： Semiconductor devices with improved transistor performance are fabricated by forming a composite oxide/nitride liner under a gate electrode sidewall spacer. Embodiments include depositing a conformal oxide layer by decoupled plasma deposition, depositing a conformal nitride layer by decoupled plasma deposition, depositing a spacer layer and then etching.
摘要翻译：具有改善的晶体管性能的半导体器件通过在栅电极侧壁间隔物下形成复合氧化物/氮化物衬垫来制造。实施例包括通过解耦等离子体沉积沉积保形氧化物层，通过去耦等离子体沉积沉积共形氮化物层，沉积间隔层然后蚀刻。

8. 发明授权

US08546855B2 Charging protection device 有权
标题翻译：充电保护装置
公开(公告)号：US08546855B2
公开(公告)日：2013-10-01
申请号：US13239865
申请日：2011-09-22
申请人： Jingrong Zhou , David Wu , James F. Buller
发明人： Jingrong Zhou , David Wu , James F. Buller
IPC分类号： H01L29/76 , H01L29/94 , H01L31/062 , H01L31/113 , H01L31/119
CPC分类号： H01L27/0255 , H01L21/84 , H01L27/1203
摘要： Shallow trench isolation silicon-on-insulator (SOI) devices are formed with improved charge protection. Embodiments include an SOI film diode and a P+ substrate junction as a charging protection device. Embodiments also include a conductive path from the SOI transistor drain, through a conductive contact, a metal line, a second conductive contact, an SOI diode, isolated from the transistor, a third conductive contact, a second conductive line, and a fourth conductive contact to a P+-doped substrate contact in the bulk silicon layer of the SOI substrate.
摘要翻译：形成具有改进的电荷保护的浅沟槽隔离绝缘体上硅（SOI）器件。实施例包括作为充电保护装置的SOI膜二极管和P +衬底结。实施例还包括从SOI晶体管漏极，通过导电触点，金属线，第二导电触点，与晶体管隔离的SOI二极管，第三导电触点，第二导线和第四导电触点的导电路径到SOI衬底的体硅层中的P +掺杂的衬底接触。

9. 发明授权

US08076703B2 Semiconductor device and methods for fabricating same 有权
标题翻译：半导体装置及其制造方法
公开(公告)号：US08076703B2
公开(公告)日：2011-12-13
申请号：US12603353
申请日：2009-10-21
申请人： Akif Sultan , James F. Buller , Kaveri Mathur
发明人： Akif Sultan , James F. Buller , Kaveri Mathur
IPC分类号： H01L29/78
CPC分类号： H01L27/1203 , H01L21/823807 , H01L21/823878 , H01L21/84 , H01L29/7843
摘要： A semiconductor device is provided which includes a substrate including an inactive region and an active region, a gate electrode structure having portions overlying the active region, a compressive layer overlying the active region, and a tensile layer overlying the inactive region and located outside the active region. The active region has a lateral edge which defines a width of the active region, and a transverse edge which defines a length of the active region. The gate electrode structure includes: a common portion spaced apart from the active region; a plurality of gate electrode finger portions integral with the common portion, and a plurality of fillet portions integral with the common portion and the gate electrode finger portions. A portion of each gate electrode finger portion overlies the active region. The fillet portions are disposed between the common portion and the gate electrode finger portions, and do not overlie the active region. The compressive layer also overlies the gate electrode finger portions, and the tensile layer is disposed adjacent the transverse edge of the active region.
摘要翻译：提供了一种半导体器件，其包括：基板，其包括非活性区域和有源区域;栅极电极结构，其具有覆盖有源区域的部分;覆盖有源区域的压缩层;以及覆盖非活性区域并位于有源区域外部的拉伸层地区。有源区域具有限定有源区域的宽度的横向边缘和限定有源区域的长度的横向边缘。栅电极结构包括：与有源区间隔开的公共部分; 与公共部分成一体的多个栅极电极指部，以及与公共部分和栅电极指部分成一体的多个圆角部分。每个栅电极指部分的一部分覆盖有源区。圆角部分设置在公共部分和栅极电极指部分之间，并且不覆盖有源区域。压电层也覆盖在栅极电极指部分上，并且拉伸层邻近有源区的横向边缘设置。

10. 发明授权

US07718503B2 SOI device and method for its fabrication 有权
标题翻译： SOI器件及其制造方法
公开(公告)号：US07718503B2
公开(公告)日：2010-05-18
申请号：US11459316
申请日：2006-07-21
申请人： Mario M. Pellela , Donggang D. Wu , James F. Buller
发明人： Mario M. Pellela , Donggang D. Wu , James F. Buller
IPC分类号： H01L21/20
CPC分类号： H01L27/0255 , H01L21/743 , H01L21/84 , H01L27/1203
摘要： A silicon on insulator (SOI) device and methods for fabricating such a device are provided. The device includes an MOS capacitor coupled between voltage busses and formed in a monocrystalline semiconductor layer overlying an insulator layer and a semiconductor substrate. The device includes at least one electrical discharge path for discharging potentially harmful charge build up on the MOS capacitor. The MOS capacitor has a conductive electrode material forming a first plate of the MOS capacitor and an impurity doped region in the monocrystalline silicon layer beneath the conductive electrode material forming a second plate. A first voltage bus is coupled to the first plate of the capacitor and to an electrical discharge path through a diode formed in the semiconductor substrate and a second voltage bus is coupled to the second plate of the capacitor.
摘要翻译：提供一种绝缘体上硅（SOI）器件及其制造方法。该器件包括耦合在电压总线之间并形成在覆盖绝缘体层和半导体衬底的单晶半导体层中的MOS电容器。该器件包括至少一个放电路径，用于在MOS电容器上放出潜在的有害电荷。 MOS电容器具有形成MOS电容器的第一板的导电电极材料和形成第二板的导电电极材料下面的单晶硅层中的杂质掺杂区域。第一电压总线耦合到电容器的第一板和通过形成在半导体衬底中的二极管的放电路径，第二电压总线耦合到电容器的第二板。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式