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1. 发明授权

US5817181A Process for forming deposited film for light-receiving member, light-received member produced by the process deposited film forming apparatus, and method for cleaning deposited film forming apparatus 失效
标题翻译：用于形成光接收部件的沉积膜的方法，由该沉积成膜装置制造的光接收部件以及用于清除沉积膜形成装置的方法
公开(公告)号：US5817181A
公开(公告)日：1998-10-06
申请号：US506347
申请日：1995-07-24
申请人： Ryuji Okamura , Kazuyoshi Akiyama , Hitoshi Murayama , Koji Hitsuishi , Satoshi Kojima , Hirokazu Ohtoshi , Masaaki Yamamura
发明人： Ryuji Okamura , Kazuyoshi Akiyama , Hitoshi Murayama , Koji Hitsuishi , Satoshi Kojima , Hirokazu Ohtoshi , Masaaki Yamamura
IPC分类号： C23C16/00 , C23C16/44 , C23C16/505 , C23C16/509 , G03G5/08 , G03G5/082 , B08B7/00
CPC分类号： C23C16/4405 , C23C16/505 , C23C16/509 , G03G5/08214 , G03G5/08221 , G03G5/08235 , G03G5/08278
摘要： A process for producing a light-receiving member comprising a substrate and provided thereon a blocking layer and a photoconductive layer each comprised of a non-monocrystalline material is disclosed in which the blocking layer is comprised of a non-monocrystalline material comprising silicon atoms as matrix and at least one kind of atoms selected from the group consisting of carbon atoms, oxygen atoms and nitrogen atoms, the process comprising forming the blocking layer and the photoconductive layer by plasma CVD using glow discharge decomposition of a starting material gas caused by applying to the starting material gas an electromagnetic wave with a frequency of from 20 MHz to 450 MHz.
摘要翻译：公开了一种制造光接收部件的方法，该光接收部件包括基板并且在其上设置有由非单晶材料构成的阻挡层和光电导层，其中阻挡层由包含硅原子作为基质的非单晶材料构成和选自碳原子，氧原子和氮原子的至少一种原子，所述方法包括通过等离子体CVD形成阻挡层和光导电层，其中使用由施加到起始原料气体具有频率为20MHz至450MHz的电磁波。

2. 发明授权

US5455138A Process for forming deposited film for light-receiving member, light-receiving member produced by the process, deposited film forming apparatus, and method for cleaning deposited film forming apparatus 失效
标题翻译：用于形成光接收部件的沉积膜的方法，通过该工艺制造的光接收部件，沉积膜形成装置和用于清洁沉积膜形成装置的方法
公开(公告)号：US5455138A
公开(公告)日：1995-10-03
申请号：US138962
申请日：1993-10-21
申请人： Ryuji Okamura , Kazuyoshi Akiyama , Hitoshi Murayama , Koji Hitsuishi , Satoshi Kojima , Hirokazu Ohtoshi , Masaaki Yamamura
发明人： Ryuji Okamura , Kazuyoshi Akiyama , Hitoshi Murayama , Koji Hitsuishi , Satoshi Kojima , Hirokazu Ohtoshi , Masaaki Yamamura
IPC分类号： C23C16/00 , C23C16/44 , C23C16/505 , C23C16/509 , G03G5/08 , G03G5/082
CPC分类号： C23C16/4405 , C23C16/505 , C23C16/509 , G03G5/08214 , G03G5/08221 , G03G5/08235 , G03G5/08278
摘要： A process for producing a light-receiving member comprising a substrate and provided thereon a blocking layer and a photoconductive layer each comprised of a non-monocrystalline material is disclosed in which the blocking layer is comprised of a non-monocrystalline material comprising silicon atoms as matrix and at least one kind of atoms selected from the group consisting of carbon atoms, oxygen atoms and nitrogen atoms, the process comprising forming the blocking layer and the photoconductive layer by plasma CVD using glow discharge decomposition of a starting material gas caused by applying to the starting material gas an electromagnetic wave with a frequency of from 20 MHz to 450 MHz.
摘要翻译：公开了一种制造光接收部件的方法，该光接收部件包括基板并且在其上设置有由非单晶材料构成的阻挡层和光电导层，其中阻挡层由包含硅原子作为基质的非单晶材料构成和选自碳原子，氧原子和氮原子的至少一种原子，所述方法包括通过等离子体CVD形成阻挡层和光导电层，其中使用由施加到起始原料气体具有频率为20MHz至450MHz的电磁波。

3. 发明授权

US5407768A Light-receiving member 失效
标题翻译：光接收元件
公开(公告)号：US5407768A
公开(公告)日：1995-04-18
申请号：US051358
申请日：1993-04-23
申请人： Kazuyoshi Akiyama , Masaaki Yamamura , Ryuji Okamura , Koji Hitsuishi
发明人： Kazuyoshi Akiyama , Masaaki Yamamura , Ryuji Okamura , Koji Hitsuishi
IPC分类号： G03G5/08 , G03G5/082 , G03G5/14
CPC分类号： G03G5/08221 , G03G5/08235 , G03G5/08285
摘要： An electrophotographic light-receiving member comprising a conductive substrate 101 and laminated thereto a non-monocrystalline material photoconductive layer 102 and a surface layer 103. The photoconductive layer 102 is mainly composed of silicon atoms and contains at least carbon atoms and hydrogen atoms. The percentage of carbon atoms having a carbon-carbon bond in the photoconductive layer is controlled to be not more than 60% based on the whole carbon atoms contained therein, and, in an instance in which a blocking layer 104 is provided between the conductive substrate 101 and the photoconductive layer 102, the percentage of carbon atoms having a carbon-carbon bond in the blocking layer is also controlled. This makes it possible to prevent clusters of carbon atoms from being formed in the photoconductive layer or blocking layer. Making the carbon atoms have a uniform distribution in the silicon film enables improvement in electrophotographic performances such as charge performance, sensitivity, residual potential, ghost-free properties, etc.
摘要翻译：一种电子照相光接收元件，包括导电基底101并且层压在非单晶材料光电导层102和表面层103上。光电导层102主要由硅原子组成并且至少含有碳原子和氢原子。光电导层中具有碳 - 碳键的碳原子百分数被控制在不超过其含有的全部碳原子的60％以下，并且在导电性基材中设置有阻挡层104的情况下 101和光电导层102，也控制了在阻挡层中具有碳 - 碳键的碳原子的百分比。这使得可以防止在光电导层或阻挡层中形成碳原子簇。使碳原子在硅膜中具有均匀分布，可以改善电荷性能，如充电性能，灵敏度，残留电位，无重影性能等。

4. 发明授权

US07033721B2 Method for producing electrophotographic photosensitive member, electrophotographic photosensitive member and electrophotographic apparatus using the same 失效
标题翻译：电子照相感光构件的制造方法，电子照相感光构件和使用其的电子照相设备
公开(公告)号：US07033721B2
公开(公告)日：2006-04-25
申请号：US10630727
申请日：2003-07-31
申请人： Junichiro Hashizume , Toshiyuki Ehara , Hideaki Matsuoka , Ryuji Okamura , Koji Hitsuishi , Satoshi Kojima , Hironori Ohwaki , Kazuto Hosoi
发明人： Junichiro Hashizume , Toshiyuki Ehara , Hideaki Matsuoka , Ryuji Okamura , Koji Hitsuishi , Satoshi Kojima , Hironori Ohwaki , Kazuto Hosoi
IPC分类号： G03G5/082 , C23C16/22
CPC分类号： G03G5/08 , G03G5/08214 , G03G5/08221 , G03G5/08235 , G03G5/14704
摘要： The invention provides a method for producing an electrophotographic photosensitive member such that even if abnormal grown portions called spherical protrusions 203 exist on the surface of the photosensitive member, they do not appear on images, thus making it possible to considerably alleviate image defects. The method for producing the electrophotographic photosensitive member including layers each constituted by a non-single crystal material includes the steps of placing a substrate having a conductive surface in a film forming apparatus capable of being airtight-sealed under vacuum having evacuating means and raw material gas supplying means, and decomposing at least a raw material gas by a high frequency power to form a first layer constituted by at least a non-single crystal material on the substrate as a first step; exposing the substrate with the first layer formed thereon to a gas containing oxygen and water vapor as a second step; and decomposing at least a raw material gas by a high frequency power in the film forming apparatus to form on the first layer a second layer including an upper blocking layer constituted by a non-single crystal material as a third step.
摘要翻译：本发明提供了一种用于制造电子照相感光构件的方法，即使在感光构件的表面上存在称为球形突起203的异常生长部分，它们也不会出现在图像上，从而可以显着地减轻图像缺陷。用于制造包括由非单晶材料构成的电子照相感光构件的方法包括以下步骤：将具有导电表面的基底放置在能够在具有抽真空装置和原料气体的真空下气密密封的成膜装置中供给装置，并且通过高频功率分解至少原料气体，以形成由至少非单晶材料构成的第一层作为第一步骤; 作为第二步，将其上形成有第一层的基板暴露于含有氧和水蒸汽的气体; 并且在成膜装置中通过高频功率分解至少一种原料气体，以在第一层上形成包括由非单晶材料构成的上阻挡层的第二层作为第三步骤。

5. 发明授权

US07033717B2 Process for producing electrophotographic photosensitive member, and electrophotographic photosensitive member and electrophotographic apparatus making use of the same 失效
标题翻译：用于制造电子照相感光构件的方法和使用其的电子照相感光构件和电子照相设备
公开(公告)号：US07033717B2
公开(公告)日：2006-04-25
申请号：US10630772
申请日：2003-07-31
申请人： Satoshi Kojima , Toshiyuki Ehara , Hideaki Matsuoka , Junichiro Hashizume , Ryuji Okamura , Koji Hitsuishi , Hironori Ohwaki , Kazuto Hosoi
发明人： Satoshi Kojima , Toshiyuki Ehara , Hideaki Matsuoka , Junichiro Hashizume , Ryuji Okamura , Koji Hitsuishi , Hironori Ohwaki , Kazuto Hosoi
IPC分类号： G03G15/04
CPC分类号： G03G5/08221 , G03G5/08278
摘要： An electrophotographic photosensitive member production process is provided having the steps of placing a cylindrical substrate having a conductive surface in a first film-forming chamber, and decomposing a source gas with high-frequency power to deposit on the cylindrical substrate a first layer formed of a non-single-crystal material, taking out of the first film-forming chamber the cylindrical substrate with the first layer deposited thereon, and placing the cylindrical substrate with the first layer deposited thereon in a second film-forming chamber, and decomposing a source gas with a high-frequency power to deposit on the first layer a second layer having an upper-part blocking layer formed of a non-single-crystal material. Even where abnormal growth portions called spherical protuberances are present on the photosensitive member surface, they can be made not to appear on images, and image defects can vastly be remedied.
摘要翻译：提供一种电子照相感光构件制造方法，其具有以下步骤：将具有导电表面的圆柱形基材放置在第一成膜室中，并且以高频电力分解源气体以沉积在圆柱形基板上，形成第一层非单晶材料，从第一成膜室取出其上沉积有第一层的圆柱形基板，并将其上沉积有第一层的圆柱形基板放置在第二成膜室中，并将源气体具有高频功率以在第一层上沉积具有由非单晶材料形成的上部阻挡层的第二层。即使在感光构件表面上存在称为球形隆起物的异常生长部分，也可以使其不会出现在图像上，并且可以大大地补救图像缺陷。

6. 发明申请

US20050153223A1 Process for producing electrophotographic photosensitive member, and electrophotographic photosensitive member and electrophotographic apparatus making use of the same 失效
标题翻译：用于制造电子照相感光构件的方法和使用其的电子照相感光构件和电子照相设备
公开(公告)号：US20050153223A1
公开(公告)日：2005-07-14
申请号：US10630772
申请日：2003-07-31
申请人： Satoshi Kojima , Toshiyuki Ehara , Hideaki Matsuoka , Junichiro Hashizume , Ryuji Okamura , Koji Hitsuishi , Hironori Ohwaki , Kazuto Hosoi
发明人： Satoshi Kojima , Toshiyuki Ehara , Hideaki Matsuoka , Junichiro Hashizume , Ryuji Okamura , Koji Hitsuishi , Hironori Ohwaki , Kazuto Hosoi
IPC分类号： G03G5/082 , G03G15/04
CPC分类号： G03G5/08221 , G03G5/08278
摘要： An electrophotographic photosensitive member production process is provided having the steps of placing a cylindrical substrate having a conductive surface in a first film-forming chamber, and decomposing a source gas with high-frequency power to deposit on the cylindrical substrate a first layer formed of a non-single-crystal material, taking out of the first film-forming chamber the cylindrical substrate with the first layer deposited thereon, and placing the cylindrical substrate with the first layer deposited thereon in a second film-forming chamber, and decomposing a source gas with a high-frequency power to deposit on the first layer a second layer having an upper-part blocking layer formed of a non-single-crystal material. Even where abnormal growth portions called spherical protuberances are present on the photosensitive member surface, they can be made not to appear on images, and image defects can vastly be remedied.
摘要翻译：提供一种电子照相感光构件制造方法，其具有以下步骤：将具有导电表面的圆柱形基材放置在第一成膜室中，并且以高频电力分解源气体以沉积在圆柱形基板上，形成第一层非单晶材料，从第一成膜室取出其上沉积有第一层的圆柱形基板，并将其上沉积有第一层的圆柱形基板放置在第二成膜室中，并将源气体具有高频功率以在第一层上沉积具有由非单晶材料形成的上部阻挡层的第二层。即使在感光构件表面上存在称为球形隆起物的异常生长部分，也可以使其不会出现在图像上，并且可以大大地补救图像缺陷。

7. 发明授权

US6090513A Eclectrophotographic light-receiving member and process for its production 失效
标题翻译：光电感光元件及其制作方法
公开(公告)号：US6090513A
公开(公告)日：2000-07-18
申请号：US999839
申请日：1997-03-27
申请人： Hiroaki Niino , Koji Hitsuishi , Satoshi Kojima
发明人： Hiroaki Niino , Koji Hitsuishi , Satoshi Kojima
IPC分类号： G03G5/082 , G03G5/085
CPC分类号： G03G5/08242 , G03G5/08235
摘要： An electrophotographic light-receiving member comprising a conductive support and a light-receiving layer having a photoconductive layer showing a photoconductivity, formed on the conductive support and formed of a non-monocrystalline material mainly composed of a silicon atom and containing at least one of a hydrogen atom and a halogen atom, wherein said photoconductive layer contains from 10 atomic % to 30 atomic % of hydrogen, the characteristic energy of exponential tail obtained from light absorption spectra at light-incident portions at least of the photoconductive layer is from 50 meV to 60 meV, and the density of states of localization in the photoconductive layer is from 1.times.10.sup.14 cm.sup.-3 to 1.times.10.sup.16 cm.sup.-3. Since the in-gap levels of the photoconductive layer has been controlled, the light-receiving member can be improved in environmental stability and exposure memory at the same time and have superior potential characteristics and image characteristics.
摘要翻译：一种电子摄影光接收元件，包括导电支撑体和具有光电导率的光电导层的光接收层，该光电导层形成在导电支撑体上并由主要由硅原子组成的非单晶材料形成，并且包含至少一个氢原子和卤素原子，其中所述光电导层含有10原子％至30原子％的氢，由至少光电导层的光入射部分处的光吸收光谱获得的指数尾部的特征能量为50meV至 60meV，光电导层中的定位状态密度为1×10 14 cm -3至1×10 16 cm -3。由于光电导层的间隙间电平已被控制，所以可以同时改善光接收元件的环境稳定性和曝光存储器，并具有优异的电位特性和图像特性。

8. 发明授权

US06453913B2 Method of cleaning a film deposition apparatus, method of dry etching a film deposition apparatus, and an article production method including a process based on the cleaning or dry etching method 失效
标题翻译：清洗成膜装置的方法，成膜装置的干法蚀刻方法以及包括基于清洗或干法蚀刻法的工序的制品制造方法
公开(公告)号：US06453913B2
公开(公告)日：2002-09-24
申请号：US09838236
申请日：2001-04-20
申请人： Hiroyuki Katagiri , Yoshio Seqi , Hideaki Matsuoka , Koji Hitsuishi , Tetsuya Karaki
发明人： Hiroyuki Katagiri , Yoshio Seqi , Hideaki Matsuoka , Koji Hitsuishi , Tetsuya Karaki
IPC分类号： B08B600
CPC分类号： C23C16/4405 , Y10S134/902 , Y10S438/905
摘要： A method for performing a cleaning process uses a cleaning gas and high-frequency power upon a film deposition apparatus for depositing a film on a substrate placed in a reactor chamber which can be evacuated to a low pressure. Supplying of high-frequency power is temporarily stopped in the middle of the cleaning process, and the cleaning process is restarted by again supplying high-frequency power. This method is capable of effectively removing by-products from the inside of a reactor chamber and makes it possible to form a high-quality deposition film, in particular, a high-quality electrophotographic photosensitive drum.
摘要翻译：用于进行清洁处理的方法使用清洗气体和高频电力进行成膜装置，用于将膜放置在可以被抽空的低压反应室中的基板上。高清电源的供给在清洗处理中暂时停止，再次通过再次供给高频电源重新开始清洗处理。该方法能够有效地从反应器室的内部除去副产物，并且可以形成高质量的沉积膜，特别是形成高质量的电子照相感光鼓。

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