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    • 1. 发明授权
    • RF plasma source for material processing
    • RF等离子体源进行材料加工
    • US06239553B1
    • 2001-05-29
    • US09296934
    • 1999-04-22
    • Mike BarnesTetsuya IshikawaKaveh NiaziTsutomu Tanaka
    • Mike BarnesTetsuya IshikawaKaveh NiaziTsutomu Tanaka
    • H01J724
    • H01J37/321H05H1/46
    • The present invention provides a plasma source that maintains a low coil voltage in the vicinity of the plasma tube, thereby reducing the capacitive coupling between the coil and the plasma and significantly reducing the erosion from the internal surfaces of the plasma tube. The plasma source generally comprises a coil having a first coil segment and a second coil segment, an RF power source connected to the coil and an enclosure disposed between the first coil segment and the second coil segment. The invention also provides a method for generating a plasma, comprising: disposing an enclosure between a first coil segment and a second coil segment; introducing a gas into the enclosure; and supplying an RF power to the coil segments to excite the gas into a plasma state. The invention provides a variety of coil operations, including symmetrical coil configuration, asymmetrical coil configuration with the matching networks adjusted to provide a low voltage near the plasma chamber, self-resonant configuration, grounded coil center configuration having coil segments driven in parallel and physically grounded near the plasma chamber, and pairs configurations having a plurality of coil segment pairs driven in series or parallel.
    • 本发明提供了一种在等离子体管附近保持低线圈电压的等离子体源,从而减小了线圈与等离子体之间的电容耦合,并显着减少了等离子体管内表面的侵蚀。 等离子体源通常包括具有第一线圈段和第二线圈段的线圈,连接到线圈的RF电源和设置在第一线圈段和第二线圈段之间的外壳。 本发明还提供了一种用于产生等离子体的方法,包括:在第一线圈段和第二线圈段之间设置外壳; 将气体引入外壳; 并且向线圈段提供RF功率以将气体激发成等离子体状态。 本发明提供了各种线圈操作,包括对称线圈配置,不对称线圈配置,匹配网络被调整以在等离子体室附近提供低电压,自谐振配置,具有线圈段并联驱动并接地的线圈中心配置 并且具有串联或并联驱动的多个线圈段对的配置配置。
    • 4. 发明申请
    • Non-Transitory Computer Readable Medium Storing Instructions for Update Management, Update Management Device, and Image Processing System
    • 非瞬时计算机可读介质存储更新管理指令,更新管理设备和图像处理系统
    • US20140245283A1
    • 2014-08-28
    • US14191948
    • 2014-02-27
    • Tsutomu Tanaka
    • Tsutomu Tanaka
    • G06F9/445
    • G06F8/65
    • A non-transitory computer readable medium stores an update management program for causing an update on control program, which is installed on each of image processing devices. The update management program, when executed by a processor, causes the computer to: acquire an update program and update function information regarding functions to be updated by the update program from a firmware distribution server; acquire device function information regarding functions of each image processing device from the each image processing device; transmit the update program to the each image processing device; determine an update sequence of timing for causing the each image processing device to update its control program, based on the acquired update function information and the acquired device function information; and cause the each image processing device to update its control program by executing the transmitted update program in accordance with the determined update sequence of timing.
    • 非暂时性计算机可读介质存储用于对安装在每个图像处理装置上的控制程序进行更新的更新管理程序。 更新管理程序在由处理器执行时使计算机从固件分发服务器获取更新程序并更新关于由更新程序更新的功能的功能信息; 从每个图像处理装置获取关于每个图像处理装置的功能的装置功能信息; 将更新程序发送到每个图像处理装置; 基于所获取的更新功能信息和所获取的设备功能信息,确定使每个图像处理设备更新其控制程序的定时更新顺序; 并且通过根据确定的定时更新顺序执行所发送的更新程序,使每个图像处理装置更新其控制程序。
    • 7. 发明授权
    • Connector
    • 连接器
    • US08568159B2
    • 2013-10-29
    • US13405440
    • 2012-02-27
    • Masahiro NodaTsutomu Tanaka
    • Masahiro NodaTsutomu Tanaka
    • H01R13/58
    • H01R13/5812H01R13/562
    • Areas at outer edge sides of a draw-out area for wires (13) out of a rear end surface (10R) of a housing (10) serve as operation surfaces (14) used to push the housing (10) forward. Areas of the outer periphery of a rear end portion of the housing (10) corresponding to and before the operation surfaces (14) are recessed to form outward forming grooves (15). The housing (10) is formed with bores (18) by further recessing parts of groove bottom surfaces (17) of the outward facing grooves (15). Inward facing projections (26) engageable with the outward facing grooves (15) are formed on the inner surface of a wire cover (20). Each locking projection (26) is formed with restricting projections (27) engageable with the bores (18).
    • 在壳体(10)的后端面(10R)之外的用于电线(13)的拉出区域的外边缘侧的区域用作用于向前推动壳体(10)的操作表面(14)。 对应于操作表面(14)之前和之前的壳体(10)的后端部分的外周的区域被凹入以形成向外的形成槽(15)。 壳体(10)通过进一步凹入面向外的凹槽(15)的槽底表面(17)的部分而形成有孔(18)。 在电线罩(20)的内表面上形成有与面向外的槽(15)接合的向内的突起(26)。 每个锁定突起(26)形成有可与孔(18)接合的限制突起(27)。