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    • 1. 发明申请
    • FET RADIATION MONITOR
    • FET辐射监测器
    • US20110220805A1
    • 2011-09-15
    • US12719962
    • 2010-03-09
    • Michael GordonSteven KoesterKenneth RodbellJeng-Bang Yau
    • Michael GordonSteven KoesterKenneth RodbellJeng-Bang Yau
    • G01T1/24H01L31/08
    • H01L31/119
    • A semiconductor device includes a semiconductor substrate; a buried insulator layer disposed on the semiconductor substrate, the buried insulator layer configured to retain an amount of charge in a plurality of charge traps in response to a radiation exposure by the semiconductor device; a semiconductor layer disposed on the buried insulating layer; a second insulator layer disposed on the semiconductor layer; a gate conducting layer disposed on the second insulator layer; and one or more side contacts electrically connected to the semiconductor layer. A method for radiation monitoring, the method includes applying a backgate voltage to a radiation monitor, the radiation monitor comprising a field effect transistor (FET); exposing the radiation monitor to radiation; determining a change in a threshold voltage of the radiation monitor; and determining an amount of radiation exposure based on the change in threshold voltage.
    • 半导体器件包括半导体衬底; 设置在所述半导体衬底上的掩埋绝缘体层,所述掩埋绝缘体层被配置为响应于所述半导体器件的辐射暴露而将多个电荷量保持在多个电荷阱中; 设置在所述掩埋绝缘层上的半导体层; 设置在所述半导体层上的第二绝缘体层; 设置在所述第二绝缘体层上的栅极导电层; 以及与半导体层电连接的一个或多个侧触点。 一种用于辐射监测的方法,所述方法包括将背栅电压施加到辐射监测器,所述辐射监测器包括场效应晶体管(FET); 将辐射监测仪暴露于辐射; 确定辐射监测器的阈值电压的变化; 以及基于阈值电压的变化确定辐射暴露量。
    • 2. 发明授权
    • FET radiation monitor
    • FET辐射监测器
    • US08080805B2
    • 2011-12-20
    • US12719962
    • 2010-03-09
    • Michael GordonSteven KoesterKenneth RodbellJeng-Bang Yau
    • Michael GordonSteven KoesterKenneth RodbellJeng-Bang Yau
    • H01L27/146
    • H01L31/119
    • A semiconductor device includes a semiconductor substrate; a buried insulator layer disposed on the semiconductor substrate, the buried insulator layer configured to retain an amount of charge in a plurality of charge traps in response to a radiation exposure by the semiconductor device; a semiconductor layer disposed on the buried insulating layer; a second insulator layer disposed on the semiconductor layer; a gate conducting layer disposed on the second insulator layer; and one or more side contacts electrically connected to the semiconductor layer. A method for radiation monitoring, the method includes applying a backgate voltage to a radiation monitor, the radiation monitor comprising a field effect transistor (FET); exposing the radiation monitor to radiation; determining a change in a threshold voltage of the radiation monitor; and determining an amount of radiation exposure based on the change in threshold voltage.
    • 半导体器件包括半导体衬底; 设置在所述半导体衬底上的掩埋绝缘体层,所述掩埋绝缘体层被配置为响应于所述半导体器件的辐射暴露而将多个电荷量保持在多个电荷阱中; 设置在所述掩埋绝缘层上的半导体层; 设置在所述半导体层上的第二绝缘体层; 设置在所述第二绝缘体层上的栅极导电层; 以及与半导体层电连接的一个或多个侧触点。 一种用于辐射监测的方法,所述方法包括将背栅电压施加到辐射监测器,所述辐射监测器包括场效应晶体管(FET); 将辐射监测仪暴露于辐射; 确定辐射监测器的阈值电压的变化; 以及基于阈值电压的变化确定辐射暴露量。