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    • 1. 发明申请
    • FET RADIATION MONITOR
    • FET辐射监测器
    • US20110220805A1
    • 2011-09-15
    • US12719962
    • 2010-03-09
    • Michael GordonSteven KoesterKenneth RodbellJeng-Bang Yau
    • Michael GordonSteven KoesterKenneth RodbellJeng-Bang Yau
    • G01T1/24H01L31/08
    • H01L31/119
    • A semiconductor device includes a semiconductor substrate; a buried insulator layer disposed on the semiconductor substrate, the buried insulator layer configured to retain an amount of charge in a plurality of charge traps in response to a radiation exposure by the semiconductor device; a semiconductor layer disposed on the buried insulating layer; a second insulator layer disposed on the semiconductor layer; a gate conducting layer disposed on the second insulator layer; and one or more side contacts electrically connected to the semiconductor layer. A method for radiation monitoring, the method includes applying a backgate voltage to a radiation monitor, the radiation monitor comprising a field effect transistor (FET); exposing the radiation monitor to radiation; determining a change in a threshold voltage of the radiation monitor; and determining an amount of radiation exposure based on the change in threshold voltage.
    • 半导体器件包括半导体衬底; 设置在所述半导体衬底上的掩埋绝缘体层,所述掩埋绝缘体层被配置为响应于所述半导体器件的辐射暴露而将多个电荷量保持在多个电荷阱中; 设置在所述掩埋绝缘层上的半导体层; 设置在所述半导体层上的第二绝缘体层; 设置在所述第二绝缘体层上的栅极导电层; 以及与半导体层电连接的一个或多个侧触点。 一种用于辐射监测的方法,所述方法包括将背栅电压施加到辐射监测器,所述辐射监测器包括场效应晶体管(FET); 将辐射监测仪暴露于辐射; 确定辐射监测器的阈值电压的变化; 以及基于阈值电压的变化确定辐射暴露量。
    • 2. 发明授权
    • FET radiation monitor
    • FET辐射监测器
    • US08080805B2
    • 2011-12-20
    • US12719962
    • 2010-03-09
    • Michael GordonSteven KoesterKenneth RodbellJeng-Bang Yau
    • Michael GordonSteven KoesterKenneth RodbellJeng-Bang Yau
    • H01L27/146
    • H01L31/119
    • A semiconductor device includes a semiconductor substrate; a buried insulator layer disposed on the semiconductor substrate, the buried insulator layer configured to retain an amount of charge in a plurality of charge traps in response to a radiation exposure by the semiconductor device; a semiconductor layer disposed on the buried insulating layer; a second insulator layer disposed on the semiconductor layer; a gate conducting layer disposed on the second insulator layer; and one or more side contacts electrically connected to the semiconductor layer. A method for radiation monitoring, the method includes applying a backgate voltage to a radiation monitor, the radiation monitor comprising a field effect transistor (FET); exposing the radiation monitor to radiation; determining a change in a threshold voltage of the radiation monitor; and determining an amount of radiation exposure based on the change in threshold voltage.
    • 半导体器件包括半导体衬底; 设置在所述半导体衬底上的掩埋绝缘体层,所述掩埋绝缘体层被配置为响应于所述半导体器件的辐射暴露而将多个电荷量保持在多个电荷阱中; 设置在所述掩埋绝缘层上的半导体层; 设置在所述半导体层上的第二绝缘体层; 设置在所述第二绝缘体层上的栅极导电层; 以及与半导体层电连接的一个或多个侧触点。 一种用于辐射监测的方法,所述方法包括将背栅电压施加到辐射监测器,所述辐射监测器包括场效应晶体管(FET); 将辐射监测仪暴露于辐射; 确定辐射监测器的阈值电压的变化; 以及基于阈值电压的变化确定辐射暴露量。
    • 5. 发明申请
    • METAL-FREE INTEGRATED CIRCUITS COMPRISING GRAPHENE AND CARBON NANOTUBES
    • 包含石墨和碳纳米管的无金属集成电路
    • US20120326129A1
    • 2012-12-27
    • US13604254
    • 2012-09-05
    • Yu-Ming LinJeng-Bang Yau
    • Yu-Ming LinJeng-Bang Yau
    • H01L29/78
    • H01L29/1606B82Y10/00H01L27/124H01L29/0665H01L29/45H01L29/4908H01L29/66742H01L29/7781H01L29/78618H01L29/78684
    • An integrated circuit includes a graphene layer, the graphene layer comprising a region of undoped graphene, the undoped graphene comprising a channel of a transistor, and a region of doped graphene, the doped graphene comprising a contact of the transistor; and a gate of the transistor, the gate comprising a carbon nanotube film. A method of fabricating an integrated circuit comprising graphene and carbon nanotubes, includes forming a graphene layer; doping a portion of the graphene layer, resulting in doped graphene and undoped graphene; forming a carbon nanotube film; and etching the carbon nanotube film to form a gate of a transistor, wherein the transistor further comprises a channel comprising the undoped graphene and a contact comprising the doped graphene. A transistor includes a gate, the gate comprising a carbon nanotube film; a channel, the channel comprising undoped graphene; and a contact, the contact comprising doped graphene.
    • 集成电路包括石墨烯层,所述石墨烯层包括未掺杂的石墨烯的区域,所述未掺杂的石墨烯包括晶体管的沟道和掺杂的石墨烯的区域,所述掺杂的石墨烯包括所述晶体管的接触; 和晶体管的栅极,所述栅极包括碳纳米管膜。 一种制造包括石墨烯和碳纳米管的集成电路的方法,包括形成石墨烯层; 掺杂一部分石墨烯层,导致掺杂的石墨烯和未掺杂的石墨烯; 形成碳纳米管膜; 以及蚀刻所述碳纳米管膜以形成晶体管的栅极,其中所述晶体管还包括包含所述未掺杂的石墨烯的沟道和包含所述掺杂石墨烯的接触。 晶体管包括栅极,栅极包括碳纳米管膜; 通道,通道包括未掺杂的石墨烯; 和触点,所述触点包括掺杂的石墨烯。
    • 10. 发明授权
    • Metal-free integrated circuits comprising graphene and carbon nanotubes
    • 包含石墨烯和碳纳米管的无金属集成电路
    • US08803131B2
    • 2014-08-12
    • US13604254
    • 2012-09-05
    • Yu-Ming LinJeng-Bang Yau
    • Yu-Ming LinJeng-Bang Yau
    • H01L29/78
    • H01L29/1606B82Y10/00H01L27/124H01L29/0665H01L29/45H01L29/4908H01L29/66742H01L29/7781H01L29/78618H01L29/78684
    • An integrated circuit includes a graphene layer, the graphene layer comprising a region of undoped graphene, the undoped graphene comprising a channel of a transistor, and a region of doped graphene, the doped graphene comprising a contact of the transistor; and a gate of the transistor, the gate comprising a carbon nanotube film. A method of fabricating an integrated circuit comprising graphene and carbon nanotubes, includes forming a graphene layer; doping a portion of the graphene layer, resulting in doped graphene and undoped graphene; forming a carbon nanotube film; and etching the carbon nanotube film to form a gate of a transistor, wherein the transistor further comprises a channel comprising the undoped graphene and a contact comprising the doped graphene. A transistor includes a gate, the gate comprising a carbon nanotube film; a channel, the channel comprising undoped graphene; and a contact, the contact comprising doped graphene.
    • 集成电路包括石墨烯层,所述石墨烯层包括未掺杂的石墨烯的区域,所述未掺杂的石墨烯包括晶体管的沟道和掺杂的石墨烯的区域,所述掺杂的石墨烯包括所述晶体管的接触; 和晶体管的栅极,所述栅极包括碳纳米管膜。 一种制造包括石墨烯和碳纳米管的集成电路的方法,包括形成石墨烯层; 掺杂一部分石墨烯层,导致掺杂的石墨烯和未掺杂的石墨烯; 形成碳纳米管膜; 以及蚀刻所述碳纳米管膜以形成晶体管的栅极,其中所述晶体管还包括包含所述未掺杂的石墨烯的沟道和包含所述掺杂石墨烯的接触。 晶体管包括栅极,栅极包括碳纳米管膜; 通道,通道包括未掺杂的石墨烯; 和触点,所述触点包括掺杂的石墨烯。