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    • 5. 发明申请
    • METAL-FREE INTEGRATED CIRCUITS COMPRISING GRAPHENE AND CARBON NANOTUBES
    • 包含石墨和碳纳米管的无金属集成电路
    • US20120326129A1
    • 2012-12-27
    • US13604254
    • 2012-09-05
    • Yu-Ming LinJeng-Bang Yau
    • Yu-Ming LinJeng-Bang Yau
    • H01L29/78
    • H01L29/1606B82Y10/00H01L27/124H01L29/0665H01L29/45H01L29/4908H01L29/66742H01L29/7781H01L29/78618H01L29/78684
    • An integrated circuit includes a graphene layer, the graphene layer comprising a region of undoped graphene, the undoped graphene comprising a channel of a transistor, and a region of doped graphene, the doped graphene comprising a contact of the transistor; and a gate of the transistor, the gate comprising a carbon nanotube film. A method of fabricating an integrated circuit comprising graphene and carbon nanotubes, includes forming a graphene layer; doping a portion of the graphene layer, resulting in doped graphene and undoped graphene; forming a carbon nanotube film; and etching the carbon nanotube film to form a gate of a transistor, wherein the transistor further comprises a channel comprising the undoped graphene and a contact comprising the doped graphene. A transistor includes a gate, the gate comprising a carbon nanotube film; a channel, the channel comprising undoped graphene; and a contact, the contact comprising doped graphene.
    • 集成电路包括石墨烯层,所述石墨烯层包括未掺杂的石墨烯的区域,所述未掺杂的石墨烯包括晶体管的沟道和掺杂的石墨烯的区域,所述掺杂的石墨烯包括所述晶体管的接触; 和晶体管的栅极,所述栅极包括碳纳米管膜。 一种制造包括石墨烯和碳纳米管的集成电路的方法,包括形成石墨烯层; 掺杂一部分石墨烯层,导致掺杂的石墨烯和未掺杂的石墨烯; 形成碳纳米管膜; 以及蚀刻所述碳纳米管膜以形成晶体管的栅极,其中所述晶体管还包括包含所述未掺杂的石墨烯的沟道和包含所述掺杂石墨烯的接触。 晶体管包括栅极,栅极包括碳纳米管膜; 通道,通道包括未掺杂的石墨烯; 和触点,所述触点包括掺杂的石墨烯。
    • 9. 发明授权
    • Metal-free integrated circuits comprising graphene and carbon nanotubes
    • 包含石墨烯和碳纳米管的无金属集成电路
    • US08803131B2
    • 2014-08-12
    • US13604254
    • 2012-09-05
    • Yu-Ming LinJeng-Bang Yau
    • Yu-Ming LinJeng-Bang Yau
    • H01L29/78
    • H01L29/1606B82Y10/00H01L27/124H01L29/0665H01L29/45H01L29/4908H01L29/66742H01L29/7781H01L29/78618H01L29/78684
    • An integrated circuit includes a graphene layer, the graphene layer comprising a region of undoped graphene, the undoped graphene comprising a channel of a transistor, and a region of doped graphene, the doped graphene comprising a contact of the transistor; and a gate of the transistor, the gate comprising a carbon nanotube film. A method of fabricating an integrated circuit comprising graphene and carbon nanotubes, includes forming a graphene layer; doping a portion of the graphene layer, resulting in doped graphene and undoped graphene; forming a carbon nanotube film; and etching the carbon nanotube film to form a gate of a transistor, wherein the transistor further comprises a channel comprising the undoped graphene and a contact comprising the doped graphene. A transistor includes a gate, the gate comprising a carbon nanotube film; a channel, the channel comprising undoped graphene; and a contact, the contact comprising doped graphene.
    • 集成电路包括石墨烯层,所述石墨烯层包括未掺杂的石墨烯的区域,所述未掺杂的石墨烯包括晶体管的沟道和掺杂的石墨烯的区域,所述掺杂的石墨烯包括所述晶体管的接触; 和晶体管的栅极,所述栅极包括碳纳米管膜。 一种制造包括石墨烯和碳纳米管的集成电路的方法,包括形成石墨烯层; 掺杂一部分石墨烯层,导致掺杂的石墨烯和未掺杂的石墨烯; 形成碳纳米管膜; 以及蚀刻所述碳纳米管膜以形成晶体管的栅极,其中所述晶体管还包括包含所述未掺杂的石墨烯的沟道和包含所述掺杂石墨烯的接触。 晶体管包括栅极,栅极包括碳纳米管膜; 通道,通道包括未掺杂的石墨烯; 和触点,所述触点包括掺杂的石墨烯。