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    • 6. 发明授权
    • Thin film forming method
    • 薄膜成型方法
    • US5540820A
    • 1996-07-30
    • US76691
    • 1993-06-15
    • Masatomo TerakadoShinji SasakiHiroshi Saito
    • Masatomo TerakadoShinji SasakiHiroshi Saito
    • C23C14/14C23C14/34C23C14/35H01L21/3205H01L21/768
    • C23C14/14C23C14/345C23C14/35H01L21/76838
    • A method of forming a thin film by a bias sputtering method using a first target made of a refractory metal mainly composed of W and a second target made of a conductive material mainly composed of a low-melting-point metal which comprises, upon sputtering the first target made of the refractory metal mainly composed of W, decreasing high energy particles incident to a substrate in a state where a desired bias voltage is applied to a substrate thereby forming a thin film of the refractory metal mainly composed of W with low resistivity and less stress and, subsequently, upon sputtering the second target made of the conductive material mainly composed of the low-melting-point metal, accelerating the growth of crystals in a state where a desired voltage is applied to a substrate thereby forming in lamination a thin film of the conductive material mainly composed of the low-melting-point metal with a large crystal grain size on the thin film made of the refractory metal mainly composed of W.
    • 通过使用由主要由W构成的难熔金属制成的第一靶和由主要由低熔点金属构成的导电性材料构成的第二靶的偏压法形成薄膜的方法,其特征在于, 由主要由W组成的难熔金属制成的第一靶,在将基板上施加期望的偏置电压的状态下降低入射到基板的高能粒子,从而形成主要由低电阻率的W构成的难熔金属的薄膜, 并且随后在溅射由主要由低熔点金属构成的导电材料制成的第二靶时,在所需电压施加到基板上的状态下加速晶体的生长,从而形成薄层 主要由难熔金属制成的薄膜上的主要由低熔点金属构成的导电材料薄膜主要由 W.
    • 7. 发明授权
    • Organic electroluminescence display device
    • 有机电致发光显示装置
    • US07893607B2
    • 2011-02-22
    • US11178421
    • 2005-07-12
    • Masatomo TerakadoShinichi KatoEiji Matsuzaki
    • Masatomo TerakadoShinichi KatoEiji Matsuzaki
    • H01J1/62H01J63/04
    • H01L27/322H01L27/3295H01L51/5284
    • On a main face of a substrate, organic EL light emitting layers are formed by stacking first electrodes for respective pixels, an organic EL layer having a white light emitting function formed above the first electrodes to cover the first electrodes in common, and a second electrode formed such that the second electrode covers the organic EL layer in common in this order, and light emitted from the organic EL layer is irradiated to the second electrode side. Above the second electrode, a color converting filter, which converts the white light emitted from the organic EL light emitting layer to a given color and is applied by coating using a wet process, is formed for every pixel, and a protective layer, which prevents the deterioration of the light emitting layer attributed to a coating material of the color filter, is provided between the second electrode and the color converting filter.
    • 在基板的主面上,通过层叠各像素的第一电极形成有机EL发光层,形成有在第一电极上方形成的白色发光功能的有机EL层以共同覆盖第一电极,第二电极 形成为使得第二电极依次覆盖有机EL层,并且从有机EL层发射的光照射到第二电极侧。 在第二电极上方,形成一个颜色转换滤光器,其将从有机EL发光层发射的白光转换成给定的颜色,并且通过使用湿法进行涂布而被施加,并且形成防止 归因于滤色器的涂料的发光层的劣化设置在第二电极和颜色转换滤光器之间。
    • 9. 发明申请
    • Organic electroluminescence display device
    • 有机电致发光显示装置
    • US20060012288A1
    • 2006-01-19
    • US11178421
    • 2005-07-12
    • Masatomo TerakadoShinichi KatoEiji Matsuzaki
    • Masatomo TerakadoShinichi KatoEiji Matsuzaki
    • H05B33/24H05B33/22
    • H01L27/322H01L27/3295H01L51/5284
    • On a main face of a substrate, organic EL light emitting layers are formed by stacking first electrodes for respective pixels, an organic EL layer having a white light emitting function formed above the first electrodes to cover the first electrodes in common, and a second electrode formed such that the second electrode covers the organic EL layer in common in this order, and light emitted from the organic EL layer is irradiated to the second electrode side. Above the second electrode, a color converting filter, which converts the white light emitted from the organic EL light emitting layer to a given color and is applied by coating using a wet process, is formed for every pixel, and a protective layer, which prevents the deterioration of the light emitting layer attributed to a coating material of the color filter, is provided between the second electrode and the color converting filter.
    • 在基板的主面上,通过层叠各像素的第一电极形成有机EL发光层,形成有在第一电极上方形成的白色发光功能的有机EL层以共同覆盖第一电极,第二电极 形成为使得第二电极依次覆盖有机EL层,并且从有机EL层发射的光照射到第二电极侧。 在第二电极上方,形成一个颜色转换滤光器,其将从有机EL发光层发射的白光转换成给定的颜色,并且通过使用湿法进行涂布而被施加,并且形成防止 归因于滤色器的涂料的发光层的劣化设置在第二电极和颜色转换滤光器之间。