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1. 发明授权

US5804923A Plasma processing apparatus having a protected microwave transmission window 失效
标题翻译：具有受保护的微波传输窗的等离子体处理装置
公开(公告)号：US5804923A
公开(公告)日：1998-09-08
申请号：US663645
申请日：1996-06-14
申请人： Kouichi Iio , Kyouichi Komachi , Katsuo Katayama , Takeshi Akimoto
发明人： Kouichi Iio , Kyouichi Komachi , Katsuo Katayama , Takeshi Akimoto
IPC分类号： H05H1/46 , C23C16/50 , C23C16/511 , C23F4/00 , H01J37/32 , H01L21/302 , H01L21/3065 , C23C16/00
CPC分类号： H01J37/32229 , H01J37/32192 , H01J37/32238 , H01J37/32266
摘要： A plasma processing apparatus includes a microwave introducing member, which is provided with a microwave transmission opening through which microwaves pass into a processing chamber. The microwave introducing member is also provided at a transmission opening with a dielectric member. Preferably, the dielectric member is formed to have a relative dielectric constant of 4 to 10 and an insulation resistance of 10.sup.8 to 10.sup.12 .OMEGA..
摘要翻译：等离子体处理装置包括具有微波传输开口的微波导入部件，微波通过该开口进入处理室。微波导入部件也设置在具有电介质部件的传输开口。优选地，电介质构件形成为具有4至10的相对介电常数和108至1012欧姆的绝缘电阻。

2. 发明授权

US5911852A Plasma processing apparatus 失效
标题翻译：等离子体处理装置
公开(公告)号：US5911852A
公开(公告)日：1999-06-15
申请号：US663640
申请日：1996-06-14
申请人： Katsuo Katayama , Kyouichi Komachi , Kouichi Iio , Takeshi Akimoto
发明人： Katsuo Katayama , Kyouichi Komachi , Kouichi Iio , Takeshi Akimoto
IPC分类号： H05H1/46 , C23C14/35 , C23F4/00 , H01J37/32 , H01L21/203 , H01L21/302 , H01L21/3065 , C23F1/08
CPC分类号： H01J37/32229 , H01J37/32192 , H01J37/32238 , H01J37/32266
摘要： A plasma processing apparatus includes a conductive thin film provided on a surface of a microwave introducing member which is exposed to a processing chamber, in which an object to be processed is placed. The conductive thin film is provided at the entire portion excluding a transmission portion, through which microwaves pass into the processing chamber. The conductive thin film is grounded to act as an electrode.
摘要翻译：等离子体处理装置包括设置在微波导入部件的表面上的导电性薄膜，所述导电薄膜暴露于放置有被处理物体的处理室。导电薄膜设置在除了传输部分之外的整个部分，微波通过该传输部分进入处理室。导电薄膜接地以作为电极。

3. 发明授权

US5545258A Microwave plasma processing system 失效
标题翻译：微波等离子体处理系统
公开(公告)号：US5545258A
公开(公告)日：1996-08-13
申请号：US490088
申请日：1995-06-13
申请人： Katsuo Katayama , Kyoichi Komachi , Hiroshi Mabuchi , Takeshi Akimoto
发明人： Katsuo Katayama , Kyoichi Komachi , Hiroshi Mabuchi , Takeshi Akimoto
IPC分类号： H01J37/32 , C23C16/00
CPC分类号： H01J37/3244 , H01J37/32192 , H01J37/32266
摘要： A microwave plasma processing system, wherein a conductor disposed for controlling the anisotropy and the acceleration energy of ions in a plasma has inside a flow path for reactant gasses and a plurality of holes through which the gasses are to be blown toward a sample holder.A microwave plasma processing system, wherein the ratio of the total area of microwave transmission holes to the area of a conductor is set to be in a range of 0.25 to 0.65.A microwave plasma processing system, wherein each microwave transmission hole formed in a conductor has a dimension in the microwave traveling direction greater than that in a direction perpendicular to the traveling direction.
摘要翻译：一种微波等离子体处理系统，其中设置用于控制等离子体中的离子的各向异性和加速能的导体内部具有用于反应物气体的流路和多个孔，气体将通过该孔流向样品保持器。微波等离子体处理系统，其中微波透射孔的总面积与导体的面积的比率设定在0.25〜0.65的范围内。微波等离子体处理系统，其中形成在导体中的每个微波传输孔的微波行进方向上的尺寸大于与行进方向垂直的方向上的尺寸。

4. 发明授权

US5529632A Microwave plasma processing system 失效
标题翻译：微波等离子体处理系统
公开(公告)号：US5529632A
公开(公告)日：1996-06-25
申请号：US490087
申请日：1995-06-13
申请人： Katsuo Katayama , Kyoichi Komachi , Hiroshi Mabuchi , Takeshi Akimoto
发明人： Katsuo Katayama , Kyoichi Komachi , Hiroshi Mabuchi , Takeshi Akimoto
IPC分类号： H05H1/46 , H01J37/32 , H01L21/205 , H01L21/302 , H01L21/3065 , C23C16/00
CPC分类号： H01J37/32504 , Y10S156/916
摘要： A microwave plasma processing system has heating means for heating the wall of a reaction chamber, and an adhesion preventing member in which a cylinder disposed so as to be in contact with the inner face of a wall of the reaction chamber and a microwave reflecting plate having a gas discharge hole are integrally formed.A microwave plasma processing system has heating means for heating the wall of a reaction chamber, and a microwave reflecting plate which is attached to the inner face of a wall of the reaction chamber and which has a gas discharge hole.
摘要翻译：微波等离子体处理系统具有用于加热反应室的壁的加热装置和其中设置成与反应室的壁的内表面接触的圆筒和具有微波反射板的微波反射板的防粘接构件，气体排出孔一体形成。微波等离子体处理系统具有用于加热反应室的壁的加热装置和附接到反应室的壁的内表面并具有气体排出孔的微波反射板。

5. 发明授权

US6060427A Thermosensitive recording material 有权
标题翻译：热敏记录材料
公开(公告)号：US6060427A
公开(公告)日：2000-05-09
申请号：US134452
申请日：1998-08-14
申请人： Yasutomo Mori , Mitsuru Naruse , Takeshi Akimoto
发明人： Yasutomo Mori , Mitsuru Naruse , Takeshi Akimoto
IPC分类号： B41M5/28 , B41M5/30 , B41M5/337 , B41M5/40 , B41M5/44
CPC分类号： B41M5/44
摘要： A thermosensitive recording material including a substrate, a thermosensitive coloring layer which is formed overlying the substrate and which induces color formation upon application of heat, and a protective layer which is formed overlying the thermosensitive coloring layer and which includes a resin, wherein the protective layer is formed by coating with a liquid including a core-shell type emulsion of the resin, and wherein the core-shell type emulsion of the resin is prepared by polymerizing monomers including (d) acrylamide and/or methacrylamide and (e) a vinyl monomer having a hydroxy group in the presence of a seed emulsion which is prepared by polymerizing monomers including (a) acrylamide and/or methacrylamide, (b) acrylonitrile and (c) a vinyl monomer having a hydroxy group.
摘要翻译：一种热敏记录材料，其包括基底，形成在基底上的热敏着色层，其在施加热时引起颜色形成;以及保护层，其形成在热敏着色层上并且包括树脂，其中保护层通过用包括树脂的核 - 壳型乳液的液体涂布形成，并且其中树脂的核 - 壳型乳液通过聚合包含（d）丙烯酰胺和/或甲基丙烯酰胺的单体和（e）乙烯基单体在通过聚合包括（a）丙烯酰胺和/或甲基丙烯酰胺，（b）丙烯腈和（c）具有羟基的乙烯基单体的单体制备的种子乳液的存在下具有羟基。

6. 发明授权

US07390164B2 Fixing structure for fixing rotor to rotor shaft, and turbo molecular pump having the fixing structure 有权
标题翻译：用于将转子固定到转子轴的固定结构，以及具有固定结构的涡轮分子泵
公开(公告)号：US07390164B2
公开(公告)日：2008-06-24
申请号：US10571642
申请日：2004-08-27
申请人： Yasushi Maejima , Yutaka Inayoshi , Shinji Kawanishi , Kou Sakurai , Hiroyuki Suda , Takeshi Akimoto
发明人： Yasushi Maejima , Yutaka Inayoshi , Shinji Kawanishi , Kou Sakurai , Hiroyuki Suda , Takeshi Akimoto
IPC分类号： F04D19/04 , F01D1/36
CPC分类号： F04D19/042 , F04D19/04 , F04D29/266
摘要： Provided are a fixing structure for fixing a rotor to a rotor shaft, in which the contact state of the contact surfaces of the rotor shaft and the rotor is stabilized to thereby maintain the rotation balance of the rotor shaft and the rotor, making it possible to prevent oscillation, and a turbo molecular pump having such a fixing structure. On the outer peripheral portion of the upper surface of a fastening portion (253), there is concentrically formed a rotor shaft (213) side contact surface (257) to be brought into contact with a rotor (103). Further, in the inner periphery of the contact surface (257), there is formed a spot facing portion (259) whose upper surface is recessed from the contact surface (257). Thus, when the rotor shaft (213) is fastened to the rotor (103), there is formed, at the portion where the spot facing portion (259) is formed, a gap (265) which has a depth corresponding to the depth of the spot facing portion (259) and which is between the contact surface (187) of the rotor (103) and the spot facing portion (259).
摘要翻译：提供了一种用于将转子固定到转子轴的固定结构，其中转子轴和转子的接触表面的接触状态稳定，从而保持转子轴和转子的旋转平衡，使得可以防止振动，以及具有这种固定结构的涡轮分子泵。在紧固部（253）的上表面的外周部上同心地形成与转子（103）接触的转子轴（213）侧接触面（257）。此外，在接触面（257）的内周形成有上表面从接触面（257）凹陷的光斑对置部（259）。因此，当转子轴（213）紧固到转子（103）时，在形成有点对面部分（259）的部分形成有与深度相对应的深度的间隙（265）位于转子（103）的接触表面（187）和光斑对向部分（259）之间的光斑对置部分（259）。

7. 发明授权

US06846538B2 Composite sheet, method of preparing same, and adhesive label sheet assembly having same 有权
标题翻译：复合片，其制备方法和具有该片的粘合标签片组合物
公开(公告)号：US06846538B2
公开(公告)日：2005-01-25
申请号：US10323559
申请日：2002-12-19
申请人： Masahiro Sato , Masanaka Nagamoto , Takeshi Akimoto
发明人： Masahiro Sato , Masanaka Nagamoto , Takeshi Akimoto
IPC分类号： C09J7/02 , D21H19/82 , D21H21/26 , D21H27/00 , B32B29/06
CPC分类号： D21H21/26 , C09J7/403 , C09J2203/334 , C09J2400/283 , C09J2483/005 , D21H19/82 , D21H27/001 , Y10T428/14 , Y10T428/1405 , Y10T428/1419 , Y10T428/1452 , Y10T428/1471 , Y10T428/1476 , Y10T428/1486 , Y10T428/31 , Y10T428/31993
摘要： A composite sheet including a paper layer made of a wood pulp having a Canadian standard freeness value of 350 to 500 ml, a transparency improving layer provided over one side of the paper layer, and a release liner provided over the transparency improving layer. The composite sheet has a transmittance of at least 10 to 20% for a light with a wavelength of 940 to 960 nm and a bulk density of 0.90 to 1.15 g/cm3. A thermosensitive recording adhesive label sheet has the above composite sheet and a thermosensitive recording sheet provided on the composite sheet through an adhesive layer.
摘要翻译：一种复合片材，其包括加拿大标准游离度值为350-500ml的木浆制成的纸层，设置在纸层的一侧的透明度改善层，以及设置在透明度改善层上的剥离衬垫。对于波长为940〜960nm，体积密度为0.90〜1.15g / cm 3的光，复合片材的透射率为10〜20％。热敏记录粘合标签片具有上述复合片材和通过粘合剂层设置在复合片材上的热敏记录片材。

8. 发明授权

US06670010B2 Composite sheet, method of preparing same, and thermosensitive recording adhesive label sheet having same 有权
标题翻译：复合片，其制备方法和具有该片的热敏记录粘合标签片
公开(公告)号：US06670010B2
公开(公告)日：2003-12-30
申请号：US10200181
申请日：2002-07-23
申请人： Masanaka Nagamoto , Masahiro Sato , Takeshi Akimoto
发明人： Masanaka Nagamoto , Masahiro Sato , Takeshi Akimoto
IPC分类号： B32B2906
CPC分类号： D21H19/84 , D21H19/82 , D21H21/26 , D21H27/001 , Y10T428/14 , Y10T428/1452 , Y10T428/1457 , Y10T428/1476 , Y10T428/31993
摘要： A composite sheet including a paper layer made of a wood pulp having a Canadian standard freeness value of 350 to 500 ml and a transmittance of at least 7% for a light with a wavelength of 940 to 960 nm, a transparency improving layer provided over one side of the paper layer so that said paper layer overlaid with said transparency improving layer exhibits a transmittance of at least 11% for a light with a wavelength of 940 to 960 nm, and a release liner provided over an opposite surface of the transparency improving layer from the paper layer. A thermosensitive recording adhesive label sheet has the above composite sheet and a thermosensitive recording sheet provided on the composite sheet through an adhesive layer.
摘要翻译：一种复合片材，包括由加拿大标准游离度值为350-500ml的木浆制成的纸层，对于波长为940至960nm的光线的透射率为至少7％，透明度改善层设置在一个使得与透明度改善层重叠的所述纸层对于波长为940至960nm的光表现出至少11％的透射率，以及设置在透明度改善层的相对表面上的剥离衬垫从纸层。热敏记录粘合标签片具有上述复合片材和通过粘合剂层设置在复合片材上的热敏记录片材。

9. 发明授权

US5798544A Semiconductor memory device having trench isolation regions and bit lines formed thereover 失效
标题翻译：具有形成在其上的沟槽隔离区域和位线的半导体存储器件
公开(公告)号：US5798544A
公开(公告)日：1998-08-25
申请号：US242345
申请日：1994-05-13
申请人： Shuichi Ohya , Masato Sakao , Yoshihiro Takaishi , Kiyonori Kajiyana , Takeshi Akimoto , Shizuo Oguro , Seiichi Shishiguchi
发明人： Shuichi Ohya , Masato Sakao , Yoshihiro Takaishi , Kiyonori Kajiyana , Takeshi Akimoto , Shizuo Oguro , Seiichi Shishiguchi
IPC分类号： H01L27/10 , H01L21/8242 , H01L27/108 , H01L29/76
CPC分类号： H01L27/10823 , H01L27/10808
摘要： Disclosed herein is a semiconductor memory device including a plurality of memory cells each includes an active region which is defined in a column direction by a pair of trench isolation regions formed in a semiconductor substrate and in a row direction by an isolation gate conductor lines formed on a first gate insulating film covering the substrate, a source and a drain region selectively formed in the active region to define a channel region of a cell transistor, a second gate insulating film formed on the channel region, a word line formed on the second gate insulating film, a first insulating film covering the active region and the word line, a bit line formed on the first insulating film to overlap with the isolation gate conductor, a bit line connection conductor formed in the first insulating film to connect the drain region to the bit line with being in contact with the sidewall surface of the bit line, a second insulating film covering the bit line and the first insulating film, and a storage capacitor having a capacitor electrode connected to the source region through a contact hole provided in the first and second insulating film.
摘要翻译：这里公开了一种半导体存储器件，其包括多个存储单元，每个存储单元包括有源区，该有源区通过在半导体衬底中形成的一对沟槽隔离区而在列方向上限定，并且在行方向上由隔离栅导体线形成覆盖基板的第一栅极绝缘膜，选择性地形成在有源区中的源极和漏极区域，以限定单元晶体管的沟道区，形成在沟道区上的第二栅极绝缘膜，形成在第二栅极上的字线绝缘膜，覆盖有源区和字线的第一绝缘膜，形成在第一绝缘膜上以与隔离栅导体重叠的位线;形成在第一绝缘膜中的位线连接导体，以将漏区连接到位线与位线的侧壁表面接触，覆盖位线的第二绝缘膜和第一绝缘f 以及具有通过设置在第一和第二绝缘膜中的接触孔连接到源极区的电容器电极的存储电容器。

10. 发明授权

US5647912A Plasma processing apparatus 失效
标题翻译：等离子体处理装置
公开(公告)号：US5647912A
公开(公告)日：1997-07-15
申请号：US617731
申请日：1996-04-01
申请人： Takahiro Kaminishizono , Takeshi Akimoto
发明人： Takahiro Kaminishizono , Takeshi Akimoto
IPC分类号： C23F4/00 , H01J37/32 , H01L21/302 , H01L21/3065 , C23C16/00
CPC分类号： H01J37/32009 , H01J37/32082 , H01J37/3244 , H01J37/32541
摘要： A permeable container having a plurality of holes whose diameters are equal to or less than two times the sheath length is provided in a vacuum container. provided at the bottom of this permeable container is an electrode on which an object to be processed is to be placed. A high-frequency power supply is connected to this electrode, and the permeable container is grounded. The permeable container and the electrode are insulated from each other by an insulator. When a process gas supplied into the vacuum container is guided into the permeable container through its holes and a high-frequency voltage is applied to the electrode, plasma is produced in the permeable container. Because the diameters of the holes are equal to or less than two times the sheath length, plasma is trapped inside the permeable container, thus improving the stability and density of plasma. This invention can therefore prevent plasma from becoming non-uniform and unstable and having a lower density, which, if occurred, raise a problem in the plasma process in a low-pressure area, and can efficiently trap plasma, thus ensuring uniform and high-density plasma on the to-be-processed object.
摘要翻译：具有多个孔的可渗透容器设置在真空容器中，所述多个孔的直径等于或小于护套长度的两倍。设置在该可渗透容器的底部的是要放置待加工物体的电极。高频电源与该电极连接，可渗透容器接地。可渗透容器和电极通过绝缘体彼此绝缘。当供给到真空容器的工艺气体通过其孔被引导到可渗透容器中并且向电极施加高频电压时，在可渗透容器中产生等离子体。由于孔的直径等于或小于护套长度的两倍，等离子体被捕获在可渗透容器的内部，从而提高了等离子体的稳定性和密度。因此，本发明可以防止等离子体变得不均匀和不稳定，并且具有较低的密度（如果发生的话）在低压区域中引起等离子体处理的问题，并且可以有效地捕获等离子体，待处理物体上的密度等离子体。

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