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    • 3. 发明专利
    • Pyroelectric infrared sensor
    • 微电子红外传感器
    • JP2013064756A
    • 2013-04-11
    • JP2012280640
    • 2012-12-25
    • Kobe Univ国立大学法人神戸大学Daikin Ind Ltdダイキン工業株式会社
    • ISHIDA KENJIKUWAJIMA SHUICHIROMATSUSHIGE KAZUMIHORIUCHI YOSHITOSHIMATSUMOTO YUJIKOTANI TETSUHIROKO MEITEN
    • G01J1/02G01J5/34H01L37/02
    • PROBLEM TO BE SOLVED: To provide a deformable high sensitivity pyroelectric infrared sensor.SOLUTION: The pyroelectric infrared sensor includes: a flexible substrate 41B formed from high polymer material such as polyimide or polyethylene terephthalate; a layer 43B formed from vinylidene fluoride (VDF) oligomer; and flexible electrodes 44B and 42B formed of Al deposition film or the like over the top and the bottom of the VDF oligomer layer 43B. With the flexibility of the component elements, the entire pyroelectric infrared sensor has flexibility. Also, plural actuators 46 are disposed around the substrate 41B. The pyroelectric infrared sensor is deformable in a desired shape having different curvature by adjusting the pressing force by the actuators 46. Since the heat capacity and thermal conductivity of the substrate formed from the high polymer material are lower than those of a substrate formed of Si or the like used for conventional pyroelectric infrared sensor, the sensitivity is enhanced.
    • 要解决的问题:提供可变形的高灵敏度热释电红外传感器。 热解红外线传感器包括:由高分子材料如聚酰亚胺或聚对苯二甲酸乙二醇酯形成的柔性基底41B; 由偏二氟乙烯(VDF)低聚物形成的层43B; 以及在VDF低聚物层43B的顶部和底部上由Al沉积膜等形成的柔性电极44B和42B。 具有组件元件的灵活性,整个热释电红外传感器具有灵活性。 此外,多个致动器46设置在基板41B周围。 通过调节致动器46的按压力,热电型红外线传感器可以变形成具有不同曲率的期望形状。由于由高分子材料形成的基板的热容量和热导率低于由Si或 用于常规热释电红外传感器的灵敏度提高。 版权所有(C)2013,JPO&INPIT