专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US07880392B2 Plasma producing method and apparatus as well as plasma processing apparatus 有权
标题翻译：等离子体制造方法和装置以及等离子体处理装置
公开(公告)号：US07880392B2
公开(公告)日：2011-02-01
申请号：US11586583
申请日：2006-10-26
申请人： Kenji Kato , Hiroshige Deguchi , Hitoshi Yoneda , Kiyoshi Kubota , Akinori Ebe , Yuichi Setsuhara
发明人： Kenji Kato , Hiroshige Deguchi , Hitoshi Yoneda , Kiyoshi Kubota , Akinori Ebe , Yuichi Setsuhara
IPC分类号： C23C16/00
CPC分类号： H01J37/32954 , H01J37/321 , H01J37/32174
摘要： Plasma producing method and apparatus wherein a plurality of high-frequency antennas are arranged in a plasma producing chamber, and a high-frequency power supplied from a high-frequency power supply device (including a power source, a phase controller and the like) is applied to a gas in the chamber from the antennas to produce inductively coupled plasma. At least some of the plurality of high-frequency antennas are arranged in a fashion of such parallel arrangement that the antennas successively neighbor to each other and each of the antennas is opposed to the neighboring antenna. The high-frequency power supply device controls a phase of a high-frequency voltage applied to each antenna, and thereby controls an electron temperature of the inductively coupled plasma.
摘要翻译：等离子体制造方法和装置，其中多个高频天线布置在等离子体产生室中，并且从高频电源装置（包括电源，相位控制器等）提供的高频电力是从天线施加到腔室中的气体以产生电感耦合等离子体。多个高频天线中的至少一些以这样的并行布置的方式布置，使得天线彼此相邻并且每个天线与相邻天线相对。高频电源装置控制施加到每个天线的高频电压的相位，从而控制感应耦合等离子体的电子温度。

2. 发明申请

US20070144672A1 Plasma producing method and apparatus as well as plasma processing apparatus 审中-公开
标题翻译：等离子体制造方法和装置以及等离子体处理装置
公开(公告)号：US20070144672A1
公开(公告)日：2007-06-28
申请号：US11586508
申请日：2006-10-26
申请人： Kenji Kato , Hiroshige Deguchi , Hitoshi Yoneda , Kiyoshi Kubota , Akinori Ebe , Yuichi Setsuhara
发明人： Kenji Kato , Hiroshige Deguchi , Hitoshi Yoneda , Kiyoshi Kubota , Akinori Ebe , Yuichi Setsuhara
IPC分类号： C23F1/00 , C23C16/00
CPC分类号： C23C16/509 , H01J37/321 , H01J37/32183
摘要： Plasma producing method and apparatus as well as plasma processing apparatus including the plasma producing apparatus wherein one or more high-frequency antennas are arranged in a plasma producing chamber, and a high-frequency power is applied to a gas in the chamber from the antenna(s) to produce inductively coupled plasma. Impedance of the high-frequency antenna is set in a range of 45 Ω or lower.
摘要翻译：等离子体制造方法和装置以及包括等离子体制造装置的等离子体处理装置，其中一个或多个高频天线布置在等离子体产生室中，并且高频电力从天线施加到腔室中的气体 s）以产生电感耦合等离子体。高频天线的阻抗设定在45Ω以下的范围内。

3. 发明申请

US20070095287A1 Plasma producing method and apparatus as well as plasma processing apparatus 有权
标题翻译：等离子体制造方法和装置以及等离子体处理装置
公开(公告)号：US20070095287A1
公开(公告)日：2007-05-03
申请号：US11586583
申请日：2006-10-26
申请人： Kenji Kato , Hiroshige Deguchi , Hitoshi Yoneda , Kiyoshi Kubota , Akinori Ebe , Yuichi Setsuhara
发明人： Kenji Kato , Hiroshige Deguchi , Hitoshi Yoneda , Kiyoshi Kubota , Akinori Ebe , Yuichi Setsuhara
IPC分类号： C23C16/00
CPC分类号： H01J37/32954 , H01J37/321 , H01J37/32174
摘要： Plasma producing method and apparatus wherein a plurality of high-frequency antennas are arranged in a plasma producing chamber, and a high-frequency power supplied from a high-frequency power supply device (including a power source, a phase controller and the like) is applied to a gas in the chamber from the antennas to produce inductively coupled plasma. At least some of the plurality of high-frequency antennas are arranged in a fashion of such parallel arrangement that the antennas successively neighbor to each other and each of the antennas is opposed to the neighboring antenna. The high-frequency power supply device controls a phase of a high-frequency voltage applied to each antenna, and thereby controls an electron temperature of the inductively coupled plasma.
摘要翻译：等离子体制造方法和装置，其中多个高频天线布置在等离子体产生室中，并且从高频电源装置（包括电源，相位控制器等）提供的高频电力是从天线施加到腔室中的气体以产生电感耦合等离子体。多个高频天线中的至少一些以这样的并行布置的方式布置，使得天线彼此相邻并且每个天线与相邻天线相对。高频电源装置控制施加到每个天线的高频电压的相位，从而控制感应耦合等离子体的电子温度。

4. 发明申请

US20070193512A1 Plasma generating method, plasma generating apparatus, and plasma processing apparatus 审中-公开
标题翻译：等离子体产生方法，等离子体产生装置和等离子体处理装置
公开(公告)号：US20070193512A1
公开(公告)日：2007-08-23
申请号：US11707862
申请日：2007-02-20
申请人： Hiroshige Deguchi , Hitoshi Yoneda , Kenji Kato , Akinori Ebe , Yuichi Setsuhara
发明人： Hiroshige Deguchi , Hitoshi Yoneda , Kenji Kato , Akinori Ebe , Yuichi Setsuhara
IPC分类号： C23C16/00
CPC分类号： C23C16/509 , H01J37/32192 , H01J37/3222
摘要： One or more high-frequency antennas is allocated to and disposed in one cubic space C having a side of 0.4 [m] in a plasma generating chamber 1 or in each of plural cubic spaces C, each having a side of 0.4 [m], adjacent ones of the plural cubic spaces being continuous to each other without forming a gap therebetween. The total length L [m] of the high-frequency antennas in each of the cubic spaces C is set in a range which satisfies relationships of (0.2/P)
摘要翻译：在等离子体发生室1中或在具有0.4 [m]侧的多个立方体空间C中的每一个中分配一个或多个高频天线并将其布置在具有0.4 [m]侧的一个立方体C中，多个立体空间中的相邻的空间彼此连续，而不形成间隙。每个立方体空间C中的高频天线的总长度L [m]被设定为满足关于电感耦合等离子体产生（0.2 / P）

5. 发明申请

US20070193513A1 Plasma generating method, plasma generating apparatus, and plasma processing apparatus 审中-公开
标题翻译：等离子体产生方法，等离子体产生装置和等离子体处理装置
公开(公告)号：US20070193513A1
公开(公告)日：2007-08-23
申请号：US11708058
申请日：2007-02-20
申请人： Hiroshige Deguchi , Hitoshi Yoneda , Kenji Kato , Akinori Ebe , Yuichi Setsuhara
发明人： Hiroshige Deguchi , Hitoshi Yoneda , Kenji Kato , Akinori Ebe , Yuichi Setsuhara
IPC分类号： C23C16/00
CPC分类号： C23C16/509 , H01J37/32192 , H01J37/3222
摘要： A plasma generating method and apparatus which use plural high-frequency antennas 2 to generate inductively coupled plasma, and a plasma processing apparatus using the apparatus. The antennas 2 are identical to one another. Application of a high-frequency electric power to the antennas 2 is performed from a high-frequency power source 4 which is disposed commonly to the antennas 2, through one matching circuit 5 and one busbar 3. The busbar 3 is partitioned into sections the number of which is equal to that of the antennas, while setting a portion which is connected to the matching circuit 5, as a reference. One-end portions of the antennas are connected to corresponding sections 31, 32, 33 through power supplying lines 311, 321, 331. The other end portions of the antennas are grounded. The impedances of the sections of the busbar, and those of the power supplying lines are adjusted so that same currents flow through the antennas, and a same voltage is applied to the antennas. Therefore, the inductively coupled plasma is generated while uniformalizing high-frequency electric powers supplied to the antennas 2.
摘要翻译：使用多个高频天线2生成电感耦合等离子体的等离子体产生方法和装置以及使用该装置的等离子体处理装置。天线2彼此相同。通过一个匹配电路5和一个母线3，从天线2共同配置的高频电源4向天线2施加高频电力。母线3被划分为多个在设置连接到匹配电路5的部分作为参考时，其等于天线的天线。天线的一端部分通过供电线311,321,331连接到对应部分31,32,33。天线的另一端接地。调节母线段和供电线的部分的阻抗，使得相同的电流流过天线，并且向天线施加相同的电压。因此，在对提供给天线2的高频电力进行均匀化的同时产生电感耦合等离子体。

6. 发明申请

US20070144440A1 Plasma producing method and apparatus as well as plasma processing apparatus 审中-公开
标题翻译：等离子体制造方法和装置以及等离子体处理装置
公开(公告)号：US20070144440A1
公开(公告)日：2007-06-28
申请号：US11586504
申请日：2006-10-26
申请人： Hitoshi Yoneda , Hiroshige Deguchi , Kenji Kato , Yuichi Setsuhara
发明人： Hitoshi Yoneda , Hiroshige Deguchi , Kenji Kato , Yuichi Setsuhara
IPC分类号： C23C16/00
CPC分类号： C23C16/509 , H01J37/321 , H01J37/3211
摘要： Plasma producing method and apparatus as well as plasma processing apparatus utilizing the plasma producing apparatus wherein a plurality of high-frequency antennas are arranged in a plasma producing chamber, and a high-frequency power supplied from a high-frequency power supply device (including a power source, a matching box and the like) is applied to a gas in the chamber from the antennas to produce inductively coupled plasma. At least some of the plurality of high-frequency antennas are arranged in a fashion of such parallel arrangement that the antennas successively neighbor to each other and each of the antennas is opposed to the neighboring antenna. The high-frequency power supply device supplies the high-frequency power to each antenna from terminals of the antennas on the same side.
摘要翻译：等离子体制造方法和装置以及利用等离子体制造装置的等离子体处理装置，其中多个高频天线布置在等离子体产生室中，以及从高频电源装置（包括电源，匹配盒等）从天线施加到腔室中的气体以产生电感耦合等离子体。多个高频天线中的至少一些以这样的并行布置的方式布置，使得天线彼此相邻并且每个天线与相邻天线相对。高频电源装置在同一侧的天线端子向每个天线提供高频电力。

7. 发明授权

US5850135A Connecting system and a connection method 失效
标题翻译：连接系统和连接方法
公开(公告)号：US5850135A
公开(公告)日：1998-12-15
申请号：US791109
申请日：1997-01-30
申请人： Heiji Kuki , Sho Miyazaki , Tsutomu Tanaka , Kunihiko Watanabe , Shuichi Kanagawa , Tomohiro Keishi , Hiroshige Deguchi , Shuji Arisaka
发明人： Heiji Kuki , Sho Miyazaki , Tsutomu Tanaka , Kunihiko Watanabe , Shuichi Kanagawa , Tomohiro Keishi , Hiroshige Deguchi , Shuji Arisaka
IPC分类号： B60L11/18 , H02J7/00 , H02J7/02 , H02M10/44
CPC分类号： B60L11/1816 , B60L11/1805 , B60L11/182 , B60L11/1829 , B60L11/1833 , B60L11/1846 , B60L11/1848 , H02J7/0045 , H02J7/025 , B60L2230/16 , Y02T10/7005 , Y02T10/7088 , Y02T90/121 , Y02T90/122 , Y02T90/125 , Y02T90/128 , Y02T90/14 , Y02T90/163 , Y02T90/169 , Y04S30/14
摘要： To facilitate the charging of an electric automotive vehicle, a primary coil 31 connected with a charging power source is so provided as to project from a wall surface W of a parking space. An electric automotive vehicle E is advanced toward the wall surface W and parked in a position where the primary coil 31 is accommodated in a receptacle 11 provided below a front bumper B of the vehicle E. Then, a pressure switch 40 provided in a shock absorbing material 39 operates to detect the presence of the vehicle E, and the primary coil 31 is excited. A secondary coil 14 is provided above the receptacle 11. A voltage is generated in the secondary coil 14 by action of electromagnetic induction, thereby charging a battery 19.
摘要翻译：为了方便电动汽车的充电，与充电电源连接的初级线圈31被设置成从停车位的壁面W突出。电动汽车E朝向壁面W前进并且停放在初级线圈31被容纳在设置在车辆E的前保险杠B下方的容座11中的位置。然后，设置有减震器材料39操作以检测车辆E的存在，并且初级线圈31被激励。次级线圈14设置在插座11的上方。通过电磁感应的作用在次级线圈14中产生电压，从而对电池19充电。

8. 发明授权

US07061205B2 Method for operating redox flow battery system 有权
标题翻译：操作氧化还原液电池系统的方法
公开(公告)号：US07061205B2
公开(公告)日：2006-06-13
申请号：US10512273
申请日：2003-04-21
申请人： Toshio Shigematsu , Takahiro Kumamoto , Hiroshige Deguchi , Nobuyuki Tokuda
发明人： Toshio Shigematsu , Takahiro Kumamoto , Hiroshige Deguchi , Nobuyuki Tokuda
IPC分类号： H01M10/44
CPC分类号： H01M8/04753 , H01M8/04992 , H01M8/188 , H01M8/20 , H01M2250/407 , Y02E10/723 , Y02E60/528 , Y02E60/563 , Y02P80/158
摘要： An operating method of a redox flow battery system that can provide a stabilized output to a system from a redox flow battery system annexed to a wind power generator, to produce an improved battery efficiency. The redox flow battery system comprises the wind power generator 10, a redox flow battery 30 annexed to the wind power generator, and an AC/DC converter 40 connected to the redox flow battery. In the operating method, an output of the wind power generator within a certain period of time in the past is subjected to a first averaging process; a present output value of the wind power generator is subtracted from the resulting value of the first averaging process, from which an input/output command value to the AC/DC converter 40 is determined; the input/output command value is subjected to a variation computing process to find variation without any consideration of a sign of the input/output command value; the resulting value obtained by the variation computing process is further subjected to a second averaging process, and an output command value for a pump P to circulate electrolytic solution of the redox flow battery is determined based on the result of the second averaging process.
摘要翻译：一种氧化还原液流电池系统的操作方法，其可以从附于风力发电机的氧化还原液流电池系统向系统提供稳定的输出，以产生改善的电池效率。氧化还原液流电池系统包括风力发电机10，附接到风力发电机的氧化还原液流电池30以及连接到氧化还原液流电池的AC / DC转换器40。在操作方法中，过去一定时间段内的风力发电机的输出经受第一平均处理; 从第一平均处理的结果值中减去风力发电机的当前输出值，确定对AC / DC转换器40的输入/输出指令值; 在不考虑输入/输出命令值的符号的情况下，对输入/输出命令值进行变化计算处理以找到变化; 通过变化计算处理获得的结果值进一步进行第二平均处理，并且基于第二平均处理的结果来确定用于循环氧化还原液流电池的电解溶液的泵P的输出命令值。

9. 发明授权

US5570181A Method of detecting impurities in molten resin utilizing scattering light and the shadows of the impurities 失效
标题翻译：利用散射光检测熔融树脂中的杂质和杂质阴影的方法
公开(公告)号：US5570181A
公开(公告)日：1996-10-29
申请号：US471443
申请日：1995-06-06
申请人： Hiroyuki Yasuo , Hiroshige Deguchi
发明人： Hiroyuki Yasuo , Hiroshige Deguchi
IPC分类号： G01N15/14 , G01N21/85 , G01N21/94 , G01N15/02 , G01B11/14 , G01N21/00 , G02B7/04
CPC分类号： G01N21/94 , B29C47/92 , G01N15/14 , G01N21/85 , B29C2947/92114 , B29C2947/92228 , B29C2947/92723 , B29C2947/9279 , B29C2947/92923 , B29C2947/92933 , G01N2015/1497
摘要： A method of detecting impurities in a molten resin. The molten resin is massed through a passage having a window through which light can pass. Light is emitted from a light source through the window and the molten resin flowing through the passage. Sensors are used to sense a shadow produced when the light from the light source is interrupted by an impurity contained in the molten resin. Finally, the size of the impurity is measured from the width of the shadow and the intensity of light of the shadow. Also, judgment is made that if optical signals obtained by detecting the light that has passed through the molten resin indicate that there exist bright areas around a dark area, the dark area is distinguished as a shadow of an impurity. Further, in order to judge the shape of an impurity with high accuracy and record its image, a plurality of the devices used in the above method or the device used in the above method and a conventional camera may be used in combination.
摘要翻译：检测熔融树脂中的杂质的方法。熔融树脂通过具有光通过的窗口的通道组合。光从光源通过窗口射出，熔融树脂流过通道。传感器用于感测当来自光源的光被包含在熔融树脂中的杂质中断时产生的阴影。最后，从阴影的宽度和阴影的光强度来测量杂质的大小。此外，判断如果通过检测通过熔融树脂的光获得的光信号表示在暗区周围存在明亮区域，则暗区域被区分为杂质的阴影。此外，为了高精度地判断杂质的形状并记录其图像，可以组合使用上述方法中使用的多个装置或上述方法中使用的装置和常规照相机。

10. 发明申请

US20150214565A1 ENERGY STORAGE BATTERY 有权
标题翻译：能源储存电池
公开(公告)号：US20150214565A1
公开(公告)日：2015-07-30
申请号：US14388246
申请日：2012-05-01
申请人： Hiroshige Deguchi , Lan Huang , Yuki Uemura , Shosuke Yamanouchi
发明人： Hiroshige Deguchi , Lan Huang , Yuki Uemura , Shosuke Yamanouchi
IPC分类号： H01M8/20 , H01M4/60 , H01M8/18
CPC分类号： H01M8/20 , H01M4/604 , H01M8/188 , Y02E60/528
摘要： A redox flow battery is described, mainly including a charge/discharge cell, a cathode electrolyte tank, and an anode electrolyte tank. The inside of the charge/discharge cell is divided into a cathode cell and an anode cell by a diaphragm. A collector plate and a cathode are contained in the cathode cell. An aqueous solution containing a Mn-polyethyleneimine complex is supplied from the cathode electrolyte tank to the cathode through a supply pipe. Thereby, an energy storage battery that has durability sufficient for practical applications in a wide range of fields can be provided.
摘要翻译：描述了一种氧化还原液流电池，主要包括充电/放电单元，阴极电解液箱和阳极电解液箱。充电/放电单元的内部通过隔膜被分为阴极单元和阳极单元。集电板和阴极包含在阴极单元中。含有Mn-聚乙烯亚胺络合物的水溶液通过供给管从阴极电解槽向阴极供给。因此，可以提供一种能够在宽范围的实际应用中具有足够的耐久性的能量蓄电池。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式