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    • 3. 发明授权
    • Process for forming an organic thin film
    • 用于形成有机薄膜的方法
    • US4604294A
    • 1986-08-05
    • US660230
    • 1984-10-12
    • Masahiro TanakaKazufumi AzumaKazuo NateMitsuo Nakatani
    • Masahiro TanakaKazufumi AzumaKazuo NateMitsuo Nakatani
    • G03C1/76B05D3/06B05D7/24
    • B05D1/60B05D3/06
    • An organic thin film consisting essentially of an organic compound is formed on a substrate surface by vacuum vapor deposition by exposing the organic compound as a vapor source to a laser beam having an energy level corresponding to that of the chemical bond of the organic compound, thereby sputtering the organic compound onto a substrate surface in vacuum and forming the organic thin film thereon. When a light or radiation-sensitive organic compound is used as the vapor source, a light or radiation-sensitive resist film is formed. The thin film thus formed retains the original chemical structure of the vapor source, and has a good flatness. Resolvability of resist film is improved owing to the absence of pin holes and particulate matters. A resist film having a higher sensitivity and a better contrast is formed by heating the substrate during the vapor deposition.
    • 通过将有机化合物作为蒸汽源暴露于具有与有机化合物的化学键的能级对应的能级的激光束,通过真空汽相沉积在基板表面上形成基本上由有机化合物构成的有机薄膜,由此 在真空中将有机化合物溅射到基板表面上并在其上形成有机薄膜。 当使用光或辐射敏感的有机化合物作为蒸气源时,形成光或辐射敏感的抗蚀剂膜。 由此形成的薄膜保持蒸气源的原始化学结构,并且具有良好的平坦度。 由于没有针孔和颗粒物质,抗蚀剂膜的可分离性得到改善。 通过在气相沉积期间加热基底来形成具有更高灵敏度和更好对比度的抗蚀剂膜。
    • 8. 发明授权
    • Working machine
    • 工作机
    • US07530184B2
    • 2009-05-12
    • US11470942
    • 2006-09-07
    • Hiroyoshi IshihamaMitsuo NakataniYasunari Watanabe
    • Hiroyoshi IshihamaMitsuo NakataniYasunari Watanabe
    • E01H5/06
    • E02F3/815
    • A working machine having a blade is disclosed, the blade comprising a body blade and an extension blade, the body blade having a body-side mounting portion having a body-side mounting hole and the extension blade having an extension-side mounting portion having an extension-side mounting hole, the body-side mounting hole and the extension-side mounting hole being formed vertically through the body-side mounting portion and the extension-side mounting portion, respectively. Further provided are mounting members adapted to be inserted into the mounting holes to connect the body blade and the extension blade with each other, and positioning members and a cutout portion for aligning the positions of the body-side mounting hole and the extension-side mounting hole vertically with each other and inhibiting the body-side mounting portion and the extension-side mounting portion from pivoting around the mounting members.
    • 公开了一种具有叶片的工作机,所述叶片包括主体叶片和延伸叶片,所述主体叶片具有主体侧安装部分,所述主体侧安装部分具有主体侧安装孔,所述延伸叶片具有延伸侧安装部分, 延伸侧安装孔,主体侧安装孔和延伸侧安装孔分别垂直地形成在主体侧安装部和延伸侧安装部上。 还提供了适于插入到安装孔中以将主体叶片和延伸叶片彼此连接的安装构件,以及用于使主体侧安装孔和延伸侧安装件的位置对准的定位构件和切口部 并且禁止体侧安装部和延伸侧安装部围绕安装构件枢转。