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1. 发明申请

WO2017172540A2 SYSTEM AND METHOD FOR SPECTRAL TUNING OF BROADBAND LIGHT SOURCES 审中-公开
标题翻译：用于光谱调谐宽带光源的系统和方法
公开(公告)号：WO2017172540A2
公开(公告)日：2017-10-05
申请号：PCT/US2017/024157
申请日：2017-03-24
申请人： KLA-TENCOR CORPORATION
发明人： HILL, Andrew , MANASSEN, Amnon , BACHAR, Ohad
IPC分类号： G01N21/31
摘要： A tunable spectral filter includes a first tunable dispersive element, a first optical element, a spatial filtering element located at the focal plane, a second optical element, and a second dispersive element. The first tunable dispersive element introduces spectral dispersion to an illumination beam with an adjustable dispersion. The first optical element focuses the illumination beam at a focal plane in which a distribution of a spectrum of the spectrally-dispersed illumination beam at the focal plane is controllable by adjusting the dispersion of the first tunable dispersive element. The spatial filtering element filters the spectrum of the illumination beam based on the distribution of the spectrum of the illumination beam at the focal plane. The second optical element collects the spectrally-dispersed illumination beam transmitted from the spatial filtering element. The second tunable dispersive element removes the dispersion introduced by the first tunable dispersive element from the illumination beam.
摘要翻译：可调谐光谱滤波器包括第一可调谐色散元件，第一光学元件，位于焦平面处的空间滤波元件，第二光学元件和第二色散元件。第一可调色散元件将光谱色散引入具有可调色散的照明光束。第一光学元件将照明光束聚焦在焦平面上，其中通过调整第一可调谐色散元件的色散可以控制光谱色散照明光束在焦平面上的光谱分布。空间滤波元件基于照明光束的光谱在焦平面处的分布来过滤照明光束的光谱。第二光学元件收集从空间滤波元件发射的光谱色散的照明光束。第二可调色散元件从照明光束中消除由第一可调色散元件引入的色散。

2. 发明申请

WO2014210381A1 POLARIZATION MEASUREMENTS OF METROLOGY TARGETS AND CORRESPONDING TARGET DESIGNS 审中-公开
标题翻译：计量目标和相应目标设计的极化度量
公开(公告)号：WO2014210381A1
公开(公告)日：2014-12-31
申请号：PCT/US2014/044440
申请日：2014-06-26
申请人： KLA-TENCOR CORPORATION
发明人： AMIT, Eran , LOEVSKY, Barry , HILL, Andrew , MANASSEN, Amnon , AMIR, Nuriel , LEVINSKI, Vladimir , VOLKOVICH, Roie
IPC分类号： G01B11/00 , G01B11/24 , G01N21/88 , H01L21/66
CPC分类号： G01B11/06 , G01B11/272 , G01B2210/56 , G01B2290/70 , G01N21/9501 , G01N21/956 , G01N2021/8848 , G06F17/5072 , G06F17/5081 , H01L22/30
摘要： Targets, target elements and target design method are provided, which comprise designing a target structure to have a high contrast above a specific contrast threshold to its background in polarized light while having a low contrast below the specific contrast threshold to its background in non-polarized light. The targets may have details at device feature scale and be compatible with device design rules yet maintain optical contrast when measured with polarized illumination and thus be used effectively as metrology targets. Design variants and respective measurement optical systems are likewise provided.
摘要翻译：提供目标，目标元素和目标设计方法，其包括将目标结构设计成在偏振光背景下具有高于特定对比度阈值的高对比度，同时具有低于特定对比度阈值至其非极化背景下的特定对比度阈值的低对比度光。目标可能在设备特征尺度上具有细节，并且与设备设计规则兼容，并且当用偏振照明测量时保持光学对比度，并且因此被有效地用作计量目标。同样提供了设计变型和相应的测量光学系统。

3. 发明申请

WO2011028807A2 METROLOGY SYSTEMS AND METHODS 审中-公开
标题翻译：计量系统和方法
公开(公告)号：WO2011028807A2
公开(公告)日：2011-03-10
申请号：PCT/US2010/047539
申请日：2010-09-01
申请人： KLA-TENCOR CORPORATION , KANDEL, Daniel , LEVINSKI, Vladimir , SVIZHER, Alexander , SELIGSON, Joel , HILL, Andrew , BACHAR, Ohad , MANASSEN, Amnon , CHUANG, Yung-Ho Alex , SELA, Ilan , MARKOWITZ, Moshe , NEGRI, Daria , ROTEM, Efraim
发明人： KANDEL, Daniel , LEVINSKI, Vladimir , SVIZHER, Alexander , SELIGSON, Joel , HILL, Andrew , BACHAR, Ohad , MANASSEN, Amnon , CHUANG, Yung-Ho Alex , SELA, Ilan , MARKOWITZ, Moshe , NEGRI, Daria , ROTEM, Efraim
IPC分类号： H01L21/66
CPC分类号： G01N21/47 , G01B11/02 , G01B11/0641 , G01B2210/56 , G01N21/211 , G01N21/9501 , G01N21/956 , G01N2021/4792 , G01N2201/06113 , G01N2201/105 , G03F7/70625 , G03F7/70633
摘要： Various metrology systems and methods are provided.
摘要翻译：
提供了各种计量系统和方法。

4. 发明申请

WO2019027705A1 SPECTRAL FILTER FOR HIGH-POWER FIBER ILLUMINATION SOURCES 审中-公开
公开(公告)号：WO2019027705A1
公开(公告)日：2019-02-07
申请号：PCT/US2018/043211
申请日：2018-07-23
申请人： KLA-TENCOR CORPORATION
发明人： HILL, Andrew , BACHAR, Ohad , ABRAMOV, Avi , MANASSEN, Amnon
IPC分类号： G02B5/20
摘要： A spectral filter includes a curved filtering element including a concave surface forming a portion of a sphere. The concave surface may be positioned to receive light diverging from an output face of an optical fiber located at a first location proximate to a center of the sphere corresponding to the concave surface. The concave surface may transmit a first portion of a spectrum of the light. The concave surface may further reflect and focus a second portion of the spectrum to a second location proximate to the center of the sphere. The spectral filter may further include a collector to direct the second portion of the spectrum away from the output face of the optical fiber.

5. 发明申请

WO2015175702A1 IMAGE ACQUISITION SYSTEM, IMAGE ACQUISITION METHOD, AND INSPECTION SYSTEM 审中-公开
标题翻译：图像采集系统，图像采集方法和检测系统
公开(公告)号：WO2015175702A1
公开(公告)日：2015-11-19
申请号：PCT/US2015/030634
申请日：2015-05-13
申请人： KLA-TENCOR CORPORATION
发明人： ZHAO, Guoheng , STOKOWSKI, Stanley E. , HILL, Andrew , DE GREEVE, Johan , VAN DER BURGT, Maarten , VAN GILS, Karel
IPC分类号： G01B11/25
CPC分类号： G06T7/586 , G01B11/0608 , G01B11/2513 , G01B11/2522 , G06T2207/10052 , G06T2207/20208 , H04N5/37206
摘要： The invention relates to an image acquisition system and an image acquisition method, as well as to an inspection system having at least one such image acquisition system. A projector projects a pattern on a surface of a sample, a camera records light intensity information from within at least two detection fields defined by the camera on the surface of the sample. A relative motion between the sample on the one hand and the camera and projector on the other hand is generated. From the acquired at least one image a height profile of the surface of the sample may be inferred. The pattern may comprise a number of sub-patterns related to each other by a phase shift. Alternatively, the pattern may be a fringe pattern.
摘要翻译：本发明涉及一种图像获取系统和图像获取方法，以及具有至少一个这样的图像采集系统的检查系统。投影仪在样品的表面上投影图案，照相机记录来自样品表面上由照相机限定的至少两个检测区域内的光强度信息。另一方面，生成样品与相机和投影仪之间的相对运动。从所获取的至少一个图像可以推断出样品表面的高度分布。该图案可以包括通过相移彼此相关的多个子图案。或者，图案可以是条纹图案。

6. 发明申请

WO2014130829A1 SYSTEMS FOR PROVIDING ILLUMINATION IN OPTICAL METROLOGY 审中-公开
标题翻译：用于在光学计量学中提供照明的系统
公开(公告)号：WO2014130829A1
公开(公告)日：2014-08-28
申请号：PCT/US2014/017723
申请日：2014-02-21
申请人： KLA-TENCOR CORPORATION
发明人： BRADY, Gregory , SHCHEGROV, Andrei V. , ROTTER, Lawrence D. , SHAUGHNESSY, Derrick , SHCEMELININ, Anatoly , BEZEL, Ilya , ARAIN, Muzammil , VASILIEV, Anatoly , ALLEN, James , SHULEPOV, Oleg , HILL, Andrew , BACHAR, Ohad , MARKOWITZ, Moshe , ISH-SHALOM, Yaron , SELA, Ilan , MANASSEN, Amnon , SVIZHER, Alexander , KHOKHLOV, Maxim , ABRAMOV, Avi , TSIBULEVSKY, Oleg , KANDEL, Daniel , GHINOVKER, Mark
IPC分类号： H01L21/66
CPC分类号： G01J3/10 , F21V13/00 , F21V13/08 , F21V13/12 , G01J3/0218 , G01J3/12 , G02B6/29332 , G02B6/29362 , G02B6/29388 , G02B6/29395 , G02B6/3508 , G02B6/353 , H01J65/04
摘要： The disclosure is directed to systems for providing illumination to a measurement head for optical metrology. In some embodiments of the disclosure, illumination beams from a plurality of illumination sources are combined to deliver illumination at one or more selected wavelengths to the measurement head. In some embodiments of the disclosure, intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. In some embodiments of the disclosure, illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.
摘要翻译：本公开涉及用于向用于光学测量的测量头提供照明的系统。在本公开的一些实施例中，来自多个照明源的照明光束被组合以将一个或多个所选波长的照明传送到测量头。在本公开的一些实施例中，控制传送到测量头的照明的强度和/或空间相干性。在本公开的一些实施例中，一个或多个所选波长的照明从配置成在连续波长范围内提供照明的宽带照明源传送。

7. 发明申请

WO2019143371A1 ON THE FLY TARGET ACQUISITION 审中-公开
公开(公告)号：WO2019143371A1
公开(公告)日：2019-07-25
申请号：PCT/US2018/018588
申请日：2018-02-19
申请人： KLA-TENCOR CORPORATION
发明人： MANASSEN, Amnon , HILL, Andrew , GUTMAN, Nadav , SIMSON, Yossi , NOVIKOV, Alexander , MASLOVSKY, Eugene
IPC分类号： H01L21/66 , H01L21/67
摘要： Metrology systems and methods are provided, which derive metrology target position on the wafer and possibly the target focus position during the movement of the wafer on the system's stage. The positioning data is derived before the target arrives its position (on-the-fly), sparing the time required in the prior art for the acquisition stage and increasing the throughput of the systems and methods. The collection channel may be split to provide for an additional moving-imaging channel comprising at least one TDI (time delay and integration) sensor with an associated analysis unit configured to derive wafer surface information, positioning and/or focusing information of the metrology targets with respect to the objective lens, during wafer positioning movements towards the metrology targets. Additional focusing-during-movement module and possibly feedbacking derived position and/or focus information to the stage may enhance the accuracy of the stopping of the stage.

8. 发明申请

WO2017172540A3 SYSTEM AND METHOD FOR SPECTRAL TUNING OF BROADBAND LIGHT SOURCES 审中-公开
公开(公告)号：WO2017172540A3
公开(公告)日：2017-10-05
申请号：PCT/US2017/024157
申请日：2017-03-24
申请人： KLA-TENCOR CORPORATION
发明人： HILL, Andrew , MANASSEN, Amnon , BACHAR, Ohad
IPC分类号： G01N21/31
摘要： A tunable spectral filter includes a first tunable dispersive element, a first optical element, a spatial filtering element located at the focal plane, a second optical element, and a second dispersive element. The first tunable dispersive element introduces spectral dispersion to an illumination beam with an adjustable dispersion. The first optical element focuses the illumination beam at a focal plane in which a distribution of a spectrum of the spectrally-dispersed illumination beam at the focal plane is controllable by adjusting the dispersion of the first tunable dispersive element. The spatial filtering element filters the spectrum of the illumination beam based on the distribution of the spectrum of the illumination beam at the focal plane. The second optical element collects the spectrally-dispersed illumination beam transmitted from the spatial filtering element. The second tunable dispersive element removes the dispersion introduced by the first tunable dispersive element from the illumination beam.

9. 发明申请

WO2008137919A1 COMPUTER-IMPLEMENTED METHODS, COMPUTER-READABLE MEDIA, AND SYSTEMS FOR IDENTIFYING ONE OR MORE OPTICAL MODES OF AN INSPECTION SYSTEM AS CANDIDATES FOR USE IN INSPECTION OF A LAYER OF A WAFER 审中-公开
标题翻译：计算机实现方法，计算机可读介质和系统，用于识别检查系统中的一个或多个光学模式，作为用于检查水平层的候选
公开(公告)号：WO2008137919A1
公开(公告)日：2008-11-13
申请号：PCT/US2008/062870
申请日：2008-05-07
申请人： KLA-TENCOR CORPORATION , FISCHER, Verlyn , MAHER, Chris , HIRIYANNAIAH, Harish , VORA, Younus , DING, Ping , HILL, Andrew
发明人： FISCHER, Verlyn , MAHER, Chris , HIRIYANNAIAH, Harish , VORA, Younus , DING, Ping , HILL, Andrew
IPC分类号： G01N21/95 , G01B11/06 , H01L21/66
CPC分类号： G01N21/9501 , G03F1/84
摘要： Computer- implemented methods, computer- readable media, and systems for identifying one or more optical modes of an inspection system as candidates for use in inspection of a layer of a wafer are provided. One method includes determining one or more characteristics of images (20) of the layer of the wafer acquired using the inspection system and different optical modes available on the inspection system. The method also includes identifying a first portion (22) of the different optical modes as not candidates for use in the inspection of the layer of the wafer based on the one or more characteristics of the images. In addition, the method includes generating output by eliminating (24) the first portion of the different optical modes from the different optical modes at which the images were acquired such that the output includes a second portion (30) of the different optical modes indicated as the candidates for use in the inspection (34).
摘要翻译：提供了计算机实现的方法，计算机可读介质和用于识别检查系统的一个或多个光学模式的系统，作为用于检查晶片层的候选。一种方法包括确定使用检查系统获取的晶片层的图像（20）的一个或多个特性以及在检查系统上可用的不同光学模式。该方法还包括基于图像的一个或多个特征，将不同光学模式的第一部分（22）识别为不用于检查晶片层的候选。此外，该方法包括通过从不同光学模式中消除（24）不同光学模式的第一部分来产生输出，在该模式下，获取图像，使得输出包括不同光学模式的第二部分（30），其指示为候选人在检查中使用（34）。

10. 发明授权

EP2474027B1 METROLOGY SYSTEMS AND METHODS 有权
公开(公告)号：EP2474027B1
公开(公告)日：2020-01-15
申请号：EP10814430.4
申请日：2010-09-01
申请人： KLA-Tencor Corporation
发明人： KANDEL, Daniel , LEVINSKI, Vladimir , SVIZHER, Alexander , SELIGSON, Joel , HILL, Andrew , BACHAR, Ohad , MANASSEN, Amnon , CHUANG, Yung-Ho Alex , SELA, Ilan , MARKOWITZ, Moshe , NEGRI, Daria , ROTEM, Efraim
IPC分类号： G01N21/956

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