专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO2009039486A3 SYSTEMS AND METHODS FOR CREATING PERSISTENT DATA FOR A WAFER AND FOR USING PERSISTENT DATA FOR INSPECTION-RELATED FUNCTIONS 审中-公开
标题翻译：用于为晶片创建持续数据并使用持续数据进行检查相关功能的系统和方法
公开(公告)号：WO2009039486A3
公开(公告)日：2009-06-11
申请号：PCT/US2008077203
申请日：2008-09-22
申请人： KLA TENCOR CORP , BHASKAR KRIS , BHASKAR CHETANA , KULKARNI ASHOK , ROSENGAUS ELIEZER , CAMPOCHIARO CECELIA , MAHER CHRIS , DUFFY BRIAN , KHULLAR ANEESH , KOHLI ALPA , BALASUBRAMANIAN LALITA , BHATTACHARYYA SANTOSH , MAHADEVAN MOHAN
发明人： BHASKAR KRIS , BHASKAR CHETANA , KULKARNI ASHOK , ROSENGAUS ELIEZER , CAMPOCHIARO CECELIA , MAHER CHRIS , DUFFY BRIAN , KHULLAR ANEESH , KOHLI ALPA , BALASUBRAMANIAN LALITA , BHATTACHARYYA SANTOSH , MAHADEVAN MOHAN
IPC分类号： H01L21/66
CPC分类号： G06T7/001 , G06T1/20 , G06T2207/30148
摘要： Various systems and methods for creating persistent data for a wafer and using persistent data for inspection-related functions are provided. One system includes a set of processor nodes coupled to a detector of an inspection system. Each of the processor nodes is configured to receive a portion of image data generated by the detector during scanning of a wafer. The system also includes an array of storage media separately coupled to each of the processor nodes. The processor nodes are configured to send all of the image data or a selected portion of the image data received by the processor nodes to the arrays of storage media such that all of the image data or the selected portion of the image data generated by the detector during the scanning of the wafer is stored in the arrays of the storage media.
摘要翻译：提供了用于为晶片创建持久数据并将持久数据用于检查相关功能的各种系统和方法。一个系统包括耦合到检查系统的检测器的一组处理器节点。每个处理器节点被配置为在扫描晶片期间接收由检测器产生的图像数据的一部分。该系统还包括分别耦合到每个处理器节点的存储介质阵列。处理器节点被配置为将由处理器节点接收的所有图像数据或图像数据的选定部分发送到存储介质阵列，使得由检测器生成的所有图像数据或图像数据的所选部分在扫描晶片期间存储在存储介质的阵列中。

2. 发明申请

WO2009039486A2 SYSTEMS AND METHODS FOR CREATING PERSISTENT DATA FOR A WAFER AND FOR USING PERSISTENT DATA FOR INSPECTION-RELATED FUNCTIONS 审中-公开
标题翻译：用于创建WAFER的持续数据并使用用于检查相关功能的数据的系统和方法
公开(公告)号：WO2009039486A2
公开(公告)日：2009-03-26
申请号：PCT/US2008/077203
申请日：2008-09-22
申请人： KLA-TENCOR CORPORATION , BHASKAR, Kris , BHASKAR, Chetana , KULKARNI, Ashok , ROSENGAUS, Eliezer , CAMPOCHIARO, Cecelia , MAHER, Chris , DUFFY, Brian , KHULLAR, Aneesh , KOHLI, Alpa , BALASUBRAMANIAN, Lalita , BHATTACHARYYA, Santosh , MAHADEVAN, Mohan
发明人： BHASKAR, Kris , BHASKAR, Chetana , KULKARNI, Ashok , ROSENGAUS, Eliezer , CAMPOCHIARO, Cecelia , MAHER, Chris , DUFFY, Brian , KHULLAR, Aneesh , KOHLI, Alpa , BALASUBRAMANIAN, Lalita , BHATTACHARYYA, Santosh , MAHADEVAN, Mohan
IPC分类号： H01L21/66
CPC分类号： G06T7/001 , G06T1/20 , G06T2207/30148
摘要： Various systems and methods for creating persistent data for a wafer and using persistent data for inspection-related functions are provided. One system includes a set of processor nodes coupled to a detector of an inspection system. Each of the processor nodes is configured to receive a portion of image data generated by the detector during scanning of a wafer. The system also includes an array of storage media separately coupled to each of the processor nodes. The processor nodes are configured to send all of the image data or a selected portion of the image data received by the processor nodes to the arrays of storage media such that all of the image data or the selected portion of the image data generated by the detector during the scanning of the wafer is stored in the arrays of the storage media.
摘要翻译：提供了用于创建晶片的持久数据并使用持久数据进行检查相关功能的各种系统和方法。一个系统包括耦合到检查系统的检测器的一组处理器节点。每个处理器节点被配置为在扫描晶片期间接收由检测器产生的图像数据的一部分。该系统还包括分开耦合到每个处理器节点的存储介质阵列。处理器节点被配置为将由处理器节点接收的图像数据的所有图像数据或选定部分发送到存储介质阵列，使得由检测器生成的图像数据或图像数据的所选部分在扫描晶片期间存储在存储介质的阵列中。

3. 发明申请

WO2009148876A1 METHODS AND SYSTEMS FOR GENERATING INFORMATION TO BE USED FOR SELECTING VALUES FOR ONE OR MORE PARAMETERS OF A DETECTION ALGORITHM 审中-公开
标题翻译：用于生成用于选择检测算法的一个或多个参数的值的信息的方法和系统
公开(公告)号：WO2009148876A1
公开(公告)日：2009-12-10
申请号：PCT/US2009/045127
申请日：2009-05-26
申请人： KLA-TENCOR CORPORATION , CHEN, Hong , VAN RIET, Michael, J. , CHEN, Chien - Huei (adam) , LIN, Jason, Z. , MAHER, Chris , KOWALSKI, Michal , BECKER, Barry , CHEN, Stephanie , BALAKRISHNAN, Subramanian , TUMMALA, Suryanarayana
发明人： CHEN, Hong , VAN RIET, Michael, J. , CHEN, Chien - Huei (adam) , LIN, Jason, Z. , MAHER, Chris , KOWALSKI, Michal , BECKER, Barry , CHEN, Stephanie , BALAKRISHNAN, Subramanian , TUMMALA, Suryanarayana
IPC分类号： H01L21/66
CPC分类号： G01N21/9501 , G01N21/956 , G01N2021/8822 , G01N2021/8854
摘要： Methods and systems for generating information to be used for selecting values for parameter(s) of a detection algorithm are provided. One method includes without user intervention, performing a scan of an area of a wafer using an inspection system and default values for parameter(s) of a detection algorithm to detect defects on the wafer. The method also includes selecting a portion of the defects from results of the scan based on a predetermined maximum number of total defects to be used for selecting values for the parameter(s) of the detection algorithm. The method further includes storing information, which can be used to select the values for the parameter(s) of the detection algorithm to be used for the inspection recipe without performing an additional scan of the wafer subsequent to the scan.
摘要翻译：提供了用于生成用于选择检测算法的参数值的信息的方法和系统。一种方法包括没有用户干预，使用检查系统执行晶片的区域的扫描，以及用于检测算法的参数的默认值以检测晶片上的缺陷。该方法还包括基于用于选择检测算法的参数的值的总缺陷的预定最大数量来从扫描结果中选择一部分缺陷。该方法还包括存储信息，其可用于选择要用于检查配方的检测算法的参数的值，而不执行扫描之后的晶片的附加扫描。

4. 发明申请

WO2011002651A1 MONITORING OF TIME-VARYING DEFECT CLASSIFICATION PERFORMANCE 审中-公开
标题翻译：监测时变缺陷分类性能
公开(公告)号：WO2011002651A1
公开(公告)日：2011-01-06
申请号：PCT/US2010/039656
申请日：2010-06-23
申请人： KLA-TENCOR CORPORATION , HUET, Patrick , DUFFY, Brian , PLIHAL, Martin , TRAUTZSCH, Thomas , MAHER, Chris
发明人： HUET, Patrick , DUFFY, Brian , PLIHAL, Martin , TRAUTZSCH, Thomas , MAHER, Chris
IPC分类号： G01R31/26
CPC分类号： G01R31/2656 , G01R31/2894 , G05B19/41875 , G05B2219/37224 , H01L22/12 , H01L22/20 , H01L2924/0002 , Y02P90/22 , H01L2924/00
摘要： Systems and methods for monitoring time-varying classification performance are disclosed. A method may include, but is not limited to: receiving one or more signals indicative of one or more properties of one or more samples from one or more scanning inspection tools; determining populations of one or more defect types for the one or more samples according an application of one or more classification rules to the one or more signals received from the one or more scanning inspection tools; determining populations of the one or more defect types for the one or more samples using one or more high-resolution inspection tools; and computing one or more correlations between populations of one or more defect types for one or more samples determined from application of one or more classification rules applied to one or more signals received from the one or more scanning inspection tools and populations of the one or more defect types for the one or more samples determined using the one or more high-resolution inspection tools.
摘要翻译：公开了用于监视时变分类性能的系统和方法。方法可以包括但不限于：从一个或多个扫描检查工具接收指示一个或多个样品的一个或多个特性的一个或多个信号; 根据一个或多个分类规则对从一个或多个扫描检查工具接收的一个或多个信号的应用来确定一个或多个样本的一个或多个缺陷类型的种群; 使用一个或多个高分辨率检查工具确定所述一个或多个样品的一种或多种缺陷类型的种群; 以及计算一个或多个缺陷类型的群体之间的一个或多个相关性，所述一个或多个缺陷类型的群体从应用于从一个或多个扫描检查工具和所述一个或多个扫描检查工具的群体接收到的一个或多个信号的一个或多个分类规则使用一个或多个高分辨率检查工具确定的一个或多个样品的缺陷类型。

5. 发明申请

WO2008137919A1 COMPUTER-IMPLEMENTED METHODS, COMPUTER-READABLE MEDIA, AND SYSTEMS FOR IDENTIFYING ONE OR MORE OPTICAL MODES OF AN INSPECTION SYSTEM AS CANDIDATES FOR USE IN INSPECTION OF A LAYER OF A WAFER 审中-公开
标题翻译：计算机实现方法，计算机可读介质和系统，用于识别检查系统中的一个或多个光学模式，作为用于检查水平层的候选
公开(公告)号：WO2008137919A1
公开(公告)日：2008-11-13
申请号：PCT/US2008/062870
申请日：2008-05-07
申请人： KLA-TENCOR CORPORATION , FISCHER, Verlyn , MAHER, Chris , HIRIYANNAIAH, Harish , VORA, Younus , DING, Ping , HILL, Andrew
发明人： FISCHER, Verlyn , MAHER, Chris , HIRIYANNAIAH, Harish , VORA, Younus , DING, Ping , HILL, Andrew
IPC分类号： G01N21/95 , G01B11/06 , H01L21/66
CPC分类号： G01N21/9501 , G03F1/84
摘要： Computer- implemented methods, computer- readable media, and systems for identifying one or more optical modes of an inspection system as candidates for use in inspection of a layer of a wafer are provided. One method includes determining one or more characteristics of images (20) of the layer of the wafer acquired using the inspection system and different optical modes available on the inspection system. The method also includes identifying a first portion (22) of the different optical modes as not candidates for use in the inspection of the layer of the wafer based on the one or more characteristics of the images. In addition, the method includes generating output by eliminating (24) the first portion of the different optical modes from the different optical modes at which the images were acquired such that the output includes a second portion (30) of the different optical modes indicated as the candidates for use in the inspection (34).
摘要翻译：提供了计算机实现的方法，计算机可读介质和用于识别检查系统的一个或多个光学模式的系统，作为用于检查晶片层的候选。一种方法包括确定使用检查系统获取的晶片层的图像（20）的一个或多个特性以及在检查系统上可用的不同光学模式。该方法还包括基于图像的一个或多个特征，将不同光学模式的第一部分（22）识别为不用于检查晶片层的候选。此外，该方法包括通过从不同光学模式中消除（24）不同光学模式的第一部分来产生输出，在该模式下，获取图像，使得输出包括不同光学模式的第二部分（30），其指示为候选人在检查中使用（34）。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式