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1. 发明授权

US5956142A Method of end point detection using a sinusoidal interference signal for a wet etch process 失效
标题翻译：使用用于湿式蚀刻工艺的正弦干涉信号的端点检测方法
公开(公告)号：US5956142A
公开(公告)日：1999-09-21
申请号：US937572
申请日：1997-09-25
申请人： K. Paul Muller , Klaus Dieter Penner
发明人： K. Paul Muller , Klaus Dieter Penner
IPC分类号： C23F1/00 , G01B11/06 , H01L21/306 , G01B9/02
CPC分类号： G01B11/0683
摘要： A process for monitoring and determining the end point of a wet etch process for removing a thin solid film 116 from a substrate by directing a light beam onto the substrate and monitoring the intensity of reflected beams, including the step of selecting a coherence length of the incoming beam 120 so that it is small enough so that no interference occurs in the liquid layer and large enough so that interference can occur in the thin solid film, i.e., light reflected from the interface between the liquid 118 and the top of the thin film, and light reflected from the interface between the bottom of the thin solid film and the substrate interferes. If the liquid layer is about 100 micrometers thick, and the thin film is about 1 micrometer thick, a coherence length of about 10 micrometers is suitable. Such coherence length can be provided with a suitable bandpass filter.
摘要翻译：一种用于监测和确定湿式蚀刻工艺的终点的方法，用于通过将光束引导到衬底上并监测反射光束的强度来从衬底去除薄的固体膜116，包括选择相干长度的步骤进入光束120使其足够小，使得在液体层中不会发生干扰并且足够大，使得在薄的固体膜中可能发生干扰，即从液体118和薄膜的顶部之间的界面反射的光并且从薄固体膜的底部与基板之间的界面反射的光干涉。如果液体层的厚度约为100微米，薄膜的厚度约为1微米，则约10微米的相干长度是合适的。这种相干长度可以提供合适的带通滤波器。

2. 发明授权

US08513972B2 Soft error resilient FPGA 失效
公开(公告)号：US08513972B2
公开(公告)日：2013-08-20
申请号：US13352900
申请日：2012-01-18
申请人： Luiz C. Alves , William J. Clarke , K. Paul Muller , Robert B. Tremaine
发明人： Luiz C. Alves , William J. Clarke , K. Paul Muller , Robert B. Tremaine
IPC分类号： H03K19/003
CPC分类号： H03K19/00315 , H03K19/17764
摘要： A field programmable gate array (FPGA) includes configuration RAM (CRAM) including at least one non-hardened portion and at least one hardened portion having an SER resilience greater than an SER resilience of the non-hardened portion.

3. 发明申请

US20120028458A1 ALPHA PARTICLE BLOCKING WIRE STRUCTURE AND METHOD FABRICATING SAME 有权
标题翻译： ALPHA颗粒阻塞线结构和方法制造
公开(公告)号：US20120028458A1
公开(公告)日：2012-02-02
申请号：US12052881
申请日：2008-03-21
申请人： Cyril Cabral, JR. , K. Paul Muller , Kenneth P. Rodbell
发明人： Cyril Cabral, JR. , K. Paul Muller , Kenneth P. Rodbell
IPC分类号： H01L21/768 , H01L23/556
CPC分类号： H01L23/5223 , H01L23/3192 , H01L23/53238 , H01L23/556 , H01L24/03 , H01L24/05 , H01L24/06 , H01L24/11 , H01L24/13 , H01L24/14 , H01L24/16 , H01L24/73 , H01L24/81 , H01L2224/02166 , H01L2224/03831 , H01L2224/0401 , H01L2224/05027 , H01L2224/05558 , H01L2224/05572 , H01L2224/05647 , H01L2224/0603 , H01L2224/06051 , H01L2224/10125 , H01L2224/11462 , H01L2224/11464 , H01L2224/13007 , H01L2224/13028 , H01L2224/13082 , H01L2224/13111 , H01L2224/13116 , H01L2224/13147 , H01L2224/13487 , H01L2224/1403 , H01L2224/16225 , H01L2224/16227 , H01L2224/73204 , H01L2224/81447 , H01L2924/00014 , H01L2924/01019 , H01L2924/01029 , H01L2924/01033 , H01L2924/01073 , H01L2924/01074 , H01L2924/01075 , H01L2924/01082 , H01L2924/01084 , H01L2924/01088 , H01L2924/014 , H01L2924/14 , H01L2924/15787 , H01L2224/05552 , H01L2924/00
摘要： An alpha particle blocking structure and method of making the structure. The structure includes: a semiconductor substrate; a set of interlevel dielectric layers stacked from a lowermost interlevel dielectric layer closest to the substrate to a uppermost interlevel dielectric layer furthest from the substrate, each interlevel dielectric layer of the set of interlevel dielectric layers including electrically conductive wires, top surfaces of the wires substantially coplanar with top surfaces of corresponding interlevel dielectric layers; an electrically conductive terminal pad contacting a wire pad of the uppermost interlevel dielectric layer; an electrically conductive plating base layer contacting a top surface of the terminal pad; and a copper block on the plating base layer.
摘要翻译：一种α粒子阻挡结构及其制造方法。该结构包括：半导体衬底; 一组层间电介质层，从最靠近衬底的最下层的层间电介质层堆叠到距离衬底最远的最上层的层间电介质层，层间电介质层组中的每个层间电介质层包括导电线，电线的顶表面基本上与对应的层间电介质层的顶表面共面; 接触最上层间介质层的焊盘的导电端子焊盘; 与所述端子焊盘的顶表面接触的导电电镀基层; 以及镀覆基底层上的铜块。

4. 发明申请

US20100301463A1 REDUCED SOFT ERROR RATE THROUGH METAL FILL AND PLACEMENT 有权
标题翻译：通过金属填充和放置减少软错误率
公开(公告)号：US20100301463A1
公开(公告)日：2010-12-02
申请号：US12473435
申请日：2009-05-28
申请人： K. Paul Muller , Alicia Wang
发明人： K. Paul Muller , Alicia Wang
IPC分类号： H01L23/556 , H01L21/71
CPC分类号： H01L23/556 , H01L23/522 , H01L2924/0002 , H01L2924/00
摘要： A method for reducing single event upsets in an integrated circuit includes the step of providing a plurality of levels within the integrated circuit, wherein the plurality of levels within the integrated circuit are in a stacked arrangement. The method also includes the step of providing a plurality of metal fill patterns within each of the plurality of levels within the integrated circuit. The method further includes the step of placing the plurality of metal fill patterns within at least one of the plurality of levels in a pattern such that a line of sight towards an active silicon layer does not exist within the stacked arrangement of the plurality of levels, thereby increasingly absorbing ionizing radiation particles, and thereby reducing single event upsets in the integrated circuit.
摘要翻译：一种用于减少集成电路中的单事件扰乱的方法包括在集成电路内提供多个电平的步骤，其中集成电路内的多个电平处于堆叠布置。该方法还包括在集成电路内的多个电平的每一个内提供多个金属填充图案的步骤。该方法还包括将多个金属填充图案放置在多个层中的至少一个层中的图案的步骤，使得朝向有源硅层的视线不存在于多个层次的堆叠布置中，从而越来越多地吸收电离辐射颗粒，从而减少集成电路中的单个事件的不适。

5. 发明授权

US07304352B2 Alignment insensitive D-cache cell 有权
标题翻译：对齐不敏感的D缓存单元
公开(公告)号：US07304352B2
公开(公告)日：2007-12-04
申请号：US11111454
申请日：2005-04-21
申请人： K. Paul Muller , Kevin A. Batson , Michael J. Lee
发明人： K. Paul Muller , Kevin A. Batson , Michael J. Lee
IPC分类号： H01L29/76 , H01L29/94
CPC分类号： G11C11/412 , H01L27/11 , H01L27/1104 , Y10S257/903 , Y10S257/904
摘要： A D-Cache SRAM cell having a modified design in schematic and layout that exhibits increased symmetry from the circuit schematic and the physical cell layout perspectives. That is, the SRAM cell includes two read ports and minimizes asymmetry by provisioning one read port on a true side and one on the complement side. Asymmetry is additionally minimized in layout as cross coupling on both the true and complement sides rises up one level by providing from the local interconnect level a via connection to a M1 or metallization level. Moreover, the distance between the local interconnect (MC) and the gate conductor structure (PC) has been enlarged and equalized for each of the pFETs in the cross-latched SRAM cell. As a result, the SRAM cell has been rendered insensitive to overlay (local interconnect processing too close) by maximizing this MC-PC distance.
摘要翻译：具有改进的示意图和布局设计的D缓存SRAM单元，其显示出来自电路原理图和物理单元布局视角的增加的对称性。也就是说，SRAM单元包括两个读取端口，并且通过在真实侧提供一个读取端口和在补充端上提供一个读取端口来最小化不对称性。通过从本地互连级别提供通向M1或金属化级别的通孔连接，通过从真实和补偿侧两者的交叉耦合上升到一个级别，不对称性在布局中另外最小化。此外，局部互连（MC）和栅极导体结构（PC）之间的距离已经在交叉锁存SRAM单元中的每个pFET被放大和均衡。因此，通过最大化这个MC-PC距离，SRAM单元已经对覆盖（局部互连处理太近）变得不敏感。

6. 发明授权

US06960806B2 Double gated vertical transistor with different first and second gate materials 失效
标题翻译：双门控垂直晶体管，具有不同的第一和第二栅极材料
公开(公告)号：US06960806B2
公开(公告)日：2005-11-01
申请号：US09886823
申请日：2001-06-21
申请人： Andres Bryant , Meikei Ieong , K. Paul Muller , Edward J. Nowak , David M. Fried , Jed Rankin
发明人： Andres Bryant , Meikei Ieong , K. Paul Muller , Edward J. Nowak , David M. Fried , Jed Rankin
IPC分类号： H01L21/336 , H01L21/8238 , H01L27/092 , H01L29/49 , H01L29/78 , H01L29/786 , H01L29/76
CPC分类号： H01L29/4908 , H01L21/823842 , H01L27/092 , H01L29/66795 , H01L29/785
摘要： Accordingly, the present invention provides a double gated transistor and a method for forming the same that results in improved device performance and density. The preferred embodiment of the present invention uses provides a double gated transistor with asymmetric gate doping, where one of the double gates is doped degenerately n-type and the other degenerately p-type. By doping on of the gates n-type, and the other p-type, the threshold voltage of the resulting device is improved. In particular, by asymmetrically doping the two gates, the resulting transistor can, with adequate doping of the body, have a threshold voltage in a range that enables low-voltage CMOS operation. For example, a transistor can be created that has a threshold voltage between 0V and 0.5V for nFETs and between 0 and −0.5V for pFETs.
摘要翻译：因此，本发明提供一种双门控晶体管及其形成方法，其导致改进的器件性能和密度。本发明的优选实施例提供了具有不对称栅极掺杂的双门控晶体管，其中双栅极中的一个被简并掺杂为n型，另一个为简并p型。通过掺杂栅极n型和另一种p型，所得器件的阈值电压得到改善。特别地，通过不对称地掺杂两个栅极，所得到的晶体管可以通过适当掺杂的体，在允许低电压CMOS操作的范围内具有阈值电压。例如，可以产生对于nFET具有在0V和0.5V之间的阈值电压并且对于pFET而言在0和-0.5V之间的晶体管。

7. 发明授权

US06463184B1 Method and apparatus for overlay measurement 失效
标题翻译：覆盖测量方法和装置
公开(公告)号：US06463184B1
公开(公告)日：2002-10-08
申请号：US09335091
申请日：1999-06-17
申请人： Chris Gould , K. Paul Muller , V. C. Jai Prakash , Robert van den Berg
发明人： Chris Gould , K. Paul Muller , V. C. Jai Prakash , Robert van den Berg
IPC分类号： G06K936
CPC分类号： G03F9/7092 , G03F7/70633
摘要： A process for measuring the alignment of different layers on a semiconductor wafer (33) includes forming repetitive alignment marks (14, 24) having substantially the same period on the different layers on the wafer (33). The images of the overlay alignment marks (14, 24) are converted from space domain to frequency domain through Fourier transformations. The alignment measurements are performed by calculating the phase difference between the images corresponding to the repetitive patterns (14, 24) on different layers.
摘要翻译：用于测量半导体晶片（33）上的不同层的对准的方法包括在晶片（33）上的不同层上形成具有基本上相同周期的重复对准标记（14,24）。覆盖对齐标记（14,24）的图像通过傅立叶变换从空间域转换到频域。通过计算对应于不同层上的重复图案（14,24）的图像之间的相位差来执行对准测量。

8. 发明授权

US09053223B2 Modular refrigeration unit health monitoring 有权
标题翻译：模块化制冷机组健康监测
公开(公告)号：US09053223B2
公开(公告)日：2015-06-09
申请号：US13355063
申请日：2012-01-20
申请人： Scott Hadderman , Timothy R. Marchini , K. Paul Muller , Katie L. Pizzolato , Andrew H. Vogel
发明人： Scott Hadderman , Timothy R. Marchini , K. Paul Muller , Katie L. Pizzolato , Andrew H. Vogel
IPC分类号： G21C17/00 , G06F15/00 , G06F11/34 , G06F11/30
CPC分类号： G06F11/3476 , F25B49/005 , G06F1/206 , G06F11/3058 , G06F11/3072
摘要： A method for modular refrigeration unit (MRU) health monitoring includes receiving log data on a log data input from the MRU by a MRU health monitor, the log data comprising a plurality of datapoints, each of the plurality of datapoints comprising a position of a control valve of the MRU and a corresponding time; determining by the MRU health monitor a plurality of MRU parameters from the log data; determining a plurality of MRU health flags based on the MRU parameters; adding the plurality of MRU health flags to determine an MRU health score; determining whether the MRU health score is higher than a replacement threshold; and indicating replacement of the MRU in the event the MRU health score is higher than the replacement threshold.
摘要翻译：一种用于模块化制冷单元（MRU）健康监测的方法包括：通过MRU健康监视器接收来自MRU的日志数据的日志数据，所述日志数据包括多个数据点，所述多个数据点中的每一个包括控制的位置 MRU的阀门和相应的时间; 由MRU健康监视器根据对数数据确定多个MRU参数; 基于MRU参数确定多个MRU健康标志; 添加多个MRU健康标志以确定MRU健康评分; 确定MRU健康评分是否高于置换阈值; 并且在MRU健康评分高于替换阈值的情况下指示MRU的替换。

9. 发明授权

US08991198B2 Cooling system control and servicing based on time-based variation of an operational variable 有权
公开(公告)号：US08991198B2
公开(公告)日：2015-03-31
申请号：US13442897
申请日：2012-04-10
申请人： Daniel J. Kearney , Rejean P. Levesque , K. Paul Muller , Andrew H. Vogel , Emmanuel Yashchin
发明人： Daniel J. Kearney , Rejean P. Levesque , K. Paul Muller , Andrew H. Vogel , Emmanuel Yashchin
IPC分类号： F25D3/12 , F25B5/02 , F25B49/02 , F28F27/00 , H05K7/20
CPC分类号： F28F27/00 , F25B5/02 , F25B49/02 , F25B2600/2513 , F25B2700/2106 , F25B2700/21152 , F25B2700/21161 , F25B2700/21162 , F25B2700/21163 , F25B2700/21174 , F25B2700/21175 , H05K7/20836
摘要： Automated control of a cooling system cooling at least one electronic component is provided. The control includes monitoring over a period of time variation of an operational variable of the cooling system or of the at least one electronic component, and based, at least in part, on variation of the operational variable over the period of time, automatically determining whether to adjust control of the cooling system to limit variation of the operational variable. In one implementation, depending on the variation of the operational variable, and whether control of the cooling system has been previously adjusted, the method may further include automatically determining a probability of fail or an expected residual life of the cooling system, and responsive to the predicted probability of fail exceeding a first acceptable threshold or the expected residual life being below a second acceptable threshold, automatically scheduling for a cooling system repair or replacement.

10. 发明申请

US20130191072A1 MODULAR REFRIGERATION UNIT HEALTH MONITORING 有权
标题翻译：模块化制冷单元卫生监测
公开(公告)号：US20130191072A1
公开(公告)日：2013-07-25
申请号：US13355063
申请日：2012-01-20
申请人： Scott Hadderman , Timothy R. Marchini , K. Paul Muller , Katie L. Pizzolato , Andrew H. Vogel
发明人： Scott Hadderman , Timothy R. Marchini , K. Paul Muller , Katie L. Pizzolato , Andrew H. Vogel
IPC分类号： G21C17/00 , G06F15/00
CPC分类号： G06F11/3476 , F25B49/005 , G06F1/206 , G06F11/3058 , G06F11/3072
摘要： A method for modular refrigeration unit (MRU) health monitoring includes receiving log data on a log data input from the MRU by a MRU health monitor, the log data comprising a plurality of datapoints, each of the plurality of datapoints comprising a position of a control valve of the MRU and a corresponding time; determining by the MRU health monitor a plurality of MRU parameters from the log data; determining a plurality of MRU health flags based on the MRU parameters; adding the plurality of MRU health flags to determine an MRU health score; determining whether the MRU health score is higher than a replacement threshold; and indicating replacement of the MRU in the event the MRU health score is higher than the replacement threshold.
摘要翻译：一种用于模块化制冷单元（MRU）健康监测的方法包括：通过MRU健康监视器接收来自MRU的日志数据的日志数据，所述日志数据包括多个数据点，所述多个数据点中的每一个包括控制的位置 MRU的阀门和相应的时间; 由MRU健康监视器根据对数数据确定多个MRU参数; 基于MRU参数确定多个MRU健康标志; 添加多个MRU健康标志以确定MRU健康评分; 确定MRU健康评分是否高于置换阈值; 并且在MRU健康评分高于替换阈值的情况下指示MRU的替换。

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