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1. 发明授权

US06782756B2 Micromechanical component and equalization method 有权
标题翻译：微机械部件和均衡方法
公开(公告)号：US06782756B2
公开(公告)日：2004-08-31
申请号：US10239470
申请日：2003-01-09
申请人： Joerg Muchow , Jochen Franz , Uwe Lipphardt , Andreas Duell , Wolfgang Romes
发明人： Joerg Muchow , Jochen Franz , Uwe Lipphardt , Andreas Duell , Wolfgang Romes
IPC分类号： G01L900
CPC分类号： G01L9/0054
摘要： A micromechanical component, in particular a pressure sensor, including a substrate that has a membrane region, a surrounding region of the membrane region, at least one measuring resistance provided in the membrane region and modifiable by deformation of the membrane region, and a corresponding evaluation circuit provided in the surrounding region. An interference effect on the measuring resistance is producible by way of a deformation of parts, in particular conductor paths, of the evaluation circuit relative to the substrate. The invention also creates a corresponding equalization method on a test chip or as an individual final equalization.
摘要翻译：一种微机械部件，特别是压力传感器，包括具有膜区域的基板，膜区域的周围区域，设置在膜区域中的至少一个测量电阻，并且可以通过膜区域的变形而修改，以及相应的评估电路设在周边地区。测量电阻的干涉效应可以通过评估电路相对于衬底的部件，特别是导体路径的变形来产生。本发明还在测试芯片上或作为单独的最终均衡产生相应的均衡方法。

2. 发明申请

US20110286069A1 CONNECTING STRUCTURE FOR MICROMECHANICAL OSCILLATING DEVICES 有权
标题翻译：微电子振荡器件的连接结构
公开(公告)号：US20110286069A1
公开(公告)日：2011-11-24
申请号：US13106453
申请日：2011-05-12
申请人： Stefan PINTER , Andreas Duell , Joerg Muchow , Zoltan Lestyan
发明人： Stefan PINTER , Andreas Duell , Joerg Muchow , Zoltan Lestyan
IPC分类号： G02B26/08
CPC分类号： G02B26/0833 , B81B7/008 , B81B2201/042 , B81B2203/0109 , B81B2203/0154
摘要： A connecting structure for micromechanical oscillating devices, in particular micromechanical oscillating mirrors. The connecting structure is at least indirectly connectable to a micromechanical oscillating structure, on the one hand, and to an elastic element, on the other hand, for measuring torsions of the micromechanical oscillating structure, and includes at least one, in particular at least two, preferably three, legs which are situated parallel to a rotation axis of the micromechanical oscillating structure, and at least one further leg which is situated perpendicularly to the rotation axis. The extension of the connecting structure parallel to the rotation axis has at least two-and-a-half times, in particular three times, the extension of the connecting structure perpendicular to the rotation axis, and includes at least one resistance element for measuring torsions of the connecting structure, the resistance element being situated in the area of increased mechanical stress when the connecting structure undergoes torsion.
摘要翻译：用于微机械振荡装置，特别是微机械振荡镜的连接结构。另一方面，连接结构至少间接地可连接到微机械振荡结构，另一方面，用于测量微机械振荡结构的扭转，并且包括至少一个，特别是至少两个，优选三个平行于微机械振荡结构的旋转轴线的腿部，以及至少一个垂直于旋转轴线设置的另外的腿部。平行于旋转轴线的连接结构的延伸部至少有两倍的时间，特别是连接结构的垂直于旋转轴的延伸的三倍，并且包括至少一个用于测量扭转的电阻元件的连接结构，电阻元件位于连接结构经受扭转时增加的机械应力的区域。

3. 发明授权

US07279759B2 Membrane sensor 有权
标题翻译：膜传感器
公开(公告)号：US07279759B2
公开(公告)日：2007-10-09
申请号：US10547041
申请日：2004-02-18
申请人： Roland Müller-Fiedler , Hans Hecht , Joerg Muchow , Matthias Fuertsch , Andreas Stratmann , Heribert Weber , Winfried Bernhard , Detlef Gruen , Andreas Duell , Rainer Schink , Ulrich Wagner , Christoph Schelling
发明人： Roland Müller-Fiedler , Hans Hecht , Joerg Muchow , Matthias Fuertsch , Andreas Stratmann , Heribert Weber , Winfried Bernhard , Detlef Gruen , Andreas Duell , Rainer Schink , Ulrich Wagner , Christoph Schelling
IPC分类号： H01L27/14 , H01L29/82 , H01L29/84
CPC分类号： G01L9/0042 , G01F1/6845 , G01N7/10
摘要： A micromechanical sensor and a method for manufacturing a micromechanical sensor which has at least one membrane are provided. The membrane is made of a first material which is accommodated in a surrounding second material, and the membrane is configured for sensing a medium surrounding it. The membrane is reinforced, at least partly, by a third material at break-sensitive points on the membrane rim. Reinforcement of the membrane rim increases the stability and thus also the service life of the membrane and the sensor.
摘要翻译：提供了具有至少一个膜的微机械传感器和用于制造微机械传感器的方法。膜由容纳在周围的第二材料中的第一材料制成，并且膜构造成用于感测周围的介质。至少部分地，膜在膜边缘上的断裂点被第三材料增强。膜边缘的加强增加了膜和传感器的稳定性，从而增加了膜的使用寿命。

4. 发明申请

US20050016288A1 Micromechanical apparatus, pressure sensor, and method 审中-公开
标题翻译：微机械装置，压力传感器和方法
公开(公告)号：US20050016288A1
公开(公告)日：2005-01-27
申请号：US10853793
申请日：2004-05-25
申请人： Joerg Muchow , Andreas Junger , Hubert Benzel , Juergen Nitsche , Frank Schaefer , Andreas Duell , Heinz-Georg Vossenberg , Christoph Schelling
发明人： Joerg Muchow , Andreas Junger , Hubert Benzel , Juergen Nitsche , Frank Schaefer , Andreas Duell , Heinz-Georg Vossenberg , Christoph Schelling
IPC分类号： B81B3/00 , B81C1/00 , G01L9/00
CPC分类号： B81C1/00158 , B81B2201/0264 , B81B2203/0315 , B81C2201/0115 , G01L9/0042
摘要： A micromechanical apparatus, a pressure sensor, and a method, a closed cavity being provided beneath a membrane, the membrane having a greater thickness in a first membrane region than in a second membrane region.
摘要翻译：一种微机械装置，压力传感器和方法，在膜下方设置闭合腔，所述膜在第一膜区域中具有比在第二膜区域中更大的厚度。

5. 发明授权

US08462415B2 Connecting structure for micromechanical oscillating devices 有权
标题翻译：微机械振荡装置的连接结构
公开(公告)号：US08462415B2
公开(公告)日：2013-06-11
申请号：US13106453
申请日：2011-05-12
申请人： Stefan Pinter , Andreas Duell , Joerg Muchow , Zoltan Lestyan
发明人： Stefan Pinter , Andreas Duell , Joerg Muchow , Zoltan Lestyan
IPC分类号： G02B26/08
CPC分类号： G02B26/0833 , B81B7/008 , B81B2201/042 , B81B2203/0109 , B81B2203/0154
摘要： A connecting structure for micromechanical oscillating devices, in particular micromechanical oscillating mirrors. The connecting structure is at least indirectly connectable to a micromechanical oscillating structure, on the one hand, and to an elastic element, on the other hand, for measuring torsions of the micromechanical oscillating structure, and includes at least one, in particular at least two, preferably three, legs which are situated parallel to a rotation axis of the micromechanical oscillating structure, and at least one further leg which is situated perpendicularly to the rotation axis. The extension of the connecting structure parallel to the rotation axis has at least two-and-a-half times, in particular three times, the extension of the connecting structure perpendicular to the rotation axis, and includes at least one resistance element for measuring torsions of the connecting structure, the resistance element being situated in the area of increased mechanical stress when the connecting structure undergoes torsion.
摘要翻译：用于微机械振荡装置，特别是微机械振荡镜的连接结构。另一方面，连接结构至少间接地可连接到微机械振荡结构，另一方面，用于测量微机械振荡结构的扭转，并且包括至少一个，特别是至少两个，优选三个平行于微机械振荡结构的旋转轴线的腿部，以及至少一个垂直于旋转轴线设置的另外的腿部。平行于旋转轴线的连接结构的延伸部至少有两倍的时间，特别是连接结构的垂直于旋转轴的延伸的三倍，并且包括至少一个用于测量扭转的电阻元件的连接结构，电阻元件位于连接结构经受扭转时增加的机械应力的区域。

6. 发明授权

US6062088A Pressure sensor 有权
标题翻译：压力传感器
公开(公告)号：US6062088A
公开(公告)日：2000-05-16
申请号：US171035
申请日：1999-03-03
申请人： Kurt Ingrisch , Kurt Weiblen , Hubert Benzel , Botho Ziegenbein , Hans-Peter Trah , Andreas Duell , Karl Bender , Jochen Franz
发明人： Kurt Ingrisch , Kurt Weiblen , Hubert Benzel , Botho Ziegenbein , Hans-Peter Trah , Andreas Duell , Karl Bender , Jochen Franz
IPC分类号： G01L9/04 , G01L9/00 , H01L29/84 , G01L9/06 , G01L7/06
CPC分类号： G01L9/006 , G01L9/0052
摘要： A pressure sensor includes a metallic membrane and a frame. For detecting the deflection of the membrane, a silicon bridge element having piezoresistive resistor elements is arranged on the membrane and the frame.
摘要翻译： PCT No.PCT / DE97 / 00716 Sec。 371日期1999年3月3日 102（e）1999年3月3日PCT PCT 1997年4月9日PCT公布。第WO97 / 39320号公报日期1997年10月23日压力传感器包括金属膜和框架。为了检测膜的挠曲，在膜和框架上布置具有压阻电阻元件的硅桥元件。

7. 发明授权

US5703282A Pressure sensor for pressure detection in combustion chamber of internal combustion engine 失效
标题翻译：用于内燃机燃烧室压力检测的压力传感器
公开(公告)号：US5703282A
公开(公告)日：1997-12-30
申请号：US734240
申请日：1996-10-16
申请人： Matthias Kuesell , Andreas Duell , Karl Bender , Kay Borchert
发明人： Matthias Kuesell , Andreas Duell , Karl Bender , Kay Borchert
IPC分类号： G01L9/00 , F02D35/00 , F02D45/00 , G01L23/08 , G01L23/18 , G01L23/22
CPC分类号： G01L23/08 , G01L23/18
摘要： A pressure sensor for pressure detection in a combustion chamber of internal combustion engines of motor vehicles has a housing provided with an opening, a measuring element, a plunger arranged in the opening of the housing and having one end acting on the measuring element so that a measuring signal is produced proportionally to a pressure to be determined, the plunger directly abutting against the measuring element and having a material with a yielding point which is smaller than a breaking limit of a material of the measuring element, the end of the plunger which acts on the measuring element is spherical and abuts against the measuring element with such a contact surface that occurring stresses do not exceed a predetermined nominal value.
摘要翻译：一种用于机动车内燃机的燃烧室中的压力检测用压力传感器，具有设置有开口，测量元件和柱塞的壳体，该柱塞布置在壳体的开口中，并具有作用在测量元件上的一端，测量信号与要确定的压力成比例地产生，柱塞直接抵靠测量元件并且具有屈服点小于测量元件的材料的断裂极限的材料，所述柱塞的端部作用在测量元件上是球形的并且具有这样的接触表面抵靠测量元件，发生的应力不超过预定的标称值。

8. 发明申请

US20150103321A1 MICROMECHANICAL COMPONENT INCLUDING AN INTEGRATED PHOTODIODE AND A MICROPROJECTOR 有权
标题翻译：包含一体化光电子的微组分成分和微晶玻璃
公开(公告)号：US20150103321A1
公开(公告)日：2015-04-16
申请号：US14513440
申请日：2014-10-14
申请人： Sebastian Reiss , Frederic Njikam Njimonzie , Andreas Duell , Frank Fischer
发明人： Sebastian Reiss , Frederic Njikam Njimonzie , Andreas Duell , Frank Fischer
IPC分类号： H04N9/31 , H01L31/0232 , G02B26/08
CPC分类号： H04N5/7458 , B41J2/442 , B41J2/473 , G02B26/0833 , H01L31/02325 , H04N1/04 , H04N9/3129 , H04N9/3182 , H04N9/3194
摘要： A micromechanical component includes: at least one micromirror; and an integrated photodiode. The micromechanical component is part of a microprojector which further includes a light source. The integrated photodiode of the micromechanical component receives light from the light source.
摘要翻译：微机械部件包括：至少一个微镜; 和集成光电二极管。微机械部件是进一步包括光源的微型喷射器的一部分。微机械部件的集成光电二极管接收来自光源的光。

9. 发明申请

US20060197634A1 Membrane sensor 有权
标题翻译：膜传感器
公开(公告)号：US20060197634A1
公开(公告)日：2006-09-07
申请号：US10547041
申请日：2004-02-18
申请人： Roland Muller-Fiedler , Hans Hecht , Joerg Fuertsch , Matthhias Fuertsch , Andreas Stratmann , Heribert Weber , Winfred Bernhard , Detlef Gruen , Andreas Duell , Rainer Schink , Ulrich Wagner , Christop Schelling
发明人： Roland Muller-Fiedler , Hans Hecht , Joerg Fuertsch , Matthhias Fuertsch , Andreas Stratmann , Heribert Weber , Winfred Bernhard , Detlef Gruen , Andreas Duell , Rainer Schink , Ulrich Wagner , Christop Schelling
IPC分类号： H01H51/22
CPC分类号： G01L9/0042 , G01F1/6845 , G01N7/10
摘要： A micromechanical sensor and a method for manufacturing a micromechanical sensor which has at least one membrane are provided. The membrane is made of a first material which is accommodated in a surrounding second material, and the membrane is configured for sensing a medium surrounding it. The membrane is reinforced, at least partly, by a third material at break-sensitive points on the membrane rim. Reinforcement of the membrane rim increases the stability and thus also the service life of the membrane and the sensor.
摘要翻译：提供了具有至少一个膜的微机械传感器和用于制造微机械传感器的方法。膜由容纳在周围的第二材料中的第一材料制成，并且膜构造成用于感测周围的介质。至少部分地，膜在膜边缘上的断裂点被第三材料增强。膜边缘的加强增加了膜和传感器的稳定性，从而增加了膜的使用寿命。

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