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1. 发明授权

US07279759B2 Membrane sensor 有权
标题翻译：膜传感器
公开(公告)号：US07279759B2
公开(公告)日：2007-10-09
申请号：US10547041
申请日：2004-02-18
申请人： Roland Müller-Fiedler , Hans Hecht , Joerg Muchow , Matthias Fuertsch , Andreas Stratmann , Heribert Weber , Winfried Bernhard , Detlef Gruen , Andreas Duell , Rainer Schink , Ulrich Wagner , Christoph Schelling
发明人： Roland Müller-Fiedler , Hans Hecht , Joerg Muchow , Matthias Fuertsch , Andreas Stratmann , Heribert Weber , Winfried Bernhard , Detlef Gruen , Andreas Duell , Rainer Schink , Ulrich Wagner , Christoph Schelling
IPC分类号： H01L27/14 , H01L29/82 , H01L29/84
CPC分类号： G01L9/0042 , G01F1/6845 , G01N7/10
摘要： A micromechanical sensor and a method for manufacturing a micromechanical sensor which has at least one membrane are provided. The membrane is made of a first material which is accommodated in a surrounding second material, and the membrane is configured for sensing a medium surrounding it. The membrane is reinforced, at least partly, by a third material at break-sensitive points on the membrane rim. Reinforcement of the membrane rim increases the stability and thus also the service life of the membrane and the sensor.
摘要翻译：提供了具有至少一个膜的微机械传感器和用于制造微机械传感器的方法。膜由容纳在周围的第二材料中的第一材料制成，并且膜构造成用于感测周围的介质。至少部分地，膜在膜边缘上的断裂点被第三材料增强。膜边缘的加强增加了膜和传感器的稳定性，从而增加了膜的使用寿命。

2. 发明授权

US07148077B2 Micromechanical structural element having a diaphragm and method for producing such a structural element 有权
标题翻译：具有隔膜的微机械结构元件及其制造方法
公开(公告)号：US07148077B2
公开(公告)日：2006-12-12
申请号：US10970069
申请日：2004-10-19
申请人： Matthias Fuertsch , Stefan Pinter , Heribert Weber , Frank Fischer , Lars Metzger , Christoph Schelling , Frieder Sundermeier
发明人： Matthias Fuertsch , Stefan Pinter , Heribert Weber , Frank Fischer , Lars Metzger , Christoph Schelling , Frieder Sundermeier
IPC分类号： H01L21/00
CPC分类号： B81B3/007 , B81B2201/0264 , B81B2203/0127 , B81C2201/0167
摘要： A micromechanical structural element, having a very stable diaphragm, implemented in a pure front process and in a layer construction on a substrate. The layer construction includes at least one sacrificial layer and one diaphragm layer above the sacrificial layer, which is structured for laying bare the diaphragm and generating stabilizing elements on the diaphragm, at least one recess being generated for a stabilizing element of the diaphragm. The structure generated in the sacrificial layer is then at least superficially closed with at least one material layer being deposited above the structured sacrificial layer, this material layer forming at least a part of the diaphragm layer and being structured to generate at least one etch hole for etching the sacrificial layer, which is removed from the region under the etch hole, the diaphragm and the at least one stabilizing element being laid bare, a cavity being created under the diaphragm.
摘要翻译：具有非常稳定的隔膜的微机械结构元件以纯正的前工艺和基底上的层结构实现。该层结构包括至少一个牺牲层和牺牲层上方的一个隔膜层，其被构造用于铺设隔膜并在隔膜上产生稳定元件，为隔膜的稳定元件产生至少一个凹槽。然后在牺牲层中产生的结构至少被表面封闭，其中至少一个材料层沉积在结构化牺牲层的上方，该材料层形成隔膜层的至少一部分并被构造成产生至少一个蚀刻孔蚀刻从蚀刻孔下方的区域去除的牺牲层，隔膜和至少一个稳定元件被裸露，在隔膜下面形成空腔。

3. 发明申请

US20050006235A1 Sensor element 审中-公开
标题翻译：传感器元件
公开(公告)号：US20050006235A1
公开(公告)日：2005-01-13
申请号：US10885196
申请日：2004-07-06
申请人： Matthias Fuertsch , Heribert Weber , Christoph Schelling
发明人： Matthias Fuertsch , Heribert Weber , Christoph Schelling
IPC分类号： G01P5/12 , G01F1/684 , G01F1/692 , G01F1/696 , G01N27/26 , G01P15/00 , H05B1/02
CPC分类号： G01P15/008 , G01F1/684 , G01F1/6845 , G01F1/696
摘要： A sensor element has at least one heater structure, at least one first circuit trace being provided via which current is injected into the heater structure; at least one second circuit trace being provided via which the current is coupled out of the heater structure, and an arrangement for detecting the resistances of individual sections of the heater structure. According to the present invention, the arrangement for detecting the resistances includes additional, high-resistance measuring lines by which the voltage is tapped directly at the individual segments of the heater structure.
摘要翻译：传感器元件具有至少一个加热器结构，提供至少一个第一电路迹线，电流被注入到加热器结构中; 提供至少一个第二电路迹线，电流被耦合到加热器结构之外，以及用于检测加热器结构的各个部分的电阻的装置。根据本发明，用于检测电阻的装置包括附加的高电阻测量线，通过该测量线直接在加热器结构的各个部分上被窃听。

4. 发明申请

US20050098840A1 Micromechanical structural element having a diaphragm and method for producing such a structural element 有权
标题翻译：具有隔膜的微机械结构元件及其制造方法
公开(公告)号：US20050098840A1
公开(公告)日：2005-05-12
申请号：US10970069
申请日：2004-10-19
申请人： Matthias Fuertsch , Stefan Pinter , Heribert Weber , Frank Fischer , Lars Metzger , Christoph Schelling , Frieder Sundermeier
发明人： Matthias Fuertsch , Stefan Pinter , Heribert Weber , Frank Fischer , Lars Metzger , Christoph Schelling , Frieder Sundermeier
IPC分类号： B81B3/00 , B81C1/00 , H01L21/00 , H01L27/14
CPC分类号： B81B3/007 , B81B2201/0264 , B81B2203/0127 , B81C2201/0167
摘要： A micromechanical structural element, having a very stable diaphragm, implemented in a pure front process and in a layer construction on a substrate. The layer construction includes at least one sacrificial layer and one diaphragm layer above the sacrificial layer, which is structured for laying bare the diaphragm and generating stabilizing elements on the diaphragm, at least one recess being generated for a stabilizing element of the diaphragm. The structure generated in the sacrificial layer is then at least superficially closed with at least one material layer being deposited above the structured sacrificial layer, this material layer forming at least a part of the diaphragm layer and being structured to generate at least one etch hole for etching the sacrificial layer, which is removed from the region under the etch hole, the diaphragm and the at least one stabilizing element being laid bare, a cavity being created under the diaphragm.
摘要翻译：具有非常稳定的隔膜的微机械结构元件以纯正的前工艺和基底上的层结构实现。该层结构包括至少一个牺牲层和牺牲层上方的一个隔膜层，其被构造用于铺设隔膜并在隔膜上产生稳定元件，为隔膜的稳定元件产生至少一个凹槽。然后在牺牲层中产生的结构至少被表面封闭，其中至少一个材料层沉积在结构化牺牲层的上方，该材料层形成隔膜层的至少一部分并被构造成产生至少一个蚀刻孔蚀刻从蚀刻孔下方的区域去除的牺牲层，隔膜和至少一个稳定元件被裸露，在隔膜下面形成空腔。

5. 发明申请

US20070128755A1 Micronozzle plate and manufacturing method 审中-公开
标题翻译：微喷盘及制造方法
公开(公告)号：US20070128755A1
公开(公告)日：2007-06-07
申请号：US11585769
申请日：2006-10-23
申请人： Matthias Fuertsch , Stefan Finkbeiner , Christoph Schelling , Stefan Weiss , Thomas Wagner , Christian Maeurer , Ines Breibach
发明人： Matthias Fuertsch , Stefan Finkbeiner , Christoph Schelling , Stefan Weiss , Thomas Wagner , Christian Maeurer , Ines Breibach
IPC分类号： H01L21/00
CPC分类号： B81C1/00087 , B81B2201/057
摘要： In the manufacture of at least one passage in a silicon wafer, in a first method step, starting from a first side of the wafer, a first recess is produced in the wafer, and in a second method step, starting from a second side of the wafer, a second recess is produced in the wafer. The first recess and the second recess are produced such that together they form a passage between the first and second sides of the silicon wafer.
摘要翻译：在制造硅晶片中的至少一个通道的过程中，在第一方法步骤中，从晶片的第一侧开始，在晶片中产生第一凹槽，并且在第二方法步骤中，从第二方面开始，在晶片中产生第二凹槽。制造第一凹部和第二凹部，使得它们一起形成硅晶片的第一和第二面之间的通道。

6. 发明申请

US20080041151A1 Microfluidic device, in particular for metering a fluid or for the metered dispensing of a fluid, and method for producing a microfluidic device 审中-公开
标题翻译：微流体装置，特别是用于计量流体或用于流体的计量分配，以及用于产生微流体装置的方法
公开(公告)号：US20080041151A1
公开(公告)日：2008-02-21
申请号：US11800009
申请日：2007-04-30
申请人： Matthias Fuertsch , Stefan Finkbeiner , Christoph Schelling , Stefan Weiss , Thomas Wagner , Christian Maeurer , Ines Breibach
发明人： Matthias Fuertsch , Stefan Finkbeiner , Christoph Schelling , Stefan Weiss , Thomas Wagner , Christian Maeurer , Ines Breibach
IPC分类号： G01F1/68 , B44C1/22
CPC分类号： B01L3/0268 , B01L3/0248 , B01L2300/0819 , B01L2300/1827 , B01L2400/0442 , Y10T137/87153
摘要： A microfluidic device for metering a fluid or for the metered dispensing of a fluid is provided, the device having a substrate, a pipette element having a dispensing side, which pipette element has a sealed side, and the device also having a heating device in the region of the sealed side. Alternatively, the microfluidic device is provided with the pipette element having a side that is connected to a reservoir, and a heating device in the region of the side connected to the reservoir.
摘要翻译：提供了一种用于计量流体或用于流体计量分配的微流体装置，所述装置具有基底，具有分配侧的移液管元件，所述移液管元件具有密封侧，并且所述装置还具有加热装置密封面的区域。或者，微流体装置设置有具有连接到储存器的侧面的移液管元件，以及连接到储存器的侧面区域中的加热装置。

7. 发明授权

US06523403B1 Mass flow sensor 失效
标题翻译：质量流量传感器
公开(公告)号：US06523403B1
公开(公告)日：2003-02-25
申请号：US09696461
申请日：2000-10-25
申请人： Matthias Fuertsch , Heribert Weber
发明人： Matthias Fuertsch , Heribert Weber
IPC分类号： G01F168
CPC分类号： G01F1/6845 , G01F1/692
摘要： A mass flow sensor is described. To improve the membrane stability of the known mass flow sensor and to increase the thermal conductivity of a membrane having a greater mechanical stability, in particular the membrane has at least one dielectric or nonconducting adjustment layer with a thermal conductivity which is greater than that of a silicon oxide layer of the same thickness, the adjustment layer being used to adjust the thermal conductivity of the membrane. One of the preferred adjustment layers is polycrystalline silicon.
摘要翻译：描述质量流量传感器。为了改善已知质量流量传感器的膜稳定性并增加具有更大机械稳定性的膜的热导率，特别地，该膜具有至少一个介电或非导电调节层，其导热率大于具有相同厚度的氧化硅层，调节层用于调节膜的热导率。优选的调整层之一是多晶硅。

8. 发明授权

US07025163B2 Device for detecting a deformation of a component 失效
标题翻译：用于检测部件变形的装置
公开(公告)号：US07025163B2
公开(公告)日：2006-04-11
申请号：US10311919
申请日：2002-04-05
申请人： Matthias Fuertsch , Gerd Lorenz
发明人： Matthias Fuertsch , Gerd Lorenz
IPC分类号： B60K28/10
CPC分类号： B60R21/0136 , G01R31/318508
摘要： A device for detecting a deformation of a component, for example, in the automotive industry, having a deformable hollow body arrangement assigned as a deformation indicator to the component and having at least one orifice area, and at least one sensor device situated in the particular orifice area for measuring an air flow corresponding to the deformation of the hollow body arrangement. In addition, a method of detecting such a deformation of a component and activating an appropriate safety application is described. The measured data is analyzed by an analyzer unit after measurement of the deformation, and a suitable safety application optionally being activated if the measured data of the at least one sensor device indicates a deformation of hollow body arrangement and thus of the component.
摘要翻译：一种用于检测例如在汽车工业中的部件的变形的装置，其具有被分配为部件并具有至少一个孔口区域的变形指示器的可变形的中空主体装置，以及位于该特定部件中的至少一个传感器装置用于测量与中空体装置的变形相对应的气流的孔面积。此外，描述了检测部件的这种变形并激活适当的安全应用的方法。如果所述至少一个传感器装置的测量数据指示中空主体装置和部件的变形，则在测量变形之后，通过分析器单元分析测量数据，并且可选地激活合适的安全应用。

9. 发明申请

US20090148634A1 Insert and Injection-Molded Part Having an Insert 审中-公开
标题翻译：具有插入物的插入和注塑成型部分
公开(公告)号：US20090148634A1
公开(公告)日：2009-06-11
申请号：US12086666
申请日：2006-12-12
申请人： Matthias Fuertsch , Lutz Mueller , Dagmar Stolpmann
发明人： Matthias Fuertsch , Lutz Mueller , Dagmar Stolpmann
IPC分类号： B32B15/04 , B32B1/00
CPC分类号： B29C45/14778 , B29C2045/0093 , B29K2705/00 , Y10T428/13 , Y10T428/26
摘要： An insert in an injection-molded part is provided, in particular a fastening bush for accommodating a fastening means in a receptacle opening, having at least one outer surface. At least the outer surface has a metallic anticorrosion layer on which a sealing layer is deposited.
摘要翻译：提供了一种注射成型部件中的插入件，特别是用于将紧固装置容纳在具有至少一个外表面的插座开口中的紧固衬套。至少外表面具有金属防腐层，在其上沉积密封层。

10. 发明授权

US07740459B2 Micropump having a pump diaphragm and a polysilicon layer 失效
标题翻译：微泵具有泵膜和多晶硅层
公开(公告)号：US07740459B2
公开(公告)日：2010-06-22
申请号：US10564370
申请日：2004-07-07
申请人： Matthias Fuertsch , Hubert Benzel , Stefan Finkbeiner , Stefan Pinter , Frank Fischer , Heiko Stahl , Tjalf Pirk
发明人： Matthias Fuertsch , Hubert Benzel , Stefan Finkbeiner , Stefan Pinter , Frank Fischer , Heiko Stahl , Tjalf Pirk
IPC分类号： F04B17/03
CPC分类号： F04B43/043
摘要： A method for producing a micromechanical component, preferably for fluidic applications having cavities. The component is constructed from two functional layers, the two functional layers being patterned differently using micromechanical methods. A first etch stop layer having a first pattern is applied to a base plate. A first functional layer is applied to the first etch stop layer and to the first contact surfaces of the base plate. A second etch stop layer, having a second pattern, is applied to first functional layer. A second functional layer is applied to the second etch stop layer and to the second contact surfaces of the first functional layer. An etching mask is applied to the second functional layer. The second and the first functional layer are patterned as sacrificial layers by the use of the first and the second etch stop layer by etching methods and/or by using the first and the second etch stop layer. By supplementing patterning of the base plate, additional movable fluidic elements may be implemented, using the method. The method is preferably used for producing a micropump having an epitactic polysilicon layer as the pump diaphragm.
摘要翻译：用于制造微机械部件的方法，优选用于具有空腔的流体应用。该组件由两个功能层构成，两个功能层使用微机械方法被不同地图案化。将具有第一图案的第一蚀刻停止层施加到基板。第一功能层被施加到第一蚀刻停止层和基板的第一接触表面。具有第二图案的第二蚀刻停止层被施加到第一功能层。第二功能层被施加到第二蚀刻停止层和第一功能层的第二接触表面。将蚀刻掩模施加到第二功能层。通过使用第一和第二蚀刻停止层通过蚀刻方法和/或通过使用第一和第二蚀刻停止层将第二功能层和第一功能层图案化为牺牲层。通过补充基板的图案化，可以使用该方法来实现附加的可移动流体元件。该方法优选用于制造具有外延多晶硅层作为泵膜的微型泵。

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