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1. 发明专利

JP2003045369A Substrate fixing method for electron beam image drawing device 审中-公开
标题翻译：电子束图像绘图装置的基板固定方法
公开(公告)号：JP2003045369A
公开(公告)日：2003-02-14
申请号：JP2001225782
申请日：2001-07-26
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： YAMAOKA SHOSAKU , ISSHIKI FUMIO
IPC分类号： H01J37/20 , G11B7/26 , H01J37/305 , H01L21/027 , H01L21/68 , H01L21/683
摘要： PROBLEM TO BE SOLVED: To provide a method of fixing a glass substrate to a holder in a state of keeping flatness in order to generate a high precision electron beam drawing on the glass base plate. SOLUTION: A pressure for fixing a glass substrate is generated by the viscoelasticity of an O-ring arranged under the glass substrate. The O-ring is located just under a pressure standard surface formed to a pressing plate pressing the glass substrate from above in order to avoid the distortion deformation of the glass substrate caused by a bending moment. The amount of pressure is decided by the squeeze of the viscoelastic body, and the size of the squeeze is adjusted by exchanging spacers with different thickness, in this case, a groove for take-out is formed adjacent to an O-ring groove in order to easily take out the spacer. By the above, the base plate fixing structure is simplified, and it is enabled to reduce the cost and distortion deformation of the glass substrate when generating image, and to generate high precision electron beam image.
摘要翻译：要解决的问题：提供一种在保持平坦度的状态下将玻璃基板固定到保持器的方法，以便在玻璃基板上产生高精度的电子束拉制。解决方案：通过布置在玻璃基板下方的O形环的粘弹性产生用于固定玻璃基板的压力。 O形环位于压力标准表面的正下方，形成于从上方挤压玻璃基板的压板，以避免由弯矩引起的玻璃基板的变形变形。压力量由粘弹性体的挤压决定，通过更换不同厚度的间隔物来调节挤压的尺寸，在这种情况下，依次形成邻近O形环槽的用于取出的槽以轻松取出间隔物。由此，能够简化基板固定结构，能够在生成图像时降低玻璃基板的成本和变形变形，并且能够产生高精度的电子束图像。

2. 发明专利

JP2004104001A Test sample transfer mechanism 审中-公开
公开(公告)号：JP2004104001A
公开(公告)日：2004-04-02
申请号：JP2002266825
申请日：2002-09-12
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： YAMAOKA SHOSAKU , HARADA KUNIO , SUGAYA MASAKAZU
IPC分类号： H01L21/68 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To provide a structure for improving the degree of transfer precision in a positioning device for a wafer or the like used for an electron beam recording device. SOLUTION: In order that shape distortions of a base and X stage 4 due to the preload of a cross roller guide 3 caused by screws 5 makes no pitching error in the transfer of the X stage 4 and Y stage 2 for improving the degree of the transfer precision in stages, the shape of the base 1 for fixing the cross roller guide 3 is formed in a recess shape, the shape of the Y stage 2 arranged on the base is formed in an integral structure having a rectangular-shaped protrusion extending straight in a vertical direction, and further the shape of the X stage 4 mounted with a substrate arranged on the Y stage 2 is formed in the recess shape. Furthermore, a top table arranged with a length measuring mirror 23 using laser and with a test sample holder 6 that are mounted on the uppermost portion of the X stage is supported at three points to prevent shape distortions of the stages from exercising a harmful effect on the top table 8. COPYRIGHT: (C)2004,JPO

3. 发明专利

JP2006119150A Sample preparation device 有权
标题翻译：样品制备装置
公开(公告)号：JP2006119150A
公开(公告)日：2006-05-11
申请号：JP2005362596
申请日：2005-12-16
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： KASHIMA HIDEO , SHICHI HIROYASU , KOIKE HIDEMI , SUZUKI HIROYUKI , TOMIMATSU SATOSHI , FUKUDA MUNEYUKI , KANASUGI KOJI , YAMAOKA SHOSAKU , SUGAYA MASAKAZU
IPC分类号： G01N1/28 , G01N1/00 , G01N23/04
摘要： PROBLEM TO BE SOLVED: To provide a sample preparation device of small occupied area for large diameter wafers, realizing miniaturization of devices, equipped with an introductory means of a TEM holder, to which test pieces of several microns adhere without pressure increase or contamination in vacuum vessels, and having a sample chamber of the required minimum volume enabling quick observation.
SOLUTION: The sample preparation device comprises a sample stage mounting samples; a charged particle beam irradiating optical system; a secondary particle detecting means for detecting secondary particles generated through irradiation of a charged particle beam; a sample piece separating means for separating sample pieces from the sample; a cassette for storing the sample; a sample transferring means for transferring the sample concerned from the cassette to the sample stage; a sample holder for fixing the sample pieces; a sample mounting section for fixing the sample holder; a cartridge for holding the sample mounting section and having a detachable constitution with a sample stage body section; a cartridge station for housing the cartridge; and a transfer means for transfer the desired cartridge from the cartridge station to the sample stage.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了提供一种用于大直径晶片的小占用面积的样品制备装置，实现了具有TEM支架的介绍装置的装置的小型化，其中几微米的试片粘附而没有压力增加，真空容器中的污染，并具有所需最小体积的样品室，可以快速观察。
解决方案：样品制备装置包括样品台安装样品; 带电粒子束照射光学系统; 用于检测通过照射带电粒子束产生的二次粒子的二次粒子检测装置; 用于从样品中分离样品片的样品片分离装置; 用于存储样品的盒; 用于将所述样品从所述盒转移到所述样品台的样品转移装置; 用于固定样品的样品保持器; 用于固定样品保持器的样品安装部分; 用于保持样品安装部分并具有可拆卸构造的样品台体部分的盒; 用于容纳盒的墨盒站; 以及用于将期望的盒从盒站传送到样品台的传送装置。版权所有（C）2006，JPO＆NCIPI

4. 发明专利

JP2008089613A Sample production device 有权
标题翻译：样品生产设备
公开(公告)号：JP2008089613A
公开(公告)日：2008-04-17
申请号：JP2007335609
申请日：2007-12-27
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： KASHIMA HIDEO , SHICHI HIROYASU , KOIKE HIDEMI , SUZUKI HIROYUKI , TOMIMATSU SATOSHI , FUKUDA MUNEYUKI , KANASUGI KOJI , YAMAOKA SHOSAKU , SUGAYA MASAKAZU
IPC分类号： G01N1/00 , G01N1/28 , G01N23/04
摘要： PROBLEM TO BE SOLVED: To provide a sample production device for a large-diameter wafer, having a small occupied area, requiring a necessary minimum sample chamber volume capable of quick observation, equipped with an introduction means of a TEM holder on which a sample piece of several μm is fixed and which is free from pressure increase or contamination in a vacuum container, and capable of realizing miniaturization of the device.
SOLUTION: This device is equipped with a sample stage on which a sample is placed; a charged particle beam irradiation optical system; a secondary particle detection means for detecting secondary particles generated by irradiation of the charged particle beam; a sample piece separation means for separating the sample piece from the sample; a cassette for storing the sample; a sample transfer means for transferring the sample from the cassette to the sample stage; a sample holder for fixing the sample piece; a sample placing part for fixing the sample holder; a cartridge for holding the sample placing part, comprising a constitution detachable from a sample stage body part; a cartridge station for storing the cartridge; and a transfer means for transferring a desired cartridge from the cartridge station onto the sample state, from the outside of the container.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种具有小占用面积的大直径晶片的样品制备装置，需要能够快速观察的必要的最小样品室体积，其具有TEM支架的引入装置，其中固定了几μm的样品片，并且在真空容器中没有增加压力或污染，能够实现器件的小型化。
解决方案：本设备配有样品台，放置样品; 带电粒子束照射光学系统; 用于检测通过照射带电粒子束产生的二次粒子的二次粒子检测装置; 样品分离装置，用于将样品与样品分离; 用于存储样品的盒; 样品转移装置，用于将样品从盒转移到样品台; 用于固定样品的样品保持器; 用于固定样品架的样品放置部件; 用于保持样品放置部的盒，包括从样品台本体部分可拆卸的结构; 用于存储盒的墨盒站; 以及用于从容器的外部将期望的盒从盒站传送到样品状态的转印装置。版权所有（C）2008，JPO＆INPIT

5. 发明专利

JP2005257425A Immunological examination apparatus and method 有权
标题翻译：免疫检查装置及方法
公开(公告)号：JP2005257425A
公开(公告)日：2005-09-22
申请号：JP2004068645
申请日：2004-03-11
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： SEKI YUUKAI , TSUKAMOTO AKIRA , SUZUKI DAISUKE , YAMAOKA SHOSAKU , SUGITA NAMI , KANDORI AKIHIKO , SAITO KAZUO
IPC分类号： G01N33/53 , G01N27/72 , G01N33/542 , G01N33/553
CPC分类号： G01N33/54373 , G01N27/745
摘要： PROBLEM TO BE SOLVED: To provide an immunological examination technique capable of efficiently examinating antigen-antibody reaction magnetically with high sensitivity using magnetic fine particles and a SQUID magnetic sensor.
SOLUTION: The immunological examination apparatus has: a disk-shaped sample holder 3 for circumferentially holding a prurality of sample containers 2, each of which houses a labelled specimen prepared by labelling a specimen with magnetic fine particles; a rotary means 4 for rotating the holder 3 around its axis; and a magnetic censor 11 for detecting the magnetic field generated from the magnetized labelled specimen in a magnetic shield. The region for holding a different sample container is inserted in the magnetic shield successively by the rotation of the holder 3 and the magnetization of the labelled specimen in the first sample container and the detection of the magnetic field generated from the labelled specimen housed in the second sample container are performed parallelly.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供能够使用磁性细颗粒和SQUID磁性传感器以高灵敏度磁性有效地检测抗原 - 抗体反应的免疫学检查技术。解决方案：免疫检查装置具有：用于周向保持样品容器2的纤维状的盘状样品保持器3，每个容器2容纳通过用磁性细颗粒标记试样而制备的标记样品; 用于使保持器3围绕其轴线旋转的旋转装置4; 以及用于检测在磁屏蔽中从被磁化的标记样本产生的磁场的磁性检测器11。用于保持不同样品容器的区域通过保持器3的旋转和标记样品在第一样品容器中的磁化而相继插入磁屏蔽中，并且检测从第二样品容器中收集的标记样品产生的磁场样品容器平行进行。版权所有（C）2005，JPO＆NCIPI

6. 发明专利

JP2006294664A Heat insulation vacuum cooling vessel 有权
标题翻译：热绝缘真空冷却船
公开(公告)号：JP2006294664A
公开(公告)日：2006-10-26
申请号：JP2005109436
申请日：2005-04-06
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： TSUKAMOTO AKIRA , SAITO KAZUO , YAMAOKA SHOSAKU
IPC分类号： H01L39/04 , G01N27/72 , H01L39/22
摘要： PROBLEM TO BE SOLVED: To bring a sensor closer to a sample at a room temperature by correcting the displacement of the sensor at low temperature by heat shrinkage in cooling.
SOLUTION: A mechanism is used, where an inner tank in which a copper rod and a sapphire rod are fixed is displaced toward the side of a sapphire window in a direction opposite to a displacement direction for suppressing the displacement of the sensor in a direction separated from the sapphire window by the shrinkage of the copper rod or the sapphire rod when the sensor is cooled.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：通过在冷却期间通过热收缩来校正传感器在低温下的位移，使传感器在室温下靠近样品。解决方案：使用一种机构，其中固定有铜杆和蓝宝石棒的内部罐沿与位移方向相反的方向朝向蓝宝石窗的侧面移动，以抑制传感器的位移当传感器被冷却时，通过铜棒或蓝宝石棒的收缩与蓝宝石窗口分离的方向。版权所有（C）2007，JPO＆INPIT

7. 发明专利

JP2005135781A Mass spectrometer 有权
标题翻译：质谱仪
公开(公告)号：JP2005135781A
公开(公告)日：2005-05-26
申请号：JP2003371500
申请日：2003-10-31
申请人： Hitachi High-Technologies Corp , Hitachi Ltd , 株式会社日立ハイテクノロジーズ , 株式会社日立製作所
发明人： HIRABAYASHI TSUDOI , ISHIMARU MASAKO , YAMAOKA SHOSAKU
IPC分类号： G01N27/62 , H01J49/04
CPC分类号： H01J49/167 , G01N30/7266
摘要： PROBLEM TO BE SOLVED: To provide an LC/MS interface having such a structure that a tip part of a spray capillary is hard to be broken, having high operability even for general users, of which, expansion of separation band and lowering of detection sensitivity are restrained, capable of analyzing in high-separation and high-sensitivity.
SOLUTION: On the mass spectrometer, a metallic member having a hole for connecting a separation column and a spray capillary, and a resin member for fixing the upstream side of the short spray capillary are used. Furthermore, for improving the operability, a spray-ionization method using a gas spray is used.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种LC / MS接口，其具有喷雾毛细管的尖端部难以破损的结构，即使对于普通用户也具有高的可操作性，其中分离带的膨胀和降低的检测灵敏度受到限制，能够在高分离度和高灵敏度下进行分析。解决方案：在质谱仪上，使用具有用于连接分离柱和喷雾毛细管的孔的金属构件和用于固定短喷雾毛细管的上游侧的树脂构件。此外，为了提高可操作性，使用使用气体喷雾的喷雾电离法。版权所有（C）2005，JPO＆NCIPI

8. 发明专利

JP2005012235A Electron beam lithographic system 有权
标题翻译：电子束光刻系统
公开(公告)号：JP2005012235A
公开(公告)日：2005-01-13
申请号：JP2004227697
申请日：2004-08-04
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： ISSHIKI FUMIO , SUGAYA MASAKAZU , SUZUKI TATSUTO , HOSAKA SUMIO , YAMAOKA SHOSAKU
IPC分类号： G01B11/02 , G03F7/20 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To provide a laser length-measuring device in which a length measuring displacement is within an absolute accuracy of ±2nm to ±1nm. SOLUTION: A fluctuation-shaped error component which appears in correspondence with the wavelength period of a laser beam is detected, when the stage is moved, and the error component is subtracted so as to enhance accuracy. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种激光长度测量装置，其中长度测量位移在±2nm至±1nm的绝对精度内。解决方案：当移动阶段时，检测出与激光束的波长周期相对应出现的波动形误差分量，并减去误差分量以提高精度。版权所有（C）2005，JPO＆NCIPI

9. 发明专利

JPS62103948A ION MICROBEAM DEVICE 失效
公开(公告)号：JPS62103948A
公开(公告)日：1987-05-14
申请号：JP24141785
申请日：1985-10-30
申请人： HITACHI LTD
发明人： UMEMURA KAORU , YAMAOKA SHOSAKU , IRIE TAKEO , ISHITANI TORU , KAWANAMI YOSHIMI
IPC分类号： H01J27/26 , H01J37/08
摘要： PURPOSE:To enable ions to be emitted quite stably for a long term by providing a driving section for driving the movable section of an emitter from the outside of a vacuum container, while constructing said driving section and the movable section to be mounted to and demounted from each other. CONSTITUTION:Under fused condition of ionized material 10, the emitter 7 can be moved finely up and down by rotating the knob 35 of a driving means 21, for properly maintaining the quantity and the holding condition, of liquid metal 10 to be held on the underface of a sump 11 and the circumference at the tip of the emitter 7. While a take-out voltage is applied onto an ion take-out electrode 14 and upon confirmation of emission of ions, the driving section 21 is separated from a movable section 9 to maintain a distance between the driving means 21 and the movable means 9 for preventing discharge between them 21, 9 just by maintaining said distance. Upon lowering of the accelerating voltage, the driving section 21 and the movable section 9 are combined together then the knob 35 is rotated to take the emitter 7 into/out of the liquid metal 10, thus enabling ions to be continuously emitted for a long time.

10. 发明专利

JP2002365182A SAMPLE PREPARATION DEVICE 失效
公开(公告)号：JP2002365182A
公开(公告)日：2002-12-18
申请号：JP2001176475
申请日：2001-06-12
申请人： HITACHI LTD
发明人： KASHIMA HIDEO , SHICHI HIROYASU , KOIKE HIDEMI , SUZUKI HIROYUKI , TOMIMATSU SATOSHI , FUKUDA MUNEYUKI , KANASUGI KOJI , YAMAOKA SHOSAKU , SUGAYA MASAKAZU
IPC分类号： G01N23/225 , G01N1/28 , G01N23/04 , H01J37/20 , H01J37/30 , H01L21/302 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To provide a sample preparation device for a large diameter wafer, equipped with an introduction means of a TEM holder capable of preventing pressure increase in a vacuum vessel and contamination, for fixing a sample piece having the size of several μm, enabling quick observation, and having a sample chamber having a small volume. SOLUTION: This device is equipped with a sample stage for loading a sample thereon, a charged particle beam irradiation optical system, a secondary particle detection means for detecting secondary particles generated by irradiation of the charged particle beam, a sample piece separation means for separating the sample piece from the sample, a cassette for storing the sample, a sample transfer means for transferring the sample from the cassette to the sample stage, a cartridge for holding a sample holder for fixing the sample piece, a sample loading part for fixing the sample holder and the sample loading part, having a constitution mountable on and dismountable from a sample stage body part, a cartridge station for storing the cartridge, and a transfer means for transferring the cartridge from the cartridge station onto the sample stage from the outside of the vessel.

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