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1. 发明授权

US4925755A Method of correcting defect in circuit pattern 失效
标题翻译：校正电路图案缺陷的方法
公开(公告)号：US4925755A
公开(公告)日：1990-05-15
申请号：US152159
申请日：1988-02-04
申请人： Hiroshi Yamaguchi , Keiya Saito , Akira Shimase , Satoshi Haraichi , Susumu Aiuchi , Nobuyuki Akiyama , Shinji Kuniyoshi , Takeshi Kimura
发明人： Hiroshi Yamaguchi , Keiya Saito , Akira Shimase , Satoshi Haraichi , Susumu Aiuchi , Nobuyuki Akiyama , Shinji Kuniyoshi , Takeshi Kimura
IPC分类号： G03F1/00 , G03F1/72 , G03F1/74 , H01L21/027
CPC分类号： G03F1/74 , G03F1/22
摘要： A method of correcting a circuit pattern such as an X-ray mask, carried out by first preparing a circuit pattern structure where a circuit pattern on a conductive film is coated with a protective film, then forming a hole or a slit by irradiating a high-intensity focused ion beam to a dropout defective portion in the circuit pattern of the circuit pattern structure, and plating such hole or slit while utilizing the conductive film as a plating electrode, thereby forming a metal frame to correct the dropout defective portion.

2. 发明授权

US4391511A Light exposure device and method 失效
标题翻译：曝光装置及方法
公开(公告)号：US4391511A
公开(公告)日：1983-07-05
申请号：US245193
申请日：1981-03-18
申请人： Nobuyuki Akiyama , Yukio Kembo , Yasuo Nakagawa , Susumu Aiuchi , Mineo Nomoto
发明人： Nobuyuki Akiyama , Yukio Kembo , Yasuo Nakagawa , Susumu Aiuchi , Mineo Nomoto
IPC分类号： G03F7/20 , G03F7/24 , G03F9/02 , H01L21/683 , G03B27/52
CPC分类号： G03F7/707 , G03F7/24 , H01L21/6838 , H01L21/68735 , H01L21/6875 , Y10T279/11
摘要： A light exposure device and method for exposing and printing a predetermined pattern on an exposure surface of a substrate comprises measuring means for measuring curvature of the exposure surface of the substrate, a chuck including suck and hold means for sucking and holding a back surface of the substrate opposite to the exposure surface and deforming means for imparting a force to the back surface of the substrate to deform the substrate, and control means for controlling the deforming means of the chuck in accordance with the curvature of the exposure surface of the substrate measured by the measuring means such that the exposure surface of the substrate conforms to an image surface of the pattern over an entire exposure area within a predetermined allowable error.
摘要翻译：一种用于在基板的曝光表面上曝光和印刷预定图案的曝光装置和方法，包括：用于测量基板的曝光表面的曲率的测量装置，包括用于吸附和保持基板的背面的吸持和保持装置的卡盘与曝光面相反的基板和用于赋予基板背面使其变形的变形机构，以及控制装置，用于根据基板的曝光面的曲率来控制卡盘的变形装置，该曲率由所述测量装置使得所述基板的曝光表面在预定的允许误差范围内在整个曝光区域上符合所述图案的图像表面。

3. 发明申请

US20130168437A1 NOBLE METAL PASTE FOR BONDING OF SEMICONDUCTOR ELEMENT 有权
标题翻译：用于粘合半导体元件的金属磷酸盐
公开(公告)号：US20130168437A1
公开(公告)日：2013-07-04
申请号：US13822334
申请日：2011-09-30
申请人： Masayuki Miyairi , Nobuyuki Akiyama , Katsuji Inagaki , Toshinori Ogashiwa
发明人： Masayuki Miyairi , Nobuyuki Akiyama , Katsuji Inagaki , Toshinori Ogashiwa
IPC分类号： B23K35/30
CPC分类号： B23K35/3006 , B23K35/3013 , H01L24/29 , H01L24/83 , H01L2224/04026 , H01L2224/05166 , H01L2224/05644 , H01L2224/29101 , H01L2224/29294 , H01L2224/29339 , H01L2224/29344 , H01L2224/83203 , H01L2224/8384 , H01L2924/00011 , H01L2924/00013 , H01L2924/01004 , H01L2924/01006 , H01L2924/01023 , H01L2924/01033 , H01L2924/01047 , H01L2924/01079 , H01L2924/014 , H01L2924/0665 , H01L2924/10253 , H01L2924/351 , H01L2924/3512 , H01L2924/00 , H01L2224/29298 , H01L2924/00015 , H01L2224/29099 , H01L2224/29199 , H01L2224/29299 , H01L2224/2929 , H01L2924/01203 , H01L2224/29144 , H01L2924/00014 , H01L2224/29139
摘要： A precious metal paste which does not cause contamination of a member, which can be uniformly coated to a member to be bonded, and which is in good condition after bonding is provided. The present invention relates to a precious metal paste for bonding a semiconductor element, of the paste including a precious metal powder and an organic solvent, in which the precious metal powder has a purity of 99.9 mass % or more and an average particle diameter of 0.1 to 0.5 μm, the organic solvent has a boiling point of 200 to 350° C., and a thixotropy index (TI) value calculated from a measurement value of a viscosity at a shear rate of 4/s with respect to a viscosity at a shear rate of 40/s at 23° C. by means of a rotational viscometer is 6.0 or more.
摘要翻译：提供了不会使被均匀地涂覆在待接合部件上并且在接合后处于良好状态的部件被污染的贵金属糊料。本发明涉及一种用于粘合半导体元件的贵金属糊料，其中贵金属粉末的纯度为99.9质量％以上且平均粒径为0.1的贵金属粉末和有机溶剂至0.5μm，有机溶剂的沸点为200〜350℃，触变性指数（TI）值由剪切速度4 / s时的粘度的测定值相对于通过旋转粘度计在23℃下的剪切速率为40 / s为6.0以上。

4. 发明申请

US20100073926A1 Flame Detector 有权
标题翻译：火焰探测器
公开(公告)号：US20100073926A1
公开(公告)日：2010-03-25
申请号：US12561185
申请日：2009-09-16
申请人： Akihisa Kudoh , Kazuyoshi Sakurai , Hiroshi Kaneko , Nobuyuki Akiyama , Masahiro Katagiri
发明人： Akihisa Kudoh , Kazuyoshi Sakurai , Hiroshi Kaneko , Nobuyuki Akiyama , Masahiro Katagiri
IPC分类号： F21V1/00 , G01J5/02
CPC分类号： G08B17/12 , G08B29/08
摘要： A flame detector is provided. A circuit board is disposed in a housing. A first light source emits first light. A light guide member comprised of translucent material guides the first light from the first light source to a light emission portion of the light guide member. A first light receiving element detects second light having a predetermined wavelength unique to the flames. A second light source emits third light to a translucent cover which is disposed between an opening of the housing and the first light receiving element. A second light receiving element detects the third light passed through the translucent cover to test the translucency. The first light source, the second light source and the second light receiving element are mounted on the circuit board. The light emission portion is formed into a substantially annular shape which encloses the first light receiving element at a front side of the housing to limit a field of view of the first light receiving element to a predetermined range. And the light guide member has a light entrance portion and a light exit portion for the third light to form a light path from the second light source to the second light receiving element through the translucent cover and the light guide member.
摘要翻译：提供火焰探测器。电路板设置在壳体中。第一光源发射第一光。由半透明材料构成的导光构件将来自第一光源的第一光引导到导光构件的发光部分。第一光接收元件检测具有特定于火焰的预定波长的第二光。第二光源将第三光发射到设置在壳体的开口和第一光接收元件之间的半透明盖。第二光接收元件检测通过半透明盖的第三光以测试半透明度。第一光源，第二光源和第二光接收元件安装在电路板上。光发射部分形成为大致环形的形状，其将第一光接收元件封装在壳体的前侧，以将第一光接收元件的视野限制在预定范围内。并且导光部件具有用于第三光的光入射部分和光出射部分，以通过半透明盖和导光部件形成从第二光源到第二光接收元件的光路。

5. 发明授权

US5098191A Method of inspecting reticles and apparatus therefor 失效
标题翻译：检查掩模版及其设备的方法
公开(公告)号：US5098191A
公开(公告)日：1992-03-24
申请号：US424196
申请日：1989-10-19
申请人： Minori Noguchi , Hiroaki Shishido , Mitsuyoshi Koizumi , Nobuyuki Akiyama , Toshihilo Nakata
发明人： Minori Noguchi , Hiroaki Shishido , Mitsuyoshi Koizumi , Nobuyuki Akiyama , Toshihilo Nakata
IPC分类号： G01N21/88 , G01N21/93 , G01N21/94 , G01N21/956 , G03F1/00 , H01L21/027 , H01L21/30 , H01L21/66
CPC分类号： G03F1/84 , G01N21/95607 , G01N21/95623 , G01N2021/95676 , G01N21/94
摘要： Method of inspecting reticles and an apparatus therefor, where means for holding and transferring an inspected reticle and a standard reticle respectively, means for illuminating light with spatial coherency adjusted onto both reticles respectively, and an objective lens for collecting transmitted light or reflected light from the illuminated body produced by the illuminating, are installed on respective Fourier transformation surfaces of both reticle surfaces, and a light blocking plate for blocking light corresponding to the adjusted spatial coherency is installed, and electric signals obtained are compared thereby a defect or a foreign substance existing on the inspected reticle can be detected.
摘要翻译：检测掩模版的方法及其装置，分别用于保持和传送被检查的掩模版和标准掩模版的装置，用于分别照射调节到两个光罩上的空间一致性的光，以及用于收集透射光或反射光的物镜通过照明产生的照明体安装在两个标线片表面的相应的傅立叶变换表面上，并且安装用于阻挡与调整的空间相干性相对应的光的遮光板，并且比较所获得的电信号，从而存在缺陷或异物可以检测到被检查的掩模版。

6. 发明授权

US5046847A Method for detecting foreign matter and device for realizing same 失效
标题翻译：异物检测方法及其实现方法
公开(公告)号：US5046847A
公开(公告)日：1991-09-10
申请号：US262573
申请日：1988-10-25
申请人： Toshihiko Nakata , Nobuyuki Akiyama , Yoshihiko Yamuchi , Mitsuyoshi Koizumi , Yoshimasa Oshima
发明人： Toshihiko Nakata , Nobuyuki Akiyama , Yoshihiko Yamuchi , Mitsuyoshi Koizumi , Yoshimasa Oshima
IPC分类号： G01N21/21 , G01N21/94 , G03F9/00
CPC分类号： G03F9/70 , G01N21/94 , G01N21/95623 , G01N2021/473 , G01N21/21
摘要： A method and apparatus for detecting foreign matter on a sample by illuminating a stripe-shaped region with linearly polarized light. Some of the light reflected by the sample is intercepted by a light intercepting stage, and the rest of the light reflected by the sample, which passes through the light intercepting stage is directed to a detecting optical system, to be detected by a photo-detector. The sample is illuminated obliquely at a predetermined angle with respect to a group of straight lines constituting a primary pattern on the sample. The angle is selected so that the diffraction light reflected by the group of straight lines does not enter the detecting optical system. A polarizing spatial filter using a liquid crystal element may be disposed in a predetermined restricted region in a spacial frequency region, or Fourier transformation plane, within the detecting optical system. The light scattered by the sample may further be separated in the detecting optical system into partial beams having different wave orientation characteristics, which characteristics are detected by a number of one-dimensional solid state imaging elements. The signals are processed by a driver, adder, and quantizer in synchronism with the one-dimensional solid state imaging elements.
摘要翻译：一种通过用线性偏振光照射条形区域来检测样品上的异物的方法和装置。由样品反射的一些光被遮光阶段遮挡，并且通过遮光台的由样品反射的其余光指向检测光学系统，由光检测器检测。样品相对于构成样品上的主要图案的一组直线以预定角度倾斜照射。选择该角度使得由直线组反射的衍射光不进入检测光学系统。使用液晶元件的偏振空间滤光片可以设置在检测光学系统内的空间频率区域或傅立叶变换平面的预定限制区域中。由样本散射的光可以在检测光学系统中进一步分离成具有不同波取向特性的部分光束，该特征由多个一维固态成像元件检测。信号由驱动器，加法器和量化器与一维固态成像元件同步处理。

7. 发明授权

US4965454A Method and apparatus for detecting foreign particle 失效
标题翻译：用于检测外来颗粒的方法和装置
公开(公告)号：US4965454A
公开(公告)日：1990-10-23
申请号：US298574
申请日：1989-01-18
申请人： Toshihiko Yamauchi , Nobuyuki Akiyama
发明人： Toshihiko Yamauchi , Nobuyuki Akiyama
IPC分类号： G01N21/33 , G01N21/94 , G01N21/956 , G03F7/20
CPC分类号： G03F7/70483 , G01N21/94 , G01N2021/4702 , G01N2021/473 , G01N2021/95676 , G01N21/33 , G01N2201/104
摘要： The present invention resides in a method and apparatus for detecting a foreign particle, wherein an ultraviolet light beam is radiated in the form of a spot to a sample having a protective film formed on a circuit pattern or a wiring pattern; the spot and the sample are scanned relative to each other; the ultraviolet light is absorbed by the protective film; diffracted light produced from a foreign particle present on the protective film is condensed by an integrating sphere; the thus-condensed light is sensed by an optoelectro transducer to convert it into an electric signal; and the foreign particle present on the protective film formed on the circuit pattern or the wiring pattern is detected on the basis of the electric signal provided from the optoelectro transducer.
摘要翻译：本发明涉及一种用于检测外来颗粒的方法和装置，其中将紫外光束以斑点的形式照射到具有形成在电路图形或布线图案上的保护膜的样品; 斑点和样品相对于彼此扫描; 紫外线被保护膜吸收; 存在于保护膜上的异物产生的衍射光被积分球冷凝，这样聚光由光电转换器感测，以将其转换为电信号; 并且基于从光电转换器提供的电信号检测存在于形成在电路图案或布线图案上的保护膜上的异物。

8. 发明授权

US4449818A Method of inspecting microscopic surface defects 失效
标题翻译：检查微观表面缺陷的方法
公开(公告)号：US4449818A
公开(公告)日：1984-05-22
申请号：US347248
申请日：1982-02-09
申请人： Kazuo Yamaguchi , Asahiro Kuni , Nobuyuki Akiyama , Juro Endo
发明人： Kazuo Yamaguchi , Asahiro Kuni , Nobuyuki Akiyama , Juro Endo
IPC分类号： G01N21/84 , G01N21/88 , G01N21/94 , G01N21/956 , G01N21/00
CPC分类号： G01N21/88
摘要： A method is provided for inspecting defects in the surface of an object to be inspected, wherein oblique lighting and perpendicular lighting are alternately applied to a location where a defect or a foreign substance possibly exists. Brightness detected in the location under the application of oblique lighting is evaluated as a foreign substance so as to be discriminated from a defect. Defects are classified through shape recognition of a defect pattern obtained under the application of perpendicular lighting.
摘要翻译：提供了一种用于检查待检查物体的表面中的缺陷的方法，其中倾斜照明和垂直照明交替施加到可能存在缺陷或异物的位置。在倾斜照明的应用下，在该位置处检测到的亮度被评价为异物，以便与缺陷区分开来。通过在垂直照明的应用下获得的缺陷图案的形状识别来分类缺陷。

9. 发明授权

US09539671B2 Precious metal paste for bonding semiconductor element 有权
标题翻译：用于键合半导体元件的贵金属膏
公开(公告)号：US09539671B2
公开(公告)日：2017-01-10
申请号：US13822334
申请日：2011-09-30
申请人： Masayuki Miyairi , Nobuyuki Akiyama , Katsuji Inagaki , Toshinori Ogashiwa
发明人： Masayuki Miyairi , Nobuyuki Akiyama , Katsuji Inagaki , Toshinori Ogashiwa
IPC分类号： H01L21/30 , B23K35/30 , H01L23/00
CPC分类号： B23K35/3006 , B23K35/3013 , H01L24/29 , H01L24/83 , H01L2224/04026 , H01L2224/05166 , H01L2224/05644 , H01L2224/29101 , H01L2224/29294 , H01L2224/29339 , H01L2224/29344 , H01L2224/83203 , H01L2224/8384 , H01L2924/00011 , H01L2924/00013 , H01L2924/01004 , H01L2924/01006 , H01L2924/01023 , H01L2924/01033 , H01L2924/01047 , H01L2924/01079 , H01L2924/014 , H01L2924/0665 , H01L2924/10253 , H01L2924/351 , H01L2924/3512 , H01L2924/00 , H01L2224/29298 , H01L2924/00015 , H01L2224/29099 , H01L2224/29199 , H01L2224/29299 , H01L2224/2929 , H01L2924/01203 , H01L2224/29144 , H01L2924/00014 , H01L2224/29139
摘要： A precious metal paste which does not cause contamination of a member, which can be uniformly coated to a member to be bonded, and which is in good condition after bonding is provided. The present invention relates to a precious metal paste for bonding a semiconductor element, of the paste including a precious metal powder and an organic solvent, in which the precious metal powder has a purity of 99.9 mass % or more and an average particle diameter of 0.1 to 0.5 μm, the organic solvent has a boiling point of 200 to 350° C., and a thixotropy index (TI) value calculated from a measurement value of a viscosity at a shear rate of 4/s with respect to a viscosity at a shear rate of 40/s at 23° C. by means of a rotational viscometer is 6.0 or more.
摘要翻译：提供了不会使被均匀地涂覆在待接合部件上并且在接合后处于良好状态的部件被污染的贵金属糊料。本发明涉及一种用于粘合半导体元件的贵金属糊料，其中贵金属粉末的纯度为99.9质量％以上且平均粒径为0.1的贵金属粉末和有机溶剂至0.5μm，有机溶剂的沸点为200〜350℃，触变性指数（TI）值由剪切速度4 / s时的粘度的测定值相对于通过旋转粘度计在23℃下的剪切速率为40 / s为6.0以上。

10. 外观设计

USD651926S1 Fire detector 有权
公开(公告)号：USD651926S1
公开(公告)日：2012-01-10
申请号：US29387984
申请日：2011-03-22
申请人： Nobuyuki Akiyama , Satoshi Yanagisawa , Masahito Ando
设计人： Nobuyuki Akiyama , Satoshi Yanagisawa , Masahito Ando

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