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    • 1. 发明申请
    • SCANNING PROBE MICROSCOPE
    • 扫描探针显微镜
    • US20130205454A1
    • 2013-08-08
    • US13726764
    • 2012-12-26
    • Shuichi BABAMasahiro WATANABEToshihiko NAKATAYukio KEMBOToru KURENUMATakafumi MORIMOTOManabu EDAMURASatoshi SEKINO
    • Shuichi BABAMasahiro WATANABEToshihiko NAKATAYukio KEMBOToru KURENUMATakafumi MORIMOTOManabu EDAMURASatoshi SEKINO
    • G01Q10/00
    • G01Q10/00B82Y35/00G01Q60/28G01Q60/34
    • In the case of measuring a pattern having a steep side wall, a probe adheres to the side wall by the van der Waals forces acting between the probe and the side wall when approaching the pattern side wall, and an error occurs in a measured profile of the side wall portion. When a pattern having a groove width almost equal to a probe diameter is measured, the probe adheres to both side walls, the probe cannot reach the groove bottom, and the groove depth cannot be measured. When the probe adheres to a pattern side wall in measurements of a microscopic high-aspect ratio pattern using an elongated probe, the probe is caused to reach the side wall bottom by detecting the adhesion of the probe to the pattern side wall, and temporarily increasing a contact force between the probe and the sample. Also, by obtaining the data of the amount of torsion of a cantilever with the shape data of the pattern, a profile error of the side wall portion by the adhesion is corrected by the obtained data of the amount of torsion.
    • 在测量具有陡峭侧壁的图案的情况下,当接近图案侧壁时,探针通过作用在探针和侧壁之间的范德华力附着在侧壁上,并且在测量的轮廓中发生错误 侧壁部分。 当测量具有几乎等于探针直径的槽宽度的图案时,探针粘附到两个侧壁,探针不能到达凹槽底部,并且不能测量凹槽深度。 当使用细长的探针测量微观高纵横比图案时探头粘附到图案侧壁上时,通过检测探针与图案侧壁的粘附力使探针到达侧壁底部,并暂时增加 探针和样品之间的接触力。 此外,通过利用图案的形状数据获得悬臂的扭转量的数据,通过获得的扭转量的数据来校正侧壁部分的粘附的轮廓误差。
    • 5. 发明授权
    • Projection alignment method and apparatus
    • 投影对准方法及装置
    • US4708484A
    • 1987-11-24
    • US789778
    • 1985-10-21
    • Yoshihiro KomeyamaYukio KemboAsahiro KuniRyuuichi FunatsuAkira InagakiMinoru IkedaKeiichi Okamoto
    • Yoshihiro KomeyamaYukio KemboAsahiro KuniRyuuichi FunatsuAkira InagakiMinoru IkedaKeiichi Okamoto
    • G01R31/26G03F9/00H01L21/30G01B11/26
    • G03F9/7023G03F9/7049G03F9/7076
    • The present invention relates, in a projection aligner wherein a mask and a wafer are held proximate to one another and wherein a circuit pattern depicted on the mask is transferred onto the wafer, to a method of detecting the respective positions of the mask and the wafer for the relative positioning between the mask and the wafer. To the end of dispensing with the withdrawal of a microscope objective in such a way that the objective of a microscope for detecting the mask and the wafer and projection light, for example, an X-ray, are prevented from interfering, thereby to achieve the enhancement of throughput and to permit the detection of the positions of the mask and the wafer even during projection, the present invention consists in that the objective of the microscope is inclined with respect to a perpendicular to the plane of the mask or the plane of the wafer being a plane to-be-detected, so as not to interfere with the projection light, for example, the X-ray, whereby the circuit pattern can be transferred while the relative positions of the mask and the wafer are being detected.
    • 本发明涉及一种投影对准器,其中掩模和晶片彼此靠近地保持,并且其中将掩模上描绘的电路图案转印到晶片上,以检测掩模和晶片的相应位置的方法 用于掩模和晶片之间的相对定位。 以这样的方式分配显微镜物镜的取出的结束,使得防止用于检测掩模和晶片的显微镜和例如X射线的投射光的目的被干扰,从而实现 增加吞吐量并且即使在投影期间也能够检测掩模和晶片的位置,本发明的目的在于,显微镜的目的是相对于掩模的平面垂直于或平面的倾斜 晶片是要被检测的平面,以便不干涉诸如X射线的投影光,由此可以在检测掩模和晶片的相对位置的同时传输电路图案。
    • 7. 发明授权
    • Scanning probe microscope
    • 扫描探针显微镜
    • US07631548B2
    • 2009-12-15
    • US11737779
    • 2007-04-20
    • Shuichi BabaMasahiro WatanabeToshihiko NakataToru KurenumaHiroshi KurodaTakafumi MorimotoYukio KemboManabu Edamura
    • Shuichi BabaMasahiro WatanabeToshihiko NakataToru KurenumaHiroshi KurodaTakafumi MorimotoYukio KemboManabu Edamura
    • G01B5/28
    • G01Q60/28G01Q10/06G01Q30/04
    • With a scanning probe microscope, if a plurality of sample properties are measured using a scanning scheme of allowing a probe to approach and withdraw from a sample, the sample properties need to be accurately and reliably detected in the minimum required measurement time. Further, the acting force between the probe and the sample varies depending on the type of the probe and the wear condition of a probe tip. Thus, disadvantageously, property values acquired using different probes cannot be compared with one another unless the artifactual effect of the measuring probes are eliminated. In accordance with the present invention, with a scanning probe microscope, the probe is brought into intermittent contact with the sample, while driving means repeatedly allows the probe to approach and withdraw from the sample with a variable amplitude. The sample property is thus acquired at a high speed. Further, a calibration sample is used in a given environment (given temperature and humidity) to acquire a force curve for at least one point. Information obtained from the force curve is used to correct measurements to display the distribution of the sample property.
    • 使用扫描探针显微镜,如果使用允许探针进入和退出样本的扫描方案测量多个样品特性,则需要在最小所需测量时间内精确可靠地检测样品性质。 此外,探针和样品之间的作用力根据探针的类型和探针尖端的磨损情况而变化。 因此,不利的是,使用不同探针获得的特性值不能相互比较,除非消除了测量探针的人为影响。 根据本发明,利用扫描探针显微镜,使探针与样品间歇接触,同时驱动装置反复允许探针以可变的幅度从样品接近和退出。 因此,以高速度获取样品特性。 此外,在给定的环境(给定的温度和湿度)中使用校准样品以获得至少一个点的力曲线。 从力曲线获得的信息用于校正测量值以显示样品属性的分布。
    • 8. 发明申请
    • Scanning Probe Microscope
    • 扫描探头显微镜
    • US20070266780A1
    • 2007-11-22
    • US11737779
    • 2007-04-20
    • SHUICHI BABAMasahiro WatanabeToshihiko NakataToru KurenumaHiroshi KurodaTakafumi MorimotoYukio KemboManabu Edamura
    • SHUICHI BABAMasahiro WatanabeToshihiko NakataToru KurenumaHiroshi KurodaTakafumi MorimotoYukio KemboManabu Edamura
    • G01N13/10
    • G01Q60/28G01Q10/06G01Q30/04
    • With a scanning probe microscope, if a plurality of sample properties are measured using a scanning scheme of allowing a probe to approach and withdraw from a sample, the sample properties need to be accurately and reliably detected in the minimum required measurement time. Further, the acting force between the probe and the sample varies depending on the type of the probe and the wear condition of a probe tip. Thus, disadvantageously, property values acquired using different probes cannot be compared with one another unless the artifactual effect of the measuring probes are eliminated. In accordance with the present invention, with a scanning probe microscope, the probe is brought into intermittent contact with the sample, while driving means repeatedly allows the probe to approach and withdraw from the sample with a variable amplitude. The sample property is thus acquired at a high speed. Further, a calibration sample is used in a given environment (given temperature and humidity) to acquire a force curve for at least one point. Information obtained from the force curve is used to correct measurements to display the distribution of the sample property.
    • 使用扫描探针显微镜,如果使用允许探针进入和退出样本的扫描方案测量多个样品特性,则需要在最小所需测量时间内精确可靠地检测样品性质。 此外,探针和样品之间的作用力根据探针的类型和探针尖端的磨损情况而变化。 因此,不利的是,使用不同探针获得的特性值不能相互比较,除非消除了测量探针的人为影响。 根据本发明,利用扫描探针显微镜,使探针与样品间歇接触,同时驱动装置反复允许探针以可变的幅度从样品接近和退出。 因此,以高速度获取样品特性。 此外,在给定的环境(给定的温度和湿度)中使用校准样品以获得至少一个点的力曲线。 从力曲线获得的信息用于校正测量值以显示样品属性的分布。