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1. 发明授权

US5083022A Scanning tunneling microscope 失效
标题翻译：扫描隧道显微镜
公开(公告)号：US5083022A
公开(公告)日：1992-01-21
申请号：US589491
申请日：1990-09-27
申请人： Hirofumi Miyamoto , Tsugiko Takase , Takao Okada , Shuzo Mishima , Hiroko Ohta
发明人： Hirofumi Miyamoto , Tsugiko Takase , Takao Okada , Shuzo Mishima , Hiroko Ohta
IPC分类号： G01B7/34 , G01N27/00 , G01Q10/02 , G01Q20/02 , G01Q30/02 , G01Q60/10 , H01J37/28 , H01J37/00
CPC分类号： G01Q70/02 , B82Y35/00 , G01Q10/02 , G01Q30/025 , G01Q60/16 , B82Y20/00 , Y10S977/869
摘要： A scanning tunneling microscope includes an observation optical system for optically observing the surface of an object. The optical system is fixed on an optical system fixing member. The optical system is moved in a direction (Z-direction) vertical to the surface of the object by means of a motor, whereby the focal point of the optical system is adjusted. An STM measurement probe supported by an optically transparent member is disposed between the optical system and the object. When the object is optically observed, the probe is displaced from the focal point by means of a micrometer. Thus, an optical observation image of the surface of the object, which is not affected by the shadow of the probe, can be obtained. When the STM measurement is carried out, a probe unit enables the probe to scan the surface of the object, and an STM image is obtained by a conventional method.

2. 发明授权

US5041783A Probe unit for an atomic probe microscope 失效
标题翻译：原子探针显微镜的探针单元
公开(公告)号：US5041783A
公开(公告)日：1991-08-20
申请号：US475169
申请日：1990-02-05
申请人： Hiroko Ohta , Tsugiko Takase , Shuzo Mishima , Hirofumi Miyamoto , Takao Okada
发明人： Hiroko Ohta , Tsugiko Takase , Shuzo Mishima , Hirofumi Miyamoto , Takao Okada
IPC分类号： G01B7/34 , G01N27/00 , G01N37/00 , G01Q30/02 , G01Q30/08 , G01Q60/10 , G01Q60/16 , G01Q60/38 , G01R31/00 , H01J37/00 , H01J37/28
CPC分类号： G01Q60/16 , B82Y35/00 , G01Q30/025 , G01Q70/02 , Y10S977/861
摘要： A probe unit includes a disk-like substrate made of transparent material, a transparent electrode coated on all over the substrate, and a metal wire whose sharp tip is projected vertically and upwardly from the center of the substrate through the transparent electrode. The metal wire is made of Pt-Ir, which incudes a sharp tip projected from the upper surface of the substrate and a stem embedded in a hole of the electrode and fixed to the electrode and substrate by conductive adhesive.

3. 发明授权

US5260824A Atomic force microscope 失效
标题翻译：原子力显微镜
公开(公告)号：US5260824A
公开(公告)日：1993-11-09
申请号：US511054
申请日：1990-04-19
申请人： Takao Okada , Shuzo Mishima , Tsugiko Takase , Hirofumi Miyamoto , Hiroko Ohta , Yasushi Satoh , Yoshimitsu Enomoto , Toshiaki Matsuzawa , Yuzo Nakamura , Hiroshi Kajimura
发明人： Takao Okada , Shuzo Mishima , Tsugiko Takase , Hirofumi Miyamoto , Hiroko Ohta , Yasushi Satoh , Yoshimitsu Enomoto , Toshiaki Matsuzawa , Yuzo Nakamura , Hiroshi Kajimura
IPC分类号： G01B7/34 , G01B21/30 , G01L5/00 , G01Q20/02 , G01Q20/04 , G01Q30/02 , G01Q60/38 , G02B4/00 , G01B5/28 , G01N23/00
CPC分类号： G01Q60/38 , B82Y35/00 , G01Q20/02 , G01Q30/025 , Y10S977/87
摘要： An atomic force microscope comprises a probe having a sharply-pointed tip end. The probe is supported on the free end portion of a cantilever and is close to the surface of a specimen. When an interatomic force is produced, the cantilever is deformed, and the probe is displaced. The displacement of the probe is detected by an optical system. A light beam emitted from a light source is collimated by a lens, and reflected by a polarized beam-splitter, and also by a half-mirror. Then, the light beam passes through a quarter wavelength plate and an objective lens, such that the light is converged on the cantilever. The reflected light beam from the cantilever returns along the same optical path and passes through the splitter. The light beam is divided into two light beams at the splitter. These two light beams are reflected by respective prisms and are then incident on respective photodetectors. These photodetectors detect the displacement of the probe.

4. 外观设计

USD335888S Probe for a scanning tunneling microscope 失效
公开(公告)号：USD335888S
公开(公告)日：1993-05-25
申请号：US621550
申请日：1990-12-03
申请人： Takao Okada , Tsugiko Takase , Shuzo Mishima , Hisanari Shimazu , Akira Yagi , Hiroko Ota , Hirofumi Miyamoto , Takaaki Takenobu
设计人： Takao Okada , Tsugiko Takase , Shuzo Mishima , Hisanari Shimazu , Akira Yagi , Hiroko Ota , Hirofumi Miyamoto , Takaaki Takenobu

5. 发明授权

US5059793A Scanning tunneling microscope having proper servo control function 失效
标题翻译：扫描隧道显微镜具有适当的伺服控制功能
公开(公告)号：US5059793A
公开(公告)日：1991-10-22
申请号：US591457
申请日：1990-10-01
申请人： Hirofumi Miyamoto , Takao Okada , Tsugiko Takase , Shuzo Mishima , Hiroko Ota
发明人： Hirofumi Miyamoto , Takao Okada , Tsugiko Takase , Shuzo Mishima , Hiroko Ota
IPC分类号： G01N27/00 , G01Q10/00 , G01Q30/06 , G01Q60/16
CPC分类号： G01Q60/16 , B82Y35/00 , Y10S977/851
摘要： A scanning tunneling microscope includes a piezoelectric driver expanding and contracting according to a voltage applied thereto to adjust the distance between a sample and a probe. A servo circuit outputs a servo voltage to control the expansion and contraction of the piezoelectric driver to keep a tunnel current flowing between the sample and the probe at a constant value. A correction voltage generating circuit generates a given correction voltage to correct a voltage to be applied to the piezoelectric driver. An adding circuit adds the servo voltage and the correction voltage together and supplies an added output to the piezoelectric driver. A control circuit controls the correction voltage according to the servo voltage to set the added output to a given reference voltage.

6. 发明授权

US5296704A Scanning tunneling microscope 失效
标题翻译：扫描隧道显微镜
公开(公告)号：US5296704A
公开(公告)日：1994-03-22
申请号：US821123
申请日：1992-01-14
申请人： Shuzo Mishima , Takao Okada , Tsugiko Takase , Hiroko Ota , Hirofumi Miyamoto
发明人： Shuzo Mishima , Takao Okada , Tsugiko Takase , Hiroko Ota , Hirofumi Miyamoto
IPC分类号： G01Q20/02 , G01B7/34 , G01B21/30 , G01N27/00 , G01N37/00 , G01Q10/04 , G01Q30/02 , G01Q30/20 , G01Q60/10 , G01Q60/16 , G01Q70/04 , H01J37/00
CPC分类号： G01Q60/16 , B82Y35/00 , G01Q30/025 , G01Q30/08 , G01Q30/18 , Y10S977/869
摘要： A scanning tunneling microscope has an STM unit including a probe for scanning the surface of an object. The STM unit has at its outer peripheral surface a cylindrical enclosing member extending towards an object table. When the object is observed, the object table is elevated or the STM unit is lowered, so that the enclosing member is urged upon the table. The table and the STM unit constitute one body. As a result, relative movement between the object and the probe can be prevented, and also influence due to vibration can be prevented. In addition, the enclosing member isolates the object and the probe from the outside space, whereby electric noise, magnetic noise, sound noise and air flow are shielded. Thus, the influence due to external vibration can be reduced, and the stability is enhanced.
摘要翻译：扫描隧道显微镜具有包括用于扫描物体表面的探针的STM单元。 STM单元在其外周表面具有朝向物台延伸的圆柱形封闭构件。当观察对象时，对象表被升高或者STM单元被降低，使得封闭构件被推到桌子上。表和STM单元构成一体。结果，可以防止物体和探针之间的相对运动，并且还可以防止由振动引起的影响。此外，封闭构件将物体和探针与外部空间隔离，由此屏蔽电噪声，磁噪声，声音噪声和空气流。因此，可以降低由外部振动引起的影响，提高稳定性。

7. 发明授权

US6127681A Scanning tunnel microscope 失效
标题翻译：扫描隧道显微镜
公开(公告)号：US6127681A
公开(公告)日：2000-10-03
申请号：US460076
申请日：1990-02-05
申请人： Chiaki Sato , Kiyozo Koshiishi , Sadao Shigetomi , Shuzo Mishima , Tsugiko Takase
发明人： Chiaki Sato , Kiyozo Koshiishi , Sadao Shigetomi , Shuzo Mishima , Tsugiko Takase
IPC分类号： A61K31/41 , A61K31/433 , A61K31/535 , A61P25/02 , A61P27/02 , C07D285/10 , C07D417/00 , C07D417/12 , G01B7/34 , G01B21/30 , G01N27/00 , G01N37/00 , G01Q30/02 , G01Q60/10 , G01Q60/16 , G02B21/00 , H01L41/09 , G12B21/20
CPC分类号： G01Q60/16 , B82Y35/00 , C07D285/10 , C07D417/12 , G01Q30/025 , G02B21/002 , H01L41/092 , H02N2/023 , H02N2/028 , Y10S977/869
摘要： A scanning tunnel microscope is arranged by a combination of an optical microscope and a tunnel scanning unit. The scanning tunnel unit includes a probe held to be spaced apart from a sample placed on a sample table by a predetermined interval in an axial direction, and an actuator for axially moving the sample table and the probe to a tunnel region and relatively and three-dimensionally driving the sample table and the probe. An objective lens and the probe are arranged such that the axis of the probe of the scanning tunnel unit is aligned with an optical axis of the objective lens of the optical microscope. The sample and the probe are axially moved and brought into the tunnel region, and the sample is scanned in its surface direction while the sample and the probe are finely moved in the axial direction and a tunnel current is kept constant, thereby performing an STM observation of an observation surface of the sample. The objective lens of the optical microscope is axially moved to obtain an in-focus state, and the field of the STM observation surface is observed as an optical microscopic image through an eyepiece lens.
摘要翻译： PCT No.PCT / JP88 / 00804 Sec。 371 1990年2月5日第 102（e）日期1990年2月5日PCT提交1988年8月12日PCT公布。公开号WO89 / 01603 日期1989年2月23日扫描隧道显微镜通过光学显微镜和隧道扫描单元的组合布置。扫描隧道单元包括：保持与沿轴向方向预定间隔放置在样品台上的样品间隔开的探针;以及用于将样品台和探针轴向移动到隧道区域的致动器，在尺寸上驱动样品台和探针。物镜和探针被布置成使得扫描隧道单元的探针的轴线与光学显微镜的物镜的光轴对准。样品和探针被轴向移动并进入隧道区域，并且在样品和探针沿轴向细微移动并且隧道电流保持恒定的同时沿其表面方向扫描样品，从而进行STM观察的样品的观察表面。轴向移动光学显微镜的物镜以获得对焦状态，并且通过目镜透镜观察STM观察表面的场作为光学显微镜图像。

8. 发明授权

US5138159A Scanning tunneling microscope 失效
标题翻译：扫描隧道显微镜
公开(公告)号：US5138159A
公开(公告)日：1992-08-11
申请号：US727005
申请日：1991-07-08
申请人： Tsugiko Takase , Takao Okada
发明人： Tsugiko Takase , Takao Okada
IPC分类号： G01B7/34 , G01B11/30 , G01N37/00 , G01Q10/00 , G01Q20/02 , G01Q30/04 , G01Q60/02 , G01Q60/10 , G01Q60/16 , G01Q60/22 , G01Q70/10 , G02B21/00 , H01J37/28
CPC分类号： G01Q60/16 , B82Y20/00 , B82Y35/00 , G01Q60/22 , Y10S977/852 , Y10S977/861
摘要： White light emitted from a light source is made incident on a spectroscope via a lens. The light from the spectroscope is converged by a lens and fed to one end of an optical fiber. The other end of the fiber is provided with a probe. The probe has a pointed end portion coated with a total reflection film and a transparent electrically conductive film. The probe is attached to a cylindrical piezoelectric actuator via a metal frame. Thus, the probe is scanned along the surface of a sample, and the distance between the probe and the surface of the sample is controlled. The light emitted from the tip of the probe and transmitted through the sample is converged by a lens system and radiated on a photoelectrical conversion element. The output from the photoelectrical conversion element is processed by a signal processor, and the processed result is displayed on a display. A driver circuit scans the probe along the surface of the sample, and controls the distance between the probe and the sample upon receiving a tunnel current. The output from the driver circuit is processed by the signal processor and an STM image is displayed on the display.
摘要翻译：从光源发出的白光通过透镜入射到分光镜上。来自分光镜的光由透镜会聚并馈送到光纤的一端。纤维的另一端设置有探针。探针具有涂覆有全反射膜和透明导电膜的尖端部分。探头通过金属框架连接到圆柱形压电致动器。因此，沿着样品的表面扫描探针，并且控制探针与样品表面之间的距离。从探针的尖端发射并透过样品的光由透镜系统会聚并辐射到光电转换元件上。光电转换元件的输出由信号处理器处理，处理结果显示在显示器上。驱动电路沿着样品的表面扫描探头，并在接收隧道电流时控制探头与样品之间的距离。来自驱动电路的输出由信号处理器处理，STM图像显示在显示器上。

9. 发明授权

US5136162A Measuring device in a scanning probe microscope 失效
标题翻译：扫描探针显微镜中的测量装置
公开(公告)号：US5136162A
公开(公告)日：1992-08-04
申请号：US730475
申请日：1991-07-16
申请人： Hirofumi Miyamoto , Tsugiko Takase , Hiroshi Kajimura , Akitoshi Toda
发明人： Hirofumi Miyamoto , Tsugiko Takase , Hiroshi Kajimura , Akitoshi Toda
IPC分类号： G01B7/34 , G01N37/00 , G01Q30/18 , G01Q60/10 , G01Q70/08 , G05D3/12 , H01J37/252 , H01J37/26 , H01J37/28 , H01L41/09
CPC分类号： G01Q60/16 , B82Y35/00 , G01Q10/04 , G01Q20/04 , Y10S977/86
摘要： A probe for scanning a sample is attached to a probe electrode supported by a cylindrical piezoelectric actuator. The actuator has four drive electrodes on its periphery, and deforms in the three axial directions in accordance with the voltage applied to the drive electrodes. A girdling electrode is provided between the actuator and the probe electrode. The girdling electrode is insulated from the probe electrode and the drive electrodes by insulator members provided on its upper and lower surfaces. A bias voltage signal S1 is input to an operational amplifier of which the output is connected to the girdling electrode. The amplifier is a voltage follower for equalizing the potential of the girdling electrode to that of the bias voltage signal S1. An operational amplifier has a non-inversion input to which the bias voltage signal S1 is input, and an inversion input connected to the probe electrode. While equalizing the potential of the probe electrode to that of the bias input voltage S1, the amplifier converts a tunnel current flowing between the probe and the sample to a voltage signal S2. An operational amplifier subtracts a bias voltage component from the voltage signal S2, and outputs a tunnel current signal S3.
摘要翻译：用于扫描样品的探针连接到由圆柱形压电致动器支撑的探针电极。致动器在其周围具有四个驱动电极，并且根据施加到驱动电极的电压在三个轴向方向上变形。在致动器和探针电极之间提供环形电极。环形电极通过设置在其上表面和下表面上的绝缘体与探针电极和驱动电极绝缘。偏置电压信号S1输入到输出与环绕电极连接的运算放大器。放大器是用于使环形电极的电位与偏置电压信号S1的电位相等的电压跟随器。运算放大器具有输入偏置电压信号S1的非反相输入端和连接到探针电极的反相输入端。在使探针电极的电位与偏置输入电压S1的电位相等的同时，放大器将在探头和样品之间流动的隧道电流转换为电压信号S2。运算放大器从电压信号S2中减去偏置电压分量，并输出隧道电流信号S3。

10. 发明授权

US5289004A Scanning probe microscope having cantilever and detecting sample characteristics by means of reflected sample examination light 失效
标题翻译：具有悬臂的扫描探针显微镜，通过反射样品检测光检测样品特性
公开(公告)号：US5289004A
公开(公告)日：1994-02-22
申请号：US866748
申请日：1992-04-10
申请人： Takao Okada , Akira Yagi , Yasuhiro Sugawara , Seizo Morita , Tsugiko Takase
发明人： Takao Okada , Akira Yagi , Yasuhiro Sugawara , Seizo Morita , Tsugiko Takase
IPC分类号： G01Q10/00 , G01Q10/06 , G01Q20/02 , G01Q60/04 , G01Q60/12 , G01Q60/14 , G01Q60/38 , H01J37/00
CPC分类号： G01Q60/12 , B82Y35/00 , G01Q10/065 , G01Q20/02 , G01Q60/04 , G01Q60/14 , Y10S977/861 , Y10S977/863 , Y10S977/868
摘要： A scanning probe microscope comprises a cantilever having a conductive probe positioned near a sample, an actuator for moving the sample to and away from the probe, a circuit for applying a bias voltage between the probe and sample to produce a tunnel current therebetween, a circuit for detecting the produced tunnel current, a circuit for detecting the amount of displacement of the probe resultant from interatomic forces acting between atomics of the probe and sample, thereby producing signals, a circuit for providing the actuator for feedback in response to the output signals from the circuit to retain constant the distance between the probe and sample, thereby causing the actuator to move the sample, a circuit for forming an STS image data from the detected tunnel current, a circuit for forming an STM image data from the detected tunnel current, and a circuit for forming an AFM image data. Thus, the STS, STP and AFM images are separately obtained simultaneously.
摘要翻译：扫描探针显微镜包括具有位于样品附近的导电探针的悬臂，用于将样品移动到远离探针的致动器，用于在探针和样品之间施加偏置电压以在其间产生隧道电流的电路，电路用于检测产生的隧道电流的电路，用于检测由探针和样品的原子间作用的原子间力产生的探针的位移量，从而产生信号的电路，用于响应于来自保持探针和样品之间的距离恒定的电路，从而使致动器移动样本，从检测到的隧道电流形成STS图像数据的电路，用于从检测到的隧道电流形成STM图像数据的电路，以及用于形成AFM图像数据的电路。因此，STS，STP和AFM图像同时分别获得。

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