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1. 发明授权

US5289004A Scanning probe microscope having cantilever and detecting sample characteristics by means of reflected sample examination light 失效
标题翻译：具有悬臂的扫描探针显微镜，通过反射样品检测光检测样品特性
公开(公告)号：US5289004A
公开(公告)日：1994-02-22
申请号：US866748
申请日：1992-04-10
申请人： Takao Okada , Akira Yagi , Yasuhiro Sugawara , Seizo Morita , Tsugiko Takase
发明人： Takao Okada , Akira Yagi , Yasuhiro Sugawara , Seizo Morita , Tsugiko Takase
IPC分类号： G01Q10/00 , G01Q10/06 , G01Q20/02 , G01Q60/04 , G01Q60/12 , G01Q60/14 , G01Q60/38 , H01J37/00
CPC分类号： G01Q60/12 , B82Y35/00 , G01Q10/065 , G01Q20/02 , G01Q60/04 , G01Q60/14 , Y10S977/861 , Y10S977/863 , Y10S977/868
摘要： A scanning probe microscope comprises a cantilever having a conductive probe positioned near a sample, an actuator for moving the sample to and away from the probe, a circuit for applying a bias voltage between the probe and sample to produce a tunnel current therebetween, a circuit for detecting the produced tunnel current, a circuit for detecting the amount of displacement of the probe resultant from interatomic forces acting between atomics of the probe and sample, thereby producing signals, a circuit for providing the actuator for feedback in response to the output signals from the circuit to retain constant the distance between the probe and sample, thereby causing the actuator to move the sample, a circuit for forming an STS image data from the detected tunnel current, a circuit for forming an STM image data from the detected tunnel current, and a circuit for forming an AFM image data. Thus, the STS, STP and AFM images are separately obtained simultaneously.
摘要翻译：扫描探针显微镜包括具有位于样品附近的导电探针的悬臂，用于将样品移动到远离探针的致动器，用于在探针和样品之间施加偏置电压以在其间产生隧道电流的电路，电路用于检测产生的隧道电流的电路，用于检测由探针和样品的原子间作用的原子间力产生的探针的位移量，从而产生信号的电路，用于响应于来自保持探针和样品之间的距离恒定的电路，从而使致动器移动样本，从检测到的隧道电流形成STS图像数据的电路，用于从检测到的隧道电流形成STM图像数据的电路，以及用于形成AFM图像数据的电路。因此，STS，STP和AFM图像同时分别获得。

2. 外观设计

USD335888S Probe for a scanning tunneling microscope 失效
公开(公告)号：USD335888S
公开(公告)日：1993-05-25
申请号：US621550
申请日：1990-12-03
申请人： Takao Okada , Tsugiko Takase , Shuzo Mishima , Hisanari Shimazu , Akira Yagi , Hiroko Ota , Hirofumi Miyamoto , Takaaki Takenobu
设计人： Takao Okada , Tsugiko Takase , Shuzo Mishima , Hisanari Shimazu , Akira Yagi , Hiroko Ota , Hirofumi Miyamoto , Takaaki Takenobu

3. 发明授权

US5378983A Scanning tunneling potentio-spectroscopic microscope and a data detecting method 失效
标题翻译：扫描隧道电位显微镜和数据检测方法
公开(公告)号：US5378983A
公开(公告)日：1995-01-03
申请号：US977572
申请日：1992-11-17
申请人： Akira Yagi , Takao Okada , Seizo Morita , Nobuo Mikoshiba
发明人： Akira Yagi , Takao Okada , Seizo Morita , Nobuo Mikoshiba
IPC分类号： G01Q60/12 , G01B7/34 , G01Q30/04 , G01Q60/14 , G01K1/16
CPC分类号： G01Q60/12 , B82Y35/00 , G01B7/34 , G01Q30/04 , G01Q60/14 , Y10S977/852
摘要： A scanning tunneling potentio-spectroscopic microscope, includes a conductive probe and a circuit for selectively applying one of first, second and third bias voltages to a sample. A tunnel current flowing between the probe and sample is detected, and a tunnel current signal is produced upon detection thereof. A servo circuit controls a distance between the probe and sample on the basis of the tunnel current signal by producing a servo signal as a feedback signal. A hold circuit switches the servo circuit between operating and non-operating states. Configuration data on a surface of the sample is obtained, on the basis of the servo signal, with the first bias voltage applied to the sample and with the servo circuit in the operating state. A first dependence of the tunnel current on the bias voltage is obtained, from the tunnel current signal and the second bias voltage, with the second bias voltage applied to the sample and with the servo circuit in the non-operating state. A second dependence of the tunnel current on the bias voltage is obtained from the tunnel current signal and the third bias voltage, with the third bias voltage applied to the sample and with the servo circuit in the non-operating state. Electron state data is obtained on the basis of the first dependence, and potential data is obtained on the basis of the first and second dependencies.
摘要翻译：扫描隧道电位分光显微镜包括导电探针和用于选择性地将一个第一，第二和第三偏置电压施加到样品的电路。检测在探针和样品之间流动的隧道电流，并且在检测到隧道电流信号时产生隧道电流信号。伺服电路通过产生伺服信号作为反馈信号，根据隧道电流信号来控制探头和样品之间的距离。保持电路在操作状态和非工作状态之间切换伺服电路。基于伺服信号获得样品表面上的配置数据，其中施加到样品的第一偏置电压和处于操作状态的伺服电路。从隧道电流信号和第二偏置电压获得隧道电流对偏置电压的第一依赖性，其中第二偏置电压施加到样品并且伺服电路处于非操作状态。从隧道电流信号和第三偏置电压获得隧道电流对偏置电压的第二依赖性，其中第三偏压施加到样品并且伺服电路处于非操作状态。基于第一依赖性获得电子状态数据，并且基于第一和第二依赖性获得潜在数据。

4. 发明授权

US5025153A Scanning tunneling spectroscope and a spectroscopic information detection method 失效
标题翻译：扫描隧道光谱仪和光谱信息检测方法
公开(公告)号：US5025153A
公开(公告)日：1991-06-18
申请号：US549469
申请日：1990-07-06
申请人： Takao Okada , Akira Yagi , Seizo Morita , Nobuo Mikoshiba
发明人： Takao Okada , Akira Yagi , Seizo Morita , Nobuo Mikoshiba
IPC分类号： G01B7/34 , G01N27/00 , G01N37/00 , G01Q10/00 , G01Q60/10 , G01Q60/12 , H01J37/00 , H01J37/244 , H01J37/28
CPC分类号： G01Q60/12 , B82Y35/00 , Y10S977/851 , Y10S977/861
摘要： A scanning tunnel spectroscope comprises a generator for applying a bias voltage (V.sub.T) of a sin wave between a sample and probe, an I-V converter for converting a tunnel current flowing when the probe is set close to the sample, to a tunnel current representing voltage singal (I.sub.T), a detector for detecting the absolute value of the voltage signal (I.sub.t), and a servo circuit for servo-controlling a distance between the sample and probe using the absolute value with the servo time constant set larger than five times the period of the bias voltage. The information concerning the unevenness of the sample is obtained based on an output of the servo control means. A unit is provided for effecting the analog operation to derive a differential conductance based on the tunnel current on the real time basis and measuring the unevenness data and differential conductance between the sample and probe kept constant.

5. 发明授权

US5185572A Scanning tunneling potentio-spectroscopic microscope and a data detecting method 失效
标题翻译：扫描隧道电子显微镜和数据检测方法
公开(公告)号：US5185572A
公开(公告)日：1993-02-09
申请号：US585880
申请日：1990-09-20
申请人： Akira Yagi , Takao Okada , Seizo Morita , Nobuo Mikoshiba
发明人： Akira Yagi , Takao Okada , Seizo Morita , Nobuo Mikoshiba
IPC分类号： G01Q60/12 , G01B7/34 , G01Q30/04 , G01Q60/14
CPC分类号： G01Q60/12 , B82Y35/00 , G01B7/34 , G01Q30/04 , G01Q60/14 , Y10S977/852
摘要： A bias voltage U.sub.B including a sine-wave voltage U.sub.T sin.omega. .sub.o t and an off-set voltage U.sub.REG is applied to an electrode on a sample. A potential U.sub.1 of the electrode is represented by: U.sub.1 =U.sub.REG +U.sub.T sin.omega. .sub.o t. A voltage including the bias voltage U.sub.B and a voltage .DELTA.U is applied to an electrode on the sample. A probe is approached to the sample by several nm, and a tunnel current I.sub.T flows therebetween. And the probe scans the surface of the sample. During the scan, the position of the probe is servo-controlled in the z-direction, to make constant the average absolute value of the tunnel current. The servo voltage is recorded thereby obtaining an STM image. Given that the potential difference between the electrode and a surface portion facing the probe is U.sub.S (x), the average of U.sub.1 +U.sub.S (x) becomes zero when the average of the tunnel current I.sub.T is zero. Accordingly, =0, that is, U.sub.S (x)=-U.sub.REG. Thus, by recording-U.sub.REG the potential distribution U.sub.S (x) on the sample surface is determined. Spectroscopic data is obtained by an analog operation unit, on the basis of a differential conductance .differential.I.sub.T /.differential.U.sub.T calculated from the tunnel current signal I.sub.T and the bias voltage U.sub.T.

6. 发明授权

US5083022A Scanning tunneling microscope 失效
标题翻译：扫描隧道显微镜
公开(公告)号：US5083022A
公开(公告)日：1992-01-21
申请号：US589491
申请日：1990-09-27
申请人： Hirofumi Miyamoto , Tsugiko Takase , Takao Okada , Shuzo Mishima , Hiroko Ohta
发明人： Hirofumi Miyamoto , Tsugiko Takase , Takao Okada , Shuzo Mishima , Hiroko Ohta
IPC分类号： G01B7/34 , G01N27/00 , G01Q10/02 , G01Q20/02 , G01Q30/02 , G01Q60/10 , H01J37/28 , H01J37/00
CPC分类号： G01Q70/02 , B82Y35/00 , G01Q10/02 , G01Q30/025 , G01Q60/16 , B82Y20/00 , Y10S977/869
摘要： A scanning tunneling microscope includes an observation optical system for optically observing the surface of an object. The optical system is fixed on an optical system fixing member. The optical system is moved in a direction (Z-direction) vertical to the surface of the object by means of a motor, whereby the focal point of the optical system is adjusted. An STM measurement probe supported by an optically transparent member is disposed between the optical system and the object. When the object is optically observed, the probe is displaced from the focal point by means of a micrometer. Thus, an optical observation image of the surface of the object, which is not affected by the shadow of the probe, can be obtained. When the STM measurement is carried out, a probe unit enables the probe to scan the surface of the object, and an STM image is obtained by a conventional method.

7. 发明授权

US5138159A Scanning tunneling microscope 失效
标题翻译：扫描隧道显微镜
公开(公告)号：US5138159A
公开(公告)日：1992-08-11
申请号：US727005
申请日：1991-07-08
申请人： Tsugiko Takase , Takao Okada
发明人： Tsugiko Takase , Takao Okada
IPC分类号： G01B7/34 , G01B11/30 , G01N37/00 , G01Q10/00 , G01Q20/02 , G01Q30/04 , G01Q60/02 , G01Q60/10 , G01Q60/16 , G01Q60/22 , G01Q70/10 , G02B21/00 , H01J37/28
CPC分类号： G01Q60/16 , B82Y20/00 , B82Y35/00 , G01Q60/22 , Y10S977/852 , Y10S977/861
摘要： White light emitted from a light source is made incident on a spectroscope via a lens. The light from the spectroscope is converged by a lens and fed to one end of an optical fiber. The other end of the fiber is provided with a probe. The probe has a pointed end portion coated with a total reflection film and a transparent electrically conductive film. The probe is attached to a cylindrical piezoelectric actuator via a metal frame. Thus, the probe is scanned along the surface of a sample, and the distance between the probe and the surface of the sample is controlled. The light emitted from the tip of the probe and transmitted through the sample is converged by a lens system and radiated on a photoelectrical conversion element. The output from the photoelectrical conversion element is processed by a signal processor, and the processed result is displayed on a display. A driver circuit scans the probe along the surface of the sample, and controls the distance between the probe and the sample upon receiving a tunnel current. The output from the driver circuit is processed by the signal processor and an STM image is displayed on the display.
摘要翻译：从光源发出的白光通过透镜入射到分光镜上。来自分光镜的光由透镜会聚并馈送到光纤的一端。纤维的另一端设置有探针。探针具有涂覆有全反射膜和透明导电膜的尖端部分。探头通过金属框架连接到圆柱形压电致动器。因此，沿着样品的表面扫描探针，并且控制探针与样品表面之间的距离。从探针的尖端发射并透过样品的光由透镜系统会聚并辐射到光电转换元件上。光电转换元件的输出由信号处理器处理，处理结果显示在显示器上。驱动电路沿着样品的表面扫描探头，并在接收隧道电流时控制探头与样品之间的距离。来自驱动电路的输出由信号处理器处理，STM图像显示在显示器上。

8. 发明授权

US5059793A Scanning tunneling microscope having proper servo control function 失效
标题翻译：扫描隧道显微镜具有适当的伺服控制功能
公开(公告)号：US5059793A
公开(公告)日：1991-10-22
申请号：US591457
申请日：1990-10-01
申请人： Hirofumi Miyamoto , Takao Okada , Tsugiko Takase , Shuzo Mishima , Hiroko Ota
发明人： Hirofumi Miyamoto , Takao Okada , Tsugiko Takase , Shuzo Mishima , Hiroko Ota
IPC分类号： G01N27/00 , G01Q10/00 , G01Q30/06 , G01Q60/16
CPC分类号： G01Q60/16 , B82Y35/00 , Y10S977/851
摘要： A scanning tunneling microscope includes a piezoelectric driver expanding and contracting according to a voltage applied thereto to adjust the distance between a sample and a probe. A servo circuit outputs a servo voltage to control the expansion and contraction of the piezoelectric driver to keep a tunnel current flowing between the sample and the probe at a constant value. A correction voltage generating circuit generates a given correction voltage to correct a voltage to be applied to the piezoelectric driver. An adding circuit adds the servo voltage and the correction voltage together and supplies an added output to the piezoelectric driver. A control circuit controls the correction voltage according to the servo voltage to set the added output to a given reference voltage.

9. 发明授权

US5041783A Probe unit for an atomic probe microscope 失效
标题翻译：原子探针显微镜的探针单元
公开(公告)号：US5041783A
公开(公告)日：1991-08-20
申请号：US475169
申请日：1990-02-05
申请人： Hiroko Ohta , Tsugiko Takase , Shuzo Mishima , Hirofumi Miyamoto , Takao Okada
发明人： Hiroko Ohta , Tsugiko Takase , Shuzo Mishima , Hirofumi Miyamoto , Takao Okada
IPC分类号： G01B7/34 , G01N27/00 , G01N37/00 , G01Q30/02 , G01Q30/08 , G01Q60/10 , G01Q60/16 , G01Q60/38 , G01R31/00 , H01J37/00 , H01J37/28
CPC分类号： G01Q60/16 , B82Y35/00 , G01Q30/025 , G01Q70/02 , Y10S977/861
摘要： A probe unit includes a disk-like substrate made of transparent material, a transparent electrode coated on all over the substrate, and a metal wire whose sharp tip is projected vertically and upwardly from the center of the substrate through the transparent electrode. The metal wire is made of Pt-Ir, which incudes a sharp tip projected from the upper surface of the substrate and a stem embedded in a hole of the electrode and fixed to the electrode and substrate by conductive adhesive.

10. 发明授权

US5296704A Scanning tunneling microscope 失效
标题翻译：扫描隧道显微镜
公开(公告)号：US5296704A
公开(公告)日：1994-03-22
申请号：US821123
申请日：1992-01-14
申请人： Shuzo Mishima , Takao Okada , Tsugiko Takase , Hiroko Ota , Hirofumi Miyamoto
发明人： Shuzo Mishima , Takao Okada , Tsugiko Takase , Hiroko Ota , Hirofumi Miyamoto
IPC分类号： G01Q20/02 , G01B7/34 , G01B21/30 , G01N27/00 , G01N37/00 , G01Q10/04 , G01Q30/02 , G01Q30/20 , G01Q60/10 , G01Q60/16 , G01Q70/04 , H01J37/00
CPC分类号： G01Q60/16 , B82Y35/00 , G01Q30/025 , G01Q30/08 , G01Q30/18 , Y10S977/869
摘要： A scanning tunneling microscope has an STM unit including a probe for scanning the surface of an object. The STM unit has at its outer peripheral surface a cylindrical enclosing member extending towards an object table. When the object is observed, the object table is elevated or the STM unit is lowered, so that the enclosing member is urged upon the table. The table and the STM unit constitute one body. As a result, relative movement between the object and the probe can be prevented, and also influence due to vibration can be prevented. In addition, the enclosing member isolates the object and the probe from the outside space, whereby electric noise, magnetic noise, sound noise and air flow are shielded. Thus, the influence due to external vibration can be reduced, and the stability is enhanced.
摘要翻译：扫描隧道显微镜具有包括用于扫描物体表面的探针的STM单元。 STM单元在其外周表面具有朝向物台延伸的圆柱形封闭构件。当观察对象时，对象表被升高或者STM单元被降低，使得封闭构件被推到桌子上。表和STM单元构成一体。结果，可以防止物体和探针之间的相对运动，并且还可以防止由振动引起的影响。此外，封闭构件将物体和探针与外部空间隔离，由此屏蔽电噪声，磁噪声，声音噪声和空气流。因此，可以降低由外部振动引起的影响，提高稳定性。

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