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1. 发明申请

US20060147648A1 Method and arrangement for generating an atmospheric pressure glow discharg plasma (apg) 有权
标题翻译：用于产生大气压辉光放电等离子体（apg）的方法和装置
公开(公告)号：US20060147648A1
公开(公告)日：2006-07-06
申请号：US10529786
申请日：2003-09-30
申请人： Hindrik De Vries , Fuyuhiko Mori , Eugen Aldea , Mauritius, Cornelius, Maria Van De Sanden
发明人： Hindrik De Vries , Fuyuhiko Mori , Eugen Aldea , Mauritius, Cornelius, Maria Van De Sanden
IPC分类号： H05H1/24 , C23C16/00
CPC分类号： H01J37/32825 , B05D1/62 , B05D3/141 , B05D2252/02 , C23C16/503 , C23C16/505 , H01J37/32036 , H01J37/32082 , H05H1/2406 , H05H2001/2412 , H05H2001/2431
摘要： Method and arrangement (1) for generating an atmospheric pressure glow plasma APG (7), where in a plurality of electrodes, (4, 5) are arranged defining a discharge space (10) for forming said plasma (7). The electrodes (4,5) are connected to a power supply (8) providing an AC-voltage having a frequency of at least 50 kHz to the electrodes (4,5). A gaseous substance (6) is provided in said discharge space and comprises t least one of a group of argon, nitrogen and air.
摘要翻译：用于产生大气压发光等离子体APG（7）的方法和装置（1），其中在多个电极（4,5）中布置有限定用于形成所述等离子体（7）的放电空间（10）的装置（4）。电极（4,5）连接到向电极（4,5）提供具有至少50kHz的频率的AC电压的电源（8）。气体物质（6）设置在所述放电空间中，并且包括一组氩，氮和空气中的至少一种。

2. 发明授权

US07491429B2 Method and arrangement for generating an atmospheric pressure glow discharge plasma (APG) 有权
标题翻译：用于产生大气压辉光放电等离子体（APG）的方法和装置
公开(公告)号：US07491429B2
公开(公告)日：2009-02-17
申请号：US10529786
申请日：2003-09-30
申请人： Hindrik Willem De Vries , Fuyuhiko Mori , Eugen Aldea , Mauritius Cornelius Maria Van De Sanden
发明人： Hindrik Willem De Vries , Fuyuhiko Mori , Eugen Aldea , Mauritius Cornelius Maria Van De Sanden
IPC分类号： H05H1/24
CPC分类号： H01J37/32825 , B05D1/62 , B05D3/141 , B05D2252/02 , C23C16/503 , C23C16/505 , H01J37/32036 , H01J37/32082 , H05H1/2406 , H05H2001/2412 , H05H2001/2431
摘要： Method and arrangement (1) for generating an atmospheric pressure glow plasma APG (7), where in a plurality of electrodes, (4, 5) are arranged defining a discharge space (10) for forming said plasma (7). The electrodes (4,5) are connected to a power supply (8) providing an AC-voltage having a frequency of at least 50 kHz to the electrodes (4,5). A gaseous substance (6) is provided in said discharge space and comprises t least one of a group of argon, nitrogen and air.
摘要翻译：用于产生大气压发光等离子体APG（7）的方法和装置（1），其中在多个电极（4,5）中布置有限定用于形成所述等离子体（7）的放电空间（10）的装置（4）。电极（4,5）连接到向电极（4,5）提供具有至少50kHz的频率的AC电压的电源（8）。气体物质（6）设置在所述放电空间中，并且包括一组氩，氮和空气中的至少一种。

3. 发明授权

US07288204B2 Method and arrangement for treating a substrate with an atmospheric pressure glow plasma (APG) 有权
标题翻译：用大气压发光等离子体（APG）处理衬底的方法和装置
公开(公告)号：US07288204B2
公开(公告)日：2007-10-30
申请号：US10198740
申请日：2002-07-19
申请人： Hindrik Willem De Vries , Fuyuhiko Mori , Eugen Aldea , Mauritius Cornelius Maria Van De Sanden
发明人： Hindrik Willem De Vries , Fuyuhiko Mori , Eugen Aldea , Mauritius Cornelius Maria Van De Sanden
IPC分类号： B44C1/22 , H01L21/00
CPC分类号： H01J37/32825 , H01J37/32009 , H01J37/32348 , H05H1/2406 , H05H2001/2412
摘要： Method for generating an atmospheric pressure glow plasma (APG), wherein said plasma is generated in a discharge space between a plurality of electrodes. A dielectric is present on at least one of said electrodes, said dielectric having a boundary surface with said plasma enabling interactions between said plasma and said surface. Said dielectric is arranged for releasing electrons contributing to said plasma from said surface by said interactions.
摘要翻译：用于产生大气压发光等离子体（APG）的方法，其中所述等离子体在多个电极之间的放电空间中产生。电介质存在于至少一个所述电极上，所述电介质具有与所述等离子体的边界面，从而能够在所述等离子体和所述表面之间进行相互作用。所述电介质被布置用于通过所述相互作用从所述表面释放对所述等离子体有贡献的电子。

4. 发明授权

US06774569B2 Apparatus for producing and sustaining a glow discharge plasma under atmospheric conditions 有权
标题翻译：用于在大气条件下产生和维持辉光放电等离子体的装置
公开(公告)号：US06774569B2
公开(公告)日：2004-08-10
申请号：US10192860
申请日：2002-07-11
申请人： Hindrik Willem de Vries , Fuyuhiko Mori , Eugen Aldea , Mauritius Cornelius Maria van de Sanden
发明人： Hindrik Willem de Vries , Fuyuhiko Mori , Eugen Aldea , Mauritius Cornelius Maria van de Sanden
IPC分类号： H01J724
CPC分类号： H01J37/32082 , H01J37/32174 , H01J37/32825 , H01J37/32935 , H01J37/3299 , H05H1/46 , H05H2001/4682 , H05H2001/4697
摘要： Apparatus for producing and sustaining a glow discharge plasma in a plasma discharge space comprising at least two oppositely spaced electrodes, means for supplying a gas or a gas mixture under atmospheric pressure conditions in the discharge space, AC power supply means for energizing the electrodes, and electric stabilisation means for stabilizing current variations in the plasma. The stabilisation means connect between the electrodes and the power supply means, and are arranged for providing a negative feedback opposed to a positive feedback of the plasma to instabilities in the plasma.
摘要翻译：用于在等离子体放电空间中产生和维持辉光放电等离子体的装置，包括至少两个相对间隔的电极，用于在放电空间中的大气压条件下供应气体或气体混合物的装置，用于激励电极的AC电源装置，以及用于稳定等离子体中的电流变化的电稳定装置。稳定装置连接在电极和电源装置之间，并被布置成提供与等离子体的正反馈相反的负反馈到等离子体中的不稳定性。

5. 发明授权

US07969095B2 Method of and arrangement for removing contaminants from a substrate surface using an atmospheric pressure glow plasma 有权
标题翻译：使用大气压发光等离子体从基板表面去除污染物的方法和装置
公开(公告)号：US07969095B2
公开(公告)日：2011-06-28
申请号：US10584075
申请日：2004-12-22
申请人： Hindrik Willem De Vries , Eugen Aldea , Jan Bastiaan Bouwstra , Mauritius Cornelius Maria Van De Sanden
发明人： Hindrik Willem De Vries , Eugen Aldea , Jan Bastiaan Bouwstra , Mauritius Cornelius Maria Van De Sanden
IPC分类号： H05B31/26
CPC分类号： H01J37/32935 , H01J37/32174 , H01J2237/335 , H01L51/5206 , H05H2240/00
摘要： The present invention relates to a method of and arrangement for removing contaminants from a surface of a substrate by subjecting said substrate surface to an atmospheric pressure glow plasma. Said plasma is generated in a discharge space comprising a plurality of electrodes, by applying an alternating plasma energizing voltage to said electrodes causing a plasma current and a displacement current. Said plasma is stabilised by controlling said displacement current during plasma generation such that modification of properties of said substrate surface is prevented.
摘要翻译：本发明涉及通过使所述衬底表面经受大气压发光等离子体从衬底表面去除污染物的方法和装置。所述等离子体通过对所述电极施加交替的等离子体激励电压而引起等离子体电流和位移电流而在包括多个电极的放电空间中产生。所述等离子体通过在等离子体生成期间控制所述位移电流来稳定，从而防止所述衬底表面的性质的改变。

6. 发明申请

US20080271748A1 Method of and Arrangement for Removing Contaminants from a Substrate Surface Using an Atmospheric Pressure Glow Plasma 有权
标题翻译：使用大气压发光等离子体从基板表面去除污染物的方法和装置
公开(公告)号：US20080271748A1
公开(公告)日：2008-11-06
申请号：US10584075
申请日：2004-12-22
申请人： Hindrik Willem De Vries , Eugen Aldea , Jan Bastiaan Bouwstra , Mauritius Cornelius Maria Van De Sanden
发明人： Hindrik Willem De Vries , Eugen Aldea , Jan Bastiaan Bouwstra , Mauritius Cornelius Maria Van De Sanden
IPC分类号： C25F1/00 , B08B6/00
CPC分类号： H01J37/32935 , H01J37/32174 , H01J2237/335 , H01L51/5206 , H05H2240/00
摘要： The present invention relates to a method of and arrangement for removing contaminants from a surface of a substrate by subjecting said substrate surface to an atmospheric pressure glow plasma. Said plasma is generated in a discharge space comprising a plurality of electrodes, by applying an alternating plasma energizing voltage to said electrodes causing a plasma current and a displacement current. Said plasma is stabilised by controlling said displacement current during plasma generation such that modification of properties of said substrate surface is prevented.
摘要翻译：本发明涉及通过使所述衬底表面经受大气压发光等离子体从衬底表面去除污染物的方法和装置。所述等离子体通过对所述电极施加交替的等离子体激励电压而引起等离子体电流和位移电流而在包括多个电极的放电空间中产生。所述等离子体通过在等离子体生成期间控制所述位移电流来稳定，从而防止所述衬底表面的性质的改变。

7. 发明授权

US07399944B2 Method and arrangement for controlling a glow discharge plasma under atmospheric conditions 有权
标题翻译：在大气条件下控制辉光放电等离子体的方法和装置
公开(公告)号：US07399944B2
公开(公告)日：2008-07-15
申请号：US11202366
申请日：2005-08-12
申请人： Hindrik Willem DeVries , Yoichiro Kamiyama , Jan Bastiaan Bouwstra , Mauritius Cornelius Maria Van de Sanden , Eugen Aldea , Paul Peeters
发明人： Hindrik Willem DeVries , Yoichiro Kamiyama , Jan Bastiaan Bouwstra , Mauritius Cornelius Maria Van de Sanden , Eugen Aldea , Paul Peeters
IPC分类号： B23K10/00
CPC分类号： H01J37/32018 , H01J37/32045 , H05H1/46 , H05H2001/4682 , H05H2001/4697
摘要： The present invention is directed to a method and arrangement for controlling a glow discharge plasma in a gas or gas mixture under atmospheric conditions, in a plasma discharge space comprising at least two spaced electrodes in which at least one plasma pulse having an absolute pulse maximum is generated by applying an AC plasma energizing voltage to the electrodes causing a plasma current and a displacement current. The plasma is controlled by providing a relative decrease of the displacement current after the pulse maximum. In a preferred embodiment, the energizing voltage is applied through a series circuit including a choke coil and a non-saturable inductor.
摘要翻译：本发明涉及一种在大气条件下控制气体或气体混合物中的辉光放电等离子体的方法和装置，其中等离子体放电空间包括至少两个间隔开的电极，其中至少一个具有绝对脉冲最大值的等离子体脉冲是通过对电极施加AC等离子体激励电压而产生，产生等离子体电流和位移电流。通过在脉冲最大值之后提供相对减小的位移电流来控制等离子体。在优选实施例中，通过包括扼流线圈和不可饱和电感器的串联电路施加通电电压。

8. 发明授权

US08323753B2 Method for deposition using pulsed atmospheric pressure glow discharge 失效
标题翻译：使用脉冲大气压辉光放电的沉积方法
公开(公告)号：US08323753B2
公开(公告)日：2012-12-04
申请号：US12302635
申请日：2007-05-24
申请人： Hindrik Willem De Vries , Eugen Aldea , Serguei Alexandrovich Starostine , Mariadriana Creatore , Mauritius Cornelius Maria Van De Sanden
发明人： Hindrik Willem De Vries , Eugen Aldea , Serguei Alexandrovich Starostine , Mariadriana Creatore , Mauritius Cornelius Maria Van De Sanden
IPC分类号： H05H1/24
CPC分类号： C23C16/515 , C23C16/402 , H05H1/46 , H05H2001/466 , H05H2001/4682 , H05H2001/4697
摘要： Disclosed are methods for deposition of a chemical compound or element using an atmospheric pressure glow discharge plasma in a treatment space comprising two electrodes connected to a power supply for providing electrical power during an on-time (ton). The treatment space is filled with a gas composition of an active and an inert gas mixture, including a precursor of the chemical compound or element to be deposited. Dust formation is prevented by using Nitrogen in the gas composition, applying short pulses and using a predetermined residence time of the gas composition in the treatment space. Best results are obtained when using a stabilized plasma.
摘要翻译：公开了在处理空间中使用大气压辉光放电等离子体沉积化合物或元素的方法，该处理空间包括连接到电源的两个电极，用于在接通时间（ton）期间提供电力。处理空间填充有活性物质和惰性气体混合物的气体组合物，其包括待沉积的化合物或元素的前体。通过在气体组合物中使用氮气，施加短脉冲并且将气体组合物的预定停留时间用于处理空间来防止形成粉尘。使用稳定的等离子体时可获得最佳效果。

9. 发明授权

US07533629B2 Arrangement, method and electrode for generating a plasma 有权
标题翻译：用于产生等离子体的布置，方法和电极
公开(公告)号：US07533629B2
公开(公告)日：2009-05-19
申请号：US10917515
申请日：2004-08-13
申请人： Hindrik Willem DeVries , Jan Bastiaan Bouwstra , Eugen Aldea , Mauritius Cornelius Maria Van De Sanden
发明人： Hindrik Willem DeVries , Jan Bastiaan Bouwstra , Eugen Aldea , Mauritius Cornelius Maria Van De Sanden
IPC分类号： C23C16/00 , H01L21/00
CPC分类号： H05H1/2406 , H05H2001/2412 , H05H2001/2437
摘要： The present invention provides an arrangement and method for generating a uniform and stable plasma. The arrangement comprises a discharge space (7) between at least a pair of electrodes (1, 2), which electrodes (1, 2) are arranged for providing an electric field and for generating a plasma in the electric field. At least one of the electrodes (1) has a boundary surface (6) with the discharge space (7). The boundary surface is comprised of one or more alternately arranged conductive (4) and insulating regions (5). The invention further relates to an electrode (1) for use in the arrangement described. The invention may, for example, be used in dielectric barrier discharge configurations, or in arrangements for generating plasmas at atmospheric pressures, or for generating plasmas at low temperatures, such as generating atmospheric pressure glow plasmas (APG) for material processing or surface (3) treatment purposes.
摘要翻译：本发明提供了一种用于产生均匀且稳定的等离子体的装置和方法。该装置包括在至少一对电极（1,2）之间的放电空间（7），该电极（1,2）被布置用于提供电场并用于在电场中产生等离子体。电极（1）中的至少一个具有带放电空间（7）的边界面（6）。边界面由一个或多个交替布置的导电（4）和绝缘区（5）组成。本发明还涉及用于所述装置的电极（1）。本发明可以例如用于介电阻挡放电结构，或用于在大气压下产生等离子体的装置中，或用于在低温下产生等离子体，例如产生用于材料加工或表面（3）的大气压辉光等离子体（APG））治疗目的。

10. 发明申请

US20080317974A1 Method and Arrangement for Generating and Controlling a Discharge Plasma 审中-公开
标题翻译：用于产生和控制放电等离子体的方法和装置
公开(公告)号：US20080317974A1
公开(公告)日：2008-12-25
申请号：US12064708
申请日：2006-08-24
申请人： Hindrik Willem de Vries , Eugen Aldea , Jan Bastiaan Bouwstra , Mauritius Cornelius Maria van de Sanden
发明人： Hindrik Willem de Vries , Eugen Aldea , Jan Bastiaan Bouwstra , Mauritius Cornelius Maria van de Sanden
IPC分类号： B01J19/08 , H05B41/36 , H01J7/24
CPC分类号： H05H1/46 , H05H2001/466 , H05H2001/4682 , H05H2240/10
摘要： Method and arrangement for controlling a discharge plasma in a discharge space (11) having at least two spaced electrodes (13, 14). A gas or gas mixture is introduced in the discharge space (11), and a power supply (15) for energizing the electrodes (13, 14) is provided for applying an AC plasma energizing voltage to the electrodes (13, 14). At least one current pulse is generated and causes a plasma current and a displacement current. Means for controlling the plasma are provided and arranged to apply a displacement current rate of change for controlling local current density variations associated with a plasma variety having a low ratio of dynamic to static resistance, such as filamentary discharges. By damping such fast variations using a pulse forming circuit (20), a uniform glow discharge plasma is obtained.
摘要翻译：用于控制具有至少两个间隔开的电极（13,14）的放电空间（11）中的放电等离子体的方法和装置。在放电空间（11）中引入气体或气体混合物，并且为电极（13,14）提供用于对电极（13,14）施加AC等离子体激励电压的电源（15）。产生至少一个电流脉冲并引起等离子体电流和位移电流。提供并设置用于控制等离子体的装置，以应用位移电流变化率，用于控制与具有低比例的动静态电阻（例如丝状放电）的等离子体品种相关联的局部电流密度变化。通过使用脉冲形成电路（20）阻尼这种快速变化，获得均匀的辉光放电等离子体。

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