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    • 1. 发明授权
    • Oxodiazine compounds and pharmaceutical compositions thereof
    • Oxodiazine化合物及其药物组合物
    • US4713381A
    • 1987-12-15
    • US867170
    • 1986-05-27
    • Hideki AoMinoru ObataTsutomu YamanakaHiroshi Mikashima
    • Hideki AoMinoru ObataTsutomu YamanakaHiroshi Mikashima
    • C07D471/04C07D487/04C07D513/04A61K31/535A61K31/54
    • C07D471/04C07D487/04C07D513/04
    • An oxodiazine compound of the formula: ##STR1## or a pharamceutically acceptable acid addition salt thereof, wherein each of R.sup.1 and R.sup.2 is hydrogen, halogen, C.sub.1-4 alkyl, C.sub.1-4 alkoxy, C.sub.1-4 alkoxy-C.sub.1-4 alkoxy, phenyl-C.sub.1-4 alkyl-oxy which may be optionally substituted by at least one substituent selected from the group consisting of halogen, C.sub.1-4 alkyl and C.sub.1-4 alkoxy on the phenyl nucleus, or phenyl which may be substituted by at least one substituent selected from the group consisting of halogen, C.sub.1-4 alkyl and C.sub.1-4 alkoxy on the phenyl nucleus; X is --S--, --CH.dbd.N-- or --C(R.sup.3).dbd.C(R.sup.4)--, where each of R.sup.3 and R.sup.4 is hydrogen, halogen, C.sub.1-4 alkyl, C.sub.1-4 alkoxy, C.sub.1-4 alkoxy-C.sub.1-4 alkoxy or phenyl-C.sub.1-4 alkyl-oxy which may be optionally substituted by at least one substituent selected from the group consisting of halogen, C.sub.1-4 alkyl and C.sub.1-4 alkoxy on the phenyl nucleus; and one of A and B is oxygen, sulfur or --NH-- and the other is --C(R.sup.5) (R.sup.6)--, where each of R.sup.5 and R.sup.6 is hydrogen or C.sub.1-4 alkyl.Such compounds are useful as antithrombotic agents, antianginal agents, coronary circulation improving agent, cerebral circulation improving agents, peripheral circulation improving agents, analgesics and antiinflammatory agents.
    • 下式的氧代二嗪化合物或其药学上可接受的酸加成盐,其中R 1和R 2各自为氢,卤素,C 1-4烷基,C 1-4烷氧基,C 1-4烷氧基-C 1-4烷氧基, 苯基-C 1-4烷基氧基,其可任选被至少一个选自以下的取代基取代:苯基核上的卤素,C 1-4烷基和C 1-4烷氧基,或可被至少一个 选自苯基核上的卤素,C 1-4烷基和C 1-4烷氧基的取代基; X是-S-, -​​ CH = N-或-C(R 3)= C(R 4) - ,其中R 3和R 4各自是氢,卤素,C 1-4烷基,C 1-4烷氧基,C 1-4烷氧基 - C 1-4烷氧基或苯基-C 1-4烷氧基,其可任选被至少一个选自苯基核上的卤素,C 1-4烷基和C 1-4烷氧基的取代基取代; A和B之一是氧,硫或-NH-,另一个是-C(R 5)(R 6) - ,其中R 5和R 6各自是氢或C 1-4烷基。 这些化合物可用作抗血栓形成剂,抗心绞痛剂,冠状循环改善剂,脑循环改善剂,外周循环改善剂,止痛剂和抗炎剂。
    • 6. 发明申请
    • Substrate processing apparatus and method of controlling substrate processing apparatus
    • 基板处理装置及其控制方法
    • US20090110824A1
    • 2009-04-30
    • US12289463
    • 2008-10-28
    • Yuichi TakenagaTakahito KasaiMinoru ObataYoshihiro TakezawaKazuo Yabe
    • Yuichi TakenagaTakahito KasaiMinoru ObataYoshihiro TakezawaKazuo Yabe
    • C23C16/44C23C16/54
    • C23C16/481C23C16/52
    • In accordance with a set temperature profile including: a first step in which a temperature is varied from a first temperature to a second temperature during a first time period; a second step in which the temperature is maintained at the second temperature during a second time period; and a third step in which the temperature is varied from the second temperature to a third temperature; a substrate is subjected to a film deposition process. The first temperature, the second temperature, and the third temperature are determined based on the first relationship between temperature and film thickness, the measured film thicknesses at the plurality of positions, and a predetermined target film thickness. There are calculated expected film thicknesses at a plurality of positions on a substrate to be actually processed in accordance with the set temperature profile corresponding to the determined first temperature, the determined second temperature, and the determined third temperature. When the expected film thicknesses at the plurality of positions are not within a predetermined allowable range with respect to the predetermined target film thickness, at least one of the first time period, the second time period, and the third time period is varied.
    • 根据设定温度曲线图,包括:第一步骤,其中温度在第一时间段内从第一温度变化到第二温度; 在第二时间段内将温度保持在第二温度的第二步骤; 以及第三步骤,其中温度从第二温度变化到第三温度; 对基板进行成膜处理。 基于温度和膜厚度之间的第一关系,多个位置处测量的膜厚度和预定的目标膜厚度来确定第一温度,第二温度和第三温度。 根据对应于所确定的第一温度,确定的第二温度和确定的第三温度的设定温度曲线,计算待实际处理的基板上的多个位置处的预期膜厚度。 当多个位置处的预期膜厚度相对于预定目标膜厚度不在预定的允许范围内时,第一时间段,第二时间段和第三时间段中的至少一个是变化的。
    • 9. 发明授权
    • Server device and program
    • 服务器设备和程序
    • US08055391B2
    • 2011-11-08
    • US12375693
    • 2007-07-09
    • Masashi TakahashiMinoru ObataNoriaki Koyama
    • Masashi TakahashiMinoru ObataNoriaki Koyama
    • G06F11/00G06F19/00G05B11/01G05D5/00H03M13/00B29C45/00
    • G05B21/02G05B23/0264H01L21/67757H01L21/67769H01L21/67772Y02P90/14Y02P90/18
    • A server device constituting a group management system includes one or more manufacturing apparatuses for performing a preset process on a target substrate, and the server device includes a measurement information storage unit for storing therein one or more measurement information; an instruction receiving unit for receiving an output instruction of the measurement information, which contains information specifying a predetermined start point and valid time information; a measurement information acquisition unit for acquiring, from the measurement information storage unit, measurement information ranging from the predetermined start point to a time point of the valid time; an output information composing unit for composing output information by using the acquired measurement information; and an output unit for outputting the output information composed by the output information composing unit.
    • 构成组管理系统的服务器装置包括用于在目标基板上执行预设处理的一个或多个制造装置,并且所述服务器装置包括用于在其中存储一个或多个测量信息的测量信息存储单元; 指令接收单元,用于接收包含指定预定起点和有效时间信息的信息的测量信息的输出指令; 测量信息获取单元,用于从测量信息存储单元获取从预定开始点到有效时间的时间点的测量信息; 输出信息组合单元,用于通过使用获取的测量信息来组合输出信息; 以及输出单元,用于输出由输出信息组合单元组成的输出信息。
    • 10. 发明授权
    • Server device and program with sub-recipe measurement communication
    • 服务器设备和程序与子配方测量通信
    • US07974729B2
    • 2011-07-05
    • US12375590
    • 2007-07-09
    • Masashi TakahashiMinoru ObataNoriaki Koyama
    • Masashi TakahashiMinoru ObataNoriaki Koyama
    • G06F19/00
    • G05B23/0213H01L21/67276
    • A server device is provided with a measurement information storage unit 1201 which can store plural measurement information, i.e., information having a measurement value and time information indicating time; an instruction receiving unit for receiving an output instruction of the measurement information; a measurement information acquisition unit for acquiring, from the measurement information storage unit, the measurement information designated by the output instruction; an output information composing unit for composing output information by using the acquired measurement information; and an output unit for outputting the output information composed by the output information composing unit. The output instruction includes an instruction for designating one or more desired number of times of execution of a sub-recipe among plural number of times of execution of the sub-recipe in the recipe and the measurement information acquisition unit acquires measurement information corresponding to the sub-recipe designated by the output instruction.
    • 服务器装置设置有可以存储多个测量信息的测量信息存储单元1201,即具有测量值的信息和指示时间的时间信息; 指令接收单元,用于接收测量信息的输出指令; 测量信息获取单元,用于从测量信息存储单元获取由输出指令指定的测量信息; 输出信息组合单元,用于通过使用获取的测量信息来组合输出信息; 以及输出单元,用于输出由输出信息组合单元组成的输出信息。 输出指令包括用于在食谱中指定子数据的多次执行中的子分配的一次或多次所需次数的指示,并且测量信息获取单元获取与子配方对应的测量信息 由输出指令指定的-recipe。