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    • 1. 发明授权
    • Server device and program
    • 服务器设备和程序
    • US08055391B2
    • 2011-11-08
    • US12375693
    • 2007-07-09
    • Masashi TakahashiMinoru ObataNoriaki Koyama
    • Masashi TakahashiMinoru ObataNoriaki Koyama
    • G06F11/00G06F19/00G05B11/01G05D5/00H03M13/00B29C45/00
    • G05B21/02G05B23/0264H01L21/67757H01L21/67769H01L21/67772Y02P90/14Y02P90/18
    • A server device constituting a group management system includes one or more manufacturing apparatuses for performing a preset process on a target substrate, and the server device includes a measurement information storage unit for storing therein one or more measurement information; an instruction receiving unit for receiving an output instruction of the measurement information, which contains information specifying a predetermined start point and valid time information; a measurement information acquisition unit for acquiring, from the measurement information storage unit, measurement information ranging from the predetermined start point to a time point of the valid time; an output information composing unit for composing output information by using the acquired measurement information; and an output unit for outputting the output information composed by the output information composing unit.
    • 构成组管理系统的服务器装置包括用于在目标基板上执行预设处理的一个或多个制造装置,并且所述服务器装置包括用于在其中存储一个或多个测量信息的测量信息存储单元; 指令接收单元,用于接收包含指定预定起点和有效时间信息的信息的测量信息的输出指令; 测量信息获取单元,用于从测量信息存储单元获取从预定开始点到有效时间的时间点的测量信息; 输出信息组合单元,用于通过使用获取的测量信息来组合输出信息; 以及输出单元,用于输出由输出信息组合单元组成的输出信息。
    • 2. 发明授权
    • Server device and program with sub-recipe measurement communication
    • 服务器设备和程序与子配方测量通信
    • US07974729B2
    • 2011-07-05
    • US12375590
    • 2007-07-09
    • Masashi TakahashiMinoru ObataNoriaki Koyama
    • Masashi TakahashiMinoru ObataNoriaki Koyama
    • G06F19/00
    • G05B23/0213H01L21/67276
    • A server device is provided with a measurement information storage unit 1201 which can store plural measurement information, i.e., information having a measurement value and time information indicating time; an instruction receiving unit for receiving an output instruction of the measurement information; a measurement information acquisition unit for acquiring, from the measurement information storage unit, the measurement information designated by the output instruction; an output information composing unit for composing output information by using the acquired measurement information; and an output unit for outputting the output information composed by the output information composing unit. The output instruction includes an instruction for designating one or more desired number of times of execution of a sub-recipe among plural number of times of execution of the sub-recipe in the recipe and the measurement information acquisition unit acquires measurement information corresponding to the sub-recipe designated by the output instruction.
    • 服务器装置设置有可以存储多个测量信息的测量信息存储单元1201,即具有测量值的信息和指示时间的时间信息; 指令接收单元,用于接收测量信息的输出指令; 测量信息获取单元,用于从测量信息存储单元获取由输出指令指定的测量信息; 输出信息组合单元,用于通过使用获取的测量信息来组合输出信息; 以及输出单元,用于输出由输出信息组合单元组成的输出信息。 输出指令包括用于在食谱中指定子数据的多次执行中的子分配的一次或多次所需次数的指示,并且测量信息获取单元获取与子配方对应的测量信息 由输出指令指定的-recipe。
    • 3. 发明申请
    • SERVER DEVICE AND PROGRAM
    • 服务器设备和程序
    • US20090276076A1
    • 2009-11-05
    • US12375590
    • 2007-07-09
    • Masashi TakahashiMinoru ObataNoriaki Koyama
    • Masashi TakahashiMinoru ObataNoriaki Koyama
    • G06F17/00
    • G05B23/0213H01L21/67276
    • A server device is provided with a measurement information storage unit 1201 which can store plural measurement information, i.e., information having a measurement value and time information indicating time; an instruction receiving unit for receiving an output instruction of the measurement information; a measurement information acquisition unit for acquiring, from the measurement information storage unit, the measurement information designated by the output instruction; an output information composing unit for composing output information by using the acquired measurement information; and an output unit for outputting the output information composed by the output information composing unit. The output instruction includes an instruction for designating one or more desired number of times of execution of a sub-recipe among plural number of times of execution of the sub-recipe in the recipe and the measurement information acquisition unit acquires measurement information corresponding to the sub-recipe designated by the output instruction.
    • 服务器装置设置有可以存储多个测量信息的测量信息存储单元1201,即具有测量值的信息和指示时间的时间信息; 指令接收单元,用于接收测量信息的输出指令; 测量信息获取单元,用于从测量信息存储单元获取由输出指令指定的测量信息; 输出信息组合单元,用于通过使用获取的测量信息来组合输出信息; 以及输出单元,用于输出由输出信息组合单元组成的输出信息。 输出指令包括用于在食谱中指定子数据的多次执行中的一个或多个期望次数的执行次数的指令,并且测量信息获取单元获取与子配方相对应的测量信息 由输出指令指定的-recipe。
    • 4. 发明申请
    • SERVER DEVICE AND PROGRAM
    • 服务器设备和程序
    • US20090265027A1
    • 2009-10-22
    • US12375693
    • 2007-07-09
    • Masashi TakahashiMinoru ObataNoriaki Koyama
    • Masashi TakahashiMinoru ObataNoriaki Koyama
    • G06F19/00
    • G05B21/02G05B23/0264H01L21/67757H01L21/67769H01L21/67772Y02P90/14Y02P90/18
    • A server device 12 constituting a group management system includes one or more manufacturing apparatuses 11 for performing a preset process on a target substrate, and the server device 12 includes a measurement information storage unit 1201 for storing therein one or more measurement information; an instruction receiving unit 1205 for receiving an output instruction of the measurement information, which contains information specifying a predetermined start point and valid time information; a measurement information acquisition unit 1203 for acquiring, from the measurement information storage unit 1201, measurement information ranging from the predetermined start point to a time point of the valid time; an output information composing unit 1206 for composing output information by using the acquired measurement information; and an output unit 1207 for outputting the output information composed by the output information composing unit 1206.
    • 构成组管理系统的服务器装置12包括用于在目标基板上执行预设处理的一个或多个制造装置11,并且服务器装置12包括用于在其中存储一个或多个测量信息的测量信息存储单元1201; 指令接收单元1205,用于接收包含指定预定起点和有效时间信息的信息的测量信息的输出指令; 测量信息获取单元1203,用于从测量信息存储单元1201获取从预定开始点到有效时间的时间点的测量信息; 输出信息组合单元1206,用于通过使用获取的测量信息来组合输出信息; 以及用于输出由输出信息组合单元1206组成的输出信息的输出单元1207。