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1. 发明授权

US06634245B1 Drivingly rotatable mechanism of specimen loading table and specimen loading mechanism 失效
标题翻译：样品装载台和试样装载机构的可旋转机构
公开(公告)号：US06634245B1
公开(公告)日：2003-10-21
申请号：US09646124
申请日：2000-09-28
申请人： Haruhiko Yoshioka , Shinji Iino , Yutaka Akaike , Masaru Suzuki
发明人： Haruhiko Yoshioka , Shinji Iino , Yutaka Akaike , Masaru Suzuki
IPC分类号： G01M1900
CPC分类号： H01L21/68 , G01R31/2887
摘要： A rotating mechanism 18 according to the present invention is a mechanism for reversibly rotating a chuck top 11, on which a wafer to be inspected is mounted. The rotating mechanism is provided with a linearly driving mechanism 181 arranged on one side of the chuck top 11, a nut 182 which is linearly moved by the linearly driving mechanism, a guide rail 183A for linearly guiding the nut 182, and a link mechanism 184 for coupling the nut 182, which moves along the guide rail 183A, to the chuck top 11.
摘要翻译：根据本发明的旋转机构18是用于可逆地旋转卡盘顶部11的机构，在其上安装待检查的晶片。旋转机构设置有布置在卡盘顶部11的一侧的线性驱动机构181，由线性驱动机构直线移动的螺母182，用于直线地引导螺母182的导轨183A和连杆机构184 用于将沿着导轨183A移动的螺母182联接到卡盘顶部11。

2. 发明授权

US5912555A Probe apparatus 失效
标题翻译：探头设备
公开(公告)号：US5912555A
公开(公告)日：1999-06-15
申请号：US628516
申请日：1996-04-05
申请人： Yutaka Akaike , Chiaki Mochizuki , Isao Kono , Haruhiko Yoshioka
发明人： Yutaka Akaike , Chiaki Mochizuki , Isao Kono , Haruhiko Yoshioka
IPC分类号： G01R31/28 , G01R31/02
CPC分类号： G01R31/2887
摘要： A probe apparatus comprising an apparatus body fitted with a probing card having a probe connected electrically with an electrode of an object of inspection, a test head operatively mounted on the apparatus body and electrically continuous with the probe of the probing card, rotating mechanism for rotating the test head, and vertical moving mechanism for vertically raising or lowering the test head.
摘要翻译：一种探针装置，包括装有探针卡的装置主体，探针卡具有与检查对象的电极电连接的探针，可操作地安装在装置主体上并与探针卡的探针电连续的测试头，用于旋转的旋转机构测试头和用于垂直升高或降低测试头的垂直移动机构。

3. 发明授权

US06262570B1 Probe apparatus 有权
标题翻译：探头设备
公开(公告)号：US06262570B1
公开(公告)日：2001-07-17
申请号：US09275042
申请日：1999-03-24
申请人： Yutaka Akaike , Chiaki Mochizuki , Isao Kono , Haruhiko Yoshioka
发明人： Yutaka Akaike , Chiaki Mochizuki , Isao Kono , Haruhiko Yoshioka
IPC分类号： G01R3102
CPC分类号： G01R31/2887
摘要： A probe apparatus comprising an apparatus body fitted with a probing card having a probe connected electrically with an electrode of an object of inspection, a test head operatively mounted on the apparatus body and electrically continuous with the probe of the probing card, rotating mechanism for rotating the test head, and vertical moving mechanism for vertically raising or lowering the test head.
摘要翻译：一种探针装置，包括装配有探针卡的装置主体，探针卡具有与检查对象的电极电连接的探针，可操作地安装在装置主体上并与探针卡的探针电连续的测试头，用于旋转的旋转机构测试头和用于垂直升高或降低测试头的垂直移动机构。

4. 发明授权

US06140828A Prober and probe method 失效
标题翻译：探针和探针法
公开(公告)号：US06140828A
公开(公告)日：2000-10-31
申请号：US71828
申请日：1998-05-04
申请人： Shinji Iino , Haruhiko Yoshioka
发明人： Shinji Iino , Haruhiko Yoshioka
IPC分类号： G01R31/28 , G01R31/00 , G01M11/00
CPC分类号： G01R31/2887 , G01R31/2886
摘要： A prober includes a probe card, a main chuck, a shaft member fixed on and extending downwardly from the main chuck, an X table and Y table for retaining the shaft member by use of a guide to be freely movable in a vertical direction, and a contact body fixed on the shaft member. The undersurface of the contact body is made parallel to the mounting surface of the main chuck. The prober further includes an elevation body whose center coincides with an extension line downwardly extending from the test center of the probe card, and an elevation body elevating mechanism for vertically moving the elevation body and a ball provided on the upper portion of the elevation body is slidably set in contact with the undersurface of the contact body.
摘要翻译：探测器包括探针卡，主卡盘，固定在主卡盘上并从主卡盘向下延伸的轴构件，X工作台和Y工作台，用于通过引导件将轴构件保持在竖直方向上可自由移动;以及固定在所述轴构件上的接触体。接触体的下表面与主卡盘的安装面平行。探测器还包括一个仰角体，其中心与从探针卡的测试中心向下延伸的延伸线重合，并且用于垂直移动仰角体的升降体升降机构和设置在仰角上部的球体可滑动地设置成与接触体的下表面接触。

5. 发明授权

US06850052B2 Probing method 失效
标题翻译：探测方法
公开(公告)号：US06850052B2
公开(公告)日：2005-02-01
申请号：US10259605
申请日：2002-09-30
申请人： Shinji Iino , Haruhiko Yoshioka
发明人： Shinji Iino , Haruhiko Yoshioka
IPC分类号： G01R31/28 , G01R31/00
CPC分类号： G01R31/2887 , G01R31/2886
摘要： A prober of this invention includes a probe card, a main chuck, a shaft member fixed on and extending downwardly from the main chuck, an X table and Y table for retaining the shaft member by use of a guide to be freely movable in a vertical direction, and a contact body fixed on the shaft member. The undersurface of the contact body is made parallel to the mounting surface of the main chuck. The prober further includes an elevation body whose center coincides with an extension line downwardly extending from the test center of the probe card, and an elevation body elevating mechanism for vertically moving the elevation body and a ball provided on the upper portion of the elevation body is slidably set in contact with the undersurface of the contact body.
摘要翻译：本发明的探测器包括探针卡，主卡盘，固定在主卡盘上并从主卡盘向下延伸的轴构件，X台和Y台，用于通过引导件将轴构件保持在垂直方向上可自由移动方向和固定在轴构件上的接触体。接触体的下表面与主卡盘的安装面平行。探测器还包括一个仰角体，其中心与从探针卡的测试中心向下延伸的延伸线重合，并且用于垂直移动仰角体的升降体升降机构和设置在仰角上部的球体可滑动地设置成与接触体的下表面接触。

6. 发明授权

US06927587B2 Probe apparatus 失效
标题翻译：探头设备
公开(公告)号：US06927587B2
公开(公告)日：2005-08-09
申请号：US10642751
申请日：2003-08-19
申请人： Haruhiko Yoshioka
发明人： Haruhiko Yoshioka
IPC分类号： G01B21/02 , G01R31/26 , G01R31/28 , H01L21/66 , G01R31/02
CPC分类号： G01R31/2891 , G01R31/2806 , G01R31/2887
摘要： A probe apparatus includes a mounting member on which an object to be inspected is mounted and a temperature thereof is being adjusted, a probe card arranged opposite to the mounting member, a driving mechanism which changes a relative positional relationship between the mounting member and the probe card, and a sensor which detects the distance between the sensor and the probe card. By way of detecting the height of the deformed probe card through the use of the sensor and revising the elevation distance of the mounting member, the electrode pads of the wafer W and the probe pins can electrically contact each other with a stable pin pressure, providing high inspection reliability and an increase in throughput.
摘要翻译：探针装置包括：安装部件，其上安装有要检查的物体并且其调节温度;与安装部件相对设置的探针卡;改变安装部件和探针之间的相对位置关系的驱动机构卡和传感器，其检测传感器和探针卡之间的距离。通过使用传感器检测变形的探针卡的高度并修正安装构件的高度距离，晶片W的电极焊盘和探针可以以稳定的销压力彼此电接触，提供检测可靠性高，吞吐量增加。

7. 发明授权

US5585738A Probe system having vertical height detection and double focal image pickup coinciding with probe contact in height adjustment 失效
标题翻译：探头系统具有垂直高度检测和双焦点图像拾取，与高度调节时的探头接触重合
公开(公告)号：US5585738A
公开(公告)日：1996-12-17
申请号：US414590
申请日：1995-03-31
申请人： Motohiro Kuji , Haruhiko Yoshioka , Shinji Akaike , Shigeaki Takahashi
发明人： Motohiro Kuji , Haruhiko Yoshioka , Shinji Akaike , Shigeaki Takahashi
IPC分类号： G01R1/073 , G01R31/28 , G01R1/067
CPC分类号： G01R31/2887 , G01R1/07314
摘要： A probe system tests the electrical characteristics of chips arranged in a matrix on a semiconductor wafer. An XYZ stage movable in the directions of three-dimensional axes is disposed under a probe card having probes to be brought into contact with the electrode pads of the chips. A wafer table rotatable within a horizontal plane is disposed on the XYZ stage. A first image pickup means for picking up the probe images is mounted on the XYZ stage. A second image pickup means for picking up a wafer image is disposed above the table. The second image pickup means is movable horizontally to and from a use position under the probe card. A target is supported and moved by a driving member mounted on the XYZ stage, for aligning the focal points and optical axes of the first and second image pickup means. The target is moved between forward and retreat positions within and outside the field of view of the first image pickup means. At the forward position, the target provides a reference point aligned with the focal point of the first image pickup means. The table, the stage, and the image pickup means are connected to control and processing section which manages the position of the stage based on the three-dimensional coordinate system defined by the pulse count of encoders.
摘要翻译：探针系统测试在半导体晶片上排列成矩阵的芯片的电特性。可以在具有与芯片的电极焊盘接触的探针的探针卡下面沿三维轴线方向移动的XYZ台架。在XYZ平台上设置在水平面内可旋转的晶片台。用于拾取探测图像的第一图像拾取装置安装在XYZ平台上。用于拾取晶片图像的第二图像拾取装置设置在桌子上方。第二图像拾取装置可水平移动到探针卡下方的使用位置。目标被安装在XYZ平台上的驱动构件支撑和移动，用于对准第一和第二图像拾取装置的焦点和光轴。目标在第一图像拾取装置的视野内和外部的前后位置之间移动。在向前位置，目标提供与第一图像拾取装置的焦点对准的参考点。桌子，舞台和图像拾取装置连接到控制和处理部分，该控制和处理部分基于由编码器的脉冲计数定义的三维坐标系统管理舞台的位置。

8. 发明授权

US07106082B2 Stage driving apparatus and probe method 有权
标题翻译：舞台驱动装置和探头方法
公开(公告)号：US07106082B2
公开(公告)日：2006-09-12
申请号：US11041284
申请日：2005-01-25
申请人： Haruhiko Yoshioka
发明人： Haruhiko Yoshioka
IPC分类号： G01R31/26
CPC分类号： G01R31/2887
摘要： A stage driving apparatus for a stage of this invention includes a horizontal driving mechanism which moves in a horizontal direction a stage to place a wafer thereon, and an elevating mechanism which moves the stage in a vertical direction. The elevating mechanism has a first elevating mechanism which supports the horizontal driving mechanism and vertically moves the horizontal driving mechanism, and a second elevating mechanism which supports the stage on the horizontal driving mechanism and vertically moves the stage over a short distance with a piezoelectric element.
摘要翻译：本发明的舞台驱动装置包括：水平驱动机构，其在水平方向上移动用于在其上放置晶片的台阶;以及升降机构，其在垂直方向上移动台。升降机构具有支撑水平驱动机构并使水平驱动机构垂直移动的第一升降机构，以及在水平驱动机构上支撑台架并使其与压电元件在短距离上垂直移动的第二升降机构。

9. 发明申请

US20050253611A1 Probe apparatus 审中-公开
公开(公告)号：US20050253611A1
公开(公告)日：2005-11-17
申请号：US11172922
申请日：2005-07-05
申请人： Haruhiko Yoshioka
发明人： Haruhiko Yoshioka
IPC分类号： G01B21/02 , G01R31/26 , G01R31/28 , H01L21/66 , G01R31/02
CPC分类号： G01R31/2891 , G01R31/2806 , G01R31/2887
摘要： A probe apparatus includes a mounting member on which an object to be inspected is mounted and a temperature thereof is being adjusted, a probe card arranged opposite to the mounting member, a driving mechanism which changes a relative positional relationship between the mounting member and the probe card, and a sensor which detects the distance between the sensor and the probe card. By way of detecting the height of the deformed probe card through the use of the sensor and revising the elevation distance of the mounting member, the electrode pads of the wafer W and the probe pins can electrically contact each other with a stable pin pressure, providing high inspection reliability and an increase in throughput.

10. 发明申请

US20050206396A1 Vacuum prober and vacuum probe method 有权
标题翻译：真空探头和真空探头法
公开(公告)号：US20050206396A1
公开(公告)日：2005-09-22
申请号：US11078305
申请日：2005-03-14
申请人： Haruhiko Yoshioka , Kiyoshi Takekoshi , Shinjiro Watanabe
发明人： Haruhiko Yoshioka , Kiyoshi Takekoshi , Shinjiro Watanabe
IPC分类号： G01R1/06 , G01R31/02 , G01R31/28 , H01L21/66
CPC分类号： G01R31/2862 , G01R31/2891
摘要： In a vacuum prober, a head plate is arranged on a prober chamber. A stage, first moving mechanism, recessed chamber, and sealing member are provided in the prober chamber. The stage is arranged below a probe card. The first moving mechanism vertically moves the stage in at least the Z direction. The recessed chamber has a bottom portion and side portion. A lower camera, an upper camera, and the stage are operated to obtain data for alignment. When the upper end of the side portion of the recessed chamber comes into tight contact with the lower surface of the sealing member and a vacuum mechanism evacuates the recessed chamber, a vacuum chamber is formed. As the chamber has a small capacity, the time required for evacuation can be shortened.
摘要翻译：在真空探测器中，头板安置在探测室上。在探针室中设置有载物台，第一移动机构，凹室和密封构件。舞台布置在探针卡下方。第一移动机构至少沿Z方向垂直移动台。凹室具有底部和侧部。操作较低的摄像机，上摄像机和舞台，以获得对准的数据。当凹室的侧部的上端与密封构件的下表面紧密接触并且真空机构抽空凹室时，形成真空室。由于房间容量小，可以缩短撤离所需的时间。

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