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    • 1. 发明授权
    • Prober and probe method
    • 探针和探针法
    • US06140828A
    • 2000-10-31
    • US71828
    • 1998-05-04
    • Shinji IinoHaruhiko Yoshioka
    • Shinji IinoHaruhiko Yoshioka
    • G01R31/28G01R31/00G01M11/00
    • G01R31/2887G01R31/2886
    • A prober includes a probe card, a main chuck, a shaft member fixed on and extending downwardly from the main chuck, an X table and Y table for retaining the shaft member by use of a guide to be freely movable in a vertical direction, and a contact body fixed on the shaft member. The undersurface of the contact body is made parallel to the mounting surface of the main chuck. The prober further includes an elevation body whose center coincides with an extension line downwardly extending from the test center of the probe card, and an elevation body elevating mechanism for vertically moving the elevation body and a ball provided on the upper portion of the elevation body is slidably set in contact with the undersurface of the contact body.
    • 探测器包括探针卡,主卡盘,固定在主卡盘上并从主卡盘向下延伸的轴构件,X工作台和Y工作台,用于通过引导件将轴构件保持在竖直方向上可自由移动;以及 固定在所述轴构件上的接触体。 接触体的下表面与主卡盘的安装面平行。 探测器还包括一个仰角体,其中心与从探针卡的测试中心向下延伸的延伸线重合,并且用于垂直移动仰角体的升降体升降机构和设置在仰角上部的球体 可滑动地设置成与接触体的下表面接触。
    • 2. 发明授权
    • Probing method
    • 探测方法
    • US06850052B2
    • 2005-02-01
    • US10259605
    • 2002-09-30
    • Shinji IinoHaruhiko Yoshioka
    • Shinji IinoHaruhiko Yoshioka
    • G01R31/28G01R31/00
    • G01R31/2887G01R31/2886
    • A prober of this invention includes a probe card, a main chuck, a shaft member fixed on and extending downwardly from the main chuck, an X table and Y table for retaining the shaft member by use of a guide to be freely movable in a vertical direction, and a contact body fixed on the shaft member. The undersurface of the contact body is made parallel to the mounting surface of the main chuck. The prober further includes an elevation body whose center coincides with an extension line downwardly extending from the test center of the probe card, and an elevation body elevating mechanism for vertically moving the elevation body and a ball provided on the upper portion of the elevation body is slidably set in contact with the undersurface of the contact body.
    • 本发明的探测器包括探针卡,主卡盘,固定在主卡盘上并从主卡盘向下延伸的轴构件,X台和Y台,用于通过引导件将轴构件保持在垂直方向上可自由移动 方向和固定在轴构件上的接触体。 接触体的下表面与主卡盘的安装面平行。 探测器还包括一个仰角体,其中心与从探针卡的测试中心向下延伸的延伸线重合,并且用于垂直移动仰角体的升降体升降机构和设置在仰角上部的球体 可滑动地设置成与接触体的下表面接触。
    • 7. 发明授权
    • Contactor and production method for contractor
    • 承包商的接触器和生产方法
    • US06344752B1
    • 2002-02-05
    • US09509546
    • 2000-04-12
    • Junichi HagiharaShinji Iino
    • Junichi HagiharaShinji Iino
    • G01R3102
    • G01R3/00G01R1/06711G01R1/06716G01R1/06727G01R1/07342
    • A conventional probe card is very complex in a support structure of probe terminals and it has been difficult to change an array of the probe terminals correspondingly to various arrays of electrode pads of an object to be checked. A contactor (1) of the present invention simultaneously sets its probe terminals in contact with a plurality of electrode pads of an object to be checked and electrical checking of the object is made once or a plurality of times. It has a plurality of first electrodes (3) arranged on a first substrate (silicon substrate) (2) and probe terminals (4) respectively provided on these electrodes (3). The probe terminal (4) has a conductive support (7) provided on the first electrode, elastic support plate (8) whose one end is fixed to the upper end of the conductive support column (7), and probe terminal (bump) 9 fixed to the free end portion of the elastic support plate (8).
    • 常规探针卡在探针端子的支撑结构中非常复杂,并且难以根据要检查的对象的各种电极焊盘阵列改变探针端子的阵列。 本发明的接触器(1)同时将其探针端子与待检查物体的多个电极焊盘接触,并且对物体的电气检查进行一次或多次。 它具有布置在分别设置在这些电极(3)上的第一衬底(硅衬底)(2)和探针端子(4)上的多个第一电极(3)。 探针端子(4)具有设置在第一电极上的导电支撑(7),其一端固定在导电支柱(7)的上端的弹性支撑板(8)和探针端子(凸块)9 固定到弹性支撑板(8)的自由端部。