专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US07221176B2 Vacuum prober and vacuum probe method 有权
标题翻译：真空探头和真空探头法
公开(公告)号：US07221176B2
公开(公告)日：2007-05-22
申请号：US11078305
申请日：2005-03-14
申请人： Haruhiko Yoshioka , Kiyoshi Takekoshi , Shinjiro Watanabe
发明人： Haruhiko Yoshioka , Kiyoshi Takekoshi , Shinjiro Watanabe
IPC分类号： G01R31/02
CPC分类号： G01R31/2862 , G01R31/2891
摘要： In a vacuum prober, a head plate is arranged on a prober chamber. A stage, first moving mechanism, recessed chamber, and sealing member are provided in the prober chamber. The stage is arranged below a probe card. The first moving mechanism vertically moves the stage in at least the Z direction. The recessed chamber has a bottom portion and side portion. A lower camera, an upper camera, and the stage are operated to obtain data for alignment. When the upper end of the side portion of the recessed chamber comes into tight contact with the lower surface of the sealing member and a vacuum mechanism evacuates the recessed chamber, a vacuum chamber is formed. As the chamber has a small capacity, the time required for evacuation can be shortened.
摘要翻译：在真空探测器中，头板安置在探测室上。在探针室中设置有载物台，第一移动机构，凹室和密封构件。舞台布置在探针卡下方。第一移动机构至少沿Z方向垂直移动台。凹室具有底部和侧部。操作较低的摄像机，上摄像机和舞台，以获得对准的数据。当凹室的侧部的上端与密封构件的下表面紧密接触并且真空机构抽空凹室时，形成真空室。由于房间容量小，可以缩短撤离所需的时间。

2. 发明申请

US20050206396A1 Vacuum prober and vacuum probe method 有权
标题翻译：真空探头和真空探头法
公开(公告)号：US20050206396A1
公开(公告)日：2005-09-22
申请号：US11078305
申请日：2005-03-14
申请人： Haruhiko Yoshioka , Kiyoshi Takekoshi , Shinjiro Watanabe
发明人： Haruhiko Yoshioka , Kiyoshi Takekoshi , Shinjiro Watanabe
IPC分类号： G01R1/06 , G01R31/02 , G01R31/28 , H01L21/66
CPC分类号： G01R31/2862 , G01R31/2891
摘要： In a vacuum prober, a head plate is arranged on a prober chamber. A stage, first moving mechanism, recessed chamber, and sealing member are provided in the prober chamber. The stage is arranged below a probe card. The first moving mechanism vertically moves the stage in at least the Z direction. The recessed chamber has a bottom portion and side portion. A lower camera, an upper camera, and the stage are operated to obtain data for alignment. When the upper end of the side portion of the recessed chamber comes into tight contact with the lower surface of the sealing member and a vacuum mechanism evacuates the recessed chamber, a vacuum chamber is formed. As the chamber has a small capacity, the time required for evacuation can be shortened.
摘要翻译：在真空探测器中，头板安置在探测室上。在探针室中设置有载物台，第一移动机构，凹室和密封构件。舞台布置在探针卡下方。第一移动机构至少沿Z方向垂直移动台。凹室具有底部和侧部。操作较低的摄像机，上摄像机和舞台，以获得对准的数据。当凹室的侧部的上端与密封构件的下表面紧密接触并且真空机构抽空凹室时，形成真空室。由于房间容量小，可以缩短撤离所需的时间。

3. 发明授权

US07091733B2 Reliability evaluation test apparatus, reliability evaluation test system, contactor, and reliability evaluation test method 有权
公开(公告)号：US07091733B2
公开(公告)日：2006-08-15
申请号：US10813257
申请日：2004-03-31
申请人： Kiyoshi Takekoshi , Hisatomi Hosaka , Junichi Hagihara , Kunihiko Hatsushika , Takamasa Usui , Hisashi Kaneko , Nobuo Hayasaka , Yoshiyuki Ido
发明人： Kiyoshi Takekoshi , Hisatomi Hosaka , Junichi Hagihara , Kunihiko Hatsushika , Takamasa Usui , Hisashi Kaneko , Nobuo Hayasaka , Yoshiyuki Ido
IPC分类号： G01R31/02
CPC分类号： G01R31/2862 , G01R1/0433 , G01R1/0491 , G01R31/2831 , G01R31/286 , G01R31/2865 , G01R31/2867 , G01R31/287 , G01R31/2886
摘要： A reliability evaluation test apparatus of this invention includes a wafer storage section which stores a wafer in a state wherein the electrode pads of a number of devices formed on the wafer and the bumps of a contactor are totally in electrical contact with each other. The wafer storage section transmits/receives a test signal to/from a measurement section and has a hermetic and heat insulating structure. The wafer storage section has a pressure mechanism which presses the contactor and a heating mechanism which directly heats the wafer totally in contact with the contactor to a predetermined high temperature. The reliability of an interconnection film and insulating film formed on the semiconductor wafer are evaluated under an accelerated condition.

4. 发明授权

US06583614B2 Inspection stage and inspection apparatus having a plurality of Z axes 失效
标题翻译：具有多个Z轴的检查台和检查装置
公开(公告)号：US06583614B2
公开(公告)日：2003-06-24
申请号：US09880117
申请日：2001-06-14
申请人： Kiyoshi Takekoshi
发明人： Kiyoshi Takekoshi
IPC分类号： G01R104
CPC分类号： G01R31/2887
摘要： An inspection stage including a chuck top, a rectangular Z base, an X stage, a Y stage, and a Z axis elevating mechanism. The chuck top is used for mounting a wafer W. The Z base is provided with the chuck top and is vertically movable. The X stage elevatingly supports the Z base and is movable in an X direction. The Y stage movably supports the X stage in the X direction and is movable in a Y direction. The Z axis elevating mechanism is provided at each of the four corners of the Z base in such a manner as to surround the chuck top.
摘要翻译：包括卡盘顶部，矩形Z底座，X台架，Y台架和Z轴升降机构的检查台。卡盘顶部用于安装晶片W.Z底座设置有卡盘顶部并且是可垂直移动的。 X档升降支撑Z底座，可沿X方向移动。 Y台在X方向上可移动地支撑X台，并且可沿Y方向移动。 Z轴升降机构以围绕卡头顶部的方式设置在Z底座的四个角的每一个处。

5. 发明授权

US5801545A LCD testing apparatus 失效
标题翻译：液晶检测仪
公开(公告)号：US5801545A
公开(公告)日：1998-09-01
申请号：US679115
申请日：1996-07-12
申请人： Kiyoshi Takekoshi , Tetsuji Ono , Hiromichi Fujihara
发明人： Kiyoshi Takekoshi , Tetsuji Ono , Hiromichi Fujihara
IPC分类号： G02F1/13 , G09G3/00 , G01R31/00
CPC分类号： G09G3/006 , G02F1/1309
摘要： An LCD assembly testing apparatus having a table for supporting the LCD assembly and for applying light to the back of the LCD assembly, and a transport mechanism for removing the LCD assembly from a cassette and transporting the LCD assembly onto the table. The transport mechanism has an arm for holding the LCD assembly, a first lift mechanism for vertical moving the arm, and a pre-alignment mechanism for receiving the LCD assembly and preliminary aligning the LCD assembly with the table. The pre-alignment mechanism has a plurality of support rollers for supporting the LCD assembly in a substantially horizontal position, four pairs of positioning rollers having axes intersecting at substantially right angles and located at level higher than the support rollers, for allowing the LCD assembly to fall naturally onto the support rollers and for holding corners of the LCD assembly, and a second lift mechanism for moving upwards the positioning rollers and the support rollers as the first lift mechanism moves the arm downwards.
摘要翻译：一种LCD组件测试装置，具有用于支撑LCD组件并用于将光施加到LCD组件的背面的工作台，以及用于将LCD组件从盒中移出并将LCD组件运送到工作台上的传送机构。传送机构具有用于保持LCD组件的臂，用于垂直移动臂的第一提升机构，以及用于接收LCD组件和将LCD组件预先对准桌子的预对准机构。预对准机构具有多个支撑辊，用于将LCD组件支撑在基本上水平的位置，四对定位辊具有以基本上直角相交且位于比支撑辊高的位置的轴线，以允许LCD组件当LCD第一升降机构向下移动臂时，自然落在支撑辊上并用于保持LCD组件的角部的第二提升机构和用于向上移动定位辊和支撑辊的第二提升机构。

6. 发明授权

US4941800A Transfer apparatus for plate-like member 失效
标题翻译：板状部件用转印装置
公开(公告)号：US4941800A
公开(公告)日：1990-07-17
申请号：US260608
申请日：1988-10-21
申请人： Hisashi Koike , Itaru Takao , Masaki Narushima , Kiyoshi Takekoshi
发明人： Hisashi Koike , Itaru Takao , Masaki Narushima , Kiyoshi Takekoshi
IPC分类号： H01L21/677 , H01L21/683
CPC分类号： H01L21/67778 , H01L21/6838
摘要： A transfer apparatus for carrying a semiconductor wafer into a wafer cassette comprising an arm to load a semiconductor wafer thereon, a moving mechanism to move the arm to a wafer cassette, a chucking device to have a wafer attracted to the arm, and an auxiliary mechanism to push a wafer and adjust the position of the wafer to the inlet of a wafer cassette when the wafer comes into contact with the side wall of the wafer cassette.
摘要翻译：一种用于将半导体晶片携带到晶片盒中的转印装置，该晶片盒包括用于在其上装载半导体晶片的臂，用于将臂移动到晶片盒的移动机构，具有吸引到臂的晶片的夹持装置和辅助机构当晶片与晶片盒的侧壁接触时，推动晶片并将晶片的位置调整到晶片盒的入口。

7. 发明授权

US4896869A Moving table apparatus 失效
标题翻译：移动台设备
公开(公告)号：US4896869A
公开(公告)日：1990-01-30
申请号：US263273
申请日：1988-10-27
申请人： Kiyoshi Takekoshi
发明人： Kiyoshi Takekoshi
IPC分类号： B23P19/04 , B23Q1/62 , H01L21/68
CPC分类号： H01L21/68 , B23P19/04 , B23Q1/623
摘要： A moving table apparatus includes a base, two guide rails laid on the base and extending in a direction Y, a first table capable of moving on rails, in direction Y, two guide rails laid on the first table and extending a direction X, and a second table capable of moving on the guide rails laid on the first table, in direction X. The first table has a main table located on the side of the base, a support table supporting the second table, and a pin supporting the support table what is rotatable relative to the main table. Before the main and support tables are fastened together by means of screws, the support table is rotated around the pin, thereby adjusting the angle between two straight lines extending in directions X and Y, respectively.
摘要翻译：移动台装置包括：基座，布置在基座上并沿Y方向延伸的两个导轨，能够沿Y方向在轨道上移动的第一工作台，布置在第一工作台上并延伸方向X的两个导轨，以及第二工作台，其能够沿着方向X移动在布置在第一工作台上的导轨上。第一工作台具有位于基座侧的主工作台，支撑第二工作台的支撑台和支撑支承台的销什么是相对于主桌可旋转？在通过螺钉将主支撑台紧固在一起之前，支撑台围绕销旋转，从而分别调整沿X方向和Y方向延伸的两条直线之间的角度。

8. 发明申请

US20100013505A1 PROBE CARD FOR INSPECTING SOLID STATE IMAGING DEVICE 失效
标题翻译：用于检查固态成像装置的检测卡
公开(公告)号：US20100013505A1
公开(公告)日：2010-01-21
申请号：US12441555
申请日：2007-11-05
申请人： Kiyoshi Takekoshi
发明人： Kiyoshi Takekoshi
IPC分类号： G01R31/02
CPC分类号： G01R31/2887 , G01R1/07314 , G01R1/07357 , G01R31/2637
摘要： The present invention is provided to quickly and efficiently inspect a plurality of CCD sensors. In the present invention, a plurality of openings is formed in a circuit board of a probe card. A plurality of vertical-type probe pins is connected to a lower surface of the circuit board. A guide board is installed at the lower surface of the circuit board, and respective probe pins are inserted into respective guide holes of the guide board. The guide board is made of a transparent glass board. During an inspection, inspection light emitted from a test head passes through the openings of the circuit board and the guide board, so that it is irradiated onto the plurality of CCD sensors on the substrate. Since the plurality of probe pins can be arranged at a narrow pitch without blocking the inspection light, adjacent CCD sensors on the substrate can be inspected simultaneously.
摘要翻译：提供本发明以快速有效地检查多个CCD传感器。在本发明中，在探针卡的电路基板上形成有多个开口部。多个垂直型探针连接到电路板的下表面。引导板安装在电路板的下表面，相应的探针插入引导板的相应引导孔中。导板由透明玻璃板制成。在检查期间，从测试头发出的检查光通过电路板和引导板的开口，使其照射到基板上的多个CCD传感器上。由于可以以窄的间距布置多个探针，而不会阻挡检查光，因此可以同时检查基板上的相邻的CCD传感器。

9. 发明申请

US20080164892A1 Probe and Probe Card 失效
标题翻译：探头和探头卡
公开(公告)号：US20080164892A1
公开(公告)日：2008-07-10
申请号：US11885426
申请日：2006-03-01
申请人： Kiyoshi Takekoshi
发明人： Kiyoshi Takekoshi
IPC分类号： G01R31/02
CPC分类号： G01R1/06727 , G01R1/06716
摘要： An object of the present invention is to make it possible that a probe for testing electrical characteristics of an object to be tested is easily attached to a support member such as a contactor. A through hole is formed in the contactor. In the probe, a fitting/locking portion which can be fitted in this through hole is formed. The fitting/locking portion is formed to penetrate the through hole of the contactor and to be locked in the contactor in a state that a tip thereof is in contact with a connecting terminal of a printed wiring board. The fitting/locking portion itself is locked in the contactor by hooking a locking portion thereof to an end face on an upper side of the through hole.
摘要翻译：本发明的目的是使得用于测试待测试物体的电特性的探针可容易地附接到诸如接触器的支撑构件。在接触器中形成通孔。在探针中，形成了可以安装在该通孔中的嵌合/锁定部。装配/锁定部分形成为穿过接触器的通孔并且在其顶端与印刷线路板的连接端子接触的状态下被锁定在接触器中。嵌合/锁定部分本身通过将其锁定部分钩在通孔上侧的端面上而被锁定在接触器中。

10. 发明申请

US20070229101A1 INSPECTION METHOD AND INSPECTION APPARATUS 有权
标题翻译：检验方法和检验装置
公开(公告)号：US20070229101A1
公开(公告)日：2007-10-04
申请号：US11759816
申请日：2007-06-07
申请人： Shinji Iino , Kiyoshi Takekoshi , Tadatomo Suga , Toshihiro Itoh , Kenichi Kataoka
发明人： Shinji Iino , Kiyoshi Takekoshi , Tadatomo Suga , Toshihiro Itoh , Kenichi Kataoka
IPC分类号： G01R31/02
CPC分类号： G01R31/2891 , G01R1/067 , G01R1/06794 , G01R3/00 , G01R31/2886
摘要： Disclosed is an inspection method for inspecting the electrical characteristics of a device by bringing an inspecting probe into electrical contact with an inspection electrode. An insulating film formed on the surface of the inspection electrode is broken by utilizing a fritting phenomenon so as to bring the inspection electrode into electrical contact with the inspection electrode.
摘要翻译：公开了一种通过使检查探针与检查电极电接触来检查装置的电气特性的检查方法。通过利用烧结现象使形成在检查电极表面上的绝缘膜破裂，从而使检查电极与检查电极电接触。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式