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1. 发明授权

US5585738A Probe system having vertical height detection and double focal image pickup coinciding with probe contact in height adjustment 失效
标题翻译：探头系统具有垂直高度检测和双焦点图像拾取，与高度调节时的探头接触重合
公开(公告)号：US5585738A
公开(公告)日：1996-12-17
申请号：US414590
申请日：1995-03-31
申请人： Motohiro Kuji , Haruhiko Yoshioka , Shinji Akaike , Shigeaki Takahashi
发明人： Motohiro Kuji , Haruhiko Yoshioka , Shinji Akaike , Shigeaki Takahashi
IPC分类号： G01R1/073 , G01R31/28 , G01R1/067
CPC分类号： G01R31/2887 , G01R1/07314
摘要： A probe system tests the electrical characteristics of chips arranged in a matrix on a semiconductor wafer. An XYZ stage movable in the directions of three-dimensional axes is disposed under a probe card having probes to be brought into contact with the electrode pads of the chips. A wafer table rotatable within a horizontal plane is disposed on the XYZ stage. A first image pickup means for picking up the probe images is mounted on the XYZ stage. A second image pickup means for picking up a wafer image is disposed above the table. The second image pickup means is movable horizontally to and from a use position under the probe card. A target is supported and moved by a driving member mounted on the XYZ stage, for aligning the focal points and optical axes of the first and second image pickup means. The target is moved between forward and retreat positions within and outside the field of view of the first image pickup means. At the forward position, the target provides a reference point aligned with the focal point of the first image pickup means. The table, the stage, and the image pickup means are connected to control and processing section which manages the position of the stage based on the three-dimensional coordinate system defined by the pulse count of encoders.
摘要翻译：探针系统测试在半导体晶片上排列成矩阵的芯片的电特性。可以在具有与芯片的电极焊盘接触的探针的探针卡下面沿三维轴线方向移动的XYZ台架。在XYZ平台上设置在水平面内可旋转的晶片台。用于拾取探测图像的第一图像拾取装置安装在XYZ平台上。用于拾取晶片图像的第二图像拾取装置设置在桌子上方。第二图像拾取装置可水平移动到探针卡下方的使用位置。目标被安装在XYZ平台上的驱动构件支撑和移动，用于对准第一和第二图像拾取装置的焦点和光轴。目标在第一图像拾取装置的视野内和外部的前后位置之间移动。在向前位置，目标提供与第一图像拾取装置的焦点对准的参考点。桌子，舞台和图像拾取装置连接到控制和处理部分，该控制和处理部分基于由编码器的脉冲计数定义的三维坐标系统管理舞台的位置。

2. 发明授权

US5640101A Probe system and probe method 失效
标题翻译：探头系统和探头方法
公开(公告)号：US5640101A
公开(公告)日：1997-06-17
申请号：US634675
申请日：1996-04-18
申请人： Motohiro Kuji , Haruhiko Yoshioka , Shinji Akaike , Shigeaki Takahashi
发明人： Motohiro Kuji , Haruhiko Yoshioka , Shinji Akaike , Shigeaki Takahashi
IPC分类号： G01R1/073 , G01R31/28 , G01R1/067 , G01R1/02
CPC分类号： G01R31/2887 , G01R1/07314
摘要： A probe system tests the electrical characteristics of chips arranged in a matrix on a semiconductor wafer. An XYZ stage movable in the directions of three-dimensional axes is disposed under a probe card having probes to be brought into contact with the electrode pads of the chips. A wafer table rotatable within a horizontal plane is disposed on the XYZ stage. A first image pickup means for picking up the probe images is mounted on the XYZ stage. A second image pickup means for picking up a wafer image is disposed above the table. The second image pickup means is movable horizontally to and from a use position under the probe card. A target is supported and moved by a driving member mounted on the XYZ stage, for aligning the focal points and optical axes of the first and second image pickup means. The target is moved between forward and retreat positions within and outside the field of view of the first image pickup means. At the forward position, the target provides a reference point aligned with the focal point of the first image pickup means. The table, the stage, and the image pickup means are connected to control and processing section which manages the position of the stage based on the three-dimensional coordinate system defined by the pulse count of encoders.
摘要翻译：探针系统测试在半导体晶片上排列成矩阵的芯片的电特性。可以在具有与芯片的电极焊盘接触的探针的探针卡下面沿三维轴线方向移动的XYZ台架。在XYZ平台上设置在水平面内可旋转的晶片台。用于拾取探测图像的第一图像拾取装置安装在XYZ平台上。用于拾取晶片图像的第二图像拾取装置设置在桌子上方。第二图像拾取装置可水平移动到探针卡下方的使用位置。目标被安装在XYZ平台上的驱动构件支撑和移动，用于对准第一和第二图像拾取装置的焦点和光轴。目标在第一图像拾取装置的视野内和外部的前后位置之间移动。在向前位置，目标提供与第一图像拾取装置的焦点对准的参考点。桌子，舞台和图像拾取装置连接到控制和处理部分，该控制和处理部分基于由编码器的脉冲计数定义的三维坐标系统管理舞台的位置。

3. 发明授权

US5777485A Probe method and apparatus with improved probe contact 失效
标题翻译：具有改进的探针接触的探头方法和装置
公开(公告)号：US5777485A
公开(公告)日：1998-07-07
申请号：US617551
申请日：1996-03-19
申请人： Hideaki Tanaka , Shinji Akaike , Yoshihito Marumo
发明人： Hideaki Tanaka , Shinji Akaike , Yoshihito Marumo
IPC分类号： G01R31/28 , G01R1/06
CPC分类号： G01R31/2887 , G01R31/2831 , G01R31/2851
摘要： A probe apparatus in which a wafer having IC chips arrayed with electrode pads is supported by a pedestal, and the pedestal is moved relatively to a probe card in the X, Y, Z directions to bring the electrode pads into contact with probes of the probe card so as to perform an electric measurement of the part to be inspected, the apparatus includes a parameter setting part for setting a distance in the Z direction between the probe and the electrode pad when the pedestal is moved along the X, Y planes to specify the initial position of the chip, a memory unit for storing the distance in the Z direction set by the parameter setting part, and a control unit for moving the pedestal in the Z direction in a manner to be apart from the probe card on the basis of the distance in the Z direction stored in the memory unit to move the chip to the initial position, and moving relatively the pedestal in the Z direction from the position to the probe card so as to contact the electrode pad of the chip with the probe.
摘要翻译：探针装置，其中具有排列有电极焊盘的IC芯片的晶片由基座支撑，并且基座在X，Y，Z方向上相对于探针卡移动以使电极焊盘与探针的探针接触卡，以对要检查的部件执行电测量，该装置包括参数设置部分，用于当基座沿X，Y平面移动时，在探头和电极焊盘之间设置Z方向上的距离，以指定芯片的初始位置，用于存储由参数设定部分设定的在Z方向上的距离的存储单元，以及控制单元，用于以与探针卡分开的方式在Z方向上移动基座沿着存储在存储器单元中的Z方向上的距离将芯片移动到初始位置，并且使Z轴方向上的基座从位置相对于探针卡移动，以便与ch的电极焊盘接触 ip用探针。

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