专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US5912555A Probe apparatus 失效
标题翻译：探头设备
公开(公告)号：US5912555A
公开(公告)日：1999-06-15
申请号：US628516
申请日：1996-04-05
申请人： Yutaka Akaike , Chiaki Mochizuki , Isao Kono , Haruhiko Yoshioka
发明人： Yutaka Akaike , Chiaki Mochizuki , Isao Kono , Haruhiko Yoshioka
IPC分类号： G01R31/28 , G01R31/02
CPC分类号： G01R31/2887
摘要： A probe apparatus comprising an apparatus body fitted with a probing card having a probe connected electrically with an electrode of an object of inspection, a test head operatively mounted on the apparatus body and electrically continuous with the probe of the probing card, rotating mechanism for rotating the test head, and vertical moving mechanism for vertically raising or lowering the test head.
摘要翻译：一种探针装置，包括装有探针卡的装置主体，探针卡具有与检查对象的电极电连接的探针，可操作地安装在装置主体上并与探针卡的探针电连续的测试头，用于旋转的旋转机构测试头和用于垂直升高或降低测试头的垂直移动机构。

2. 发明授权

US06262570B1 Probe apparatus 有权
标题翻译：探头设备
公开(公告)号：US06262570B1
公开(公告)日：2001-07-17
申请号：US09275042
申请日：1999-03-24
申请人： Yutaka Akaike , Chiaki Mochizuki , Isao Kono , Haruhiko Yoshioka
发明人： Yutaka Akaike , Chiaki Mochizuki , Isao Kono , Haruhiko Yoshioka
IPC分类号： G01R3102
CPC分类号： G01R31/2887
摘要： A probe apparatus comprising an apparatus body fitted with a probing card having a probe connected electrically with an electrode of an object of inspection, a test head operatively mounted on the apparatus body and electrically continuous with the probe of the probing card, rotating mechanism for rotating the test head, and vertical moving mechanism for vertically raising or lowering the test head.
摘要翻译：一种探针装置，包括装配有探针卡的装置主体，探针卡具有与检查对象的电极电连接的探针，可操作地安装在装置主体上并与探针卡的探针电连续的测试头，用于旋转的旋转机构测试头和用于垂直升高或降低测试头的垂直移动机构。

3. 发明授权

US06634245B1 Drivingly rotatable mechanism of specimen loading table and specimen loading mechanism 失效
标题翻译：样品装载台和试样装载机构的可旋转机构
公开(公告)号：US06634245B1
公开(公告)日：2003-10-21
申请号：US09646124
申请日：2000-09-28
申请人： Haruhiko Yoshioka , Shinji Iino , Yutaka Akaike , Masaru Suzuki
发明人： Haruhiko Yoshioka , Shinji Iino , Yutaka Akaike , Masaru Suzuki
IPC分类号： G01M1900
CPC分类号： H01L21/68 , G01R31/2887
摘要： A rotating mechanism 18 according to the present invention is a mechanism for reversibly rotating a chuck top 11, on which a wafer to be inspected is mounted. The rotating mechanism is provided with a linearly driving mechanism 181 arranged on one side of the chuck top 11, a nut 182 which is linearly moved by the linearly driving mechanism, a guide rail 183A for linearly guiding the nut 182, and a link mechanism 184 for coupling the nut 182, which moves along the guide rail 183A, to the chuck top 11.
摘要翻译：根据本发明的旋转机构18是用于可逆地旋转卡盘顶部11的机构，在其上安装待检查的晶片。旋转机构设置有布置在卡盘顶部11的一侧的线性驱动机构181，由线性驱动机构直线移动的螺母182，用于直线地引导螺母182的导轨183A和连杆机构184 用于将沿着导轨183A移动的螺母182联接到卡盘顶部11。

4. 发明授权

US06317647B1 Aligner 有权
标题翻译：对齐者
公开(公告)号：US06317647B1
公开(公告)日：2001-11-13
申请号：US09462041
申请日：1999-12-29
申请人： Yutaka Akaike , Isao Kono , Satoshi Sano
发明人： Yutaka Akaike , Isao Kono , Satoshi Sano
IPC分类号： G06F700
CPC分类号： H01L21/682
摘要： An aligner (10) according to the present invention is an apparatus in which a wafer chuck (50), wafer (W), and contactor (60) are aligned with one another, and these three elements are then united to form a shell (S), and the shell (S) is reduced to the three elements. A identification code (62) is attached to the contactor (60). A reader (41) reads the identification code (62). The identification code (62) read by means of the reader (41) is associated with the position of the main chuck (15) reached when first and second valve mechanisms (51, 52) are connected, and is loaded into a control device (40). When the shell (S) is disassembled, the position of the main chuck (15) is retrieved in the control device (40) in accordance with the identification code (62) read by means of the reader (41). The main chuck (15) is moved according to the result of the retrieval.
摘要翻译：根据本发明的对准器（10）是其中晶片卡盘（50），晶片（W）和接触器（60）彼此对准的装置，然后将这三个元件结合以形成壳体（ S），并且壳（S）被还原成三个元素。识别码（62）附接到接触器（60）。读取器（41）读取识别码（62）。通过阅读器（41）读取的识别码（62）与连接第一和第二阀机构（51,52）时达到的主卡盘（15）的位置相关联，并被装载到控制装置 40）。当壳体（S）拆卸时，根据通过读取器（41）读取的识别码（62），在控制装置（40）中检索主卡盘（15）的位置。主夹头（15）根据检索结果移动。

5. 发明授权

US06307390B1 Aligner and method for inspecting semiconductor wafer using shell 有权
标题翻译：使用外壳检查半导体晶片的对准器和方法
公开(公告)号：US06307390B1
公开(公告)日：2001-10-23
申请号：US09288291
申请日：1999-04-08
申请人： Yutaka Akaike , Isao Kono , Satoshi Sano
发明人： Yutaka Akaike , Isao Kono , Satoshi Sano
IPC分类号： G01R3102
CPC分类号： G01R31/2887 , G01R31/2851
摘要： An aligner according to the present invention is constituted by integrating a wafer chuck, a wafer and a contactor, which are aligned with one another, into one piece by vacuum adsorptivity. A vacuum exhaust apparatus for generating the vacuum adsorptivity, includes first and second valve mechanisms, a valve operation mechanism for opening/closing these valve mechanisms, first and second solenoid valves connected to the valve operation mechanism through a vacuum exhaust line, and a vacuum leak detecting pressure gauge interposed between the first solenoid valve and the valve operation mechanism.
摘要翻译：根据本发明的对准器通过将通过真空吸附性彼此对准的晶片卡盘，晶片和接触器集成而构成。用于产生真空吸附性的真空排气装置包括第一和第二阀机构，用于打开/关闭这些阀机构的阀操作机构，通过真空排气管连接到阀操作机构的第一和第二电磁阀，以及真空泄漏检测插入在第一电磁阀和阀操作机构之间的压力计。

6. 发明授权

US07994809B2 Transfer mechanism for target object to be inspected 有权
标题翻译：要检查的目标物体的转移机制
公开(公告)号：US07994809B2
公开(公告)日：2011-08-09
申请号：US12492676
申请日：2009-06-26
申请人： Yutaka Akaike , Hiroshi Yamada , Tomoya Endo
发明人： Yutaka Akaike , Hiroshi Yamada , Tomoya Endo
IPC分类号： G01R31/20 , G01R31/00
CPC分类号： G01R31/2893 , H01L21/67748 , H01L21/68742
摘要： A transfer mechanism for a target object includes at least two insulating wire materials disposed spaced from each other to transverse a mounting table, at least two pairs of supporting bodies horizontally disposed at outsides of the mounting table, for stretching said at least two wire materials in parallel with a mounting surface of the mounting table, and at least two grooves formed on the mounting surface of the mounting table to respectively receive therein said at least two wire materials by said at least two pairs of supporting bodies. The transfer mechanism further includes a first elevation driving mechanism for vertically moving said wire materials between said grooves and above of the mounting surface through said pairs of supporting bodies, wherein the target object is transferred between a carrying mechanism and the mounting table through said at least two wire materials.
摘要翻译：用于目标物体的传送机构包括彼此间隔开以横向安装台的至少两个绝缘线材，至少两对水平地设置在安装台外侧的支撑体，用于将所述至少两根线材材料拉伸平行于所述安装台的安装表面，以及形成在所述安装台的安装表面上的至少两个凹槽，以分别通过所述至少两对支撑体在其中容纳所述至少两个线材。传送机构还包括第一升降驱动机构，用于通过所述一对支撑体在所述槽和所述安装表面之间垂直移动所述线材，其中所述目标物体至少通过所述承载机构和所述安装台之间传递两线材。

7. 发明申请

US20110157666A1 Image reading apparatus 审中-公开
标题翻译：图像读取装置
公开(公告)号：US20110157666A1
公开(公告)日：2011-06-30
申请号：US12926781
申请日：2010-12-09
申请人： Hiroyuki Hirokawa , Yutaka Akaike , Shinnosuke Enomoto
发明人： Hiroyuki Hirokawa , Yutaka Akaike , Shinnosuke Enomoto
IPC分类号： H04N1/04
CPC分类号： H04N1/0464 , H04N1/00588 , H04N1/00602 , H04N1/1013 , H04N1/1215 , H04N1/1235 , H04N1/193
摘要： To enable accurate image reading and concurrently therewith, enable a reading optical system to be varied easily in an apparatus configuration in which first and second read portions are disposed in planes inclined a predetermined angle, the apparatus has an apparatus housing 10, a platen 11 disposed in the apparatus housing to form the first read portion 11a and the second read portion 11b in planes mutually inclined a predetermined angle, a reading carriage 12, 40 disposed to be able to shift to positions between the first read portion and the second read portion, and a light source lamp 15, 41 for applying light to a document sheet on the platen, and a reflecting mirror 16, 42 for guiding the reflected light from the document sheet toward image reading means 13 each mounted on the reading carriage, and is configured so that an angular attitude of the reflecting mirror 16 is deflected by a predetermined angle or deflecting means 46 disposed in the second read portion guides the reflected light to the reflecting mirror 42 when the reading carriage is positioned in the second read portion.
摘要翻译：为了能够准确地进行图像读取，并且与此同时，能够使读取光学系统容易地变化，其中第一和第二读取部分设置在倾斜预定角度的平面中的装置配置中，该装置具有装置壳体10，设置有压板11 在设备外壳中形成相互倾斜预定角度的平面中的第一读取部分11a和第二读取部分11b，设置成能够移动到第一读取部分和第二读取部分之间的位置的读取滑架12,40，以及用于将光照射到台板上的文件片的光源灯15,41，以及用于将从原稿的反射光引导到安装在阅读台上的图像读取装置13的反射镜16,42，使得反射镜16的角度姿态偏转预定角度，或者设置在第二读取部分中的偏转装置46引导反射镜当读取托架位于第二读取部分中时，将光线引导到反射镜42。

8. 发明申请

US20100001751A1 TRANSFER MECHANISM FOR TARGET OBJECT TO BE INSPECTED 有权
标题翻译：目标对象的转移机制要检查
公开(公告)号：US20100001751A1
公开(公告)日：2010-01-07
申请号：US12492676
申请日：2009-06-26
申请人： Yutaka Akaike , Hiroshi Yamada , Tomoya Endo
发明人： Yutaka Akaike , Hiroshi Yamada , Tomoya Endo
IPC分类号： G01R31/02
CPC分类号： G01R31/2893 , H01L21/67748 , H01L21/68742
摘要： A transfer mechanism for a target object includes at least two insulating wire materials disposed spaced from each other to transverse a mounting table, at least two pairs of supporting bodies horizontally disposed at outsides of the mounting table, for stretching said at least two wire materials in parallel with a mounting surface of the mounting table, and at least two grooves formed on the mounting surface of the mounting table to respectively receive therein said at least two wire materials by said at least two pairs of supporting bodies. The transfer mechanism further includes a first elevation driving mechanism for vertically moving said wire materials between said grooves and above of the mounting surface through said pairs of supporting bodies, wherein the target object is transferred between a carrying mechanism and the mounting table through said at least two wire materials.
摘要翻译：用于目标物体的传送机构包括彼此间隔开以横向安装台的至少两个绝缘线材，至少两对水平地设置在安装台外侧的支撑体，用于将所述至少两根线材材料拉伸平行于所述安装台的安装表面，以及形成在所述安装台的安装表面上的至少两个凹槽，以分别通过所述至少两对支撑体在其中容纳所述至少两个线材。传送机构还包括第一升降驱动机构，用于通过所述一对支撑体在所述槽和所述安装表面之间垂直移动所述线材，其中所述目标物体至少通过所述承载机构和所述安装台之间传递两线材。

9. 发明授权

US08082977B2 Ceramic mounting for wafer apparatus with thermal expansion feature 有权
标题翻译：具有热膨胀特性的晶圆装置的陶瓷安装
公开(公告)号：US08082977B2
公开(公告)日：2011-12-27
申请号：US11684828
申请日：2007-03-12
申请人： Yutaka Akaike , Munetoshi Nagasaka
发明人： Yutaka Akaike , Munetoshi Nagasaka
IPC分类号： H05B3/10 , H05B3/06 , H05B3/16 , H05B3/20 , H05B3/68 , H01L21/66
CPC分类号： H01L21/67103 , F28D2021/0077 , F28F13/00 , H01L21/67109
摘要： A mounting apparatus includes a surface plate; a temperature control unit integrated with the surface plate; and a bottom plate integrated with the temperature control unit via a heat insulation ring, wherein a temperature of a target object held on the surface plate is capable of being controlled and the surface plate is formed of ceramic. The surface plate and the temperature control unit are coupled to each other by a first coupling member at each portion thereof except for each peripheral portion thereof such that the peripheral portion of the surface plate being not coupled thereto. The peripheral portion of the temperature control unit is coupled to the heat insulation ring by a second coupling member.
摘要翻译：一种安装设备，包括一个表面板; 与表面板一体化的温度控制单元; 以及通过隔热环与温度控制单元一体化的底板，其中能够控制保持在表面板上的目标物体的温度，并且表面板由陶瓷形成。表面板和温度控制单元通过除了其每个周边部分之外的每个部分处的第一联接构件彼此联接，使得表面板的周边部分不与其连接。温度控制单元的周边部分通过第二联接构件联接到隔热环。

10. 发明授权

US07525695B2 Image reading apparatus 有权
标题翻译：图像读取装置
公开(公告)号：US07525695B2
公开(公告)日：2009-04-28
申请号：US10876516
申请日：2004-06-28
申请人： Yutaka Akaike
发明人： Yutaka Akaike
IPC分类号： H04N1/04 , H04N1/40 , H04N1/46
CPC分类号： G03G15/605
摘要： An image reading apparatus enables designs of such apparatus without regard to a grounding location for a guide shaft and reduces the number of assembly hours and fastening members to fasten a ground member of a guide shaft to a frame. An apparatus includes a scanning unit for scanning and reading images on originals placed on a platen; a guide shaft supporting and guiding the scanning unit in a sub-scanning direction; a shaft support unit supporting an end of the guide shaft; and a plastic frame housing the scanning unit and guide shaft and formed with the shaft support unit, wherein the guide shaft is grounded via the shaft support unit.
摘要翻译：图像读取装置使得能够设计这种装置而不考虑导向轴的接地位置，并且减少了组装时间的数量和紧固构件以将导向轴的接地构件紧固到框架。一种装置包括用于扫描和读取放置在压板上的原稿上的图像的扫描单元; 导向轴，其沿副扫描方向支撑并引导扫描单元; 轴支撑单元，其支撑所述引导轴的端部; 以及容纳扫描单元和引导轴并形成有轴支撑单元的塑料框架，其中引导轴经由轴支撑单元接地。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式