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1. 发明专利

JPS5698828A EXPOSURE DEVICE 失效
公开(公告)号：JPS5698828A
公开(公告)日：1981-08-08
申请号：JP133380
申请日：1980-01-11
申请人： HITACHI LTD
发明人： MATSUDA MASAYUKI , MARUYAMA KOUICHI , NAKAI KIMIMITSU
IPC分类号： H01L21/30 , G03F7/20 , H01L21/027
摘要： PURPOSE:To intend to shorten the exposure time by being allowed to intervene a correction lens having a discontinuous surface between a optical source and a wafer and to form an image of a mask pattern having a sufficient resolution on a wafer having a poor flatness. CONSTITUTION:The light of a optical source 8 passes a lens 9, an aperture 10, and a mask 7 and further exposes the surface of a wafer 14 held on a sliding stand 4 through reflecting mirrors m1-m5 inside a optical head 11. A correction lens 15 is placed between the optical source 8 and the mask 7. The lens 15 is a collecting body of small lenses 15a correspond to the number of patterns of the mask 7. There exists a discontinuous boundary between each lens 15a, said boundary being provided with a given gradient and thickness corresponding to the mask pattern. Accordingly, a very high accurate correction is possible. Since the whole exposure is possible at a time without consumption of the step as in the exposure and cosidering the accuracy of the wafer surface, this method is appopriate to the mass production. Further, a high accurate correction apporiate to the pattern itself and the position of the pattern is possible, and the exposure of high accuracy and high efficiency is also possible.

2. 发明专利

JPH0140459B2 失效
公开(公告)号：JPH0140459B2
公开(公告)日：1989-08-29
申请号：JP4391981
申请日：1981-03-27
申请人： HITACHI LTD
发明人： TOMITA YOSHIFUMI , NAKAI KIMIMITSU
IPC分类号： H01J9/22 , G03F7/28 , H01J9/227 , H01J29/28

3. 发明专利

JPH01107433A PHOSPHOR SCREEN FORMATION OF CATHODE-RAY TUBE 失效
公开(公告)号：JPH01107433A
公开(公告)日：1989-04-25
申请号：JP26379987
申请日：1987-10-21
申请人： HITACHI LTD
发明人： NISHIZAWA SHOKO , SUZUKI TETSUO , TAKAHASHI KATSUISA , NAKAI KIMIMITSU
IPC分类号： H01J9/22 , H01J9/227
摘要： PURPOSE:To secure such a cathode-ray tube that is excellent in a color tone without any luminance degradation and surface coloring, besides long service life by turning an atmosphere in liquid, material, vapor, etc., where a phosphor comes into contact in a phosphor screen forming process, to neutrality or alkalinity. CONSTITUTION:During a phosphor screen forming process, an atmosphere such as liquid, material and vapor or the like, where a phosphor comes into contact in this forming process, is turned to the alkaline side. Thus, the phosphor is prevented from being exposed to acidic liquid or vapor whereby its surface is not damaged, so that a firm state is kept up against any action of an electron beams or X-rays. With this constitution, a variation in reflected colors and luminance degradation are sharply improved, especially as to a red color, its effect is very large, and in the case of a long persistence red phosphor, a conspicuous effect is secured in particular, and also as to green and blue, respective effects are secured.

4. 发明专利

JPS57130342A PRODUCTION OF ELECTRON TUBE 失效
公开(公告)号：JPS57130342A
公开(公告)日：1982-08-12
申请号：JP1432781
申请日：1981-02-04
申请人： HITACHI LTD
发明人： KAWAMURA KEIYOSHI , OKI HIROSHI , HIRAI KAZUMASA , NAKAI KIMIMITSU
IPC分类号： H01J9/34 , H01J9/26
摘要： PURPOSE:To improve the accuracy of relative positioning by a method wherein the contact portions of a glass bulb and a glass stem are joined together via a metal ring coated with glass having a low melting point, and then the bulb and the stem are melted and tightly joined together by heating the metal ring through the high-frequency heating method. CONSTITUTION:A ring-shaped projection 3g is formed above a stem 3e. A ring- shaped sealing member 10 consisting of a thin ring metal 10a and a low melting point glass member 10b covering the surface of the metal ring are concentrically provided between the end surface of a neck tube 1a and the projection 3g to be sealed together. A high frequency dielectric heating coil 12 is also concentrically provided on the periphery of and centering around a portion 11 to be sealed and power is supplied to heat and melt the portion for sealing purposes. In so doing, the positioning of the neck tube and the stem can be made highly accurate.

5. 发明专利

JPS5847811B2 JPS5847811B2 - 失效
公开(公告)号：JPS5847811B2
公开(公告)日：1983-10-25
申请号：JP6819574
申请日：1974-06-17
申请人： Hitachi Ltd
发明人： TOMITA YOSHIFUMI , MIURA SEIJI , NAKAI KIMIMITSU
IPC分类号： G03F7/04 , H01J9/227
CPC分类号： H01J9/2271 , G03F7/04

6. 发明专利

JPS57158923A METHOD FOR FORMING FLUORESCENT SCREEN OF CATHODE-RAY TUBE 失效
公开(公告)号：JPS57158923A
公开(公告)日：1982-09-30
申请号：JP4391981
申请日：1981-03-27
申请人： HITACHI LTD
发明人： TOMITA YOSHIFUMI , NAKAI KIMIMITSU
IPC分类号： H01J9/22 , G03F7/28 , H01J9/227 , H01J29/28
摘要： PURPOSE:To form a film composed of a plurality of layers by utilizing an adhesive liquid oozing out of a layer where a fluorescent screen of multilayer construction has been formed in a cathode-ray tube. CONSTITUTION:The surface of the panel of a cathode-ray tube is coated through exposure with a material producing adhesion, for instance, a polymer aqueous solution mixed with salts such as diazonium salts and zinc oxide. The panel surface is dried, before being exposed to light. The zinc oxide produced as the result of photo-decomposition begins to absorb moisture, while the portion exposed becomes adhesive. When powder is given to the above portion and then excessive powder is removed by blowing it off to it, a film having the desired pattern is formed. If this film is left as it was, an adhesive liquid will begin to ooze through surfaces of particles constituting the film because of a capillary phenomenon. At this time, another kind of powder is given to the film. If blowing off airing is also subsequently given to the film, a film composed of the particles of the second powder is formed on the first film. By repeating the same process as this until the adhesive liquid is dried, a multilayer film can be formed.

7. 发明专利

JPS5398799A LIMINESCENCE ELEMENT 失效
公开(公告)号：JPS5398799A
公开(公告)日：1978-08-29
申请号：JP1241177
申请日：1977-02-09
申请人： HITACHI LTD
发明人： MARUYAMA AKIO , ISHIBASHI TADASHI , ODAWARA KOUZOU , NAKAI KIMIMITSU
IPC分类号： H01J65/08 , G02F1/13 , G02F1/1335 , G02F1/13357 , G09F9/00 , G09F13/20
摘要： PURPOSE:To make the light receiving display unit small and light in size and weight and to increase the quality of display, by constituting the luminescence element through a plurality of the light emitting cells on the reflection surface, in which the phosphor and the radioactive material are sealed in the external surrounder of hollow pipe.

8. 发明专利

JPS6450340A FORMATION OF PHOSPHOR SCREEN OF CATHODE-RAY TUBE 失效
公开(公告)号：JPS6450340A
公开(公告)日：1989-02-27
申请号：JP20628387
申请日：1987-08-21
申请人： HITACHI LTD
发明人： NISHIZAWA SHOKO , SUZUKI TETSUO , SATO YOSHIO , FUJI DAIICHIROU , NAKAI KIMIMITSU
IPC分类号： H01J9/22 , H01J9/227
摘要： PURPOSE:To prevent or reduce deterioration caused by electron beams by forming a layer containing boron or a compound of boron. CONSTITUTION:A color display tube of a black matrix type of a 0.31mm pitch is completed with a normal method using a surface treatment of each phosphor of green, blue and red with a surface treatment agent using for example 0.15weight% of boron oxide or boron nitride relative to the phosphor. Since it is constituted such that boron or oxide is contained in the phosphor itself, it is possible at the time of manufacturing the phosphor to perform adhesion treatment of boron or boron oxide. As a result, not only the process of the manufacture is simplified but also the protection effect against electron beams is great as the said materials are easy to adhere to the entire surface of the phosphor.

9. 发明专利

JPS6310530B2 失效
公开(公告)号：JPS6310530B2
公开(公告)日：1988-03-08
申请号：JP4664979
申请日：1979-04-18
申请人： HITACHI LTD
发明人： TOMITA YOSHIFUMI , NISHIZAWA SHOKO , YOKOMIZO HIROSHI , NAKAI KIMIMITSU
IPC分类号： G03F7/28 , H01J9/227

10. 发明专利

JPS55139737A FORMATION OF FLUORESCENT SCREEN FOR COLOR PICTURE TUBE 失效
公开(公告)号：JPS55139737A
公开(公告)日：1980-10-31
申请号：JP4664979
申请日：1979-04-18
申请人： HITACHI LTD
发明人： TOMITA YOSHIFUMI , NISHIZAWA SHIYOUKOU , YOKOMIZO HIROSHI , NAKAI KIMIMITSU
IPC分类号： G03F7/28 , H01J9/227
摘要： PURPOSE:To reduce the number of detaching times of mask by the procedure in which a photosensitive film showing an adhesiveness upon exposure, formed on the inner surface of a panel, is exposed its first fluorescent substance-coated position to light and then the other fluorescent substance-coated position is exposed to lesser amounts of light. CONSTITUTION:The inner surface of a panel is coated with a photosensitive substance showing an adhesiveness upon exposure, e.g., an aqueous solution containing dimethylalminobenzenediazonium chloride, zinc chloride, and a water-soluble high polymer, and then dried. Then, a shadow mask is attached to the panel. After exposing the first fluorescent substance-coated position, the second and third fluorescent substance-coated positions are exposed by varying the location of exposure light source, where the amount of light to be exposed on the second and third positions is enough not to emerge its adhesiveness upon exposure. Then, the first fluorescent substance is fixed, back light exposure is made on the photosensitive substance at the second position to cause its adhesiveness to energe, the second fluorescent substance is fixed, and then by the same way, the third fluorescent substance is fixed. Thus, the number of the detaching times of the shadow mask can be reduced to one time.

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