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    • 3. 发明申请
    • Manufacturing Method for Switch and Array Substrate
    • 开关阵列基板的制造方法
    • US20140141576A1
    • 2014-05-22
    • US13701863
    • 2012-11-23
    • Yu-Lien ChouPo-Lin Chen
    • Yu-Lien ChouPo-Lin Chen
    • H01L29/66H01L21/8234
    • H01L29/458H01L29/66765
    • The present invention discloses a manufacturing method for a switch and an array substrate. The method comprises: firstly, forming sequentially a first metal layer, an insulating layer, a semiconductor layer, an ohmic contact layer, a second metal layer, a third metal layer and a photoresist layer on a base substrate; after patterning the photoresist layer, etching the third metal layer and the second metal layer to form the input electrode and the output electrode of the switch; using a stripper comprising at least 30% by weight of amine in order to remove the photoresist layer and the residual second metal layer; and finally, etching the ohmic contact layer. Through the above steps, the present invention can avoid the electrical abnormality of the switch and increase process yield of the array substrate.
    • 本发明公开了一种开关和阵列基板的制造方法。 该方法包括:首先在基底基板上依次形成第一金属层,绝缘层,半导体层,欧姆接触层,第二金属层,第三金属层和光致抗蚀剂层; 在图案化光致抗蚀剂层之后,蚀刻第三金属层和第二金属层以形成开关的输入电极和输出电极; 使用包含至少30重量%的胺的汽提器以除去光致抗蚀剂层和残留的第二金属层; 最后蚀刻欧姆接触层。 通过上述步骤,本发明可以避免开关的电气异常并提高阵列基板的工艺成品率。
    • 4. 发明授权
    • Display element and method of manufacturing the same
    • 显示元件及其制造方法
    • US07625788B2
    • 2009-12-01
    • US12115855
    • 2008-05-06
    • Po-Lin ChenWen-Ching TsaiChun-Nan LinKuo-Yuan Tu
    • Po-Lin ChenWen-Ching TsaiChun-Nan LinKuo-Yuan Tu
    • H01L21/00H01L21/44
    • H01L29/458H01L27/124H01L29/41733
    • A display element and a method of manufacturing the same are provided. The method comprises the following steps: forming a first patterned conducting layer with a gate on a substrate and a dielectric layer thereon; forming a patterned semiconductor layer on the dielectric layer, wherein the patterned semiconductor layer has a channel region, a source and a drain, and wherein the source and the drain lie on the opposite sides of the channel region; selectively depositing a barrier layer, which only wraps the patterned semiconductor layer; forming a second patterned conducting layer on the barrier layer and above the source and the drain. In the display element manufactured by the method, the barrier layer only wraps the patterned semiconductor layer.
    • 提供了一种显示元件及其制造方法。 该方法包括以下步骤:在衬底上形成具有栅极的第一图案化导电层和其上的电介质层; 在所述电介质层上形成图案化的半导体层,其中所述图案化半导体层具有沟道区,源极和漏极,并且其中所述源极和漏极位于所述沟道区的相对侧上; 选择性地沉积仅包裹图案化半导体层的阻挡层; 在阻挡层上和源极和漏极之上形成第二图案化导电层。 在通过该方法制造的显示元件中,阻挡层仅包裹图案化的半导体层。
    • 6. 发明申请
    • PIXEL STRUCTURE, DISPLAY PANEL, ELETRO-OPTICAL APPARATUS, AND METHOD THEREROF
    • 像素结构,显示面板,ELETRO-OPTICAL设备及其方法
    • US20090153056A1
    • 2009-06-18
    • US12060873
    • 2008-04-02
    • Po-Lin ChenChun-Nan LinShu-Feng WuWen-Ching Tsai
    • Po-Lin ChenChun-Nan LinShu-Feng WuWen-Ching Tsai
    • H01J7/44H01L21/04H01J9/00
    • H01L29/458H01L27/124H01L27/1255
    • A pixel structure disposed on a substrate including a thin film transistor (TFT), a bottom capacitor electrode, a dielectric layer, an upper capacitor electrode, a passivation layer, and a pixel electrode is provided. The TFT having a source/drain and the bottom capacitor electrode are disposed on the substrate. The dielectric layer is disposed on the bottom capacitor electrode. The upper capacitor electrode has a semiconductor layer, a barrier layer, and a metal layer. The semiconductor layer is disposed on the dielectric layer above the bottom capacitor electrode. The barrier layer is disposed on the semiconductor layer. The metal layer whose material includes copper, a copper alloy, or a combination thereof is disposed on the barrier layer. The passivation layer covers the TFT and the upper capacitor electrode and has a first opening exposing the source/drain. The pixel electrode is electrically connected to the TFT through the first opening.
    • 提供了一种设置在包括薄膜晶体管(TFT),底部电容器电极,电介质层,上部电容器电极,钝化层和像素电极的基板上的像素结构。 具有源极/漏极和底部电容器电极的TFT设置在衬底上。 电介质层设置在底部电容器电极上。 上部电容器电极具有半导体层,阻挡层和金属层。 半导体层设置在底部电容器电极上方的电介质层上。 阻挡层设置在半导体层上。 其材料包括铜,铜合金或其组合的金属层设置在阻挡层上。 钝化层覆盖TFT和上电容器电极,并且具有暴露源极/漏极的第一开口。 像素电极通过第一开口与TFT电连接。
    • 7. 发明申请
    • Delay fault testing apparatus
    • 延时故障测试仪
    • US20070061657A1
    • 2007-03-15
    • US11203381
    • 2005-08-12
    • Tsin-Yuan ChangPo-Lin ChenHao-Hsuan Chiu
    • Tsin-Yuan ChangPo-Lin ChenHao-Hsuan Chiu
    • G01R31/28G06F11/00
    • G01R31/31858
    • A delay fault testing apparatus includes a scan device having a first input for receiving a data to the core under test, an update device including an input electrically connected to a first output of the scan device, a first multiplexer including a first input electrically connected to the output of the scan device, a second input electrically connected to a first output of the update device, and an output electrically connected to an input of the core under test. The first input of the first multiplexer is switched to the output when a first control signal is asserted so that the output of the scan device is allowed to directly connect to the output of the first multiplexer to launch a transition by switching the first multiplexer rather than triggering an update event, which is restricted to be triggered in the time of a negative edge.
    • 一种延迟故障测试装置包括:扫描装置,具有用于向被测核心接收数据的第一输入端,包括电连接到扫描装置的第一输出端的输入端的更新装置;第一多路复用器,包括电连接到 扫描装置的输出,电连接到更新装置的第一输出的第二输入,以及电连接到被测核心的输入的输出。 当第一控制信号被断言时,第一多路复用器的第一输入被切换到输出,使得允许扫描装置的输出直接连接到第一多路复用器的输出,以通过切换第一多路复用器来发射转换,而不是 触发一个更新事件,这个更新事件被限制为在一个负边缘的时间被触发。
    • 9. 发明申请
    • Display Element and Method of Manufacturing the Same
    • 显示元件及其制造方法
    • US20100038645A1
    • 2010-02-18
    • US12582964
    • 2009-10-21
    • Po-Lin ChenWen-Ching TsaiChun-Nan LinKuo-Yuan Tu
    • Po-Lin ChenWen-Ching TsaiChun-Nan LinKuo-Yuan Tu
    • H01L33/00
    • H01L29/458H01L27/124H01L29/41733
    • A display element and a method of manufacturing the same are provided. The method comprises the following steps: forming a first patterned conducting layer with a gate on a substrate and a dielectric layer thereon; forming a patterned semiconductor layer on the dielectric layer, wherein the patterned semiconductor layer has a channel region, a source and a drain, and wherein the source and the drain lie on the opposite sides of the channel region; selectively depositing a barrier layer, which only wraps the patterned semiconductor layer; forming a second patterned conducting layer on the barrier layer and above the source and the drain. In the display element manufactured by the method, the barrier layer only wraps the patterned semiconductor layer.
    • 提供了一种显示元件及其制造方法。 该方法包括以下步骤:在衬底上形成具有栅极的第一图案化导电层和其上的电介质层; 在所述电介质层上形成图案化的半导体层,其中所述图案化半导体层具有沟道区,源极和漏极,并且其中所述源极和漏极位于所述沟道区的相对侧上; 选择性地沉积仅包裹图案化半导体层的阻挡层; 在阻挡层上和源极和漏极之上形成第二图案化导电层。 在通过该方法制造的显示元件中,阻挡层仅包裹图案化的半导体层。