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    • 2. 发明专利
    • Method and apparatus for observation of sample
    • 用于观察样品的方法和装置
    • JP2010080969A
    • 2010-04-08
    • JP2009265869
    • 2009-11-24
    • Hitachi Ltd株式会社日立製作所
    • OBARA KENJITAKAGI YUJISHIMODA ATSUSHINAKAGAKI AKIRAISOGAI SHIZUSHIOZAWA YASUHIKOBABA HIDEHARUWATANABE KENJISHISHIDO CHIE
    • H01L21/66G01N21/956H01J37/22
    • PROBLEM TO BE SOLVED: To provide a method and apparatus for observation of a sample by which, upon detailed inspection of a defective part of the sample by means of magnification or the like, the amount of stage movement is reduced as little as possible to shorten image acquiring time thereby effectively observing defects. SOLUTION: The method for observation of the sample includes the steps of: acquiring a reference image not including a defect of the sample by imaging the sample on the basis of information of the defect of the sample detected by an inspection device; adjusting a position of the sample on the basis of the information of the defect of the sample detected by the inspection device so that the defect comes in sight of imaging; acquiring a defect image including the defect of the sample by imaging the sample whose position has been adjusted; detecting the defect in the defect image by comparing the reference image and the defect image; acquiring a magnified image of the defect by imaging a partial region including the detected defect in the sight of imaging; and displaying the magnified image of the defect on a screen. COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供一种用于观察样品的方法和装置,通过这种方法和装置,通过借助于放大率等对样品的缺陷部分进行详细检查后,台架移动量减少到少至 可能缩短图像获取时间,从而有效地观察缺陷。 解决方案:用于观察样本的方法包括以下步骤:基于由检查装置检测到的样本的缺陷的信息,通过对样本进行成像来获取不包括样本缺陷的参考图像; 基于由检查装置检测到的样本的缺陷的信息来调整样本的位置,使得缺陷进入成像; 通过对已经调整了位置的样本进行成像来获取包括样本缺陷的缺陷图像; 通过比较参考图像和缺陷图像来检测缺陷图像中的缺陷; 通过在成像的视觉中成像包括检测到的缺陷的部分区域来获取缺陷的放大图像; 并在屏幕上显示缺陷的放大图像。 版权所有(C)2010,JPO&INPIT
    • 3. 发明专利
    • Review sem
    • REVIEW SEM
    • JP2009092673A
    • 2009-04-30
    • JP2008332085
    • 2008-12-26
    • Hitachi LtdRenesas Eastern Japan Semiconductor Inc株式会社ルネサス東日本セミコンダクタ株式会社日立製作所
    • NOZOE MARINISHIYAMA HIDETOSHIHIJIKATA SHIGEAKIWATANABE KENJIABE KOJI
    • G01N23/225H01L21/66
    • PROBLEM TO BE SOLVED: To provide an inspection device and method for observing, inspecting, and distinguishing inspected and detected surface irregularities, shape defects, foreign matters, further, electrical defects, or the like, quickly and precisely using an identical device by applying white light, laser beams, and electron beams to a substrate surface having a circuit pattern in a semiconductor device, or the like, and to move to a position to be observed, to capture an image, and to automatically perform classification. SOLUTION: When specifying the position to be observed on a sample and applying electron beams for forming an image, based on the position information of a defect inspected and detected by other inspection apparatus, observation of electrical defects that can be conducted with a potential contract by designating electron beam irradiation conditions, detectors, detection conditions, and the like, according to the types of defects to be observed. The acquired images are automatically classified by an image processing section, and the results are added to a defect file to output. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供一种用于使用相同的装置快速且精确地观察,检查和区分检查和检测的表面凹凸,形状缺陷,异物,进一步的电气缺陷等的检查装置和方法 通过将白光,激光束和电子束施加到具有半导体装置等中的电路图案的基板表面,并且移动到要观察的位置,以捕获图像,并且自动执行分类。 解决方案:当指定要在样品上观察的位置并施加用于形成图像的电子束时,基于由其他检查装置检查和检测的缺陷的位置信息,观察可以用 根据要观察的缺陷的类型,通过指定电子束照射条件,检测器,检测条件等来进行潜在的合同。 所获取的图像由图像处理部分自动分类,并将结果添加到缺陷文件以输出。 版权所有(C)2009,JPO&INPIT
    • 4. 发明专利
    • Inspection apparatus
    • 检查装置
    • JP2008261893A
    • 2008-10-30
    • JP2008205955
    • 2008-08-08
    • Hitachi High-Technologies CorpHitachi Ltd株式会社日立ハイテクノロジーズ株式会社日立製作所
    • ISHIMARU ICHIRONOGUCHI MINORUMORIYAMA ICHIROTANABE YOSHIKAZUHACHIKAKE YASUOKENBO YUKIOWATANABE KENJITSUCHIYAMA YOJI
    • G01N21/956
    • PROBLEM TO BE SOLVED: To provide a surface inspection apparatus which enables an inspection discriminating between scratches, which are generated on a surface and have various shapes, and foreign substances sticking to the surface when a polishing or grinding like CMP etc. is performed on an object to be processed (for example, an insulation film on a semiconductor substrate) in semiconductor manufacture or magnetic head manufacture, and to provide its method. SOLUTION: The inspection apparatus is characterized by the followings. Epi illumination and oblique illumination with almost the same luminous flux are applied on the scratches and foreign substances generated on the polished or grinded surface of the insulation film. Discrimination between shallow scratches and the foreign substances is performed by detecting variations in the intensities of scattered light arising from the shallow scratches and foreign substances during the epi illumination and oblique illumination, further, discrimination between linear scratches and the foreign substances is performed by detecting the directivity of the scattered light during the epi illumination. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供一种表面检查装置,其能够进行检查,以区分在表面上产生并具有各种形状的划痕和当像CMP等的研磨或研磨时粘附到表面的异物 在半导体制造或磁头制造中对被处理物体(例如,半导体衬底上的绝缘膜)进行,并提供其方法。

      解决方案:检查装置的特征如下。 Epi照明和具有几乎相同光通量的倾斜照明被施加在在绝缘膜的抛光或研磨表面上产生的划痕和异物上。 通过检测在epi照明和倾斜照明期间由浅刮痕和异物产生的散射光的强度的变化来进行浅痕迹和异物之间的区别,此外,通过检测线性划痕和异物来区分线性划痕 在epi照明期间散射光的方向性。 版权所有(C)2009,JPO&INPIT

    • 5. 发明专利
    • Onboard antenna incorporated with door
    • ONBOARD天线与门并入
    • JP2006295712A
    • 2006-10-26
    • JP2005115959
    • 2005-04-13
    • Hitachi Chem Co LtdHitachi LtdYagi Antenna Co Ltd八木アンテナ株式会社日立化成工業株式会社株式会社日立製作所
    • MATSUURA MIKIHIROHORII SHIROIRIGUCHI TAKENORIIWATA TERUHIKOWATANABE KENJISUZUKI SHIGEO
    • H01Q1/22H01Q7/00
    • PROBLEM TO BE SOLVED: To provide an onboard antenna incorporated with a door capable of giving a large degree of freedom to an antenna arrangement place without impairing its appearance and sufficiently ensuring antenna characteristics.
      SOLUTION: An automobile door panel 10 is composed of an indoor side synthetic resin inner panel 11 and an outer panel being an outer plate. The inner panel 11 and the outer panel are integrally configured by being adhered at their edges using an adhesive material, and a space portion 15 is formed between the both. In this space portion 15, a loop antenna 21 is disposed along with the edge of the inner panel 11 and fixed by an antenna fixing hook 22. Furthermore, a power feeding part 23 is provided in the center of the loop antenna 21 and connected to communication equipment or the like via a coaxial cable. A stab 24 for widening the band of the antenna and reducing influence caused by surrounding metals such as car body metals or various cables is connected to one terminal of said power feeding part 23.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种结合门的车载天线,其能够给天线布置位置提供大的自由度而不损害其外观并充分确保天线特性。 汽车门板10由室内侧合成树脂内板11和作为外板的外板构成。 内板11和外板通过使用粘合材料在其边缘处粘合而整体构成,并且在两者之间形成空间部分15。 在该空间部分15中,环形天线21与内板11的边缘一起设置并由天线固定钩22固定。此外,馈电部23设置在环形天线21的中心并连接到 通信设备等通过同轴电缆。 用于加宽天线带和减少由诸如车体金属或各种电缆的周围金属引起的影响的刺杆24连接到所述馈电部分23的一个端子。版权所有(C)2007,JPO&INPIT
    • 6. 发明专利
    • Method and apparatus for inspecting defects
    • 检查缺陷的方法和装置
    • JP2005055447A
    • 2005-03-03
    • JP2004249426
    • 2004-08-30
    • Hitachi Ltd株式会社日立製作所
    • SHIBATA YUKIHIROMAEDA SHUNJIYAMAGUCHI KAZUOYOSHIDA MINORUYOSHIDA ATSUSHININOMIYA TAKANORIMATSUI SHIGERUOKA KENJIWATANABE KENJI
    • G01B11/24G01N21/88G01N21/956H01L21/66
    • PROBLEM TO BE SOLVED: To detect defects in a minute wiring pattern formed on a sample with high sensitivity, by improving the contrast of an optical image of the sample formed by the interference between the 0-th and higher-order diffracted lights of reflected light, arising from illuminating light reflected by the sample surface, in a defects detection optical system which detects defects in a pattern formed on the sample surface.
      SOLUTION: A high resolution optical system is constructed by an illumination optical system which illuminates the sample with a polarized light, a polarization optical component which transmits higher-order diffracted lights, after being subjected to polarization rotation by the sample more efficiently than the 0-th order light, and a detection optical system which forms an image of the sample onto a photoelectric conversion device with the light which is transmitted through or is reflected by the polarization optical component.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:通过改善由第0级和高级衍射光之间的干扰形成的样品的光学图像的对比度,来检测在高灵敏度下形成在样品上的微小布线图案中的缺陷 在检测在样品表面上形成的图案中的缺陷的缺陷检测光学系统中产生的由样品表面反射的照明光产生的反射光。 解决方案:高分辨率光学系统由照射光学系统构成,该照明光学系统利用偏振光照射样品,透射高阶衍射光的偏振光学部件在受到样品的极化旋转之后更有效地比 以及检测光学系统,其通过透射或被偏振光学部件反射的光将样品的图像形成到光电转换装置上。 版权所有(C)2005,JPO&NCIPI
    • 8. 发明专利
    • Motor-driven type actuator
    • 电机驱动型执行器
    • JP2007231994A
    • 2007-09-13
    • JP2006051462
    • 2006-02-28
    • Hitachi Ltd株式会社日立製作所
    • KUME MIKINESAEKI HIROAKIKUWANO MORIOWATANABE KENJINISHIMURA MITSUNORI
    • F16H35/00F16B21/12F16H1/16H02K7/116
    • PROBLEM TO BE SOLVED: To provide a motor-driven type actuator exhibiting improved reliability of a stopper regardless of a space restriction condition to the stopper.
      SOLUTION: The actuator is provided with a worm wheel attached to an end of an output rotating shaft, a bearing for supporting rotation of the output rotating shaft, a body having a space for housing the worm wheel, a worm gear meshed with the worm wheel, a motor for giving rotational force to the worm gear, and the stopper for regulating a turning region of the worm wheel. The stopper of the actuator is made of a resin material, and is provided with two regulating surfaces in correspondence with a turning regulation angle, and has an air hole exhibiting the damping effect between the regulating surfaces. Thus, the requirement such as reduction of the load to a gear tooth flank or increase of impact energy to the stopper can be coped with, desired torsional rigidity can be set, and reliability of the stopper is improved.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种具有改进的止动器可靠性的电机驱动型致动器,而与挡块的空间限制条件无关。 解决方案:致动器设置有连接到输出转轴的端部的蜗轮,用于支撑输出旋转轴的旋转的轴承,具有用于容纳蜗轮的空间的主体,与蜗轮啮合的蜗轮 蜗轮,用于向蜗轮提供旋转力的电动机和用于调节蜗轮的转向区域的止动器。 致动器的止动件由树脂材料制成,并且具有与转动调节角度对应的两个调节表面,并且具有在调节表面之间呈现阻尼效果的空气孔。 因此,可以应对减速到齿轮齿面的负荷或增加对止动件的冲击能量的要求,可以设定期望的扭转刚度,并提高止动件的可靠性。 版权所有(C)2007,JPO&INPIT