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1. 发明专利

JP2010164438A Spectroscopic detection method, apparatus thereof, defect inspection method using same, and apparatus thereof 有权
标题翻译：光谱检测方法，其装置，使用其的缺陷检查方法及其装置
公开(公告)号：JP2010164438A
公开(公告)日：2010-07-29
申请号：JP2009007160
申请日：2009-01-16
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： HIROSE TAKESHI , YOSHIDA MINORU , SASAZAWA HIDEAKI , YOSHITAKE YASUHIRO
IPC分类号： G01N21/95 , G01B11/30
CPC分类号： G01J3/02 , G01B2210/56 , G01J3/0208 , G01J3/021 , G01J3/0229 , G01N21/95607
摘要： PROBLEM TO BE SOLVED: To solve the following problem that an optical system of a relatively simple constitution and capable of spectroscopic detection of a wide wavelength range including a short wavelength region, in other words, an ultraviolet region can not have been easily achieved in view of the fact that a wide wavelength range for spectroscopic detection in a short wavelength region is advantageous for detecting the shape of a repetitive pattern uniformly formed in a surface to be inspected through the use of a spectroscopic detection technique.
SOLUTION: A pattern defect inspection apparatus is provided with a spectroscopic detection optical system capable of detection in deep-ultraviolet to near-infrared wavelength bands by using a spatially partial mirror 1702 as a half mirror and installing an aperture stop 1710 in a reflection type object lens for restricting the irradiation of an object to be inspected with light and the angle and direction of detection of reflected light from the object to be inspected.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：解决的问题为了解决以下问题，即，具有相对简单结构并能够对包括短波长区域的宽波长范围进行光谱检测的光学系统，换句话说，紫外线区域的光学系统不容易考虑到通过使用光谱检测技术在短波长区域中用于光谱检测的宽波长范围有利于检测均匀形成在待检查表面中的重复图案的形状。解决方案：图案缺陷检查装置设置有能够通过使用空间部分反射镜1702作为半反射镜在深紫外至近红外波长带中检测的光谱检测光学系统，并将孔径光阑1710安装在用于限制被检查对象的照射的反射型物镜以及检测来自被检体的反射光的角度和方向。版权所有（C）2010，JPO＆INPIT

2. 发明专利

JP2002367902A Overlap exposing method and exposing system 有权
标题翻译：重叠曝光方法与曝光系统
公开(公告)号：JP2002367902A
公开(公告)日：2002-12-20
申请号：JP2002143995
申请日：2002-05-20
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： OSHIDA YOSHITADA , IWATA HISAFUMI , YOSHITAKE YASUHIRO , YOSHIDA MINORU , SHIBATA YUKIHIRO
IPC分类号： G03F9/00 , G03F7/20 , H01L21/027
CPC分类号： G03F7/70466
摘要： PROBLEM TO BE SOLVED: To realize overlap exposing of fine pattern and highly accurate evaluation of the patterns formed by accurately detecting position, width and interval or the like of the patterns on a wafer of semiconductor circuit.
SOLUTION: The lighting beam to a specimen such as a wafer or/and the light beam reflected from the specimen is/are set to a predetermined spectral luminance or spectral transmittance, so that it becomes possible that distortion of detected waveform through multiple reflection due to film structure can be eliminated. Moreover, the numerical apertures for detection in each waveform is changed to realize matching of resolutions of images in each waveform. In addition, a pattern signal strength ratio of each waveform is changed by signal processing for image composition for the primary image of each waveforms isolated by a spectroscopic means. Moreover, Chromatic aberration generated in a detection optical system is compensated by compensating for the time base of pattern signal of each isolated wavelength (position coordinate axis on the pattern). Accordingly, it is now possible to accurately detect position of pattern of a wafer or the like, exposing of semiconductor circuit can be realized with higher yield for more fine patterns, and higher reliability and accuracy can also be attained for inspection.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：实现精细图案的重叠曝光和通过精确检测半导体电路晶片上的图案的位置，宽度和间隔等形成的图案的高精度评估。解决方案：将诸如晶片或/和从样品反射的光束的样品的照明光束设置为预定的光谱亮度或光谱透射率，使得可能由于多次反射而导致的检测波形的失真胶片结构可以消除。此外，改变每个波形中用于检测的数值孔径，以实现每个波形中图像分辨率的匹配。此外，通过用于通过光谱装置隔离的每个波形的主图像的图像合成的信号处理，来改变每个波形的图案信号强度比。此外，通过补偿每个孤立波长（图案上的位置坐标轴）的图案信号的时基来补偿在检测光学系统中产生的色差。因此，现在可以精确地检测晶片等的图案的位置，可以以更高的产量实现对更细的图案的半导体电路的暴露，并且还可以获得更高的可靠性和精度来进行检查。

3. 发明专利

JP2012088155A Measuring method using fbg sensor, and device thereof 审中-公开
标题翻译：使用FBG传感器的测量方法及其装置
公开(公告)号：JP2012088155A
公开(公告)日：2012-05-10
申请号：JP2010234598
申请日：2010-10-19
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： YOSHIDA MINORU , WATANABE MASAHIRO , NAKANO KEIKO
IPC分类号： G01K11/12 , G01B11/16 , G01D5/26
摘要： PROBLEM TO BE SOLVED: To simultaneously measure a distortion and temperature by separating one FBG sensor into an FBG section for sensing the distortion and temperature and an FBG section for sensing only the temperature, in a measuring method using an FBG sensor and a device thereof.SOLUTION: A part of an optical fiber in which a diffraction grating is formed on a core is fixed in a state depending on a distortion of a measurement object, and the other part of the optical fiber in which the diffraction grating is formed on the core is fixed in a state not depending on the distortion of the measurement object. The distortion and temperature of the measurement object are measured by using a signal detected from the part of the optical fiber fixed in the state depending on the distortion of the measurement object and a signal detected from the part of the optical fiber fixed in the state not depending on the distortion of the measurement object.
摘要翻译：要解决的问题：通过将FBG传感器分离成用于感测失真和温度的FBG部分和用于感测温度的FBG部分来同时测量失真和温度，在使用FBG传感器和装置。解决方案：其中在芯上形成衍射光栅的光纤的一部分根据测量对象的失真状态而固定，并且形成衍射光栅的光纤的另一部分核心固定在不依赖于测量对象的失真的状态。测量对象的失真和温度通过使用从根据测量对象的失真状态固定的光纤部分检测到的信号和从固定在该状态下的光纤部分检测到的信号来测量取决于测量对象的失真。版权所有（C）2012，JPO＆INPIT

4. 发明专利

JP2012013614A Specular inspection method and specular inspection device 审中-公开
标题翻译：检测方法和检测装置
公开(公告)号：JP2012013614A
公开(公告)日：2012-01-19
申请号：JP2010152155
申请日：2010-07-02
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： WATANABE MASAHIRO , NAKADA TOSHIHIKO , SASAZAWA HIDEAKI , YOSHIDA MINORU , HARIYAMA TATSUO
IPC分类号： G01N21/956 , G01B11/30 , G01N21/95 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To provide a specular inspection device that can quantitatively detect irregularity of a surface with high sensitivity.SOLUTION: A specular inspection method includes the steps of orienting an illumination light irradiated from a light source substantially parallel to be irradiated onto a sample having a specular surface, condensing a light reflected by the sample to which the illumination light is irradiated by a condensation lens, passing the reflection light condensed by the condensation lens from the sample through a pin hole to shield lights except for the reflection light, detecting the reflection light from the sample through the pin hole by a detector arranged at a position offset from a focus position of the condensation lens, and processing a signal detected by the detector. The detector detects the reflection light from the sample through the pin hole under a plurality of conditions and detects a distribution of local irregularity on the sample using a detection signal of the reflection light detected by the detector under the plurality of conditions.
摘要翻译：要解决的问题：提供可以以高灵敏度定量检测表面的不规则性的镜面检查装置。解决方案：镜面检查方法包括以下步骤：将从光源照射的照明光基本平行地照射到具有镜面的样品上，将由照射光照射的样品反射的光，凝结透镜，使来自凝结透镜的反射光从样品通过针孔穿过，以遮蔽除了反射光之外的光，通过检测器检测来自样品的反射光，该检测器布置在偏离聚焦位置，并处理由检测器检测到的信号。检测器在多个条件下通过针孔检测来自样品的反射光，并且使用在多个条件下由检测器检测的反射光的检测信号来检测样品上的局部不规则性的分布。版权所有（C）2012，JPO＆INPIT

5. 发明专利

JP2005156516A Method of inspecting pattern defect, and apparatus of the same 审中-公开
标题翻译：检查图案缺陷的方法及其设备
公开(公告)号：JP2005156516A
公开(公告)日：2005-06-16
申请号：JP2004001603
申请日：2004-01-07
申请人： Hitachi High-Technologies Corp , Hitachi Ltd , 株式会社日立ハイテクノロジーズ , 株式会社日立製作所
发明人： YOSHIDA MINORU , NISHIYAMA HIDETOSHI , SHIBATA YUKIHIRO , MAEDA SHUNJI
IPC分类号： G01N21/956
CPC分类号： G01N21/95684
摘要： PROBLEM TO BE SOLVED: To reduce damages to a sample due to a high power pulse light, and to inspect the sample at a high speed and with high sensitivity. SOLUTION: A light is emitted from a pulse laser light source 3 and passes through a pseudo serializing optical system 4, a beam forming optical system 5 and a coherency reducing optical system 6. A beam is deflected by a transformational illumination optical system 7, reflected by a PBS 8, and is irradiated on a wafer 1. A diffracted light from the wafer 1 is focused, and imaged on a plurality of image sensors in a view field dividing parallel detecting section 12 through optical modulation units 9, 11. A defect is detected by a signal processing section 13. The pseudo serializing optical system 4, by time-dividing the pulse light and maintaining the total quantity of the pulse lights, has an optical system for reducing energy per pulse. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了减少由于高功率脉冲光而对样品造成的损害，并且以高速和高灵敏度检查样品。解决方案：从脉冲激光光源3发射光，并通过伪串行光学系统4，光束形成光学系统5和相干性降低光学系统6.光束被变换照明光学系统 7，由PBS 8反射，并照射在晶片1上。来自晶片1的衍射光聚焦，并通过光调制单元9,11被成像在视场分割并行检测部分12中的多个图像传感器上由信号处理部13检测到缺陷。伪串联光学系统4通过对脉冲光进行时分并维持脉冲光的总量，具有用于降低每脉冲能量的光学系统。版权所有（C）2005，JPO＆NCIPI

6. 发明专利

JP2005122765A Computer system and secondary storage device 有权
标题翻译：计算机系统和二次存储设备
公开(公告)号：JP2005122765A
公开(公告)日：2005-05-12
申请号：JP2004367003
申请日：2004-12-20
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： MATSUNAMI NAOTO , ISONO SOICHI , MATSUMOTO JUN , YOSHIDA MINORU
IPC分类号： G06F12/00
摘要： PROBLEM TO BE SOLVED: To provide a computer system that can ensure optimum file allocation regardless of the type of a secondary storage device. SOLUTION: When instructed to newly store a file by a host computer 1 with a command including file identification information, file managing/command managing means 23a of the secondary storage device 2 notify the instruction to new file address determining means 26. The new file address determining means 26 determine optimum space in free space detected by reference to a disk management table 25b as space to register the new file in consideration of characteristics of the file, the configuration of the secondary storage device, and the like. The address of the determined space is registered in a local file management table 27 in association with the file identification information. The file managing/command managing means 23a store the file in the determined space of a disk device 29 through disk device controlling means 24. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供可以确保最佳文件分配的计算机系统，而不管辅助存储设备的类型如何。解决方案：当通过包含文件识别信息的命令由主计算机1指示新存储文件时，辅助存储装置2的文件管理/命令管理装置23a通知新文件地址确定装置26的指令。新文件地址确定装置26通过参照磁盘管理表25b来确定可用空间中的最佳空间，作为考虑到文件的特性，辅助存储装置的配置等来注册新文件的空间。所确定的空间的地址与文件识别信息相关联地登记在本地文件管理表27中。文件管理/命令管理装置23a通过盘装置控制装置24将文件存储在盘装置29的确定空间中。（C）2005年，JPO＆NCIPI

7. 发明专利

JP2005055447A Method and apparatus for inspecting defects 有权
标题翻译：检查缺陷的方法和装置
公开(公告)号：JP2005055447A
公开(公告)日：2005-03-03
申请号：JP2004249426
申请日：2004-08-30
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： SHIBATA YUKIHIRO , MAEDA SHUNJI , YAMAGUCHI KAZUO , YOSHIDA MINORU , YOSHIDA ATSUSHI , NINOMIYA TAKANORI , MATSUI SHIGERU , OKA KENJI , WATANABE KENJI
IPC分类号： G01B11/24 , G01N21/88 , G01N21/956 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To detect defects in a minute wiring pattern formed on a sample with high sensitivity, by improving the contrast of an optical image of the sample formed by the interference between the 0-th and higher-order diffracted lights of reflected light, arising from illuminating light reflected by the sample surface, in a defects detection optical system which detects defects in a pattern formed on the sample surface.
SOLUTION: A high resolution optical system is constructed by an illumination optical system which illuminates the sample with a polarized light, a polarization optical component which transmits higher-order diffracted lights, after being subjected to polarization rotation by the sample more efficiently than the 0-th order light, and a detection optical system which forms an image of the sample onto a photoelectric conversion device with the light which is transmitted through or is reflected by the polarization optical component.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：通过改善由第0级和高级衍射光之间的干扰形成的样品的光学图像的对比度，来检测在高灵敏度下形成在样品上的微小布线图案中的缺陷在检测在样品表面上形成的图案中的缺陷的缺陷检测光学系统中产生的由样品表面反射的照明光产生的反射光。解决方案：高分辨率光学系统由照射光学系统构成，该照明光学系统利用偏振光照射样品，透射高阶衍射光的偏振光学部件在受到样品的极化旋转之后更有效地比以及检测光学系统，其通过透射或被偏振光学部件反射的光将样品的图像形成到光电转换装置上。版权所有（C）2005，JPO＆NCIPI

8. 发明专利

JP2003343208A Preceding pressure control steam turbine plant 审中-公开
标题翻译：压力控制蒸汽涡轮机厂
公开(公告)号：JP2003343208A
公开(公告)日：2003-12-03
申请号：JP2002148839
申请日：2002-05-23
申请人： Hitachi Engineering & Services Co Ltd , Hitachi Ltd , Nitto Denko Corp , 日東電工株式会社 , 株式会社日立エンジニアリングサービス , 株式会社日立製作所
发明人： YOSHIDA SHINICHIRO , YOSHIDA MINORU , MURAKOSHI SHINJI , HAMA MASAYUKI
IPC分类号： F01D17/24
摘要： PROBLEM TO BE SOLVED: To provide a preceding pressure control steam turbine plant which absorbs a surplus or deficiency of the steam of a steam header so as to make use of energy efficiently. SOLUTION: A pressure detector 12 detects the header pressure of the steam header 5. When the detected value of the header pressure decreases down to a set value or lower, an adjusting valve control unit 15 controls a preceding pressure adjusting valve 3 so that the preceding pressure of the preceding pressure control steam turbine 1 may be at a second preceding pressure set value higher than the header pressure set value. When the detected value of the header pressure of the steam header 5 increases up to the set value or higher, steam is supplied to the preceding pressure control steam turbine 1 from the steam header 5 via a steam surplus system. COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：提供一种先前的压力控制蒸汽轮机设备，其吸收蒸汽集管的蒸汽的过剩或不足以有效地利用能量。解决方案：压力检测器12检测蒸汽集管5的集管压力。当总压力的检测值降低到设定值或更低时，调节阀控制单元15控制先前的压力调节阀3 前一个压力控制蒸气轮机1的前一个压力可以处于比头部压力设定值高的第二在前的压力设定值。当蒸汽集管5的总压力的检测值增加到设定值以上时，通过蒸汽余量系统从蒸汽集管5向前一压力控制蒸汽轮机1供给蒸汽。版权所有（C）2004，JPO

9. 发明专利

JP2003042967A Inspection device for pattern defect 审中-公开
标题翻译：用于图案缺陷的检查装置
公开(公告)号：JP2003042967A
公开(公告)日：2003-02-13
申请号：JP2001228166
申请日：2001-07-27
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： UTO YUKIO , YOSHIDA MINORU , NAKADA TOSHIHIKO , MAEDA SHUNJI , SHIMODA ATSUSHI
IPC分类号： G01N21/33 , G01N21/95 , G01N21/956 , H01L21/66
CPC分类号： G01N21/21 , G01N21/33 , G01N21/55 , G01N21/9501 , G01N21/956 , G01N21/95607 , G01N2021/151 , G01N2021/95615 , G01N2201/06113 , G01N2201/1035
摘要： PROBLEM TO BE SOLVED: To provide an inspection device for pattern defects, capable of realizing high reliability stable pattern defect inspection, having high resolution relative to minute patterns by using an ultraviolet laser beam as the light source.
SOLUTION: In this pattern defect inspection device, the quantity change in the ultraviolet laser beam is detected during inspection, to thereby determine the existence of an influence on the inspection, and service life prediction and abnormality of the light source are detected, and the inside of an optical system is cleaned, to thereby ensure prolongation of service life and long-term reliability of optical parts.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：提供一种能够实现高可靠性稳定图案缺陷检查的图形缺陷检查装置，通过使用紫外激光束作为光源，相对于微小图案具有高分辨率。解决方案：在该图案缺陷检查装置中，在检查期间检测紫外激光束的数量变化，从而确定对检查的影响的存在，并检测使用寿命预测和光源的异常，并且内部清洁光学系统，从而确保光学部件的使用寿命延长和长期可靠性。

10. 发明专利

JP2006294052A Computer system and secondary storage device 有权
标题翻译：计算机系统和二次存储设备
公开(公告)号：JP2006294052A
公开(公告)日：2006-10-26
申请号：JP2006154165
申请日：2006-06-02
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： MATSUNAMI NAOTO , ISONO SOICHI , MATSUMOTO JUN , YOSHIDA MINORU
IPC分类号： G06F3/06 , G06F12/00
摘要： PROBLEM TO BE SOLVED: To provide a computer system capable of carrying out optimum file placement independently of the type of a secondary storage device. SOLUTION: When a file and command management means 23a of the secondary storage device 2 is instructed by a host computer 1 to store a new file by a command which contains file identification information, the means transfers it to a new file address determining means 26. The new file address determining means 26 refers to a disk management table 25b to find a free area and considers characteristics of the file, the configuration of the secondary storage system, etc., to determine an optimum area as an area for registering the new file. Also, the address of the determined area is registered in a local file management table 27 in association with the identification information of the file. The file and command management means 23a stores the file in the determined area of a disk device 29 through a disk device control means 24. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够独立于辅助存储装置的类型执行最佳文件放置的计算机系统。解决方案：当主计算机1指示辅助存储装置2的文件和命令管理装置23a通过包含文件识别信息的命令存储新文件时，该装置将其传送到新的文件地址确定新文件地址确定装置26参考磁盘管理表25b找到空闲区域并考虑文件的特性，二级存储系统的配置等，以确定最佳区域作为登记区域新文件。此外，确定区域的地址与文件的识别信息相关联地登记在本地文件管理表27中。文件和命令管理装置23a通过盘装置控制装置24将文件存储在盘装置29的确定区域中。版权所有（C）2007，JPO＆INPIT

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