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1. 发明申请

WO2009138138A2 METHOD FOR PRODUCING CHIPS 审中-公开
标题翻译：用于生产CHIPS
公开(公告)号：WO2009138138A2
公开(公告)日：2009-11-19
申请号：PCT/EP2008066593
申请日：2008-12-02
申请人： BOSCH GMBH ROBERT , KRAMER TORSTEN , BOEHRINGER MATTHIAS , PINTER STEFAN , BENZEL HUBERT , ILLING MATTHIAS , HAAG FRIEDER , ARMBRUSTER SIMON
发明人： KRAMER TORSTEN , BOEHRINGER MATTHIAS , PINTER STEFAN , BENZEL HUBERT , ILLING MATTHIAS , HAAG FRIEDER , ARMBRUSTER SIMON
IPC分类号： B81C1/00
CPC分类号： H01L25/50 , B81C1/0038 , B81C2201/0191 , H01L21/02002 , H01L24/03 , H01L24/05 , H01L2224/05599 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01022 , H01L2924/01024 , H01L2924/01033 , H01L2924/01046 , H01L2924/0105 , H01L2924/01068 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/04941
摘要： The invention relates to a method for producing chips (1, 2), whereby at least one membrane (11, 12) is produced in the surface layer of a semiconductor substrate (10), said membrane spanning a cavity (13). The functionality of the chip (1, 2) is then integrated into the membrane (11, 12). In order to subdivide the chip (1, 2), the membrane (11, 12) is detached from the substrate composite. The method according to the invention is characterized by metalizing the back of the chip in an electroplating process before the chip (1, 2) is detached.
摘要翻译：提供了一种用于生产的芯片（1,2）已经提出，其中最初在一个半导体衬底（10）的至少一个膜（11，12）的表面层中产生跨越的空腔（13）。接着，将芯片的功能（1，2）在所述膜（11，12）被集成。以单个模具（1，2），所述隔膜（11，12）从所述复合衬底释放。根据本发明，该芯片回之前剥离用芯片（1，2）被金属化在电镀工艺中的复合衬底上。

2. 发明申请

WO2010006849A3 PROCESS FOR MANUFACTURING A COMPONENT, PROCESS FOR MANUFACTURING A COMPONENT ARRANGEMENT, COMPONENT AND COMPONENT ARRANGEMENT 审中-公开
标题翻译：制造构件的方法，制造构件的方法，构件和构件
公开(公告)号：WO2010006849A3
公开(公告)日：2010-12-29
申请号：PCT/EP2009057106
申请日：2009-06-09
申请人： BOSCH GMBH ROBERT , KRAMER TORSTEN , PINTER STEFAN , BENZEL HUBERT , ILLING MATTHIAS , HAAG FRIEDER , ARMBRUSTER SIMON
发明人： KRAMER TORSTEN , PINTER STEFAN , BENZEL HUBERT , ILLING MATTHIAS , HAAG FRIEDER , ARMBRUSTER SIMON
IPC分类号： B81B7/00
CPC分类号： B81C99/008 , B81B7/0006 , B81B2207/093
摘要： The invention proposes a process for manufacturing a component, wherein, in a first manufacturing step, a basic structure having a substrate, a membrane and a cavern region is provided, wherein the membrane is arranged substantially parallel to a plane of principal extent of the substrate, wherein the cavern region is arranged between the substrate and the membrane, wherein the cavern region has an access opening and wherein, in a second manufacturing step, a first conductive layer is arranged at least partially in the cavern region and, in particular, on a second side of the membrane which faces towards the substrate perpendicularly to the plane of principal extent.
摘要翻译：它提出了一种方法，用于制造装置，其特征在于，提供了一种基本结构，其包括一基板，一隔膜和在第一制造工序的腔体区域，其中所述膜基本上平行于所述衬底的主平面设置，所述基板和所述隔膜之间被布置在腔体区域，所述具有接入开口，并且其中的第一导电层被布置在至少部分地在腔区域中的第二制造工序，特别是垂直地朝向所述膜的第二侧的主延伸面的衬底上腔区域。

3. 发明申请

WO2009127273A3 METHOD FOR THE PRODUCTION OF A MICROMECHANICAL COMPONENT HAVING ELECTRODE UNITS ON TWO PLANES, AND MICROMECHANICAL COMPONENT 审中-公开
标题翻译：用于微机械结构与电极单元两个级别和微机械结构
公开(公告)号：WO2009127273A3
公开(公告)日：2010-05-06
申请号：PCT/EP2008066715
申请日：2008-12-03
申请人： BOSCH GMBH ROBERT , PIRK TJALF , PINTER STEFAN , BENZEL HUBERT , WEBER HERIBERT , KRUEGER MICHAEL , SATTLER ROBERT , MUCHOW JOERG , FRITZ JOACHIM , SCHELLING CHRISTOPH , FRIESE CHRISTOPH
发明人： PIRK TJALF , PINTER STEFAN , BENZEL HUBERT , WEBER HERIBERT , KRUEGER MICHAEL , SATTLER ROBERT , MUCHOW JOERG , FRITZ JOACHIM , SCHELLING CHRISTOPH , FRIESE CHRISTOPH
IPC分类号： B81B3/00 , B81C1/00 , G02B26/08
CPC分类号： B81C1/00007 , B81B2201/032 , B81B2201/033 , B81B2201/045 , B81B2203/019 , B81C1/00142 , B81C2201/017
摘要： The invention relates to a method for producing a micromechanical component (10), encompassing the following steps: a first electrode unit (14) is formed in a first position relative to a bottom substrate (16); a supporting element (22) is formed which comprises a first subunit (23, 28, 30) having a first internal stress and a second subunit (23, 28, 30) having a second internal stress that differs from the first internal stress, said supporting element (22) being fastened to the first electrode unit (14) at a first end while being fastened to the bottom substrate (16) at a second end; and the supporting element (22) is bent as a result of the difference between the first internal stress and the second internal stress, the bending action causing the first electrode unit (14) to be moved from the first position relative to the bottom substrate (16) into a second position relative to the bottom substrate (16). The invention further relates to a micromechanical component (10).
摘要翻译：本发明涉及一种用于微机械部件（10）的制造方法，包括以下步骤：在一个第一位置到一个基底（16）形成第一电极单元（14）; 形成具有具有与方向上从所述第一内部应力第二残余应力偏离，第一本征电压和第二子单元（23,28,30）的第一子单元（23,28,30）的支撑部件（22），其中在所述支撑构件（22）第一端连接到所述第一电极部（14）和在第二端处与基底基板（16）被安装; 和支撑部件（22）弯曲，由于第一内部应力和第二特征电压之间的差，由于从所述第一位置到所述基底（16），所述支撑构件（22），所述第一电极单元（14）的相对于所述的第二位置的弯曲基底基板（16）被调整。此外，本发明提供了一种微机械部件（10）涉及。

4. 发明申请

WO2009095108A2 FIXED BODY JOINT AND MICROMECHANICAL COMPONENT 审中-公开
标题翻译： SOLID STATE关节和微机械部件
公开(公告)号：WO2009095108A2
公开(公告)日：2009-08-06
申请号：PCT/EP2008065532
申请日：2008-11-14
申请人： BOSCH GMBH ROBERT , PIRK TJALF , PINTER STEFAN , BENZEL HUBERT , WEBER HERIBERT , KRUEGER MICHAEL , SATTLER ROBERT , NJIKAM NJIMONZIE FREDERIC , MUCHOW JOERG , FRITZ JOACHIM , SCHELLING CHRISTOPH , FRIESE CHRISTOPH
发明人： PIRK TJALF , PINTER STEFAN , BENZEL HUBERT , WEBER HERIBERT , KRUEGER MICHAEL , SATTLER ROBERT , NJIKAM NJIMONZIE FREDERIC , MUCHOW JOERG , FRITZ JOACHIM , SCHELLING CHRISTOPH , FRIESE CHRISTOPH
IPC分类号： B81B7/00
CPC分类号： G02B26/0841 , B81B7/0006 , B81B2201/042 , B81B2203/058
摘要： The invention relates to a fixed body joint (16) for suspending a micromechanical device (2), comprising a support beam (17) and a thin layer (22) applied to the support beam (17). The thin layer extends laterally beyond the support beam (17). One or more conductor tracks (18) are embedded in said thin layer (22).
摘要翻译：根据本发明（16），用于悬挂的微机械装置（2）包括在所述轴承的光束（17）的支撑梁（17）和一个所述的固体关节淀积的薄层（22）。薄层横向延伸出经轴承梁（17）。在薄层（22）的一个或多个导体轨迹（18）嵌入。

5. 发明申请

WO2009124605A2 MICROMECHANICAL COMPONENT HAVING A SLANTED STRUCTURE AND CORRESPONDING PRODUCTION METHOD 审中-公开
标题翻译：与斜面结构及相应方法微机械结构
公开(公告)号：WO2009124605A2
公开(公告)日：2009-10-15
申请号：PCT/EP2008066388
申请日：2008-11-28
申请人： BOSCH GMBH ROBERT , PIRK TJALF , PINTER STEFAN , BENZEL HUBERT , WEBER HERIBERT , KRUEGER MICHAEL , SATTLER ROBERT , NJIKAM NJIMONZIE FREDERIC , MUCHOW JOERG , FRITZ JOACHIM , SCHELLING CHRISTOPH , FRIESE CHRISTOPH
发明人： PIRK TJALF , PINTER STEFAN , BENZEL HUBERT , WEBER HERIBERT , KRUEGER MICHAEL , SATTLER ROBERT , NJIKAM NJIMONZIE FREDERIC , MUCHOW JOERG , FRITZ JOACHIM , SCHELLING CHRISTOPH , FRIESE CHRISTOPH
IPC分类号： B81C1/00
CPC分类号： B81C1/00103 , B81B2203/0118 , B81B2203/0307
摘要： The invention relates to a micromechanical component having a slanted structure and to a corresponding production method. Said component comprises a substrate (1) having a surface (O); a first anchor (3e; 3e') that is provided on the surface (O) of the substrate (1) and which extends away from the substrate (1); and at least one arm (3c, 3d; 3c; 3c') that is oriented away from the anchor (3e; 3e') and that is provided on one lateral surface (S1, S2; S1'; S1'') of the anchor (3e; 3e').
摘要翻译：本发明提供了螺旋结构和相应的制造方法的微机械部件。该组件包括具有表面（O）的基板（1）; 在基板（1）的表面上的第一锚（3E，3E“），该（O）被设置，并且从衬底（1）延伸离开; 指向离开和在侧面的至少一个; '（其被从电枢倾斜臂3c和3d，3c和3c）中所提供的电枢的（S1，S2 S1”，S1' '）（3E，3E） '（图3e' 3E）是。

6. 发明申请

WO2009086978A3 PRODUCTION METHOD FOR A MICROMECHANICAL ELECTROSTATIC ADJUSTER DEVICE AND MICROMECHANICAL ELECTROSTATIC ADJUSTER DEVICE 审中-公开
标题翻译： PROCESS微型机械静态修正及MICRO电荷调节
公开(公告)号：WO2009086978A3
公开(公告)日：2010-04-01
申请号：PCT/EP2008065575
申请日：2008-11-14
申请人： BOSCH GMBH ROBERT , PIRK TJALF , PINTER STEFAN , BENZEL HUBERT , WEBER HERIBERT , KRUEGER MICHAEL , SATTLER ROBERT , MUCHOW JOERG , FRITZ JOACHIM , SCHELLING CHRISTOPH , FRIESE CHRISTOPH
发明人： PIRK TJALF , PINTER STEFAN , BENZEL HUBERT , WEBER HERIBERT , KRUEGER MICHAEL , SATTLER ROBERT , MUCHOW JOERG , FRITZ JOACHIM , SCHELLING CHRISTOPH , FRIESE CHRISTOPH
IPC分类号： B81C1/00
CPC分类号： B81C1/00666 , B81B2201/033 , B81B2201/042 , B81B2203/0136 , B81B2203/019 , B81C1/00166 , B81C2201/0167 , H02N1/002
摘要： The invention relates to a production method for a micromechanical electrostatic adjuster device (10), comprising the steps: application of a first conducting layer (12) to a substrate (28,30), etching the first conducting layer (12) to form at least one first electrode (16) in the material of the first conducting layer (12), application of a separation layer (32a) to the first conducting layer (12), application of a second conducting layer to the separation layer (32a), etching the second conducting layer to form at least one second electrode (22) in the material of the second conducting layer and application of a cover layer (40) to the second electrode (22) and bending the second electrode (22) by means of a mechanical compression load exerted on the second electrode (22) by means of the cover layer (40). The invention further relates to a corresponding micromechanical electrostatic adjuster device.
摘要翻译：本发明涉及一种用于微机械静电调节器（10）的制造方法，包括以下步骤：基部（28,30）上沉积第一导电层（12），蚀刻所述第一导电层（12），用于形成至少一个第一电极（ 16）从第一导电层（12）的材料，在施加第一导电层（12）上的脱模层（32a），其上沉积隔离层（32A）上的第二导电层，蚀刻第二导电层，以形成至少一个从第二导电层的材料，并施加于第二电极（22）的覆盖层（40）和由在第二电极上的覆盖层（40）中的一个的装置的第二电极（22）的弯曲的第二电极（22）（22）施加机械压应力。本发明还涉及一种相应的微机械静电调节器。

7. 发明申请

WO2010012532A3 METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT HAVING AN INCLINED PLANAR STRUCTURE, AND MICROMECHANICAL COMPONENT 审中-公开
标题翻译：过程与斜平面结构微机械结构和微机械结构
公开(公告)号：WO2010012532A3
公开(公告)日：2010-10-07
申请号：PCT/EP2009056772
申请日：2009-06-03
申请人： BOSCH GMBH ROBERT , PINTER STEFAN , FRIESE CHRISTOPH
发明人： PINTER STEFAN , FRIESE CHRISTOPH
IPC分类号： B81B3/00 , H02N1/00
CPC分类号： B81B3/0054 , B81B2201/033 , B81C2203/031 , H02N1/002
摘要： The invention relates to a method for producing a micromechanical component, comprising the following steps: arranging an electrode comb (50) in a mount (54, 56), wherein a first partial surface of the electrode comb (50) is arranged at a distance not equal to zero from a glass surface (58) of the mount (54, 56), and wherein the electrode comb (50) is connected to the mount (54, 56) via at least one connecting part arranged on a second partial surface of the electrode comb (50); applying a voltage between the first partial surface of the electrode comb (50) and the glass surface (58), with the result that the distance between the first partial surface of the electrode comb (50) and the glass surface (58) is reduced; and anodically fixedly bonding the first partial surface of the electrode comb (50) to the glass surface (58). The invention furthermore relates to a method for producing a micromechanical component, and to a micromechanical component.
摘要翻译：本发明涉及一种制造方法，包括以下步骤的微机械部件：将一个电极梳（50），在支架（54，56），其中，在一个非零距离的电极的梳（50）连接到保持器的玻璃表面（58）的第一部分表面（54，56）被布置，并且其中，所述的电极的梳（50），其设置在至少所述的电极的梳（50），其连接部分的第二表面的一部分到所述支撑（54，56）连接; 施加的电极的梳（50）和玻璃表面（58）的第一部分表面之间的电压，从而使电极的梳（50）和玻璃表面（58）的第一部分表面之间的距离被减小; 阳极和玻璃表面（58）上的电极的梳（50）的第一部分表面的硬焊。此外，本发明提供了一种用于微机械部件的制造方法和微机械部件涉及。

8. 发明申请

WO2009127275A3 ELECTRODE COMB, MICROMECHANICAL COMPONENT, AND METHODS FOR THE PRODUCTION OF AN ELECTRODE COMB AND A MICROMECHANICAL COMPONENT 审中-公开
标题翻译：电极的梳，微机械结构和方法的电极的梳和微机械部件
公开(公告)号：WO2009127275A3
公开(公告)日：2010-04-29
申请号：PCT/EP2008067690
申请日：2008-12-17
申请人： BOSCH GMBH ROBERT , PIRK TJALF , PINTER STEFAN , KRUEGER MICHAEL , MUCHOW JOERG , FRITZ JOACHIM , FRIESE CHRISTOPH
发明人： PIRK TJALF , PINTER STEFAN , KRUEGER MICHAEL , MUCHOW JOERG , FRITZ JOACHIM , FRIESE CHRISTOPH
IPC分类号： B81B3/00
CPC分类号： B81B3/004 , B81B2201/033 , B81B2201/045 , B81B2203/0136 , G02B26/0841 , H02N1/008
摘要： The invention relates to an electrode comb (52, 54) for a micromechanical component. Said electrode comb (52, 54) is designed such that at least two electrode fingers (52a, 54a) are mounted on a first fastening part (52b, 54b) at a first end while being mounted on a second fastening part (52b, 54b) at a second end lying opposite the first end. The invention additionally relates to a micromechanical component comprising a stator electrode comb (54) and an actuator electrode comb (52) between which a voltage (U) can be applied such that the actuator electrode comb (54) can be rotated about an axis of rotation (56) of the actuator electrode comb (52). The axis of rotation (56) of the actuator electrode comb (52) vertically penetrates at least one surface of an electrode finger (54a) of the stator electrode comb (44, 54). The invention further relates to a method for producing an electrode comb (52, 54) and a method for producing a micromechanical component.
摘要翻译：本发明涉及一种如此形成，使得至少两个电极指（52A，54A）在其第一端的第一附接部（52B，54B）被固定且相对的第一端部用于微机械部件的电极梳（52,54）第二端连接到第二附接部分（52B，54B）附连。此外，本发明涉及一种具有定子电极的梳（54）和致动器的电极的梳（52），在它们之间的电压（U）可应用于微机械部件，其特征在于，由（定子电极的梳54之间施加的电压（U））和致动器的电极的梳（52），致动器的电极的梳（52）（围绕致动器的电极的梳（52的旋转轴线56））是可旋转的，并且其中所述致动器的电极的梳（52）的至少一个表面的旋转（56）的轴线定子电极的梳（44,54）的电极指（54A）垂直地刺穿。此外，本发明涉及一种用于电极的梳（52,54）和用于微机械部件的制造方法的制造方法。

9. 发明申请

WO2009086977A2 MICROMIRROR DEVICE AND METHOD FOR PRODUCING A MICROMIRROR DEVICE 审中-公开
标题翻译：微镜装置及方法微镜装置
公开(公告)号：WO2009086977A2
公开(公告)日：2009-07-16
申请号：PCT/EP2008065564
申请日：2008-11-14
申请人： BOSCH GMBH ROBERT , PIRK TJALF , PINTER STEFAN , FRIESE CHRISTOPH
发明人： PIRK TJALF , PINTER STEFAN , FRIESE CHRISTOPH
IPC分类号： B81B7/00
CPC分类号： G02B26/0841
摘要： The invention relates to a micromirror device, comprising a housing (10, 12), enclosing an inner volume (40), a mirror surface (28), arranged within the inner volume (40) and a light incidence window (14) arranged in a wall of the housing (10, 12), having a domed surface (42). The invention further relates to an optical device comprising a housing (10, 12), enclosing an inner volume (40), wherein an inner volume pressure (pI) exists in the inner volume (40), different from an external pressure (pA) in an external environment of the optical device and a pressure difference between the inner volume pressure (pI) and the external pressure (pA) is such that the light incidence window (14) is domed. The invention further relates to corresponding production methods for a micromirror device or an optical device.
摘要翻译：本发明涉及一种微镜装置，其包括壳体（10，12），其在所述内部（40）被布置包围的内部空间（40），至少一个反射镜板（28），和一个（在外壳10，12的壁）形成的光入射窗（14）具有弯曲表面（42）的。此外，本发明涉及一种包括一个壳体（10，12）具有内部（40），在内部空间中，所述（40）的存在的内部腔室压力（PI），其是光学装置围绕外叉开的外部压力（PA）的光学装置，且其中形成的内部压力（Pa）之间的压力差（PI）和外部压力，使得光入射窗（14）是弓形的。此外，微反射镜装置的本发明的相应的制造方法或光学器件涉及。

10. 发明申请

WO2010046155A3 ELECTROSTATIC DRIVE, MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING AN ELECTROSTATIC DRIVE AND A MICROMECHANICAL COMPONENT 审中-公开
标题翻译：静电驱动，微机械结构和方法用于静电驱动器和微机械部件
公开(公告)号：WO2010046155A3
公开(公告)日：2010-12-16
申请号：PCT/EP2009060881
申请日：2009-08-24
申请人： BOSCH GMBH ROBERT , PIRK TJALF , PINTER STEFAN , KRUEGER MICHAEL , MUCHOW JOERG , FRITZ JOACHIM , FRIESE CHRISTOPH
发明人： PIRK TJALF , PINTER STEFAN , KRUEGER MICHAEL , MUCHOW JOERG , FRITZ JOACHIM , FRIESE CHRISTOPH
IPC分类号： H02N1/00
CPC分类号： H02N1/006 , Y10T29/49002
摘要： The invention relates to an electrostatic drive having an interior frame (16), at least one intermediate frame (14) surrounding the interior frame, and an exterior frame (12) surrounding the interior frame (12) and the at least one intermediate frame (14), wherein two adjacent frames (12, 14, 16) of the interior, intermediate, and exterior frames (12, 14, 16) are connected to each other via a spring element (22, 24, 26), wherein the spring elements (22, 24, 26) through which two adjacent frames (12, 14, 16) of the interior, intermediate, and exterior frames (12, 14,16) are connected to each other are disposed such that the longitudinal directions of the spring elements (22, 24, 26) are positioned on a mutual spring longitudinal axis (28), and wherein electrode fingers are disposed on frame joists (12a,14a,16a) of the interior frame (16), of the at least one intermediate frame (14), and of the exterior frame (12), said joists being aligned directly parallel to the spring longitudinal axis (28). The invention further relates to a method for producing an electrostatic drive. The invention also relates to a micromechanical component (10) and to a method for producing a micromechanical component (10).
摘要翻译：本发明涉及一种具有内框架（16），至少一个围绕所述内框架中间框架（14）和所述内框架（12）和所述至少一个中间框架（14）围绕所述外框架（12），每两个相邻的帧（的静电驱动 12，14，16）（通过至少一个弹簧元件（22，24，26）内，中间和外框架12，14，16）被连接到彼此，其中所述弹簧元件（22，24,26），通过该内层，中间和外框架（12，14,16）中的每两个相邻的帧（12，14，16）连接在一起，被布置成使得所述弹簧元件（22，24，26）的一个共同的弹簧轴线的纵向方向（28）位于和直接平行于所述弹簧纵向轴线的内框架（16）的（28）框架梁（12A，14A，16A），所述至少一个中间框架（14）和所述外框架（12）的电极指排列。本发明还涉及一种静电驱动器的制造方法。此外，本发明提供了一种微机械部件（10）和用于微机械部件的制造方法（10）涉及。

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