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    • 1. 发明申请
    • MOTOR CONTROL DEVICE
    • 电机控制装置
    • US20120007540A1
    • 2012-01-12
    • US13257627
    • 2010-03-08
    • Akira TanabeYoshihiro MarushitaHidetoshi IkedaKei TeradaTetsuya TanabeMasahiko YoshidaMasanori Ozaki
    • Akira TanabeYoshihiro MarushitaHidetoshi IkedaKei TeradaTetsuya TanabeMasahiko YoshidaMasanori Ozaki
    • G05B5/01
    • H02P23/04
    • Provided is a motor control device which realizes automatic adjustment of control of a motor for driving a mechanical load through a simple operation. The motor control device includes: a follow-up control unit (6) for receiving detection information of a detector (3) to output a torque command signal and output a status of motor control of a motor (1) as a control status amount signal, when a command signal regarding the motor control to be output from an upper-level controller is absent; an oscillation detection unit (9) for receiving the control status amount signal and detecting oscillation of a control status amount to output an oscillation detection signal; and an automatic adjustment unit (10) for receiving the oscillation detection signal to monitor a control status of the motor (1) and adjust a control parameter of the follow-up control unit (6) only when abnormality is detected.
    • 提供一种电动机控制装置,其通过简单的操作实现用于驱动机械负载的电动机的控制的自动调节。 电动机控制装置包括:跟随控制单元(6),用于接收检测器(3)的检测信息,以输出转矩指令信号,并输出电动机(1)的电动机控制状态作为控制状态量信号 当从上级控制器输出关于电动机控制的命令信号时, 振荡检测单元(9),用于接收控制状态量信号并检测控制状态量的振荡以输出振荡检测信号; 以及仅在检测到异常时,接收振动检测信号以监视电动机(1)的控制状态并且调整跟随控制单元(6)的控制参数的自动调整单元(10)。
    • 2. 发明授权
    • Motor control device
    • 电机控制装置
    • US08736211B2
    • 2014-05-27
    • US13257627
    • 2010-03-08
    • Akira TanabeYoshihiro MarushitaHidetoshi IkedaKei TeradaTetsuya TanabeMasahiko YoshidaMasanori Ozaki
    • Akira TanabeYoshihiro MarushitaHidetoshi IkedaKei TeradaTetsuya TanabeMasahiko YoshidaMasanori Ozaki
    • H02P7/00
    • H02P23/04
    • Provided is a motor control device which realizes automatic adjustment of control of a motor for driving a mechanical load through a simple operation. The motor control device includes: a follow-up control unit (6) for receiving detection information of a detector (3) to output a torque command signal and output a status of motor control of a motor (1) as a control status amount signal, when a command signal regarding the motor control to be output from an upper-level controller is absent; an oscillation detection unit (9) for receiving the control status amount signal and detecting oscillation of a control status amount to output an oscillation detection signal; and an automatic adjustment unit (10) for receiving the oscillation detection signal to monitor a control status of the motor (1) and adjust a control parameter of the follow-up control unit (6) only when abnormality is detected.
    • 提供一种电动机控制装置,其通过简单的操作实现用于驱动机械负载的电动机的控制的自动调节。 电动机控制装置包括:跟随控制单元(6),用于接收检测器(3)的检测信息,以输出转矩指令信号,并输出电动机(1)的电动机控制状态作为控制状态量信号 当从上级控制器输出关于电动机控制的命令信号时, 振荡检测单元(9),用于接收控制状态量信号并检测控制状态量的振荡以输出振荡检测信号; 以及仅在检测到异常时,接收振动检测信号以监视电动机(1)的控制状态并且调整跟随控制单元(6)的控制参数的自动调整单元(10)。
    • 3. 发明授权
    • Motor control device
    • 电机控制装置
    • US08779712B2
    • 2014-07-15
    • US13695738
    • 2011-04-28
    • Akira TanabeHiroyuki SekiguchiHidetoshi Ikeda
    • Akira TanabeHiroyuki SekiguchiHidetoshi Ikeda
    • H02P7/00
    • H02P23/30
    • A motor control device including: a following control unit that calculates a pre-correction torque command based on a difference between an operation command signal for commanding an operation of a motor and a detection signal resulting from detecting an operation of the motor; an adder that outputs a post-correction torque command by adding the pre-correction torque command to a correction torque command; and an electric-current control unit that outputs a drive current driving the motor based on the post-correction torque command, wherein the motor control device executes control so that the detection signal matches the operation command signal, and further including: a reference-periodic-signal computation unit; an amplitude/phase estimation unit; and a correction-torque computation unit, so that the correction torque command is updated such that a difference between the correction torque command and the post-correction torque command becomes smaller.
    • 一种电动机控制装置,包括:跟随控制单元,其基于用于指示电动机的操作的操作命令信号与由检测到电动机的操作而产生的检测信号之间的差计算预校正转矩指令; 加法器,通过将预校正转矩指令与校正转矩指令相加来输出校正后转矩指令; 以及电流控制单元,其基于所述校正后转矩指令输出驱动所述电动机的驱动电流,其中所述电动机控制装置执行所述检测信号与所述运转指令信号一致的控制,并且还包括:基准周期 信号计算单元; 幅度/相位估计单元; 以及校正转矩计算单元,使得校正转矩指令被更新为使得校正转矩指令和校正后转矩指令之间的差变小。
    • 4. 发明申请
    • MOTOR CONTROL DEVICE
    • 电机控制装置
    • US20130057186A1
    • 2013-03-07
    • US13695738
    • 2011-04-28
    • Akira TanabeHiroyuki SekiguchiHidetoshi Ikeda
    • Akira TanabeHiroyuki SekiguchiHidetoshi Ikeda
    • H02P6/10
    • H02P23/30
    • A motor control device including: a following control unit that calculates a pre-correction torque command based on a difference between an operation command signal for commanding an operation of a motor and a detection signal resulting from detecting an operation of the motor; an adder that outputs a post-correction torque command by adding the pre-correction torque command to a correction torque command; and an electric-current control unit that outputs a drive current driving the motor based on the post-correction torque command, wherein the motor control device executes control so that the detection signal matches the operation command signal, and further including: a reference-periodic-signal computation unit; an amplitude/phase estimation unit; and a correction-torque computation unit, so that the correction torque command is updated such that a difference between the correction torque command and the post-correction torque command becomes smaller.
    • 一种电动机控制装置,包括:跟随控制单元,其基于用于指示电动机的操作的操作命令信号与由检测到电动机的操作而产生的检测信号之间的差计算预校正转矩指令; 加法器,通过将预校正转矩指令与校正转矩指令相加来输出校正后转矩指令; 以及电流控制单元,其基于所述校正后转矩指令输出驱动所述电动机的驱动电流,其中所述电动机控制装置执行所述检测信号与所述运转指令信号一致的控制,并且还包括:基准周期 信号计算单元; 幅度/相位估计单元; 以及校正转矩计算单元,使得校正转矩指令被更新为使得校正转矩指令和校正后转矩指令之间的差变小。
    • 5. 发明授权
    • Plasma processing method and plasma processing apparatus
    • 等离子体处理方法和等离子体处理装置
    • US08642478B2
    • 2014-02-04
    • US13214372
    • 2011-08-22
    • Yoshinobu OoyaAkira TanabeYoshinori Yasuta
    • Yoshinobu OoyaAkira TanabeYoshinori Yasuta
    • H01L21/302H01L21/461
    • H01J37/02H01J37/32091H01J37/32165H01J2237/3348
    • There is provided a plasma processing apparatus capable of optimizing a plasma process in response to various requirements of a micro processing by effectively controlling a RF bias function. In this plasma processing apparatus, a high frequency power RFH suitable for generating plasma of a capacitively coupling type is applied to an upper electrode 48 (or lower electrode 16) from a third high frequency power supply 66, and two high frequency powers RFL1 (0.8 MHz) and RFL2 (13 MHz) suitable for attracting ions are applied to the susceptor 16 from first and second high frequency power supplies 36 and 38, respectively, in order to control energy of ions incident onto a semiconductor wafer W from the plasma. A control unit 88 controls a total power and a power ratio of the first and second high frequency powers RFL1 and RFL2 depending on specifications, conditions or recipes of an etching process.
    • 提供了一种能够通过有效地控制RF偏置功能来响应于微处理的各种要求来优化等离子体处理的等离子体处理装置。 在该等离子体处理装置中,适用于产生电容耦合型等离子体的高频功率RFH从第三高频电源66施加到上电极48(或下电极16),并且将两个高频功率RFL1(0.8 MHz)和适合于吸引离子的RFL2(13MHz)分别从第一和第二高频电源36和38施加到基座16,以便控制从等离子体入射到半导体晶片W上的离子的能量。 控制单元88根据蚀刻处理的规格,条件或配方来控制第一和第二高频功率RFL1和RFL2的总功率和功率比。
    • 6. 发明授权
    • Evaluation device and circuit design method used for the same
    • 评估装置和电路设计方法相同
    • US07404157B2
    • 2008-07-22
    • US10540973
    • 2003-12-25
    • Akira Tanabe
    • Akira Tanabe
    • G06F17/50
    • G01R31/2621
    • There is provided an evaluation apparatus capable of measuring the I-V characteristic in the MOSFET AC operation with a high accuracy. There are also provided a circuit design method and a circuit design system used for the evaluation apparatus. In the evaluation apparatus (1), an AC input signal superimposing circuit (11) applies DC voltage to the MOSFET gate•source•drain•substrate and superimposes an AC input signal of very small voltage on the gate. An AC component measurement circuit (12) measures an AC component of the current flowing between the source and the drain at that time. A mutual conductance calculation circuit (13) compares the amplitude of the AC component of the current with the amplitude of the AC input signal and calculates, from this ratio, the mutual conductance in the frequency of the AC input signal of the MOSFET.
    • 提供了一种能够以高精度测量MOSFET交流运行中的I-V特性的评估装置。 还提供了用于评估装置的电路设计方法和电路设计系统。 在评价装置(1)中,交流输入信号叠加电路(11)向MOSFET栅极源极施加直流电压,并在栅极上叠加极小电压的交流输入信号。 交流分量测量电路(12)测量此时在源极和漏极之间流动的电流的交流分量。 电导计算电路(13)将电流的交流分量的振幅与交流输入信号的振幅进行比较,并从该比率计算出MOSFET的交流输入信号的频率的互导。
    • 7. 发明授权
    • Laser plumbing device, long member plumbing device and long member plumbing method
    • 激光管道装置,长件管道装置和长件管道方法
    • US06449856B1
    • 2002-09-17
    • US09353151
    • 1999-07-14
    • Yuuji MatsumotoTatsusei MinamiOsamu YodaAkira Tanabe
    • Yuuji MatsumotoTatsusei MinamiOsamu YodaAkira Tanabe
    • G01C910
    • G01C15/105Y10S33/21
    • A laser plumbing device including a laser beam emitting device; a supporting device for supporting the laser beam emitting device and allowing swinging movements of the laser beam emitting device in a first direction X1 and a second direction Y1; a two-direction drive device for swinging the laser beam emitting device in the first and second directions X1 and Y1; an inclination angle detecting device for detecting an inclination angle of the laser beam emitting direction with respect to the vertical direction; and a controller for controlling the position of the laser beam emitting device by the two-direction drive device so as to change the laser beam emitting direction toward the vertical direction based on the angle detected by the inclination angle detecting device. The long member plumbing device and method utilizing the laser plumbing device.
    • 一种激光管道装置,包括激光束发射装置; 支撑装置,用于支撑激光束发射装置并允许激光束发射装置在第一方向X1和第二方向Y1上摆动; 用于在第一和第二方向X1和Y1上摆动激光束发射装置的双向驱动装置; 用于检测激光束发射方向相对于垂直方向的倾斜角度的倾斜角度检测装置; 以及控制器,用于通过双向驱动装置控制激光束发射装置的位置,以便基于由倾斜角度检测装置检测的角度将激光束发射方向改变为垂直方向。 使用激光管道装置的长件管件装置和方法。