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1. 发明申请

WO2011035157A3 APPARATUS AND METHODS FOR FORMING ENERGY STORAGE AND PHOTOVOLTAIC DEVICES IN A LINEAR SYSTEM 审中-公开
标题翻译：用于在线性系统中形成能量存储和光伏器件的装置和方法
公开(公告)号：WO2011035157A3
公开(公告)日：2011-07-14
申请号：PCT/US2010049335
申请日：2010-09-17
申请人： APPLIED MATERIALS INC , PUSHPARAJ VICTOR L , NARWANKAR PRAVIN K , HAAS DIETER , THAKUR BIPIN , ARCOT MAHESH , GUJAR VIKAS , NALAMASU OMKARAM
发明人： PUSHPARAJ VICTOR L , NARWANKAR PRAVIN K , HAAS DIETER , THAKUR BIPIN , ARCOT MAHESH , GUJAR VIKAS , NALAMASU OMKARAM
IPC分类号： H01L31/042
CPC分类号： C23C16/545 , B82Y10/00 , B82Y40/00 , H01L31/035227 , H01L31/075 , H01L31/1876 , H01L31/206 , H01L51/0048 , H01L51/4213 , Y02E10/548 , Y02E10/549 , Y02P70/521
摘要： A method and apparatus are provided for formation of a composite material on a substrate. The composite material includes carbon nanotubes and/or nanofibers, and composite intrinsic and doped silicon structures. In one embodiment, the substrates are in the form of an elongated sheet or web of material, and the apparatus includes supply and take-up rolls to support the web prior to and after formation of the composite materials. The web is guided through various processing chambers to form the composite materials. In another embodiment, the large scale substrates comprise discrete substrates. The discrete substrates are supported on a conveyor system or, alternatively, are handled by robots that route the substrates through the processing chambers to form the composite materials on the substrates. The composite materials are useful in the formation of energy storage devices and/or photovoltaic devices.
摘要翻译：提供了用于在基底上形成复合材料的方法和设备。复合材料包括碳纳米管和/或纳米纤维，以及复合本征和掺杂硅结构。在一个实施方案中，基材为细长片材或网状材料的形式，并且该装置包括供应辊和卷取辊以在形成复合材料之前和之后支承网。纤维网被引导通过各种处理室以形成复合材料。在另一个实施方案中，大规模基材包含离散基材。离散的基板被支撑在传送系统上，或者由机器人处理，机器人将基板引导穿过处理室以在基板上形成复合材料。该复合材料可用于形成能量存储装置和/或光伏装置。

2. 发明申请

WO2011034751A2 HOT WIRE CHEMICAL VAPOR DEPOSITION (CVD) INLINE COATING TOOL 审中-公开
标题翻译：热线化学气相沉积（CVD）在线涂装工具
公开(公告)号：WO2011034751A2
公开(公告)日：2011-03-24
申请号：PCT/US2010047972
申请日：2010-09-07
申请人： APPLIED MATERIALS INC , HAAS DIETER , NARWANKAR PRAVIN K , THAKUR RANDHIR P S
发明人： HAAS DIETER , NARWANKAR PRAVIN K , THAKUR RANDHIR P S
IPC分类号： H01L21/205 , C23C16/54
CPC分类号： C23C16/24 , C23C16/54 , H01L21/02532 , H01L21/0262
摘要： Methods and apparatus for hot wire chemical vapor deposition (HWCVD) are provided herein. In some embodiments, an inline HWCVD tool may include a linear conveyor for moving a substrate through the linear process tool; and a multiplicity of HWCVD sources, the multiplicity of HWCVD sources being positioned parallel to and spaced apart from the linear conveyor and configured to deposit material on the surface of the substrate as the substrate moves along the linear conveyor; wherein the substrate is coated by the multiplicity of HWCVD sources without breaking vacuum. In some embodiments, methods of coating substrates may include depositing a first material from an HWCVD source on a substrate moving through a first deposition chamber; moving the substrate from the first deposition chamber to a second deposition chamber; and depositing a second material from a second HWCVD source on the substrate moving through the second deposition chamber.
摘要翻译：本文提供了热线化学气相沉积（HWCVD）的方法和装置。在一些实施例中，在线HWCVD工具可以包括用于通过线性处理工具移动衬底的线性输送机; 和多个HWCVD源，多个HWCVD源被定位成与线性传送器平行并与其间隔开，并且被配置为当衬底沿着线性传送器移动时将材料沉积在衬底的表面上; 其中所述衬底被多个HWCVD源涂覆而不破坏真空。在一些实施例中，涂覆基底的方法可以包括在移动通过第一沉积室的基底上沉积来自HWCVD源的第一材料; 将衬底从第一沉积室移动到第二沉积室; 以及将第二材料从第二HWCVD源沉积在移动通过第二沉积室的衬底上。

3. 发明申请

WO2012170363A3 METHODS OF AND HYBRID FACTORIES FOR THIN-FILM BATTERY MANUFACTURING 审中-公开
标题翻译：薄膜电池制造和混合工艺方法
公开(公告)号：WO2012170363A3
公开(公告)日：2013-04-04
申请号：PCT/US2012040798
申请日：2012-06-04
申请人： APPLIED MATERIALS INC , KWAK BYUNG-SUNG , BANGERT STEFAN , HAAS DIETER , NALAMASU OMKARAM
发明人： KWAK BYUNG-SUNG , BANGERT STEFAN , HAAS DIETER , NALAMASU OMKARAM
IPC分类号： H01M10/04 , H01M6/40 , H01M10/0585
CPC分类号： H01M10/0436 , H01M4/0423 , H01M4/0426 , H01M4/134 , H01M4/1395 , H01M4/382 , H01M6/188 , H01M6/40 , H01M6/50 , H01M10/0404 , H01M10/052 , Y02E60/122 , Y02P70/54
摘要： Methods of and hybrid factories for thin-film battery manufacturing are described. A method includes operations for fabricating a thin-film battery. A hybrid factory includes one or more tool sets for fabricating a thin-film battery. In an example, a hybrid factory layout for lithium-based thin-film battery manufacturing includes a process tool for depositing active layers. The process tool includes a cluster tool for deposition of an active layer. The hybrid factory layout also includes an in-line tool for deposition of an active layer and a lithium evaporation tool having one or more gloveboxes coupling the lithium evaporation tool to the cluster tool and to the in-line tool.
摘要翻译：描述了薄膜电池制造的方法和混合工厂。一种方法包括制造薄膜电池的操作。混合工厂包括一个或多个用于制造薄膜电池的工具组。在一个示例中，用于锂基薄膜电池制造的混合工厂布局包括用于沉积活性层的处理工具。该工艺工具包括用于沉积有源层的簇工具。混合工厂布局还包括用于沉积活性层的在线工具和具有将锂蒸发工具耦合到簇工具和直列工具的一个或多个手套箱的锂蒸发工具。

4. 发明申请

WO2011037868A3 METHODS OF AND FACTORIES FOR THIN-FILM BATTERY MANUFACTURING 审中-公开
标题翻译：薄膜电池制造方法和工厂
公开(公告)号：WO2011037868A3
公开(公告)日：2011-07-21
申请号：PCT/US2010049536
申请日：2010-09-20
申请人： APPLIED MATERIALS INC , KWAK BYUNG-SUNG , BANGERT STEFAN , HAAS DIETER , NALAMASU OMKARAM
发明人： KWAK BYUNG-SUNG , BANGERT STEFAN , HAAS DIETER , NALAMASU OMKARAM
IPC分类号： H01M10/04 , H01M10/0525
CPC分类号： H01M10/0404 , H01M4/621 , H01M6/40 , H01M10/052 , H01M10/0585 , Y02E60/122 , Y02P70/54 , Y10T29/52
摘要： Methods of and factories for thin-film battery manufacturing are described. A method includes operations for fabricating a thin-film battery. A factory includes one or more tool sets for fabricating a thin-film battery.
摘要翻译：描述了用于薄膜电池制造的方法和工厂。一种方法包括用于制造薄膜电池的操作。工厂包括一个或多个用于制造薄膜电池的工具组。

5. 发明申请

WO2010068525A3 LAMINATED ELECTRICALLY TINTABLE WINDOWS 审中-公开
标题翻译：层压电动的WINDOWS
公开(公告)号：WO2010068525A3
公开(公告)日：2010-08-19
申请号：PCT/US2009066255
申请日：2009-12-01
申请人： APPLIED MATERIALS INC , KWAK BYUNG-SUNG LEO , HAAS DIETER , BANGERT STEFAN , KRISHNA NETY M , HOFFMANN WINFRIED
发明人： KWAK BYUNG-SUNG LEO , HAAS DIETER , BANGERT STEFAN , KRISHNA NETY M , HOFFMANN WINFRIED
IPC分类号： C03C17/00 , B32B17/00 , C03C27/00
CPC分类号： B32B17/10981 , B32B17/10045 , B32B17/10055 , B32B17/10513 , B32B17/10761 , B32B17/10788 , E06B3/6722 , E06B9/24 , E06B2009/2464 , G02F1/1533 , Y10S359/90 , Y10T156/1075 , Y10T156/12
摘要： A method of manufacturing electrically tintable window glass with a variety of sizes and functionalities is described. The method comprises: (a) providing a large format glass substrate; (b) fabricating a plurality of electrically tintable thin film devices on the large format glass substrate; (c) cutting the large format glass substrate into a plurality of electrically tintable pieces, each electrically tintable piece including one of the plurality of electrically tintable thin film devices; (d) providing a plurality of window glass pieces; (e) matching each one of the plurality of electrically tintable pieces with a corresponding one of the plurality of window glass pieces; and (f) laminating each of the matched electrically tintable pieces and window glass pieces. The lamination may result in the electrically tintable device either being sandwiched between the glass substrate and the window glass piece or on the surface of the laminated pieces. The electrically tintable device is an electrochromic device.
摘要翻译：描述了一种制造具有各种尺寸和功能的电镀锡窗玻璃的方法。该方法包括：（a）提供大尺寸玻璃基板; （b）在所述大尺寸玻璃基板上制造多个可电镀锡的薄膜器件; （c）将大尺寸玻璃基板切割成多个可电镀的片，每个可电镀的片包括多个可电镀薄膜器件中的一个; （d）提供多个窗玻璃片; （e）将所述多个可电镀件中的每一个与所述多个窗玻璃件中的对应的一个相匹配; 和（f）层压每个匹配的可电镀部分和窗玻璃部件。层压可能导致可电着色装置夹在玻璃基板和窗玻璃片之间或层压片的表面上。电镀装置是电致变色装置。

6. 发明申请

WO2015086168A8 A PROCESSING APPARATUS FOR PROCESSING DEVICES, PARTICULARLY DEVICES INCLUDING ORGANIC MATERIALS THEREIN, AND METHOD FOR TRANSFERRING AN EVAPORATION SOURCE FROM A PROCESSING VACUUM CHAMBER TO A MAINTENANCE VACUUM CHAMBER OR FROM THE MAINTENANCE VACUUM CHAMBER TO THE PROCESSING VACUUM CHAMBER 审中-公开
标题翻译：用于处理装置的处理装置，包括其有机材料的特定装置，以及将蒸发源从处理真空室传送到维护真空室或从维护真空室转移到加工真空室的方法
公开(公告)号：WO2015086168A8
公开(公告)日：2016-06-09
申请号：PCT/EP2014067673
申请日：2014-08-19
申请人： APPLIED MATERIALS INC , DIEGUEZ-CAMPO JOSE MANUEL , BANGERT STEFAN , SCHÜSSLER UWE , HAAS DIETER
发明人： DIEGUEZ-CAMPO JOSE MANUEL , BANGERT STEFAN , SCHÜSSLER UWE , HAAS DIETER
IPC分类号： C23C14/04 , B05D1/00 , B05D1/02 , B05D3/04 , C23C14/12 , C23C14/24 , C23C14/56 , C23C16/44 , H01L51/00 , H01L51/56
CPC分类号： C23C14/243 , C23C14/042 , C23C14/12 , C23C14/246 , C23C14/50 , C23C14/56 , C23C14/562 , C23C14/564 , C23C14/566 , H01L51/001 , H01L51/0011 , H01L51/56
摘要： A processing apparatus for processing devices, particularly devices including organic materials therein, is described. The processing apparatus includes a processing vacuum chamber; at least one evaporation source for organic material, wherein the at least one evaporation source includes at least one evaporation crucible, wherein the at least one evaporation crucible is configured to evaporate the organic material, and at least one distribution pipe with one or more outlets, wherein the at least one distribution pipe is in fluid communication with the at least one evaporation crucible; and a maintenance vacuum chamber connected with the processing vacuum chamber, wherein the at least one evaporation source can be transferred from the processing vacuum chamber to the maintenance vacuum chamber and from the maintenance vacuum chamber to the processing vacuum chamber.
摘要翻译：描述了用于处理装置的处理装置，特别是包括其中的有机材料的装置。处理装置包括处理真空室; 用于有机材料的至少一个蒸发源，其中所述至少一个蒸发源包括至少一个蒸发坩埚，其中所述至少一个蒸发坩埚被配置为蒸发所述有机材料，以及至少一个具有一个或多个出口的分配管，其中所述至少一个分配管与所述至少一个蒸发坩埚流体连通; 以及与所述处理真空室连接的维护真空室，其中所述至少一个蒸发源可以从所述处理真空室转移到所述维护真空室，并且从所述维护真空室转移到所述处理真空室。

7. 发明申请

WO2012145205A3 HOT WIRE ATOMIC LAYER DEPOSITION APPARATUS AND METHODS OF USE 审中-公开
标题翻译：热线原子层沉积装置及其使用方法
公开(公告)号：WO2012145205A3
公开(公告)日：2013-01-24
申请号：PCT/US2012033029
申请日：2012-04-11
申请人： APPLIED MATERIALS INC , YUDOVSKY JOSEPH , KWONG GARRY K , HAAS DIETER , MARCUS STEVEN D , WEIDMAN TIMOTHY W
发明人： YUDOVSKY JOSEPH , KWONG GARRY K , HAAS DIETER , MARCUS STEVEN D , WEIDMAN TIMOTHY W
IPC分类号： H01L21/205
CPC分类号： C23C16/45551 , C23C16/452 , C23C16/45544
摘要： Provided are gas distribution plates for atomic layer deposition apparatus including a hot wire or hot wire unit which can be heated to excite gaseous species while processing a substrate. Methods of processing substrates using a hot wire to excite gaseous precursor species are also described.
摘要翻译：提供了用于原子层沉积设备的气体分配板，其包括热线或热丝单元，其可以在加工基板的同时被加热以激发气态物质。还描述了使用热丝处理衬底以激发气态前体物质的方法。

8. 发明申请

WO2012109113A3 METHOD FOR ENCAPSULATING AN ORGANIC LIGHT EMITTING DIODE 审中-公开
标题翻译：用于封装有机发光二极管的方法
公开(公告)号：WO2012109113A3
公开(公告)日：2012-11-29
申请号：PCT/US2012023853
申请日：2012-02-03
申请人： APPLIED MATERIALS INC , HAAS DIETER , WHITE JOHN M , KWAK BYUNG-SUNG LEO , CHOI SOO YOUNG , CHEN JRJYAN JERRY , DIEGUEZ-CAMPO JOSE MANUEL
发明人： HAAS DIETER , WHITE JOHN M , KWAK BYUNG-SUNG LEO , CHOI SOO YOUNG , CHEN JRJYAN JERRY , DIEGUEZ-CAMPO JOSE MANUEL
IPC分类号： H01L51/50 , H01L51/56 , H05B33/04
CPC分类号： H01L51/0014 , H01L51/5253
摘要： Methods for encapsulating OLED structures disposed on a substrate using a soft/polymer mask technique are provided. The soft/polymer mask technique can efficiently provide a simple and low cost OLED encapsulation method, as compared to convention hard mask patterning techniques. The soft/polymer mask technique can utilize a single polymer mask to complete the entire encapsulation process with low cost and without alignment issues present when using conventional metal masks. Rather than utilizing a soft/polymer mask, the encapsulation layers may be blanked deposited and then laser ablated such that no masks are utilized during the encapsulation process.
摘要翻译：提供了使用软/聚合物掩模技术封装设置在基板上的OLED结构的方法。与常规硬掩模图案化技术相比，软/聚合物掩模技术可以有效地提供简单且低成本的OLED封装方法。软/聚合物掩模技术可以利用单一聚合物掩模以低成本完成整个封装工艺，并且在使用常规金属掩模时不存在对准问题。不是使用软/聚合物掩模，而是可以将封装层消隐沉积，然后激光烧蚀，使得在封装过程中不使用掩模。

9. 发明专利

JP2017115246A 有機材料用の蒸発源、有機材料用の蒸発源を有する真空チャンバにおいて有機材料を堆積するための堆積装置、及び有機材料を蒸発させるための方法有权
公开(公告)号：JP2017115246A
公开(公告)日：2017-06-29
申请号：JP2017002003
申请日：2017-01-10
申请人：アプライドマテリアルズインコーポレイテッドApplied Materials,Incorporated , Applied Materials Inc , アプライドマテリアルズインコーポレイテッドApplied Materials,Incorporated
发明人： STEFAN BANGERT , UWE SCHUESLER , JOSE MANUEL DIEGUEZ-CAMPO , HAAS DIETER
IPC分类号： C23C14/24 , H01L51/50 , H05B33/10
摘要：【課題】有機材料用の改良された蒸発源、有機材料を蒸発させるための堆積装置、及び有機材料を蒸発させる方法の提供。【解決手段】有機材料を蒸発させるように構成された蒸発るつぼ104と、蒸発るつぼ104と流体連通しており、蒸発中に軸周囲を回転可能である、一又は複数の排出口を有する分配管106と、有機材料を遮蔽するための少なくとも1つのサイドシールド202とを備える蒸発源100、及び真空チャンバ110の中で有機材料を蒸発させる蒸発源100、真空チャンバ110の中に配置され、少なくとも2つのトラック220を有する基板支持体システムであって、基板支持体システムの少なくとも2つのトラック220が、基板121又は真空チャンバ110の中で基板121を運ぶキャリアの本質的に垂直な支持のために構成されている、基板支持体システムとを備える堆積装置200、及び方法。【選択図】図2

10. 发明专利

JP2008291361A Substrate support, substrate processing device and method of placing substrate 有权
标题翻译：基板支撑，基板处理装置和放置基板的方法
公开(公告)号：JP2008291361A
公开(公告)日：2008-12-04
申请号：JP2008116237
申请日：2008-04-25
申请人： Applied Materials Inc , アプライドマテリアルズインコーポレイテッドApplied Materials,Incorporated
发明人： HAAS DIETER , BERGER THOMAS , LAU SIMON
IPC分类号： C23C14/50 , C23C16/458 , H01L21/205 , H01L21/31
CPC分类号： H01L21/68714 , H01L21/68 , Y10T29/49998
摘要： PROBLEM TO BE SOLVED: To provide a substrate support for supporting a substrate to be processed in a vacuum processing chamber. SOLUTION: The substrate support comprises: frames 2c, 2d for carrying the substrate 14; and at least a first fastening means fixedly attached to the frames for aligning the substrate 14 relative to the frames by attaching the substrate 14 to the first fastening means. The substrate support further comprises at least second fastening means 12, 13 movably attached to the frames, the second fastening means 12, 13 being movable relative to the frames and/or movable relative to the substrate 14 attached to the first fastening means in a direction at least towards and/or away from an edge 14' of the substrate 14 attached to the first fastening means. Furthermore, a coating chamber comprises an edge exclusion projecting over portion of the surface of the stored substrate in order to prevent processing of a portion of the substrate surface. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供用于在真空处理室中支撑待处理的基板的基板支撑件。解决方案：基板支撑件包括：用于承载基板14的框架2c，2d; 以及至少第一紧固装置，其固定地附接到框架，用于通过将基板14附接到第一紧固装置来相对于框架对准基板14。基板支撑件还包括至少可移动地附接到框架的第二紧固装置12,13，第二紧固装置12,13可相对于框架移动和/或可相对于在第一紧固装置上的方向至少朝向和/或远离附接到第一紧固装置的基板14的边缘14'。此外，涂覆室包括突出在存储的基板的表面的一部分上的边缘排除，以防止基板表面的一部分的处理。版权所有（C）2009，JPO＆INPIT

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