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    • 6. 发明授权
    • Device for etching the backside of wafer
    • 用于蚀刻晶片背面的装置
    • US06533892B2
    • 2003-03-18
    • US09921403
    • 2001-08-02
    • Yung-Ho RyuHyung-Hee NamHo-Phil Jung
    • Yung-Ho RyuHyung-Hee NamHo-Phil Jung
    • B08B300
    • H01L21/67086
    • A device for etching the backside of a wafer is disclosed. The etching device directly feeds an etchant to a target wafer without using any medium, such as a conventional absorption fabric, thus uniformly etching the backside of the wafer, and prevents the wafer from coming into contact with the etchant during the removal of the wafer from the device, thus almost completely protecting the wafer from any damage. This etching device consists of a cylindrical housing having a conical bottom wall and an annular etching dam seated in the housing while forming an etchant collecting chamber and an etching bat An etchant supply unit is provided on the conical bottom wall of the housing. At least one first etchant discharging part communicates the etching bath with the collecting chamber, while at least one second etchant discharging part communicates the etchant collecting chamber with the outside. A target wafer is seated on the upper portion of the etching dam, and is etched at its backside by the etchant fed from the etchant supply unit into the etching bath The present invention also provides an etching system, having an etchant storage tank, a pump, and a flow controller, in addition to the etching device.
    • 公开了一种用于蚀刻晶片背面的装置。 蚀刻装置直接将蚀刻剂馈送到目标晶片,而不使用诸如常规吸收织物的任何介质,因此均匀地蚀刻晶片的背面,并且防止晶片从晶片脱离期间与蚀刻剂接触 该装置,因此几乎完全保护晶片免受任何损害。 该蚀刻装置由具有锥形底壁的圆柱形壳体和安置在壳体中的环形蚀刻坝组成,同时形成蚀刻剂收集室和蚀刻棒。蚀刻剂供应单元设置在壳体的圆锥形底壁上。 至少一个第一蚀刻剂排出部分将蚀刻槽与收集室连通,而至少一个第二蚀刻剂排出部分将腐蚀剂收集室与外部连通。 目标晶片位于蚀刻坝的上部,并且在其背面被蚀刻剂从蚀刻剂供应单元进料到蚀刻槽中进行蚀刻。本发明还提供一种蚀刻系统,其具有蚀刻剂储存罐,泵 ,以及除了蚀刻装置之外的流量控制器。
    • 10. 发明授权
    • Method for manufacturing vertical structure light emitting diode
    • 垂直结构发光二极管的制造方法
    • US07442565B2
    • 2008-10-28
    • US11522407
    • 2006-09-18
    • Yung Ho RyuHae Youn Hwang
    • Yung Ho RyuHae Youn Hwang
    • H01L21/00
    • H01L33/0079H01L33/62H01L33/64H01L2924/0002H01L2933/0075H01L2924/00
    • A method for manufacturing a vertical light emitting diode of the invention allows an easier process of individually separating chips. A light emitting structure is formed on a growth substrate having a plurality of device areas and at least one device isolation area. The light emitting structure has an n-type clad layer, an active layer and a p-type clad layer sequentially formed therein. Corresponding p-type electrodes are formed on the light emitting structure on the device areas. A glass substrate having through holes perforated therein is provided on the p-electrodes so that the through holes are disposed corresponding to the p-electrodes. Also, the through holes are plated with a metal material to form patterns of a plating layer on the p-electrodes. Then, the growth substrate is removed to form n-electrodes on the n-type clad layer. The glass substrate is removed via etching.
    • 本发明的垂直发光二极管的制造方法能够容易地分离芯片。 在具有多个器件区域和至少一个器件隔离区域的生长衬底上形成发光结构。 发光结构具有依次形成的n型覆盖层,有源层和p型覆盖层。 相应的p型电极形成在器件区域上的发光结构上。 在p电极上设置有在其上穿孔的玻璃基板,使得贯通孔对应于p电极。 此外,通孔用金属材料镀覆以在p电极上形成电镀层的图案。 然后,去除生长衬底以在n型覆盖层上形成n电极。 通过蚀刻去除玻璃基板。