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1. 发明授权

US09529353B2 Methods for limiting counter-mass trim-motor force and stage assemblies incorporating same 有权
标题翻译：限制反质量调节马达力的方法和包含相同质量的马达的阶段组件
公开(公告)号：US09529353B2
公开(公告)日：2016-12-27
申请号：US13228341
申请日：2011-09-08
申请人： Pai-Hsueh Yang , Michael B. Binnard , Scott Coakley
发明人： Pai-Hsueh Yang , Michael B. Binnard , Scott Coakley
IPC分类号： G03B27/58 , G03B27/62 , G05B19/404 , G03F7/20
CPC分类号： G05B19/404 , G03F7/70725 , G03F7/70766
摘要： An exemplary stage assembly has movable stage mass and counter-mass. A stage motor is coupled to the stage mass and counter-mass such that stage-mass motion imparted by the stage motor causes a reactive motion of the counter-mass counter to the motion of the stage mass. At least one trim-motor is coupled to the counter-mass. A control system commands the trim-motor to regulate movement of the counter-mass in reaction to stage-mass motion. A PI feedback controller receives the following-error of the counter-mass and generates corresponding center-of-gravity (CG) force commands and trim-motor force commands to the trim-motor(s) to produce corrective counter-mass motion. A trim-motor force limiter receives trim-motor force commands and produces corresponding limited trim-motor force commands that are fed back as actual CG force commands to the feedback controller to modify integral terms of the feedback controller according to the limited trim-motor force commands.
摘要翻译：示例性的舞台组件具有可移动的舞台质量和反质量。舞台电机被耦合到舞台质量和反质量，使得由舞台电动机施加的舞台质量运动导致反质量计数器对舞台质量的运动的反作用运动。至少一个调整电机与反质量联接。控制系统命令微调电机调节反质量运动反应阶段质量运动。 PI反馈控制器接收反质量的跟随误差，并产生相应的重心（CG）力指令和微调电机力指令给微调电机，以产生校正反质量运动。修剪马达力限制器接收修剪马达力指令并产生相应的有限的修剪马达力命令，作为实际的CG力命令反馈到反馈控制器，以根据限制的修正马达力修改反馈控制器的积分项命令。

2. 发明授权

US08853988B2 Control systems and methods for compensating for effects of a stage motor 有权
标题翻译：用于补偿平台电机的影响的控制系统和方法
公开(公告)号：US08853988B2
公开(公告)日：2014-10-07
申请号：US12406322
申请日：2009-03-18
申请人： Michael B. Binnard , Scott Coakley , Douglas C. Watson , Pai-Hsueh Yang
发明人： Michael B. Binnard , Scott Coakley , Douglas C. Watson , Pai-Hsueh Yang
IPC分类号： G05B1/06 , G05B19/404 , G03F7/20
CPC分类号： G05B19/404 , G03F7/70725 , G03F7/70758 , G05B2219/41128 , G05B2219/41443
摘要： Embodiments of the invention compensate for one or more effects of a stage motor in a precision stage device. A feedforward module receives an input signal corresponding to the effect of the motor and generates a feedforward control signal that can be used to modify a motor control signal to compensate for the effect of the motor. In some embodiments, a control system is provided to compensate for a back-electromotive force generated by a motor, while in other embodiments, a control system may compensate for an inductive effect of a motor. Embodiments of the invention may be useful in precision stage devices, for example, lithography devices such as steppers and scanners.
摘要翻译：本发明的实施例补偿了精密级装置中的级电动机的一个或多个效果。前馈模块接收与电动机的效果相对应的输入信号，并产生可用于修改电动机控制信号以补偿电动机的影响的前馈控制信号。在一些实施例中，提供控制系统以补偿由电动机产生的反电动势，而在其他实施例中，控制系统可以补偿电动机的感应效应。本发明的实施例可用于精密平台装置，例如平版印刷装置，例如步进器和扫描器。

3. 发明授权

US08582080B2 Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage 有权
标题翻译：具有测量系统初始化，振动补偿，低传输性和轻质细阶段的舞台装配
公开(公告)号：US08582080B2
公开(公告)日：2013-11-12
申请号：US12178240
申请日：2008-07-23
申请人： Michael Binnard , Wen-Hou Ma , Toshio Ueta , Pai-Hsueh Yang , Ting-Chien Teng , Bausan Yuan
发明人： Michael Binnard , Wen-Hou Ma , Toshio Ueta , Pai-Hsueh Yang , Ting-Chien Teng , Bausan Yuan
IPC分类号： G03B27/42
CPC分类号： G03F7/70775 , G03F7/70716 , G03F7/709
摘要： A stage assembly (220) that moves a work piece (200) about a first axis and along a first axis includes a first stage (238), a second stage (240) that retains the work piece (200), a second mover assembly (244), a measurement system, and an initialization system (1081A). The second mover assembly (244) moves the second stage (240) relative to the first stage (238) about the first axis. The measurement system (22) monitors the position of the second stage (240) about the first axis when the second stage (240) is positioned within a working range about the first axis. The initialization system (1081A) facilitates movement of the second stage (240) about the first axis when the second stage (240) is rotated about the first axis outside the working range. The second mover assembly (244) can include a mover (255) and a dampener (410) that reduces the transmission of vibration from the first stage (238) to the second stage (240). In addition, the stage assembly (220) can include a control system (24) that directs power to the mover (255) to position the second stage (240) and to compensate for vibration of the first stage (238).
摘要翻译：围绕第一轴线并沿着第一轴线移动工件（200）的平台组件（220）包括：第一阶段（238）;保持工件（200）的第二阶段（240）;第二推动组件（244），测量系统和初始化系统（1081A）。第二移动器组件（244）围绕第一轴线相对于第一阶段（238）移动第二阶段（240）。当第二级（240）位于围绕第一轴的工作范围内时，测量系统（22）监测第二级（240）围绕第一轴的位置。当第二级（240）围绕工作范围外的第一轴线旋转时，初始化系统（1081A）有助于第二级（240）围绕第一轴的移动。第二移动器组件（244）可以包括减小从第一级（238）到第二级（240）的振动传递的移动器（255）和阻尼器（410）。另外，台架组件（220）可以包括控制系统（24），该控制系统（24）将电力引导到动子（255）以定位第二级（240）并补偿第一级（238）的振动。

4. 发明申请

US20120328836A1 Method and Apparatus to Allow a Plurality of Stages to Operate in Close Proximity 有权
标题翻译：允许多个阶段以近距离操作的方法和装置
公开(公告)号：US20120328836A1
公开(公告)日：2012-12-27
申请号：US13526994
申请日：2012-06-19
申请人： Michael B. Binnad , Pai-Hsueh Yang
发明人： Michael B. Binnad , Pai-Hsueh Yang
IPC分类号： H02K41/03 , G03B27/58 , B32B3/30 , G03F7/20
CPC分类号： G03F7/70758 , H02K3/47 , H02K41/031 , H02K2201/18 , Y10T428/24479
摘要： According to one aspect of the present invention, a stage apparatus includes a first stage, a first magnet arrangement, and a stator arrangement that includes a first coil having a first width. The first magnet arrangement is associated with the first stage, and includes a first quadrant and a second quadrant or, more generally, a first sub-array and a second sub-array. The first quadrant has at least one first magnet arranged parallel to a first axis, and the second quadrant has at least one second magnet arranged parallel to a second axis. The first quadrant is adjacent to the second quadrant relative to the first axis, and is spaced apart from the second quadrant by a distance relative to the second axis. The stator arrangement is configured to cooperate with the first magnet arrangement to drive the first stage
摘要翻译：根据本发明的一个方面，一种舞台装置包括第一舞台，第一磁铁装置以及包括具有第一宽度的第一线圈的定子装置。第一磁体布置与第一阶段相关联，并且包括第一象限和第二象限，或更一般地，第一子阵列和第二子阵列。第一象限具有平行于第一轴布置的至少一个第一磁体，而第二象限具有平行于第二轴布置的至少一个第二磁体。第一象限相对于第一轴相邻于第二象限，并且与第二象限相隔相对于第二轴的距离。定子装置构造成与第一磁体装置配合以驱动第一级

5. 发明申请

US20120319637A1 Synchronization control devices and methods 审中-公开
标题翻译：同步控制装置和方法
公开(公告)号：US20120319637A1
公开(公告)日：2012-12-20
申请号：US13317982
申请日：2011-10-31
申请人： Pai-Hsueh Yang , Kazuhiro Hirano , Masao Yuasa
发明人： Pai-Hsueh Yang , Kazuhiro Hirano , Masao Yuasa
IPC分类号： G05B13/02 , G05B11/32
CPC分类号： G05B11/32 , G05B2219/50234
摘要： Control systems are disclosed that control motion of a first movable body along a first trajectory in coordination with motion of a second movable body along a second trajectory. An exemplary system has first and second controllers. The first controller provides first driving commands to the first movable body. The second controller provides second driving commands to the second movable body. A first control loop associated with the first controller includes feedback to the first controller of position-error data regarding the first movable body. A second control loop associated with the second controller includes feedback to the second controller of position-error data regarding the second movable body. A synchronization target filter couples the first and second control loops and causes the first controller to move the first movable body in a manner that tracks the position-error data of the second movable body at one or more frequencies of interest.
摘要翻译：公开了控制系统，其与第二可移动体沿着第二轨迹的运动协调地控制第一可移动体沿着第一轨迹的运动。示例性系统具有第一和第二控制器。第一控制器向第一移动体提供第一驱动命令。第二控制器向第二移动体提供第二驱动命令。与第一控制器相关联的第一控制回路包括向第一控制器提供关于第一可移动体的位置误差数据的反馈。与第二控制器相关联的第二控制回路包括向第二控制器提供关于第二可移动体的位置误差数据的反馈。同步目标滤波器耦合第一和第二控制回路，并使得第一控制器以在感兴趣的一个或多个频率跟踪第二可移动体的位置误差数据的方式移动第一可移动体。

6. 发明授权

US06855032B1 Fine force control of actuators for chemical mechanical polishing apparatuses 有权
标题翻译：用于化学机械抛光装置的致动器的微细力控制
公开(公告)号：US06855032B1
公开(公告)日：2005-02-15
申请号：US10722090
申请日：2003-11-24
申请人： Pai-Hsueh Yang , Bausan Yuan
发明人： Pai-Hsueh Yang , Bausan Yuan
IPC分类号： B24B37/04 , B24B49/00
CPC分类号： B24B37/30
摘要： An actuator assembly (432) for positioning a pad (48) includes a first actuator assembly (440), a second actuator subassembly (442) and a control system (524). In one embodiment, the first actuator subassembly (440) includes a first core (502), and a conductor (504) secured to the first core (502), and the second actuator subassembly (442) includes a second core (506) spaced apart a component gap (444) from the first core (502). Further, the control system (524) directs current to the conductor (504) to attract the second core (506) to the first core (502). In one embodiment, the amount of current directed to the conductor (504) is calculated without measuring the component gap (444).
摘要翻译：用于定位垫（48）的致动器组件（432）包括第一致动器组件（440），第二致动器子组件（442）和控制系统（524）。在一个实施例中，第一致动器子组件（440）包括第一芯（502）和固定到第一芯（502）的导体（504），并且第二致动器子组件（442）包括间隔开的第二芯从第一芯（502）分离组件间隙（444）。此外，控制系统（524）将电流引导到导体（504）以将第二芯（506）吸引到第一芯（502）。在一个实施例中，在不测量部件间隙（444）的情况下，计算导向导体（504）的电流量。

7. 发明申请

US20080275661A1 On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stage 有权
标题翻译：用于识别和补偿由多个执行器在多轴平台上产生的力 - 波动和侧力的机上方法
公开(公告)号：US20080275661A1
公开(公告)日：2008-11-06
申请号：US11986314
申请日：2007-11-19
申请人： Pai-Hsueh Yang , Bausan Yuan , Kazuo Masaki , Kazuhiro Hirano , Xiao-Feng Yang , Scott Coakley , Michael B. Binnard
发明人： Pai-Hsueh Yang , Bausan Yuan , Kazuo Masaki , Kazuhiro Hirano , Xiao-Feng Yang , Scott Coakley , Michael B. Binnard
IPC分类号： G01L25/00
CPC分类号： G03F7/70758 , G03F7/70725
摘要： Methods, apparatus, and systems are disclosed for identifying force-ripple and/or side-forces in actuators used for moving a multiple-axis stage. The identified force-ripple and/or side-forces can be mapped, and maps of corresponding position-dependent compensation ratios useful for correcting same are obtained. The methods are especially useful for stages providing motion in at least one degree of freedom using multiple (redundant) actuators. In an exemplary method a stage member is displaced, using at least one selected actuator, multiple times over a set distance in the range of motion of the subject actuator(s). Each displacement has a predetermined trajectory and respective starting point in the range. For each displacement, respective section force-command(s) are extracted and normalized to a reference section force-command to define a section compensation-ratio. Multiple section compensation-ratios are assembled, as functions of displacement in the range, to provide a map of compensation ratios for the actuator(s) throughout the range.
摘要翻译：公开了用于识别用于移动多轴平台的致动器中的力波动和/或侧向力的方法，装置和系统。可以对所识别的力 - 纹波和/或侧向力进行映射，并且获得用于校正相应的位置相关的补偿比的映射。这些方法对于使用多个（冗余）致动器在至少一个自由度中提供运动的阶段特别有用。在示例性方法中，使用至少一个所选择的致动器，在主体致动器的运动范围内的设定距离上移动台架构件多次。每个位移具有预定的轨迹和该范围内的相应起始点。对于每个位移，提取相应的截面力命令并将其归一化为参考部分力命令以定义截面补偿比。组合多段补偿比作为该范围内的位移的函数，以提供在整个范围内的致动器的补偿比的图。

8. 发明授权

US09465305B2 Method for determining a commutation offset and for determining a compensation map for a stage 有权
标题翻译：用于确定换向偏移和用于确定载物台的补偿图的方法
公开(公告)号：US09465305B2
公开(公告)日：2016-10-11
申请号：US13101264
申请日：2011-05-05
申请人： Pai-Hsueh Yang , Scott Coakley , Michael B. Binnard , Kazuhiro Hirano , Bausan Yuan , Shiang-Lung Koo
发明人： Pai-Hsueh Yang , Scott Coakley , Michael B. Binnard , Kazuhiro Hirano , Bausan Yuan , Shiang-Lung Koo
IPC分类号： H02K41/00 , G03F7/20 , H02P6/00
CPC分类号： G03F7/70758 , G03F7/70516 , G03F7/70775 , H02P6/006
摘要： A method for determining a commutation offset for a mover (250A) of a mover assembly (220C) that moves and positions a stage (220A) relative to a stage base (220B) includes controlling the mover assembly (220C) in a closed loop fashion to maintain the position of the stage (220A) along a first axis and along a second axis with the stage (220A) levitated above the stage base (220B). The method also includes the steps of (i) directing current to a coil array (240) of the mover assembly (220C) so that the mover assembly (220C) imparts a disturbance on the stage (220A); and (ii) evaluating one or more forces generated by the mover assembly (220C) as a result of the disturbance on the stage (220A) created by the mover (250A). Further, a method for generating a compensation map (1402) includes sequentially directing a plurality of excitation signals to the control of the mover assembly (220C) and determining the control commands that result from the plurality of excitation signals.
摘要翻译：用于确定相对于台架（220B）移动和定位平台（220A）的移动器组件（220C）的移动器（250A）的换向偏移的方法包括以闭环方式控制所述动子组件（220C）以使台架（220A）沿着第一轴线并且沿着第二轴线保持台架（220A）的位置，台架（220A）悬浮在平台底座（220B）上方。该方法还包括以下步骤：（i）将电流引导到移动器组件（220C）的线圈阵列（240），使得移动器组件（220C）在平台（220A）上施加干扰; 以及（ii）评估由所述移动器组件（220C）产生的由所述移动器（250A）产生的所述平台（220A）上的干扰所产生的一个或多个力。此外，用于产生补偿图（1402）的方法包括将多个激励信号顺序地引导到移动器组件（220C）的控制，并且确定由多个激励信号产生的控制命令。

9. 发明授权

US08451431B2 Control systems and methods applying iterative feedback tuning for feed-forward and synchronization control of microlithography stages and the like 有权
标题翻译：控制系统和方法应用迭代反馈调谐用于微光刻阶段的前馈和同步控制等
公开(公告)号：US08451431B2
公开(公告)日：2013-05-28
申请号：US12657805
申请日：2010-01-27
申请人： Pai-Hsueh Yang , Shiang-Lung Koo
发明人： Pai-Hsueh Yang , Shiang-Lung Koo
IPC分类号： G03B27/58 , G03B27/62
CPC分类号： G03B27/58 , G03F7/70725
摘要： Stage assemblies and control methods are disclosed. An exemplary assembly includes a first stage and first and second controllers. The first controller feedback-controls the first stage according to a respective parameter vector. The second controller controls the first stage by feed-forward control, according to a respective parameter vector. The controllers perform iterative feedback tuning IFT, including minimization of a cost-function of the parameter vectors from the first and second controllers. The second controller receives data including first-stage trajectory, and the first controller receives data including first-stage following-error. A suitable application of the assembly is in a microlithography system or other high-precision system.
摘要翻译：公开了舞台组件和控制方法。示例性组件包括第一级和第一和第二控制器。第一控制器反馈根据相应的参数向量来控制第一级。第二控制器根据相应的参数向量通过前馈控制来控制第一级。控制器执行迭代反馈调谐IFT，包括最小化来自第一和第二控制器的参数矢量的成本函数。第二控制器接收包括第一级轨迹的数据，第一控制器接收包括第一级跟随误差的数据。该组件的合适应用是在微光刻系统或其它高精度系统中。

10. 发明申请

US20130049647A1 Force Distribution Method for Stage Systems Utilizing Dual Actuators 审中-公开
标题翻译：使用双驱动器的舞台系统的力分配方法
公开(公告)号：US20130049647A1
公开(公告)日：2013-02-28
申请号：US13597592
申请日：2012-08-29
申请人： Pai-Hsueh Yang
发明人： Pai-Hsueh Yang
IPC分类号： H02K41/035
CPC分类号： G03F7/70725
摘要： According to one aspect, a method for controlling a stage that is a part of a stage apparatus and is coupled to a voice coil motor (VCM) and an EI-core actuator arrangement includes driving the stage, identifying a frequency associated with the stage, and determining whether the frequency is below a frequency setpoint. The method also includes providing a first control force on the stage using the EI-core actuator arrangement when it is determined that the frequency is below the frequency setpoint, and providing the first control force on the stage using the VCM when it is determined that the frequency is not below the frequency setpoint.
摘要翻译：根据一个方面，一种用于控制作为舞台装置的一部分并且耦合到音圈电动机（VCM）和EI-芯致动器装置的舞台的方法包括驱动舞台，识别与舞台相关联的频率，以及确定频率是否低于频率设定点。该方法还包括当确定频率低于频率设定点时，使用EI-芯致动器装置在舞台上提供第一控制力，并且当确定第一控制力被确定为频率设定点时，使用VCM在舞台上提供第一控制力频率不低于频率设定值。

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