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    • 1. 发明申请
    • Method and Apparatus to Allow a Plurality of Stages to Operate in Close Proximity
    • 允许多个阶段以近距离操作的方法和装置
    • US20120328836A1
    • 2012-12-27
    • US13526994
    • 2012-06-19
    • Michael B. BinnadPai-Hsueh Yang
    • Michael B. BinnadPai-Hsueh Yang
    • H02K41/03G03B27/58B32B3/30G03F7/20
    • G03F7/70758H02K3/47H02K41/031H02K2201/18Y10T428/24479
    • According to one aspect of the present invention, a stage apparatus includes a first stage, a first magnet arrangement, and a stator arrangement that includes a first coil having a first width. The first magnet arrangement is associated with the first stage, and includes a first quadrant and a second quadrant or, more generally, a first sub-array and a second sub-array. The first quadrant has at least one first magnet arranged parallel to a first axis, and the second quadrant has at least one second magnet arranged parallel to a second axis. The first quadrant is adjacent to the second quadrant relative to the first axis, and is spaced apart from the second quadrant by a distance relative to the second axis. The stator arrangement is configured to cooperate with the first magnet arrangement to drive the first stage
    • 根据本发明的一个方面,一种舞台装置包括第一舞台,第一磁铁装置以及包括具有第一宽度的第一线圈的定子装置。 第一磁体布置与第一阶段相关联,并且包括第一象限和第二象限,或更一般地,第一子阵列和第二子阵列。 第一象限具有平行于第一轴布置的至少一个第一磁体,而第二象限具有平行于第二轴布置的至少一个第二磁体。 第一象限相对于第一轴相邻于第二象限,并且与第二象限相隔相对于第二轴的距离。 定子装置构造成与第一磁体装置配合以驱动第一级
    • 2. 发明授权
    • Method and apparatus to allow a plurality of stages to operate in close proximity
    • 允许多个台阶靠近操作的方法和装置
    • US09030057B2
    • 2015-05-12
    • US13526994
    • 2012-06-19
    • Michael B. BinnadPai-Hsueh Yang
    • Michael B. BinnadPai-Hsueh Yang
    • H02K41/02G03F7/20H02K41/03H02K3/47
    • G03F7/70758H02K3/47H02K41/031H02K2201/18Y10T428/24479
    • According to one aspect of the present invention, a stage apparatus includes a first stage, a first magnet arrangement, and a stator arrangement that includes a first coil having a first width. The first magnet arrangement is associated with the first stage, and includes a first quadrant and a second quadrant or, more generally, a first sub-array and a second sub-array. The first quadrant has at least one first magnet arranged parallel to a first axis, and the second quadrant has at least one second magnet arranged parallel to a second axis. The first quadrant is adjacent to the second quadrant relative to the first axis, and is spaced apart from the second quadrant by a distance relative to the second axis. The stator arrangement is configured to cooperate with the first magnet arrangement to drive the first stage.
    • 根据本发明的一个方面,一种舞台装置包括第一舞台,第一磁铁装置以及包括具有第一宽度的第一线圈的定子装置。 第一磁体布置与第一阶段相关联,并且包括第一象限和第二象限,或更一般地,第一子阵列和第二子阵列。 第一象限具有平行于第一轴布置的至少一个第一磁体,而第二象限具有平行于第二轴布置的至少一个第二磁体。 第一象限相对于第一轴相邻于第二象限,并且与第二象限相隔相对于第二轴的距离。 定子装置构造成与第一磁体装置配合以驱动第一级。