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1. 发明申请

WO2016053253A1 UNIFLOW ENGINE WITH FLUID FLOW ARRANGEMENT 审中-公开
标题翻译：具有流体流动装置的共同发动机
公开(公告)号：WO2016053253A1
公开(公告)日：2016-04-07
申请号：PCT/US2014/058103
申请日：2014-09-29
申请人： VOLVO TRUCK CORPORATION , MORTON, Richard, Kellogg
发明人： MORTON, Richard, Kellogg
IPC分类号： F02B29/00
CPC分类号： F02B25/08 , F02B25/04 , F02B75/28 , F02F1/22
摘要： A uniflow engine includes a cylinder having a cylinder wall, an inlet channel, an extension of a central axis of the inlet channel first intersecting the cylinder wail in a first portion of the cylinder and next intersecting the cylinder wail in a second portion of the cylinder opposite the first portion of the cylinder, an intake air gallery, the intake air gallery having a gallery wall and being in flow communication with the inlet channel, and a plurality of intake ports extending between the cylinder wail and the gallery wall, at least some of the intake ports having different areas at the cylinder wall measured perpendicular to longitudinal axes of the intake ports, and wherein an area of at least one in take port in the first portion of the cylinder is larger than an area of at least one intake port in the second portion of the cylinder.
摘要翻译：单流发动机包括具有气缸壁的气缸，入口通道，入口通道的中心轴线的延伸部，首先在气缸的第一部分中与气缸壁相交，并且在气缸的第二部分中与气缸壁相交与气缸的第一部分相对的入口空气库，进气管道具有一个壁壁并与该入口通道流动连通;以及多个进气口，在该气缸壁与该通道壁之间延伸，至少一些的进气口在气缸壁处具有与进气口的纵向轴线垂直测量的不同面积的进气口，并且其中在气缸的第一部分中至少一个进气口的区域大于至少一个进气口的面积在气缸的第二部分。

2. 发明申请

WO2005013441A2 CATHODES FOR FLUORINE GAS DISCHARGE LASERS 审中-公开
标题翻译：氟气排放激光灯
公开(公告)号：WO2005013441A2
公开(公告)日：2005-02-10
申请号：PCT/US2004/023663
申请日：2004-07-21
申请人： CYMER, INC. , STEIGER, Thomas, D. , BROWN, Joshua, C. , DUFFEY, Thomas, P. , GILLESPIE, Walter, D. , MORTON, Richard, G. , DYER, Timothy, S.
发明人： STEIGER, Thomas, D. , BROWN, Joshua, C. , DUFFEY, Thomas, P. , GILLESPIE, Walter, D. , MORTON, Richard, G. , DYER, Timothy, S.
IPC分类号： H01S
CPC分类号： H01S3/038 , H01S3/036 , H01S3/0381 , H01S3/0382 , H01S3/0385 , H01S3/0388 , H01S3/097 , H01S3/09702 , H01S3/0971 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258
摘要： A fluorine gas discharge laser electrode for a gas discharge laser having a laser gas containing fluorine is disclosed which may comprise a copper and copper alloy cathode body having an upper curved region containing the discharge footprint for the cathode comprising copper and a lower portion comprising a copper alloy, with the facing portion of the electrode if formed in a arcuate shape extending into straight line portions on either side of the arcuate portion, the straight line portions terminating in vertical straight sides, with the boundary between the copper including at least the arcuate portion, the electrode may comprise a bonded element machined from two pieces of material the first made of copper and the second made of a copper alloy bonded together before machining. The electrode may also comprise a first and a second elongated lopsided Vshaped groove formed along substantially all of the elongated electrode body forming a discharge receiving ridge between the first and second lopsided V-shaped grooves, with a differentially faster eroding material filling the first and second lopsided V-shaped grooves. also disclosed is an electrode system in which the one electrode, e.g., the cathode bows during operation and may comprise at least one of a first and second elongated gas discharge electrode being machined to form a crown to receive the gas discharge that compensates for the bowing of at least one of the gas discharge electrodes during operation of the fluorine gas discharge laser.
摘要翻译：公开了一种用于具有含氟激光气体的气体放电激光器的氟气放电激光电极，其可包括铜和铜合金阴极体，该铜和铜合金阴极体具有包含用于包含铜的阴极的放电足迹的上部弯曲区域，以及包含铜合金，如果电极的对置部分形成为延伸到弓形部分两侧的直线部分的弓形形状，则直线部分终止于垂直的直边，铜线之间的边界至少包括弧形部分电极可以包括由铜制成的两片材料和由加工前结合在一起的铜合金制成的第二个材料加工的接合元件。电极还可以包括沿着基本上所有的细长电极体形成的第一和第二细长的V形凹槽，其在第一和第二偏斜V形槽之间形成放电接收脊，其中填充有第一和第二偏斜的V形槽。还公开了一种电极系统，其中一个电极例如阴极在操作期间弯曲并且可以包括被加工成形成冠部的第一和第二细长气体放电电极中的至少一个，以接收补偿弯曲的气体放电的至少一个气体放电电极在氟气放电激光器的操作期间。

3. 发明申请

WO2005013391A3 ANODES FOR FLUORINE GAS DISCHARGE LASERS 审中-公开
公开(公告)号：WO2005013391A3
公开(公告)日：2005-02-10
申请号：PCT/US2004/023012
申请日：2004-07-16
申请人： CYMER, INC. , DYER, Timothy, S. , MORTON, Richard , GILLESPIE, Walter, D. , STEIGER, Thomas, D.
发明人： DYER, Timothy, S. , MORTON, Richard , GILLESPIE, Walter, D. , STEIGER, Thomas, D.
IPC分类号： H01S3/22
摘要： Electrodes for a fluorine gas discharge laser are disclosed which may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the electrode; the crown in traverse cross section having the shape of the upper half of a canted ellipse rotated in the preionizer direction, such that a tangent to the short centerline axis of the ellipse forms an angle with the horizontal.

4. 发明申请

WO2005013391A2 ANODES FOR FLUORINE GAS DISCHARGE LASERS 审中-公开
标题翻译：氟化物放射性激光阳极
公开(公告)号：WO2005013391A2
公开(公告)日：2005-02-10
申请号：PCT/US2004023012
申请日：2004-07-16
申请人： CYMER INC , DYER TIMOTHY S , MORTON RICHARD , GILLESPIE WALTER D , STEIGER THOMAS D
发明人： DYER TIMOTHY S , MORTON RICHARD , GILLESPIE WALTER D , STEIGER THOMAS D
IPC分类号： H01M20060101 , H01S3/036 , H01S3/038 , H01S3/097 , H01S3/0971 , H01S3/22 , H01S3/223 , H01S3/225 , H01M
CPC分类号： H01S3/038 , H01S3/036 , H01S3/0381 , H01S3/0382 , H01S3/0385 , H01S3/0388 , H01S3/097 , H01S3/09702 , H01S3/09713 , H01S3/225 , H01S3/2251 , H01S3/2256
摘要： Electrodes for a fluorine gas discharge laser are disclosed which may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the electrode; the crown in traverse cross section having the shape of the upper half of a canted ellipse rotated in the preionizer direction, such that a tangent to the short centerline axis of the ellipse forms an angle with the horizontal. Another embodiment may comprise an anode blade having a top portion and a first and second sidewall portion each intersecting the top portion; the anode blade being formed with the shape in cross section of the top portion being curvilinear and intersecting the generally straight portions of each of first and second sidewall portions along a radius of curvature and with the top portion beveled away from an asymmetric discharge side of the anode. Another embodiment may comprise an anode and an up-stream fairing each composed of electrically conductive material, at least the discharge receiving portion of which is coated with a thin dielectric layer, e.g. is anodized. Another embodiment may comprise at least a portion of the discharge region of a gas discharge electrode is covered with a preformed reef having generally uniform pore size and distribution. A method is disclosed for reef making which may comprise forming the reef of a vacuum infiltrated porous anodized material. Another disclosed method may comprise forming a first anodization layer on the surface of the electrode at least in the discharge region; removing the anodization layer; forming a second anodization layer on the surface of the electrode at least in the discharge region; which may be followed by widening the pores in the second anodization layer, thinning the second anodization layer; and filling the pores with a conductive material. A further method may comprise forming a reef template on at least the discharge region of the elongated gas discharge region; selectively growing a porous layer of insulating material as dictated by the reef template, and may further comprise a positive template or a negative template.
摘要翻译：公开了一种用于氟气体放电激光器的电极，其可以包括横跨所述一对侧壁和所述一对端壁之间的中心线轴线的冠，包括形成电极的放电区域的至少一部分的第一材料; 横截面中的冠部具有以预旋转方向旋转的倾斜椭圆的上半部的形状，使得与椭圆形的短中心线轴的切线与水平方向成一角度。另一个实施例可以包括具有顶部部分和分别与顶部部分相交的第一和第二侧壁部分的阳极刀片; 阳极叶片形成为顶部部分的横截面形状为曲线，并且沿着曲率半径与第一和第二侧壁部分的每一个的大体直线部分相交，并且顶部部分从远离第一和第二侧壁部分的不对称排放侧倾斜阳极。另一个实施例可以包括每个由导电材料构成的阳极和上游整流罩，至少其放电接收部分涂覆有薄介电层，例如电介质层。被阳极氧化。另一个实施例可以包括气体放电电极的放电区域的至少一部分被具有大致均匀的孔径和分布的预成型的礁石覆盖。公开了一种用于珊瑚制造的方法，其可以包括形成真空渗透的多孔阳极氧化材料的珊瑚礁。另一公开的方法可以包括至少在放电区域中在电极的表面上形成第一阳极氧化层; 去除阳极氧化层; 至少在所述放电区域中在所述电极的表面上形成第二阳极氧化层; 其可以随后扩大第二阳极氧化层中的孔，使第二阳极氧化层变薄; 并用导电材料填充孔。另外的方法可以包括在细长气体放电区域的至少放电区域上形成珊瑚礁模板; 根据珊瑚礁模板选择性地生长绝缘材料的多孔层，并且还可以包括正模板或负模板。

5. 发明申请

WO03096497A8 HIGH POWER DEEP ULTRAVIOLET LASER WITH LONG LIFE OPTICS 审中-公开
标题翻译：高功率深紫外线激光与长寿命光学
公开(公告)号：WO03096497A8
公开(公告)日：2004-12-29
申请号：PCT/US0312819
申请日：2003-04-23
申请人： CYMER INC , YAGER THOMAS A , PARTLO WILLIAM N , SANDSTROM RICHARD L , PAN XIAOJIANG , MELCHIOR JOHN T , ALGOTS JOHN M , BALL MATTHEW , ERSHOV ALEXANDER I , FLEUROV VLADIMIR , GILLESPIE WALTER D , GLATZEL HOLGER K , LUBLIN LEONARD , MARSH ELIZABETH , MORTON RICHARD G , UJAZDOWKI RICHARD C , WARKENTIN DAVID J , WEBB R KYLE
发明人： YAGER THOMAS A , PARTLO WILLIAM N , SANDSTROM RICHARD L , PAN XIAOJIANG , MELCHIOR JOHN T , ALGOTS JOHN M , BALL MATTHEW , ERSHOV ALEXANDER I , FLEUROV VLADIMIR , GILLESPIE WALTER D , GLATZEL HOLGER K , LUBLIN LEONARD , MARSH ELIZABETH , MORTON RICHARD G , UJAZDOWKI RICHARD C , WARKENTIN DAVID J , WEBB R KYLE
IPC分类号： H01S3/034 , G03F7/20 , H01S3/00 , H01S3/225 , H01S3/22
CPC分类号： G03F7/7055 , H01S3/005 , H01S3/225
摘要： The present invention provides long life optics for a modular, high repetition rate, ultraviolet gas discharge laser systems (Fig. 1B) producing a high repetition rate high power output beam (38). The invention includes solutions to a surface damage problem discovered by Applicants on CaF2 optics (4260) (422)(424)(426) located in high pulse intensity sections (10)(26) of the output beam (14C) of prototype laser systems. Embodiments include an enclosed (4) and purged beam path (14C) with beam pointing control (40A) (40B)(6) for beam delivery of billions of output laser pulses (38). Optical components and modules described herein are capable of controlling ultraviolet laser output pulses (14A) with wavelength less than 200nm with average output pulse intensities greater than 1.75x10 Watts/cm and with peak intensity or greater 3.5x10 Watts/cm for many billions of pulses (14A) as compared to prior art components and modules which failed after only a few minutes in these pulse intensities.
摘要翻译：本发明提供了用于产生高重复率高功率输出光束（38）的模块化高重复率紫外线气体放电激光系统（图1B）的长寿命光学器件。本发明包括由原始激光系统的输出光束（14C）的高脉冲强度部分（10）（26）中的CaF2光学器件（4260）（422）（424）（426）发现的由申请人发现的表面损伤问题的解决方案。实施例包括具有用于束输送数十亿个输出激光脉冲（38）的光束指向控制（40A）（40B）（6））的封闭（4）和净化光束路径（14C）。本文所述的光学部件和模块能够控制波长小于200nm的紫外激光输出脉冲（14A），平均输出脉冲强度大于1.75×10 6瓦/ cm 2，峰值强度或更大的3.5×10 6 与现有技术的元件和模块相比，在这些脉冲强度仅在几分钟之后就失败了，数十亿脉冲（14A）的功率>瓦特/平方厘米（2）。

6. 发明申请

WO0245475A3 PROTECTIVE OVERCOAT FOR REPLICATED DIFFRACTION GRATINGS 审中-公开
标题翻译：用于复制衍射光栅的保护膜
公开(公告)号：WO0245475A3
公开(公告)日：2002-10-10
申请号：PCT/US0146667
申请日：2001-11-07
申请人： CYMER INC , PAN XIAOJIANG J , MORTON RICHARD G , ERSHOV ALEXANDER I
发明人： PAN XIAOJIANG J , MORTON RICHARD G , ERSHOV ALEXANDER I
IPC分类号： G02B5/26 , C03C17/38 , C23C14/06 , C23C14/16 , C23C14/22 , C23C14/24 , C23C14/58 , G02B1/10 , G02B5/18 , G02B5/28 , G03F7/20 , H01S3/08
CPC分类号： C23C14/225 , C23C14/0694 , C23C14/16 , C23C14/24 , G02B1/105 , G02B1/14 , G02B5/1847 , G02B5/1852 , G03F7/70025 , G03F7/70041 , G03F7/70483 , G03F7/70558 , G03F7/70575
摘要： An overcoat protected diffraction grating. A replica grating having a thin aluminum reflective grating surface is produced by replication of a master grating or a submaster grating. The thin aluminum reflective surface may be cracked or have relatively thick grain boundaries containing oxides and hydroxides of aluminum and typically is also naturally coated with an aluminum oxide film. The grating is subsequently overcoated in a vacuum chamber with one or two thin, pure, dense aluminum overcoat layers and then also in the vacuum the aluminum overcoat layer or layers are coated with one or more thin protective layers of a material transparent to ultraviolet radiation. In preferred embodiments this protective layer is a single layer of MgF2, S1O2 or Al2O3. In other preferred embodiments the layer is a layer of MgF2 or S1O2 covered with a layer of Al2O3 and in a third preferred embodiment the protective layer is made up of four alternating layers of MgF2 and Al2O3 or four alternating layers of S1O2 and Al2O3. Preferably, the thickness of the transparent protective layers are chosen to produce a phase shift at the proposed operating wavelengths of an integral number of 2 pi .
摘要翻译：外涂保护衍射光栅。具有薄铝反射光栅表面的复制光栅通过主光栅或子光栅的复制产生。薄的铝反射表面可能是破裂的或具有含有氧化物和铝的氢氧化物的相对较厚的晶界，并且通常也被氧化铝膜自然地涂覆。随后，在具有一个或两个薄的，纯的，致密的铝外涂层的真空室中涂覆光栅，然后在真空中涂覆一层或多层对紫外线辐射透明的材料的薄保护层。在优选的实施方案中，该保护层是单层MgF 2，SiO 2或Al 2 O 3。在其它优选实施方案中，该层是被Al 2 O 3层覆盖的MgF 2或SiO 2层，在第三优选实施方案中，保护层由四个交替层的MgF 2和Al 2 O 3或四个交替层的SiO 2和Al 2 O 3构成。优选地，选择透明保护层的厚度以在所提出的整数2 pi的工作波长下产生相移。

7. 发明申请

WO2016053254A1 OPPOSED PISTON ENGINE WITH PISTONS HAVING CONICAL RECESSES THEREIN 审中-公开
标题翻译：具有活塞活塞的活塞式发动机
公开(公告)号：WO2016053254A1
公开(公告)日：2016-04-07
申请号：PCT/US2014/058105
申请日：2014-09-29
申请人： VOLVO TRUCK CORPORATION , MORTON, Richard, Kellogg , LI, Jian , BRANDT, Richard
发明人： MORTON, Richard, Kellogg , LI, Jian , BRANDT, Richard
IPC分类号： F02B75/28
CPC分类号： F02B75/265 , F01B7/02 , F02B23/066 , F02B23/0663 , F02B75/16 , F02B75/24 , F02B75/26 , F02B75/28 , F02B75/287
摘要： An opposed piston engine includes a cylinder having a cylinder wall, and a pair of opposed pistons, Each face of each piston of the pair of opposed pistons has a top plane and a recess formed therein, each recess comprising a first surface defining part of a cone, the cone defined by the first surface of at least one of the recesses having a longitudinal axis that defines an angle equal to at least one half of a cone angle of the cone with the top plane.
摘要翻译：相对的活塞发动机包括具有气缸壁的气缸和一对相对的活塞，一对相对的活塞的每个活塞的每个面具有形成在其中的顶面和凹部，每个凹部包括限定一部分的第一表面由至少一个凹部的第一表面限定的锥体具有纵向轴线，所述纵向轴线限定锥度与顶部平面的锥角的至少一半的角度。

8. 发明申请

WO2005050794A3 HALOGEN GAS DISCHARGE LASER ELECTRODES 审中-公开
标题翻译：卤化物放电激光电极
公开(公告)号：WO2005050794A3
公开(公告)日：2006-01-05
申请号：PCT/US2004024062
申请日：2004-07-27
申请人： CYMER INC , STEIGER THOMAS D , UJAZDOWSKI RICHARD C , DYER TIMOTHY S , DUFFEY THOMAS P , GILLESPIE WALTER D , MOOSMAN BRYAN G , MORTON RICHARD G , STRATE BRIAN D
发明人： STEIGER THOMAS D , UJAZDOWSKI RICHARD C , DYER TIMOTHY S , DUFFEY THOMAS P , GILLESPIE WALTER D , MOOSMAN BRYAN G , MORTON RICHARD G , STRATE BRIAN D
IPC分类号： H01S20060101 , H01S3/038 , H01S3/097 , H01S3/0971 , H01S3/22 , H01S3/225 , H01S3/97
CPC分类号： H01S3/225 , H01S3/0381 , H01S3/0385 , H01S3/0388 , H01S3/0971 , H01S3/09713
摘要： A method and apparatus for operating a gas discharge laser is disclosed which may comprise a laser chamber containing a laser gas, the laser gas comprising a halogen, two elongated electrode elements defining a cathode and an anode, each of the cathode and anode having an elongated discharge receiving region having a discharge receiving region width defining a width of an electric discharge between the electrode elements in the laser gas, the discharge receiving region defining two longitudinal edges, and the anode comprising: a first elongated anode portion comprising a first anode material defining a first anode material erosion rate, located entirely within the discharge receiving region of the anode, a pair of second elongated anode portions comprising a second anode material defining a second anode material erosion rate, respectively located on each side of the first anode portion and at least partially within the discharge receiving region; an elongated electrode center base portion integral with the first elongated anode portion; and wherein each of the respective pair of second elongated anode portions is mechanically bonded to the center base portion. The electrode element may comprise a cathode. The first and second materials may be different materials such as different brass alloys with different erosion rates in the halogen gas. The first elongated cathode portion may comprising a first cathode material, located entirely within the discharge receiving region comprising a first portion of an ellipse intersecting elongated side walls, with a bottom wall opposite the portion of the ellipse; and a pair of second elongated cathode side portions comprising a second cathode material with the intersection of each respective second cathode portion and the portion of the ellipse forming the discharge receiving region of the first cathode portion, forming respective ellipsoidal extensions of the first portion. The members may be mechanically bonded to the center base portion. Some may be diffusion bonded to the center base portion and/or each other. The electrode assembly may have a hooded discharge receiving region extension at respective ends of the electrode and the electrode portion may be formed with or bonded to the center base portion and may have slanted side walls.
摘要翻译：公开了一种用于操作气体放电激光器的方法和装置，其可以包括包含激光气体的激光室，激光气体包括卤素，限定阴极和阳极的两个细长电极元件，阴极和阳极中的每一个具有细长的放电接收区域具有限定激光气体中的电极元件之间的放电宽度的放电接收区域宽度，放电接收区域限定两个纵向边缘，阳极包括：第一细长阳极部分，包括限定第一阳极材料侵蚀速率，完全位于阳极的放电接收区域内;一对第二细长阳极部分，包括限定第二阳极材料侵蚀速率的第二阳极材料，第二阳极材料分别位于第一阳极部分的每一侧，最少部分地在放电接收区域内; 与所述第一细长阳极部分成一体的细长电极中心基部; 并且其中相应的一对第二细长阳极部分中的每一个机械地结合到中心基部。电极元件可以包括阴极。第一和第二材料可以是不同的材料，例如在卤素气体中具有不同侵蚀速率的不同的黄铜合金。第一细长阴极部分可以包括第一阴极材料，其全部位于放电接收区域内，包括与细长侧壁相交的椭圆的第一部分，其中与壁的部分相对的底壁; 以及一对第二细长阴极侧部分，其包括第二阴极材料，每个相应的第二阴极部分和形成第一阴极部分的放电接收区域的椭圆形部分的交点形成第一部分的相应的椭圆形延伸部分。构件可以机械地结合到中心基部。一些可以扩散结合到中心基部和/或彼此。电极组件可以在电极的相应端部处具有连接的放电接收区域延伸部，并且电极部分可以形成有或结合到中心基部并且可以具有倾斜的侧壁。

9. 发明申请

WO2005102412A2 CONTROL DEVICE FOR A FLUID DELIVERY SYSTEM 审中-公开
标题翻译：流体输送系统的控制装置
公开(公告)号：WO2005102412A2
公开(公告)日：2005-11-03
申请号：PCT/US2005/009415
申请日：2005-03-21
申请人： MEDRAD, INC. , HAURY, John, A. , GIMBEL, James, M. , LEROCH, Matthew, J. IV , MILLER, Paul, J. , CALLAN, Gerald, W. , MORTON, Richard, C. , KOPACKO, Ralph, E. , KWO, Jennie , PADRAZA, Luis, A. , BEAULIEU, Roderick, H. , WADE, Russel, W. , TRCKA, Milan , WHITEBOOK, Mark, Evan
发明人： HAURY, John, A. , GIMBEL, James, M. , LEROCH, Matthew, J. IV , MILLER, Paul, J. , CALLAN, Gerald, W. , MORTON, Richard, C. , KOPACKO, Ralph, E. , KWO, Jennie , PADRAZA, Luis, A. , BEAULIEU, Roderick, H. , WADE, Russel, W. , TRCKA, Milan , WHITEBOOK, Mark, Evan
IPC分类号： A61M1/00
CPC分类号： A61M5/16877 , A61M5/007 , A61M5/16804 , A61M2205/3576
摘要： The control device is used to control delivery of fluid from a fluid delivery system during a medical injection procedure. The fluid delivery system includes an injector adapted to actuate a syringe used to deliver the injection fluid to a patient. The control device is operatively associated with the injector for controlling discrete flow rates of injection fluid delivered to the patient. The control device includes a housing and an actuator associated with the housing. An electronic substrate is disposed within the housing and comprises a conductive pattern. The actuator is adapted for operative association with the conductive pattern. The conductive pattern includes a plurality of predetermined digital values corresponding to discrete flow rates of injection fluid to be delivered by the injector, such that when the actuator is actuated the actuator operatively associates with the conductive pattern for transmitting the digital values to the injector.
摘要翻译：控制装置用于在医疗注射过程期间控制来自流体输送系统的流体的输送。流体递送系统包括适于致动用于将注射流体输送给患者的注射器的注射器。控制装置与注射器可操作地相关联，用于控制输送给患者的注射液体的离散流速。控制装置包括壳体和与壳体相关联的致动器。电子基板设置在壳体内并且包括导电图案。致动器适于与导电图案操作地关联。导电图案包括对应于由喷射器输送的喷射流体的离散流速的多个预定数字值，使得当致动器被致动时，致动器可操作地与导电图案相关联，以将数字值传送到喷射器。

10. 发明申请

WO2005050794A2 HALOGEN GAS DISCHARGE LASER ELECTRODES 审中-公开
标题翻译：卤化物放电激光电极
公开(公告)号：WO2005050794A2
公开(公告)日：2005-06-02
申请号：PCT/US2004/024062
申请日：2004-07-27
申请人： CYMER, INC. , STEIGER, Thomas, D. , UJAZDOWSKI, Richard, C. , DYER, Timothy, S. , DUFFEY, Thomas, P. , GILLESPIE, Walter, D , MOOSMAN, Bryan, G , MORTON, Richard, G. , STRATE, Brian, D
发明人： STEIGER, Thomas, D. , UJAZDOWSKI, Richard, C. , DYER, Timothy, S. , DUFFEY, Thomas, P. , GILLESPIE, Walter, D , MOOSMAN, Bryan, G , MORTON, Richard, G. , STRATE, Brian, D
IPC分类号： H01S
CPC分类号： H01S3/225 , H01S3/0381 , H01S3/0385 , H01S3/0388 , H01S3/0971 , H01S3/09713
摘要： A method and apparatus for operating a gas discharge laser is disclosed which may comprise a laser chamber containing a laser gas, the laser gas comprising a halogen, two elongated electrode elements defining a cathode and an anode, each of the cathode and anode having an elongated discharge receiving region having a discharge receiving region width defining a width of an electric discharge between the electrode elements in the laser gas, the discharge receiving region defining two longitudinal edges, and the anode comprising: a first elongated anode portion comprising a first anode material defining a first anode material erosion rate, located entirely within the discharge receiving region of the anode, a pair of second elongated anode portions comprising a second anode material defining a second anode material erosion rate, respectively located on each side of the first anode portion and at least partially within the discharge receiving region; an elongated electrode center base portion integral with the first elongated anode portion; and wherein each of the respective pair of second elongated anode portions is mechanically bonded to the center base portion. The electrode element may comprise a cathode. The first and second materials may be different materials such as different brass alloys with different erosion rates in the halogen gas. The first elongated cathode portion may comprising a first cathode material, located entirely within the discharge receiving region comprising a first portion of an ellipse intersecting elongated side walls, with a bottom wall opposite the portion of the ellipse; and a pair of second elongated cathode side portions comprising a second cathode material with the intersection of each respective second cathode portion and the portion of the ellipse forming the discharge receiving region of the first cathode portion, forming respective ellipsoidal extensions of the first portion. The members may be mechanically bonded to the center base portion. Some may be diffusion bonded to the center base portion and/or each other. The electrode assembly may have a hooded discharge receiving region extension at respective ends of the electrode and the electrode portion may be formed with or bonded to the center base portion and may have slanted side walls.
摘要翻译：公开了一种用于操作气体放电激光器的方法和装置，其可以包括包含激光气体的激光室，激光气体包括卤素，限定阴极和阳极的两个细长电极元件，阴极和阳极中的每一个具有细长的放电接收区域具有限定激光气体中的电极元件之间的放电宽度的放电接收区域宽度，放电接收区域限定两个纵向边缘，阳极包括：第一细长阳极部分，包括限定第一阳极材料侵蚀速率，完全位于阳极的放电接收区域内;一对第二细长阳极部分，包括限定第二阳极材料侵蚀速率的第二阳极材料，第二阳极材料分别位于第一阳极部分的每一侧，至少部分地在放电接收区域内; 与所述第一细长阳极部分成一体的细长电极中心基部; 并且其中相应的一对第二细长阳极部分中的每一个机械地结合到中心基部。电极元件可以包括阴极。第一和第二材料可以是不同的材料，例如在卤素气体中具有不同侵蚀速率的不同的黄铜合金。第一细长阴极部分可以包括第一阴极材料，其全部位于放电接收区域内，包括与细长侧壁相交的椭圆的第一部分，其中与壁的部分相对的底壁; 以及一对第二细长阴极侧部分，其包括第二阴极材料，每个相应的第二阴极部分和形成第一阴极部分的放电接收区域的椭圆形部分的交点形成第一部分的相应的椭圆形延伸部分。构件可以机械地结合到中心基部。一些可以扩散结合到中心基部和/或彼此。电极组件可以在电极的相应端部处具有连接的放电接收区域延伸部，并且电极部分可以形成有或结合到中心基部并且可以具有倾斜的侧壁。

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