基本信息:
- 专利标题： HALOGEN GAS DISCHARGE LASER ELECTRODES
- 专利标题（中）：卤化物放电激光电极
- 申请号：PCT/US2004/024062 申请日：2004-07-27
- 公开(公告)号：WO2005050794A2 公开(公告)日：2005-06-02
- 发明人： STEIGER, Thomas, D. , UJAZDOWSKI, Richard, C. , DYER, Timothy, S. , DUFFEY, Thomas, P. , GILLESPIE, Walter, D , MOOSMAN, Bryan, G , MORTON, Richard, G. , STRATE, Brian, D
- 申请人： CYMER, INC. , STEIGER, Thomas, D. , UJAZDOWSKI, Richard, C. , DYER, Timothy, S. , DUFFEY, Thomas, P. , GILLESPIE, Walter, D , MOOSMAN, Bryan, G , MORTON, Richard, G. , STRATE, Brian, D
- 申请人地址： 17075 Thornmint Court, San Diego, CA 92127-2413 US
- 专利权人： CYMER, INC.,STEIGER, Thomas, D.,UJAZDOWSKI, Richard, C.,DYER, Timothy, S.,DUFFEY, Thomas, P.,GILLESPIE, Walter, D,MOOSMAN, Bryan, G,MORTON, Richard, G.,STRATE, Brian, D
- 当前专利权人： CYMER, INC.,STEIGER, Thomas, D.,UJAZDOWSKI, Richard, C.,DYER, Timothy, S.,DUFFEY, Thomas, P.,GILLESPIE, Walter, D,MOOSMAN, Bryan, G,MORTON, Richard, G.,STRATE, Brian, D
- 当前专利权人地址： 17075 Thornmint Court, San Diego, CA 92127-2413 US
- 代理机构： CRAY, William, C.
- 优先权： US10/629,364 20030729; US10/672,722 20030926; US10/672,181 20030926; US10/672,182 20030926; US10/877,737 20040625
- 主分类号： H01S
- IPC分类号： H01S
摘要：
A method and apparatus for operating a gas discharge laser is disclosed which may comprise a laser chamber containing a laser gas, the laser gas comprising a halogen, two elongated electrode elements defining a cathode and an anode, each of the cathode and anode having an elongated discharge receiving region having a discharge receiving region width defining a width of an electric discharge between the electrode elements in the laser gas, the discharge receiving region defining two longitudinal edges, and the anode comprising: a first elongated anode portion comprising a first anode material defining a first anode material erosion rate, located entirely within the discharge receiving region of the anode, a pair of second elongated anode portions comprising a second anode material defining a second anode material erosion rate, respectively located on each side of the first anode portion and at least partially within the discharge receiving region; an elongated electrode center base portion integral with the first elongated anode portion; and wherein each of the respective pair of second elongated anode portions is mechanically bonded to the center base portion. The electrode element may comprise a cathode. The first and second materials may be different materials such as different brass alloys with different erosion rates in the halogen gas. The first elongated cathode portion may comprising a first cathode material, located entirely within the discharge receiving region comprising a first portion of an ellipse intersecting elongated side walls, with a bottom wall opposite the portion of the ellipse; and a pair of second elongated cathode side portions comprising a second cathode material with the intersection of each respective second cathode portion and the portion of the ellipse forming the discharge receiving region of the first cathode portion, forming respective ellipsoidal extensions of the first portion. The members may be mechanically bonded to the center base portion. Some may be diffusion bonded to the center base portion and/or each other. The electrode assembly may have a hooded discharge receiving region extension at respective ends of the electrode and the electrode portion may be formed with or bonded to the center base portion and may have slanted side walls.
摘要（中）：
公开了一种用于操作气体放电激光器的方法和装置，其可以包括包含激光气体的激光室，激光气体包括卤素，限定阴极和阳极的两个细长电极元件，阴极和阳极中的每一个具有细长的 放电接收区域具有限定激光气体中的电极元件之间的放电宽度的放电接收区域宽度，放电接收区域限定两个纵向边缘，阳极包括：第一细长阳极部分，包括限定 第一阳极材料侵蚀速率，完全位于阳极的放电接收区域内;一对第二细长阳极部分，包括限定第二阳极材料侵蚀速率的第二阳极材料，第二阳极材料分别位于第一阳极部分的每一侧， 至少部分地在放电接收区域内; 与所述第一细长阳极部分成一体的细长电极中心基部; 并且其中相应的一对第二细长阳极部分中的每一个机械地结合到中心基部。 电极元件可以包括阴极。 第一和第二材料可以是不同的材料，例如在卤素气体中具有不同侵蚀速率的不同的黄铜合金。 第一细长阴极部分可以包括第一阴极材料，其全部位于放电接收区域内，包括与细长侧壁相交的椭圆的第一部分，其中与壁的部分相对的底壁; 以及一对第二细长阴极侧部分，其包括第二阴极材料，每个相应的第二阴极部分和形成第一阴极部分的放电接收区域的椭圆形部分的交点形成第一部分的相应的椭圆形延伸部分。 构件可以机械地结合到中心基部。 一些可以扩散结合到中心基部和/或彼此。 电极组件可以在电极的相应端部处具有连接的放电接收区域延伸部，并且电极部分可以形成有或结合到中心基部并且可以具有倾斜的侧壁。