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81. 发明授权

US06553323B1 Method and its apparatus for inspecting a specimen 有权
标题翻译：检测样本的方法及其装置
公开(公告)号：US06553323B1
公开(公告)日：2003-04-22
申请号：US09661182
申请日：2000-09-13
申请人： Kenji Obara , Yuji Takagi , Toshifumi Honda , Ryo Nakagaki , Toshiei Kurosaki , Yasuhiko Ozawa
发明人： Kenji Obara , Yuji Takagi , Toshifumi Honda , Ryo Nakagaki , Toshiei Kurosaki , Yasuhiko Ozawa
IPC分类号： G01B528
CPC分类号： H01L22/20 , G01N21/88 , G01N2021/8861
摘要： The present invention improves inspection efficiency in detailed inspections of defects performed based on inspection information from a defect inspection. Particles and defects are detected by a defect inspection device 1. If the cause of the particles and defects are to be determined by performing a detailed inspection with a details inspection device 3 using an SEM or the like, attributes are determined on the particles and defects detected by the defects inspection device 1 before the detailed inspection is performed. The attributes are determined with an attribute inspection device using an optical microscope or the like. Based on these attributes, the defects and particles are separated into those that require detailed inspection and those that do not require detailed inspection or that cannot be inspected in detail. A details inspection device 3 is used to inspect the particles and defects requiring detailed inspection.
摘要翻译：本发明基于来自缺陷检查的检查信息进行的缺陷的详细检查，提高了检查效率。通过缺陷检查装置1检测颗粒和缺陷。如果通过使用SEM等的细节检查装置3进行详细检查来确定颗粒和缺陷的原因，则根据颗粒和缺陷确定属性在执行详细检查之前由缺陷检查装置1检测到。属性由使用光学显微镜等的属性检查装置确定。基于这些属性，缺陷和颗粒被分成需要详细检查的那些和不需要详细检查或者不能被详细检查的那些。细节检查装置3用于检查需要详细检查的颗粒和缺陷。

82. 发明授权

US06333992B1 Defect judgement processing method and apparatus 失效
标题翻译：缺陷判断处理方法和装置
公开(公告)号：US06333992B1
公开(公告)日：2001-12-25
申请号：US08967015
申请日：1997-11-10
申请人： Hisae Yamamura , Yukio Matsuyama , Toshifumi Honda , Ludwig Listl
发明人： Hisae Yamamura , Yukio Matsuyama , Toshifumi Honda , Ludwig Listl
IPC分类号： G06K900
CPC分类号： G01N21/88 , G01N21/956
摘要： A defect judgement processing method and apparatus which can optimize image processing and defect judgement parameters for a detection image cut out by each inspection window to avoid erroneous judgement and defect missing and to realize reliable defect judgement. An image data generator cuts out ranges indicated by a plurality of predesignated inspection windows from a detected image and stores them in a memory, a window data generator generates window data having inspection conditions attached thereto with respect to the plurality of inspection windows and stores them in the memory, a feature extractor reads out detection images of the ranges indicated by the inspection windows from the memory and extracts a structural feature parameter therefrom on the basis of an image processing parameter conforming to the inspection condition obtained by the window data, and a defect judger performs its defect judging operation over the extracted structural feature parameter on the basis of a defect judgement parameter conforming to the inspection condition.
摘要翻译：一种缺陷判断处理方法和装置，其可以优化每个检查窗口切出的检测图像的图像处理和缺陷判断参数，以避免错误判断和缺陷缺失，并实现可靠的缺陷判断。图像数据发生器从检测到的图像中切出由多个预先指定的检查窗口指示的范围并将其存储在存储器中，窗口数据生成器生成具有关于多个检查窗口附加到其上的检查条件的窗口数据，并将它们存储在存储器中，特征提取器基于从窗口数据获得的检查条件的图像处理参数，从存储器读出由检查窗口指示的范围的检测图像，并从其提取结构特征参数，并且缺陷基于符合检查条件的缺陷判断参数，判断器对提取的结构特征参数执行缺陷判断操作。

83. 发明申请

US20140233024A1 Defect Inspecting Apparatus and Defect Inspecting Method 有权
标题翻译：缺陷检查仪器和缺陷检查方法
公开(公告)号：US20140233024A1
公开(公告)日：2014-08-21
申请号：US14235916
申请日：2012-05-14
申请人： Atsushi Taniguchi , Taketo Ueno , Shunichi Matsumoto , Yukihiro Shibata , Toshifumi Honda
发明人： Atsushi Taniguchi , Taketo Ueno , Shunichi Matsumoto , Yukihiro Shibata , Toshifumi Honda
IPC分类号： G01N21/95
CPC分类号： G01N21/95 , G01B11/0641 , G01N21/211 , G01N21/9501 , G01N21/95607 , G01N21/95623 , G01N2021/8822 , G01N2021/9513 , G02F1/1303 , G02F1/136259
摘要： An invention being applied is a defect detecting apparatus that has: an illuminating optical system with a laser light source for irradiating a sample on whose surface a pattern is formed with light; a detecting optical system with a sensor for detecting light generated from the sample illuminated by the illuminating optical system; and a signal processing unit that extracts a defect from an image based on the light detected by the detecting optical system, in which an amplification rate of the sensor is dynamically changed during a time when the light is detected by the detecting optical system.
摘要翻译：一种应用的发明是一种缺陷检测装置，其具有：具有激光光源的照明光学系统，用于对其表面形成有图案的样品进行照射; 检测光学系统，其具有用于检测由照明光学系统照射的样本产生的光的传感器; 以及信号处理单元，其基于由检测光学系统检测到的光的时间期间传感器的放大率动态地改变的检测光学系统检测到的光，从图像中提取缺陷。

84. 发明申请

US20130293879A1 DEFECT INSPECTION METHOD AND DEVICE THEREFOR 有权
标题翻译：缺陷检查方法及其设备
公开(公告)号：US20130293879A1
公开(公告)日：2013-11-07
申请号：US13993888
申请日：2011-11-08
申请人： Toshifumi Honda , Yukihiro Shibata , Atsushi Taniguchi
发明人： Toshifumi Honda , Yukihiro Shibata , Atsushi Taniguchi
IPC分类号： G01N21/95
CPC分类号： G01N21/00 , G01N21/8851 , G01N21/9501 , G01N21/956 , G01N2021/8896
摘要： To process a signal from a plurality of detectors without being affected by a variation in the height of a substrate, and to detect more minute defects on the substrate, a defect inspection device is provided with a photoelectric converter having a plurality of rows of optical sensor arrays in each of first and second light-collecting/detecting unit and a processing unit for processing a detection signal from the first and the second light-collecting/detecting unit to determine the extent to which the positions of the focal points of the first and the second light-collecting/detecting unit are misaligned with respect to the surface of a test specimen, and processing the detection signal to correct a misalignment between the first and the second light-collecting/detecting unit, and the corrected detection signal outputted from the first and the second light-collecting/detecting unit are combined together to detect the defects on the test specimen.
摘要翻译：为了处理来自多个检测器的信号而不受基板高度的变化的影响，并且在基板上检测更多的微小缺陷，缺陷检查装置设置有具有多行光学传感器的光电转换器在第一和第二集光/检测单元中的每一个中的阵列，以及处理单元，用于处理来自第一和第二聚光/检测单元的检测信号，以确定第一和第二聚光/ 第二聚光/检测单元相对于试样的表面不对准，并且处理检测信号以校正第一和第二聚光/检测单元之间的未对准，并且校正的检测信号从第一和第二聚光/检测单元组合在一起以检测试样上的缺陷。

85. 发明申请

US20120128233A1 DEFECT CLASSIFIER USING CLASSIFICATION RECIPE BASED ON CONNECTION BETWEEN RULE-BASED AND EXAMPLE-BASED CLASSIFIERS 有权
标题翻译：基于基于规则和基于实例的分类器之间的连接使用分类协议的缺陷分类器
公开(公告)号：US20120128233A1
公开(公告)日：2012-05-24
申请号：US13362181
申请日：2012-01-31
申请人： Ryo NAKAGAKI , Masaki Kurihara , Toshifumi Honda
发明人： Ryo NAKAGAKI , Masaki Kurihara , Toshifumi Honda
IPC分类号： G06K9/00
CPC分类号： G06T7/0006 , G06K9/6256 , G06T7/0004 , G06T7/001 , G06T2207/10056 , G06T2207/10061 , G06T2207/30148
摘要： In apparatuses for automatically acquiring and also for automatically classifying images of defects present on a sample such as a semiconductor wafer, a classifying system is provided which are capable of readily accepting even such a case that a large number of classification classes are produced based upon a request issued by a user, and also even such a case that a basis of the classification class is changed in a high frequency. When the user defines the classification classes, a device for designating attributes owned by the respective classification classes is provided. The classifying system automatically changes a connecting mode between an internally-provided rule-based classifier and an example-based classifier, so that such a classifying system which is fitted to the classification basis of the user is automatically constructed.
摘要翻译：在用于自动获取并且还自动分类诸如半导体晶片的样本上存在的缺陷的图像的设备中，提供了能够容易地接受甚至基于以下情况产生大量分类等级的情况的分类系统由用户发出的请求，甚至是分类等级的基础被高频地改变的情况。当用户定义分类类时，提供用于指定由各个分级类所拥有的属性的设备。分类系统自动地在内部提供的基于规则的分类器和基于示例的分类器之间改变连接模式，从而自动构建适合用户分类基础的这样的分类系统。

86. 发明授权

US08106357B2 Scanning electron microscope and method for processing an image obtained by the scanning electron microscope 有权
标题翻译：扫描电子显微镜以及通过扫描电子显微镜获得的图像的处理方法
公开(公告)号：US08106357B2
公开(公告)日：2012-01-31
申请号：US12016290
申请日：2008-01-18
申请人： Kenji Nakahira , Toshifumi Honda , Atsushi Miyamoto
发明人： Kenji Nakahira , Toshifumi Honda , Atsushi Miyamoto
IPC分类号： G01N23/00
CPC分类号： G01N23/225 , G01N2223/401
摘要： In the case where a specimen is imaged by a scanning electron microscope, it is intended to acquire an image of a high quality having a noise component reduced, thereby to improve the precision of an image processing. The intensity distribution of a beam is calculated on the basis of an imaging condition or specimen information, and an image restoration is performed by using a resolving power deterioration factor other than the beam intensity distribution as a target of a deterioration mode, so that a high resolving power image can be acquired under various conditions. In the scanning electron microscope for semiconductor inspections and semiconductor measurements, the restored image is used for pattern size measurement, defect detections, defect classifications and so on, so that the measurements can be improved in precision and so that the defect detections and classifications can be made high precise.
摘要翻译：在通过扫描电子显微镜对样本进行成像的情况下，旨在获取具有降低噪声成分的高质量图像，从而提高图像处理的精度。基于成像条件或样本信息计算光束的强度分布，并且通过使用除了光束强度分布之外的分辨力退化因子作为劣化模式的目标来执行图像恢复，使得高可以在各种条件下获得分辨率的图像。在用于半导体检查和半导体测量的扫描电子显微镜中，恢复的图像用于图案尺寸测量，缺陷检测，缺陷分类等，从而可以提高测量精度，从而可以使缺陷检测和分类做出高精度。

87. 发明申请

US20120019816A1 DEFECT INSPECTION METHOD AND DEFECT INSPECTION APPARATUS 审中-公开
标题翻译：缺陷检查方法和缺陷检查装置
公开(公告)号：US20120019816A1
公开(公告)日：2012-01-26
申请号：US13145138
申请日：2010-01-06
申请人： Yukihiro Shibata , Toshihiko Nakata , Toshifumi Honda , Yasuhiro Yoshitake
发明人： Yukihiro Shibata , Toshihiko Nakata , Toshifumi Honda , Yasuhiro Yoshitake
IPC分类号： G01N21/88
CPC分类号： G01N21/95 , G01N21/21 , G01N21/47 , G01N21/9501 , G01N21/956 , G01N21/95607
摘要： The present invention provides a spatial filtering technology for exposing a defect image independently of polarization properties of defect scattered light, a defect inspection method for increasing a defect capture rate by suppressing the brightness saturation of a normal pattern, and a defect inspection apparatus that uses the defect inspection method. An array of spatial filters is disposed in one or more optical paths, which are obtained by polarizing and splitting a detection optical path, to filter diffracted light and scattered light emitted from the normal pattern. An image whose brightness saturation is suppressed is obtained by controlling an illumination light amount and/or detection efficiency during image detection in accordance with the amount of scattered light from the normal pattern.
摘要翻译：本发明提供了一种独立于缺陷散射光的偏振特性曝光缺陷图像的空间滤波技术，通过抑制正常图案的亮度饱和来增加缺陷捕获率的缺陷检查方法，以及使用缺陷检查方法。空间滤波器阵列设置在通过偏振和分离检测光路获得的一个或多个光路中，以滤除衍射光和从正常图案发射的散射光。根据来自正常图案的散射光的量，通过控制图像检测期间的照明光量和/或检测效率来获得亮度饱和度被抑制的图像。

88. 发明申请

US20110188735A1 METHOD AND DEVICE FOR DEFECT INSPECTION 审中-公开
标题翻译：缺陷检查的方法和装置
公开(公告)号：US20110188735A1
公开(公告)日：2011-08-04
申请号：US13057782
申请日：2009-06-05
申请人： Naoki Hosoya , Toshifumi Honda , Takashi Hiroi
发明人： Naoki Hosoya , Toshifumi Honda , Takashi Hiroi
IPC分类号： G06K9/00
CPC分类号： G01N21/956 , G01N2223/6116 , G06T7/0004 , G06T7/001 , G06T2207/10061 , G06T2207/30148
摘要： Provided are a method and a device for defect inspection, wherein, in a state where a few DOIs exist in a large number of nuisances, a classification performance can be improved by a few appropriate defect instructions and a high classification performance is ensured while mitigating the burden of user's defect instructions. The method and device for defect inspection is characterized by repeating extraction of one or more defects from a plurality of defects detected by imaging a sample, instruction of a classification class of the extracted defects, and calculation of a classification criterion and a classification performance from the image information and classification class of the defects, and determining, based on the finally obtained classification criterion, the classification class of the unknown defects. This makes it possible to improve a classification performance by a few appropriate defect instructions and ensure a high classification performance while mitigating the burden of user's defect instructions.
摘要翻译：提供了一种用于缺陷检查的方法和装置，其中，在少数DOI存在大量滋扰的状态下，可以通过少量适当的缺陷指令来提高分类性能，并且在减轻分类性能的同时确保高分类性能用户的缺陷指示负担。用于缺陷检查的方法和装置的特征在于，从通过成像样本检测到的多个缺陷中重复提取一个或多个缺陷，提取的缺陷的分类等级的指令，以及来自所述缺陷的分类标准和分类性能的计算图像信息和分类类的缺陷，并根据最终获得的分类标准确定未知缺陷的分类等级。这使得可以通过几个适当的缺陷指令提高分类性能，并确保高分类性能，同时减轻用户缺陷指令的负担。

89. 发明授权

US07657078B2 Method and apparatus for reviewing defects 有权
标题翻译：检查缺陷的方法和装置
公开(公告)号：US07657078B2
公开(公告)日：2010-02-02
申请号：US11311254
申请日：2005-12-20
申请人： Ryo Nakagaki , Toshifumi Honda
发明人： Ryo Nakagaki , Toshifumi Honda
IPC分类号： G06K9/00
CPC分类号： G06T7/001 , G06T2207/30148
摘要： An apparatus for reviewing defects including an image processing section (defect classification device section) with a function of estimating a non-defective state (reference image) of a portion in which the defect exists by use of a defect image, and a function of judging criticality or non-flat state of the defect by use of the estimation result. It becomes possible to establish both of a high-throughput image collecting sequence in which any reference image is not acquired and high-precision defect classification, and then to realize both of a high performance classifying function and a high-throughput image collecting function in a defect reviewing apparatus which automatically collects and classifies images of defects existing on a sample of a semiconductor wafer or the like.
摘要翻译：一种用于检查缺陷的装置，包括具有通过使用缺陷图像来估计存在缺陷的部分的非缺陷状态（参考图像）的功能的图像处理部分（缺陷分类装置部分），以及判断通过使用估计结果，缺陷的关键性或非平坦状态。可以建立不获取任何参考图像的高通量图像采集序列和高精度缺陷分类，然后实现高性能分类功能和高吞吐量图像采集功能缺陷检查装置，其自动地收集和分类存在于半导体晶片等的样本上的缺陷的图像。

90. 发明授权

US07583832B2 Method and its apparatus for classifying defects 有权
标题翻译：分类缺陷的方法及其设备
公开(公告)号：US07583832B2
公开(公告)日：2009-09-01
申请号：US10378016
申请日：2003-02-28
申请人： Hirohito Okuda , Toshifumi Honda , Yuji Takagi , Atsushi Miyamoto
发明人： Hirohito Okuda , Toshifumi Honda , Yuji Takagi , Atsushi Miyamoto
IPC分类号： G06K9/00 , G06K9/62 , H04N9/47
CPC分类号： G06T7/001
摘要： A highly reliable defect automatic classifying method and apparatus capable of flexibly coping with a request for classifying a defect given by each user without having to collect lots of teach data items. A classifying class arrangement is defined by a user by combining classes supplied by the system itself or classes defined by the user and, further, a priori knowledge on the defect class is given by the user as a restriction so as to carry out restricted learning.
摘要翻译：一种高度可靠的缺陷自动分类方法和装置，其能够灵活地应对用于分类每个用户给出的缺陷的请求，而不需要收集大量的教学数据项。分类类安排由用户通过组合由系统本身提供的类或由用户定义的类来定义，此外，由用户给出缺陷类的先验知识作为限制，以便进行有限的学习。

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