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    • 2. 发明授权
    • Apparatus for measuring a surface profile
    • 用于测量表面轮廓的装置
    • US06758085B2
    • 2004-07-06
    • US10463128
    • 2003-06-17
    • Yasunari NagaikeYasushi NakamuraYoshiaki Ito
    • Yasunari NagaikeYasushi NakamuraYoshiaki Ito
    • G01B528
    • G01B5/008G01B3/008G01B5/004G01B5/20
    • An apparatus for measuring a surface profile of an object to be measured includes a measuring probe positioned to contact the surface of the object to be measured, a guide mechanism for supporting and guiding the measuring probe in an axial direction of the measuring probe, a tilt angle adjustment mechanism for tilting the guide mechanism at a predetermined tilt angle with respect to a horizontal direction so that the measuring probe contacts the surface of the object to be measured with a predetermined contact force, and a drive mechanism for relatively driving at least one of the measuring probe and the object to scan the surface of the object to be measured with the measuring probe. The contact force is derived from a tilt direction component of the gravity of the measuring probe generated when the measuring probe is tilted.
    • 用于测量被测量物体的表面轮廓的装置包括:测量探头,定位成接触待测物体的表面,用于在测量探针的轴向方向上支撑和引导测量探针的引导机构,倾斜 角度调节机构,用于使引导机构相对于水平方向倾斜预定的倾斜角度,使得测量探针以预定的接触力与被测量物体的表面接触;以及驱动机构,用于相对地驱动至少一个 测量探头和物体用测量探头扫描待测物体的表面。 接触力来源于测量探头倾斜时产生的测量探头的重力的倾斜方向分量。
    • 3. 发明授权
    • Scanning probe system with spring probe and actuation/sensing structure
    • 具有弹簧探头和致动/感应结构的扫描探头系统
    • US06734425B2
    • 2004-05-11
    • US10136258
    • 2002-04-30
    • Thomas HantschelEugene M. ChowDavid K. ForkMichel A. RosaDirk De Bruyker
    • Thomas HantschelEugene M. ChowDavid K. ForkMichel A. RosaDirk De Bruyker
    • G01B528
    • G01Q70/10G01Q70/06G01Q70/16G01R1/06727Y10S977/873
    • Scanning probe systems, which include scanning probe microscopes (SPMs) are disclosed that include cantilevered spring (e.g., stressy metal) probes and actuation/position sensing electrodes formed on a substrate. The actuation electrodes are used to position the spring probe relative to the substrate using electrostatic, magnetic, acoustic, or piezoelectric arrangements. An actuation signal source is switched between full on and off states to facilitate “ON/OFF” probe actuation in which the spring probe is either fully retracted against the substrate or deployed for scan operations. The position sensing electrodes are used to sense the deflected position of the spring probe relative to the substrate using resistive, magnetic, or piezoresistive arrangements. Spring probe arrays are disclosed that include multiple spring probes arranged on a single substrate. Each spring probe of the array includes a separate actuation electrode that is controlled using “ON/OFF” or tapping probe actuation, and may include a separate position sensing electrode.
    • 公开了包括扫描探针显微镜(SPM)的扫描探针系统,其包括形成在基底上的悬臂弹簧(例如,应力金属)探针和致动/位置感测电极。 致动电极用于使用静电,磁,声或压电布置相对于衬底定位弹簧探头。 致动信号源在完全打开和关闭状态之间切换,以便于“ON / OFF”探头致动,其中弹簧探针完全缩回到基板上或部署用于扫描操作。 位置检测电极用于使用电阻,磁阻或压阻布置来感测弹簧探针相对于基底的偏转位置。 公开了包括布置在单个基板上的多个弹簧探针的弹簧探针阵列。 阵列的每个弹簧探针包括使用“ON / OFF”或分接探头致动来控制的单独的致动电极,并且可以包括单独的位置感测电极。
    • 4. 发明授权
    • Computerized operator assistance for turbine component inspection
    • 涡轮机部件检查的电脑操作员辅助
    • US06711506B2
    • 2004-03-23
    • US10006441
    • 2001-11-21
    • Maurice J. BalesBrian A. DalioDavid G. Johnsen
    • Maurice J. BalesBrian A. DalioDavid G. Johnsen
    • G01B528
    • G05B23/0216G05B23/0267
    • A plurality of system checks on a turbine component inspection system are monitored, and an end user interface element to cause an inspection of a turbine component to commence is enabled only upon determining based on the monitored system checks that the inspection system is in a predetermined state of readiness, thereby ensuring each turbine component inspected is stimulated with thermal stimulus having the same characteristics. Further, a binary passed or failed indicator is displayed to unequivocally inform the operator whether a turbine component being inspected passed or failed the inspection. In a preferred embodiment, thermal images of a turbine component's response to applied thermal stimulus, as well as status of automatically launched quantitatively analyses on the turbine component's response to the applied thermal stimulus are also displayed.
    • 监测对涡轮机部件检查系统的多个系统检查,并且仅在基于所监视的系统检查检查系统处于预定状态时才启用用于引起对涡轮机部件的检查的终端用户接口元件 从而通过具有相同特征的热刺激来确保所检测的每个涡轮机部件受到刺激。 此外,显示二进制通过或失败的指示器以明确地通知操作者检查的涡轮机部件是否通过或未通过检查。 在优选实施例中,还显示涡轮机部件对所施加的热刺激的响应的热图像,以及对涡轮部件对所施加的热刺激的响应的自动启动定量分析的状态。
    • 7. 发明授权
    • Flyability and glide methodology for 100 GPSI
    • 100 GPSI的可飞行性和滑翔方法
    • US06568252B1
    • 2003-05-27
    • US09901830
    • 2001-07-10
    • Zine-Eddine Boutaghou
    • Zine-Eddine Boutaghou
    • G01B528
    • G11B5/6005G11B5/82G11B2005/001
    • Disclosed is a method for testing the smoothness of a disc surface. A glide test is performed by first lowering the glide head until contact between the glide head and the disc surface occurs. The point of contact establishes a base line indicating the location of the disc surface. Once a base line is established, the glide head can be controlled so that it flies at the desired glide height above the disc surface. By first establishing the base line, the glide head can be flown with greatly increased precision at the desired glide height based on known relationships between glide height and various parameters, including spindle speed, various electrical parameters, or crown shape.
    • 公开了一种用于测试盘表面平滑度的方法。 通过首先降低滑动头来执行滑行测试,直到滑动头和盘表面之间的接触发生。 接触点建立一条指示盘表面位置的基线。 一旦建立基线,就可以控制滑行头,使其在盘表面上方的所需滑动高度处飞行。 通过首先建立基线,可以基于滑动高度与各种参数(包括主轴转速,各种电气参数或表冠形状)之间的已知关系,以期望的滑行高度大大提高滑行头。
    • 10. 发明授权
    • Scanning probe microscope system including removable probe sensor assembly
    • 扫描探针显微镜系统,包括可拆卸的探针传感器组件
    • US06415654B1
    • 2002-07-09
    • US09699803
    • 2000-10-30
    • David J. Ray
    • David J. Ray
    • G01B528
    • G01Q20/02G01Q70/02Y10S977/868Y10S977/87
    • A scanning force microscope system that employs a laser (76) and a probe assembly (24) mounted in a removable probe illuminator assembly (22), that is mounted to the moving portion of a scanning mechanism. The probe illuminator assembly may be removed from the microscope to permit alignment of said laser beam onto a cantilever (30) after removal. This prevents damage to, and shortens alignment time of, the microscope during replacement and alignment of the probe assembly. The scanning probe microscope assembly (240) supports a scanning probe microscope (244). Scanning probe microscope (244) holds a removable probe sensor assembly (242). Removable probe sensor assembly (242) may be transported and conveniently attached to the adjustment station (250) where the probe sensor assembly parameters may be observed and adjusted if necessary. The probe sensor assembly (242) may then be attached to the scanning probe microscope (244).
    • 一种扫描力显微镜系统,其使用安装在扫描机构的移动部分上的安装在可移除的探针照射器组件(22)中的激光器(76)和探针组件(24)。 探针照明器组件可以从显微镜移除,以允许在去除之后将所述激光束对准到悬臂(30)上。 这可以防止在更换和对准探头组件期间显微镜的损坏和缩短对准时间。 扫描探针显微镜组件(240)支撑扫描探针显微镜(244)。 扫描探针显微镜(244)保持可移除的探针传感器组件(242)。 可移动的探针传感器组件(242)可以被传送并方便地附接到调节站(250),其中如果需要可以观察和调整探针传感器组件的参数。 探头传感器组件(242)然后可以附接到扫描探针显微镜(244)。